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2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)最新文献

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Modeling and process development of Die Edge Protection to alleviate thermo-mechanical stresses on silicon dies in PBGA packages 减轻PBGA封装中硅模热机械应力的模具边缘保护建模及工艺开发
C. Foong, K. W. Shim, Min Ding
Mechanical stresses induced by the mismatch of coefficient of thermal expansion (CTE) among different materials are the major driving force of fracture failures in silicon dies of microelectronic packages. The stresses induced are concentrated at locations where different materials interfaced and geometrical singularities such as die corners and die edges. Stress analyses using finite element mechanical modeling demonstrated that the stresses close to the die corners are 30% ~ 80% higher compared to the inner regions of the die. In addition, cracks inside the bulk mold compound and interfacial delamination on top of the die have been found due to these high stresses. DEP (Die Edge Protection) epoxy, a low-stress high CTE polymeric material, has been used to cover the corners and edges of the die to reduce stress levels with the objective of eradicating failures associated with these stress singularities. It acts as a buffering medium to mechanically shield the die corners and edges from being in direct contact to the high modulus molding compound materials. The DEP coating is achieved by dispensing the liquid DEP epoxy outside the wire bonded die area and allowing the epoxy to creep up along the die corners and edges. The DEP dispense process takes place after wire bonding. In the subsequent molding process step, areas coated with DEP will be shielded from the mold compound. It was observed from experimental evaluations that the DEP coating managed to prevent die corners cracking and delamination. This paper examines the simulation of the DEP coating, and discusses the DEP process development required to implement such a scheme into high volume production.
不同材料之间的热膨胀系数不匹配引起的机械应力是微电子封装硅模具断裂失效的主要驱动力。产生的应力集中在不同材料的界面和几何奇点处,如模具角和模具边缘。利用有限元力学模型进行应力分析表明,靠近模具角的应力比模具内部区域高30% ~ 80%。此外,由于这些高应力,还发现了大块模具复合材料内部的裂纹和模具顶部的界面分层。DEP(模具边缘保护)环氧树脂,一种低应力高CTE聚合物材料,已用于覆盖模具的角落和边缘,以降低应力水平,目的是消除与这些应力奇点相关的故障。它作为一种缓冲介质,机械地保护模具的角和边缘不与高模量成型复合材料直接接触。DEP涂层是通过将液态DEP环氧树脂涂在焊丝粘合模具区域外,并允许环氧树脂沿着模具的角落和边缘爬升来实现的。DEP点胶过程发生在电线粘合之后。在随后的成型工艺步骤中,涂有DEP的区域将与模具化合物隔离。从实验评估中观察到,DEP涂层成功地防止了模具角的开裂和分层。本文研究了DEP涂层的模拟,并讨论了将这种方案实施到大批量生产所需的DEP工艺开发。
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引用次数: 0
Air cooling augmentation in an array of heated modules by horizontal semicircular cylindrical shells as cross flow barriers 通过水平半圆形圆柱壳作为横流屏障,在加热模块阵列中增加空气冷却
S. Bhatta, T. Seetharam
A three dimensional study of air cooling from an array of heated blocks in a rectangular channel for a range of Reynolds number is presented. Heated blocks represent electronic modules mounted on horizontal circuit boards. Numerically obtained average heat transfer coefficients for the top surface of the heated modules are compared with experimentally obtained values, and it is found that there is a good agreement between the two at low Reynolds numbers. Further, circular cylinders, semi-circular cylinders, and semicircular cylindrical shells with length equal to the width of the channel are introduced as flow barriers in the domain separately to study the influence on heat transfer and pressure drop. These horizontal cylinders over each row of modules in cross flow augment heat transfer from the heated modules considerably. The heat transfer enhancement is found to be more dependent on the vertical position of the cylinders with respect to the modules than on the horizontal position. Air cooling is predicted to be augmented from the modules by shifting the cylinders closer to the heated modules up to a certain limiting distance, and beyond which the heat transfer decreases. Semicircular cylindrical shells prove more beneficial than any of the other two barriers for heat transfer enhancement from the modules. It is observed that the semicircular shells in cross flow result in lesser pressure drop when compared to semicircular cylinders, though the former produces maximum heat transfer from the modules.
在一定雷诺数范围内,对矩形通道内的加热块阵列进行了空气冷却的三维研究。加热块代表安装在水平电路板上的电子模块。将数值计算得到的受热模块顶面平均换热系数与实验计算得到的值进行了比较,发现在低雷诺数时两者吻合较好。在此基础上,分别引入长度等于通道宽度的圆柱、半圆圆柱和半圆圆柱壳作为流动屏障,研究其对换热和压降的影响。横流中每排模块上的这些水平圆柱体大大增加了被加热模块的传热。研究发现,相对于模块而言,传热增强更多地取决于圆柱体的垂直位置,而不是水平位置。预计通过将气缸移近加热模块达到一定的限制距离,可以增强模块的空气冷却,超过该距离,传热就会减少。半圆圆柱壳被证明比其他两种屏障更有利于增强模块的传热。观察到,与半圆圆柱体相比,半圆壳在横向流动中产生的压降较小,尽管前者从模块中产生的热量最大。
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引用次数: 0
A study of Ag micro-particle reinforced Sn-Zn matrix composite solder 银微粒增强锡锌基复合钎料的研究
S. Das, A. Sharif
In this work, Ag micro-particles content in the range between 0-4.0 wt.% with Sn-Zn eutectic system, were examined in order to understand the effect of Ag addition on the microstructural and mechanical properties as well as the thermal behavior of the composite solders. The shear strengths and the interfacial reactions of Sn-Zn micro-composite eutectic solders with Au/Ni/Cu ball grid array (BGA) pad metallization were systematically investigated. The three distinct intermetallic compound (IMC) layers were formed at the solder interface of the Au/electrolytic Ni/Cu bond pad with Sn-Zn composite alloys. The more Ag particles added to the Sn-Zn solder, the more Ag-Zn compound formed to thicken the uppermost IMC layer. The dissoluted Ag-Zn IMCs formed in the bulk solder redeposited over the initially formed interfacial Au-Zn IMC layer, prevented the whole IMC layer lift-off from the pad surface. Cross-sectional studies of the interfaces were also conducted to correlate with the fracture surfaces.
本文研究了在Sn-Zn共晶体系中,在0-4.0 wt.%范围内添加Ag对复合钎料的显微组织、力学性能和热行为的影响。系统研究了Au/Ni/Cu球栅阵列(BGA)焊盘金属化后Sn-Zn微复合共晶焊料的剪切强度和界面反应。在Au/电解Ni/Cu焊盘与Sn-Zn复合合金的焊点界面处形成了三个不同的金属间化合物(IMC)层。在Sn-Zn钎料中添加的Ag颗粒越多,形成的Ag- zn化合物越多,使最上层的IMC层变厚。在初始形成的界面Au-Zn IMC层上重新沉积的大块焊料中形成的溶解的Ag-Zn IMC阻止了整个IMC层从焊盘表面升起。界面的横截面研究也与断裂面进行了关联。
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引用次数: 0
Creep of lead-free Sn-3.8Ag and Sn-3.8Ag-0.7Cu solder alloy as replacements of Sn-Pb solder used in microelectronic packaging 无铅Sn-3.8Ag和Sn-3.8Ag-0.7 cu钎料合金在微电子封装中替代Sn-Pb钎料的蠕变
A. Torbati-Sarraf, R. Mahmudi, A. Geranmayeh, A. Baradaran-Goorani
Creep behavior of the tin-based lead-free Sn-3.8Ag and Sn-3.8Ag-0.7Cu alloys together with Sn-37Pb, as the material for comparison, was studied by impression and indentation creep testing at room temperature. Stress exponent values in the range 5.1 to 9.7, obtained by the two methods, were in good agreement with each other and with those determined by room-temperature creep testing of the same materials reported in the literature. Among all tested materials, as indicated by their steady-state creep rates, Sn-3.8Ag-0.7Cu showed the highest creep resistance followed by Sn-3.8Ag and Sn-Pb. The formation of Ag3Sn and Cu6Sn5 intermetallics in Sn-3.8Ag-0.7Cu, and Ag3Sn in Sn-3.8Ag are the main cause of improved creep resistance of the alloys over the eutectic Sn-Pb alloy.
采用室温压痕蠕变试验研究了以Sn-37Pb为对照材料的锡基无铅Sn-3.8Ag和Sn-3.8Ag-0.7 cu合金的蠕变行为。两种方法得到的应力指数值在5.1 ~ 9.7范围内,与文献报道的同种材料室温蠕变试验结果吻合较好。从稳态蠕变速率来看,Sn-3.8Ag-0.7 cu的抗蠕变性能最高,其次是Sn-3.8Ag和Sn-Pb。在Sn-3.8Ag-0.7 cu中形成Ag3Sn和Cu6Sn5金属间化合物,在Sn-3.8Ag中形成Ag3Sn是合金抗蠕变性能优于共晶Sn-Pb合金的主要原因。
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引用次数: 3
Super heavy 6.0 mils Cu wire ball bonding 超重型6.0密尔铜丝球粘接
T. Chai, J. Tan, M. Sivakumar, J. Premkumar, James Song, Y. Wong
The quest to replace wire material from gold (Au) to Copper (Cu) in wire bonding interconnect has been in the industry since few decades. As the Cu wire bonding manufacturing process matures, the idea of substituting Al wedge bond with Cu ball bond is mooted. Such substitution could potentially reap benefits of lower machine cost of ownership and better utilization of silicon real estate. It also comes with better conductivity, slower intermetallic growth and possibly cheaper material price. However, the associated challenges such as hardness and oxidation could be overwhelming and requires a careful assessment. The objective of this study is to provide insight of the 6.0 mils Cu wire bonding process. 6.0 mils Cu wire is the key candidate in this Al - Cu wire substitution idea. Bonding interaction of Cu wire, chip & lead are studied experimentally.
几十年来,业界一直在寻求用铜(Cu)代替金(Au)在线键合互连中的线材。随着铜丝键合工艺的成熟,提出了用铜球键合代替铝楔键合的设想。这种替代可以潜在地获得更低的机器拥有成本和更好地利用硅资产的好处。它还具有更好的导电性,更慢的金属间生长和可能更便宜的材料价格。然而,相关的挑战,如硬度和氧化可能是压倒性的,需要仔细评估。本研究的目的是提供6.0密尔铜丝键合工艺的见解。6.0 mm铜丝是铝-铜丝替代方案的关键候选材料。实验研究了铜线、芯片和导线的键合作用。
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引用次数: 1
Development of Human Reliability Model for Evaluating Maintenance Workforce Reliability: A Case Study in Electronic Packaging Industry 评估维修人员可靠性的人力可靠性模型的建立——以电子封装行业为例
I. H. A. Razak, S. Kamaruddin, I. Azid
Sophisticated and advanced technologies adopted in recent semiconductor industries have grown rapidly to some degree. The complex hardware and software embedded with automation control system and other technological advancement require the need for higher levels of maintenance system. In such technological advancements, one must consider that innovations also require humans in the maintenance system to acquire new skills and knowledge. This however may induce additional probable for human error; which is known as a primary contributor to equipment and plant failures. This paper reviewed several general approaches to the study of human error and the characteristics of work in various industries as a foundation for describing the nature, incidence, and consequences of human error in the maintenance area. The Human Reliability Model (HRrM) which integrates qualitative and quantitative assessments is proposed as a methodology to quantify maintenance worker's reliability; or probability the worker successfully accomplishes a maintenance task without performing any erroneous activities. A set of individual factors which may influence to error occurrence is considered as the model variables in evaluating individual maintenance workers. The HRrM model is then been verified and applied in a case study conducted in an electronic packaging industry. The intention of this model is to assist the organization in evaluating and monitoring the maintenance worker's performance in terms of their reliability and thus improving the effectiveness of organization's maintenance system.
近年来,半导体工业采用的尖端技术在一定程度上得到了迅速发展。复杂的硬件和软件嵌入了自动化控制系统等技术的进步,需要更高层次的系统维护。在这样的技术进步中,人们必须考虑到创新也需要维护系统中的人类获得新的技能和知识。然而,这可能会引起人为错误的额外可能性;这被认为是设备和工厂故障的主要原因。本文回顾了几种研究人为错误的一般方法和不同行业的工作特征,作为描述维护领域人为错误的性质、发生率和后果的基础。提出了定性与定量相结合的人的可靠性模型(HRrM),作为一种量化维修工人可靠性的方法;或者工作人员成功完成维护任务而没有执行任何错误活动的可能性。在对维修工人个体进行评价时,考虑了一组可能影响错误发生的个体因素作为模型变量。HRrM模型随后在电子封装行业进行的案例研究中得到验证和应用。该模型的目的是帮助组织评估和监控维修工人的可靠性表现,从而提高组织维修系统的有效性。
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引用次数: 8
Optimized conditions to make stable free air ball(FAB) for copper bonding wire 优化了制备稳定自由空气球(FAB)的工艺条件
S. H. Kim, H. Park, J. Moon
Recently Gold price is increased much higher. So Copper wire as low cost solution, is highlighted in various package groups. And some packages having low-pin count of thick size wire, have already been succeeded in mass production using Copper wire. If high Gold price is being kept continuously, speed of conversion for Copper wire will be accelerated.
最近黄金价格上涨了很多。所以铜线作为低成本的解决方案,在各种封装组中是突出的。而一些粗线的低引脚数封装,已经成功地采用铜线量产。如果金价持续走高,铜线的转换速度将加快。
{"title":"Optimized conditions to make stable free air ball(FAB) for copper bonding wire","authors":"S. H. Kim, H. Park, J. Moon","doi":"10.1109/IEMT.2008.5507781","DOIUrl":"https://doi.org/10.1109/IEMT.2008.5507781","url":null,"abstract":"Recently Gold price is increased much higher. So Copper wire as low cost solution, is highlighted in various package groups. And some packages having low-pin count of thick size wire, have already been succeeded in mass production using Copper wire. If high Gold price is being kept continuously, speed of conversion for Copper wire will be accelerated.","PeriodicalId":151085,"journal":{"name":"2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133569963","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
“CCTO thin film growth on a Cu plated Si wafer by pulse laser deposition at low temperatures” 低温脉冲激光沉积法在镀铜硅片上生长CCTO薄膜
J. Lee, Jungwon Lee, Y. Chung, Seogmoon Choi, Jongin Ryu, B. Jang
Work on the Pulse Laser Deposition (PLD) equipment is purely for research and development at Samsung Electro-Mechanics when it takes 30 minutes to complete the experiment to grow a dielectric thin film on Cu plated pieces of Si wafer. At SEMCO, low temperatures around 180°C is essential for thin film growth on CCL since CCL melts around 200°C. High dielectric thin film performance is also paramount in terms of reducing costs, eliminating SMT passive components and decreasing CCL thickness. It is why CCTO is being investigated since it has very high dielectric performance without any parasitic ferroelectric hysteresis effect. As a result, our investigation shows it is possible to have a dielectric constant of 128 with a loss tangent of 0.15 at a measuring frequency of 1 MHz. PLD conditions require a temperature of 180°C, O2 pressure of 40mTorr, pulsing frequency of 10Hz, and power density of 18mJ/mm2.
脉冲激光沉积(PLD)设备的工作纯粹是三星电机的研究和开发,完成在镀铜的硅片上生长介电薄膜的实验需要30分钟。在SEMCO,由于CCL在200°C左右熔化,因此在CCL上生长薄膜所需的低温约为180°C。高介电薄膜性能在降低成本,消除SMT无源元件和减少覆铜板厚度方面也至关重要。这就是为什么CCTO被研究的原因,因为它具有非常高的介电性能,没有任何寄生铁电滞后效应。因此,我们的研究表明,在1 MHz的测量频率下,介电常数为128,损耗正切为0.15是可能的。PLD条件要求温度180℃,O2压力40mTorr,脉冲频率10Hz,功率密度18mJ/mm2。
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引用次数: 0
An analysis on the properties of epoxy based die attach material and the effect to delamination and wire bondability 分析了环氧基模具贴合材料的性能及其对分层和焊丝粘合性能的影响
H. T. Wang, Y. Poh
Silver filled epoxy is widely used as interconnect of chip to leadframe. This paper introduces material analysis method to study effect of epoxy glue properties to delamination and wire bondability in Dual Flat Non Leaded (DFN) package. Five epoxy glues were characterized using TMA, DMA, TGA. DSC, Moisture Absorption Test and Die Shear Test. Epoxy glues were assembled into 5 × 6 × 1mm DFN package and subjected to Moisture Sensitivity Level 3. thermal cycling and autoclave test. Material analysis result is reflected into experimental verification. CTE mismatch between epoxy glue with molding compound, chip, and leadframe is identified as the primary factor causing epoxy glue delamination. High elastic modulus 1034MPa at 260°C is preferred to resist solder reflow stress. Interfacial adhesion degradation at high temperature is another key factor; investigation revealed with chip size 2mm2 high shear strength as 1.98 kg and cohesive mode with 40% epoxy remnants able to prevent epoxy glue delamination. Result showed that at wire bond temperature of 220°C, minimum elastic modulus required for consistent wire bondability is 101MPa base on chip size of 2mm2.
银填充环氧树脂广泛用于芯片与引线框架的互连。本文引入材料分析方法,研究了环氧胶性能对双平面无铅(DFN)封装的分层和焊丝粘合性能的影响。采用TMA、DMA、TGA对5种环氧胶进行了表征。DSC,吸湿试验和模具剪切试验。将环氧胶组装成5 × 6 × 1mm DFN封装,并进行3级湿敏测试。热循环和高压灭菌试验。材料分析结果反映到实验验证中。确定了环氧胶与成型胶、切屑、引线框的CTE不匹配是导致环氧胶分层的主要原因。260℃时弹性模量1034MPa高,抗焊料回流应力。高温下界面粘附退化是另一个关键因素;研究表明,当切屑尺寸为2mm2时,抗剪强度为1.98 kg,黏结方式为40%的环氧残留物,可防止环氧胶分层。结果表明,在焊线温度为220℃时,在芯片尺寸为2mm2的情况下,保持焊线可粘合性所需的最小弹性模量为101MPa。
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引用次数: 7
Stress evaluations in Micro Bump structures of FCBGA FCBGA微碰撞结构的应力评估
W. Y. Huang, E. Chen, J. Lai, Yu Po Wang
System in Package(SiP) includes technologies of Multi-chip Module(MCM), Multi-chip Package(MCP), stacked die, Package on Package(PoP), Package in Package(PiP) and Embedded substrate. While Au wire bonding technology is commonly used as current SIP interconnection solution, take Staked Die structure for example, with increasing stack die number upper die needs longer wire bonding length for signal interconnection and results in lower electrical performance for whole system. In addition, wire bonding technology as Stacked die solution requires spacer die insertion between functional chips for bonding space and thus increases total package thickness. In order to achieve better electrical performance and reduce form factor, a new fine pitch bump technology of “Micro Bump” structure is developed with metal bump for both top and bottom chips. Micro bump structure is one of the key technologies of Trough Silicon Vias (TSV) and is used in chip to chip interconnection with the dimension of Micro bump smaller than typical flip chip bump. In this study a 15mm×15mm Face-to-Face Stacked-die Thin and Fine-pitch BGA (F2F-STFBGA) package was adopted for Finite Element Method (FEM) analysis. The evaluations focused on low-k stress, bump stress and pad peeling stress of different Micro Bump structures. Firstly two different face to face interconnection levels of chip to chip and chip to substrate (EHS-FCBGA) were investigated. Secondly four different interconnection bump structures of common bump structure (solder bump), Cu pillar for both top and bottom bump, Cu pillar for both top bump and Au for bottom bump, Au for top bump and Cu pillar for bottom bump were compared. In conclusion a design guideline of F2F-S2TFBGA package was recommended with considerations of Micro Bump structure, material, and package geometry.
系统级封装(SiP)技术包括多芯片模块(MCM)、多芯片封装(MCP)、堆叠芯片、封装上封装(PoP)、封装中封装(PiP)和嵌入式基板技术。而目前SIP互连通常采用Au线键合技术,以Staked Die结构为例,随着堆叠模数的增加,上模需要更长的线键合长度来进行信号互连,导致整个系统的电气性能下降。此外,线键合技术作为堆叠模解决方案,需要在功能芯片之间插入间隔模以增加键合空间,从而增加封装的总厚度。为了获得更好的电性能和减小外形尺寸,开发了一种新的“Micro bump”结构的细间距凸点技术,在顶部和底部芯片上都采用金属凸点。微凸点结构是槽式硅孔(TSV)的关键技术之一,用于芯片间互连,其尺寸小于典型的倒装芯片凸点。本研究采用15mm×15mm面对面叠层薄细间距BGA (F2F-STFBGA)封装进行有限元分析。对不同微碰撞结构的低k应力、碰撞应力和衬垫剥离应力进行了评价。首先研究了芯片与芯片和芯片与衬底的两种不同的面对面互连水平(EHS-FCBGA)。其次比较了普通凸点结构(焊料凸点)的四种不同互连凸点结构,即上下凸点均采用铜柱、上下凸点均采用铜柱、下凸点采用金柱、上凸点采用金柱、下凸点采用铜柱。综上所述,提出了考虑Micro Bump结构、材料和封装几何的F2F-S2TFBGA封装设计准则。
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引用次数: 0
期刊
2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)
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