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2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)最新文献

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Current capacity evaluation of a cantilever probe 悬臂探头的电流容量评估
L. Thomas, H. Kow, Selvam Palasundram
The tungsten-rhenium (WRe) 3mil cantilever probe is widely used in wafer probe at ON Semiconductors. The maximum current that can be supplied to a DUT is restricted by the current capacity of the probe needles. A typical 3 mil tip probe can carry 2 - 3 Amps at a short burst current (I short) for a <;10 ms pulse time. Probing at a higher current level with minimal number of probes can cause current over crowding at probe tip which produces excessive heat due to electric charge and contact resistance. This heat can melt surface material and contaminant which can attach to the probe tip causing it to be deformed thus increasing resistance and temperature at the contact point. Accordingly more heat is generated by this causing the contaminant at probe tip to be further oxidized producing an insulating layer between DUT and probe. This results in spark occurrence during high current testing which may cause damage to the device. This paper describes the experiments carried out to guarantee the appropriate pulsed current level that can be carried through a single 3 mil tip probe without causing the probe tip to melt, get oxidized and generate sparks which could lead to devices damage due to EOS. Two MOSFET devices with current ratings of 2.0 Amps and 2.6 Amps respectively were used for this evaluation to determine the allowable operating pulsed current a probe can withstand. A Total of 85 K dies were probed, assembled and final tested. The test fallouts that were analyzed did not show any indication of an EOS signature on die cause by probe needles.
钨铼(WRe)悬臂探针在安森美半导体广泛应用于晶圆探针。可提供给被测设备的最大电流受测针的电流容量的限制。一个典型的3mil探针可以在短突发电流(I short)下携带2 - 3安培,脉冲时间< 10ms。用最小数量的探头在较高的电流水平下进行探测,会导致探头尖端的电流过度拥挤,由于电荷和接触电阻而产生过多的热量。这种热量可以熔化表面材料和污染物,这些材料和污染物可以附着在探头尖端,使其变形,从而增加接触点的电阻和温度。因此,由此产生更多的热量,导致探头尖端的污染物进一步氧化,在被测件和探头之间产生绝缘层。这将导致在大电流测试期间产生火花,从而可能对设备造成损坏。本文描述了为保证适当的脉冲电流水平而进行的实验,该脉冲电流水平可以通过单个3mil尖端探针,而不会导致探针尖端熔化、氧化和产生火花,从而导致EOS导致设备损坏。两个额定电流分别为2.0安培和2.6安培的MOSFET器件用于本次评估,以确定探头可以承受的允许工作脉冲电流。共探测、组装和最终测试了85个K模具。分析的测试沉降物没有显示任何由探针针引起的EOS签名的迹象。
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引用次数: 4
A mechanical fatigue assessment methodology to study solder joint reliability 一种研究焊点可靠性的机械疲劳评估方法
I. Chin, Shaw Fong Wong, P. Malatkar, R. Canham
This paper presents a unified mechanical fatigue assessment methodology that characterizes and predicts the fatigue life performance of electronic components. It involves establishing the relationship between a solder ball damage metric and the fatigue cycles-to-failure. With the proposal of board strain as a metric, single BGA component test boards are used to produce a fatigue characterization curve - the E-N curve. The methodology was initially established using high cycle fatigue but later extended to the lower cycle fatigue region to give a complete picture of the characteristics. The methodology has been validated by predicting fatigue failure of a system board under random vibration using the rainflow-counting algorithm and Palmgren-Miner's damage accumulation. Discussion on board design implications and features to improve fatigue performance are presented. Furthermore, a case study with the methodology used to assess the mechanical integrity risk of two mobile devices is shared. The sensitivity of the methodology towards various board and package attributes is also demonstrated.
本文提出了一种统一的机械疲劳评估方法,用于表征和预测电子元件的疲劳寿命性能。它涉及建立焊接球损伤度量和疲劳循环到失效之间的关系。在提出以板应变为度量标准的基础上,利用单块BGA组件测试板,生成了疲劳表征曲线——E-N曲线。该方法最初建立在高周疲劳区域,但后来扩展到低周疲劳区域,以提供完整的特征图。通过使用雨流计数算法和Palmgren-Miner损伤累积法预测系统板在随机振动下的疲劳失效,验证了该方法的有效性。讨论了提高疲劳性能的板设计意义和特点。此外,还分享了一个用于评估两个移动设备机械完整性风险的方法的案例研究。该方法对各种板和封装属性的敏感性也得到了证明。
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引用次数: 4
Solvent effect on the morphology of copper (I) oxide: A fundamental study towards copper (I) oxide-epoxy composites 溶剂对氧化铜形貌的影响:氧化铜-环氧复合材料的基础研究
W. L. Tan, K. Y. Chew, N. M. Hirmizi, M. A. Abu Bakar, J. Ismail, L. C. Sim, Azmah
The study on the influence of solvent environments on the Cu2O particles preparation via aqueous to organic phase transfer technique is described. In aqueous, the morphologies of the as-formed particles are of whisker-like or ellipsoidal shape dependent on the amount of CTAB used. At lower concentration of CTAB (r=2.7), Cu2O particles tend to form bundle of fine needle-like structures with an average diameter of 14.1±4.3 nm. Upon phase transfer process, transformation of Cu2O morphology occurred. Two organic solvents namely chloroform and toluene is studied. Chloroform with higher dielectric constant and dipole moment exert better particle-solvent interaction thus give better particle dispersion as compared to toluene. Addition of 10% v/v epoxy in the organic solvent further affects the particles morphology. Spherical particles as small as 8.1 ± 2.1 nm are obtained for Cu2O particles transferred into the 10%v/v epoxy/chloroform. Better solvation of epoxy resin in chloroform makes it a better stabilizer thus protecting the particles from agglomeration and secondary growth.
研究了溶剂环境对水-有机相转移法制备Cu2O颗粒的影响。在水溶液中,形成的颗粒的形态是须状或椭球状,这取决于CTAB的用量。在较低浓度的CTAB (r=2.7)下,Cu2O颗粒倾向于形成一束细针状结构,平均直径为14.1±4.3 nm。在相转移过程中,Cu2O的形貌发生了转变。研究了氯仿和甲苯两种有机溶剂。与甲苯相比,具有较高介电常数和偶极矩的氯仿具有更好的颗粒-溶剂相互作用,因而具有更好的颗粒分散性。在有机溶剂中加入10% v/v的环氧树脂进一步影响颗粒形态。将Cu2O颗粒转移到10%v/v的环氧树脂/氯仿中,可获得小至8.1±2.1 nm的球形颗粒。环氧树脂在氯仿中较好的溶剂化使其成为较好的稳定剂,从而防止颗粒团聚和二次生长。
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引用次数: 0
NGSHBI throughput optimization through innovative solution 通过创新的解决方案优化NGSHBI的吞吐量
N. Annamalai, Choo Pak Kee, K. S. Yeoh, W. Ismail
Productivity and cost savings are known key challenges in this competitive semiconductor industries. It has become more complex with the introduction of a new equipment, NGSHBI (Next Generation Self Heat Burn-In) integration into Test Operation. NGSHBI module was developed and deployed to support the product for Burn In requirement for chipset product. Moving into high product mix environment, the team encountered complexities with different package size design interception. With this multi form factor requirement, the design team provided fungible kit solution with new actuation bar design. The solution was not effective and also not factory friendly. This paper will outline how the key unproductive line item has been narrowed and solved through innovative solution
在这个竞争激烈的半导体行业,生产力和成本节约是众所周知的关键挑战。随着新设备NGSHBI(下一代自热老化)集成到测试操作中,它变得更加复杂。NGSHBI模块的开发和部署是为了支持芯片组产品的Burn - In要求。进入高产品组合环境后,团队遇到了不同封装尺寸设计拦截的复杂性。有了这种多外形因素的要求,设计团队提供了新的驱动杆设计的可替代套件解决方案。这个解决方案并不有效,而且对工厂也不友好。本文将概述如何通过创新的解决方案缩小和解决关键的非生产性行项目
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引用次数: 0
Important qualification process to wafer probing 晶圆探测的重要鉴定过程
Yoon-Peng Yee
Wafer fabrication technology has overcome many challenges and achieved small pitch at high current density nowadays, hence durable and sustainable probing tools are essential. Since good qualification process determines good tools to use, the scope of study in probe card fabrication has to be comprehensive enough to cover all that needed to be covered in forming an effective wafer probing characteristics. National Semiconductor has conducted a series of experiments looking into probing characteristics over a period of time. From the experimental results, conclusions were reached to setup guidelines to be applied to probe card fabrication with correct probe pressure.
如今,晶圆制造技术已经克服了许多挑战,在高电流密度下实现了小间距,因此耐用和可持续的探测工具是必不可少的。由于良好的鉴定过程决定了使用好的工具,因此在探针卡制造方面的研究范围必须足够全面,以涵盖形成有效晶圆探测特性所需的所有内容。国家半导体公司在一段时间内进行了一系列实验,研究探测特性。根据实验结果,得出了在正确的探针压力下制作探针卡的指导原则。
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引用次数: 0
Using ultrasonic energy for reducing ACF bonding process time 利用超声能量缩短ACF键合时间
T. Jang, Won-Su Yun, Soohyun Kim, Kyung-Soo Kim
In this paper, we develop the novel ultrasonic bonding method for mounting LCD driver IC which has a number of small bumps with high pin-density. Since the materials for bumps and pads are different metals, the an-isotropic conductive film (ACF) is used for adhesion. The conventional methods based on the thermal energy under pressure suffer from the high failure rate at high temperature process and, in particular, the low productivity due to the long bonding process time. To avoid these, the thermo-compression ultrasonic approach is newly proposed, and, validated by experiments. The experimental results show that lower values of bonding pressure and temperature than recommended by the ACF specification can be adopted for reliable bonding, which proves the feasibility of the ultrasonic bonding technique. In addition, we address a new concept of horn design for high precision bonding. Since the proposed method is utilizing the mechanical vibration, the misalignment between bumps and pads may be the major issue. To solve this, the active controllable horn design is further discussed.
在本文中,我们开发了一种新的超声波键合方法,用于安装具有许多高引脚密度的小凸起的LCD驱动IC。由于凸起和垫块的材料是不同的金属,因此使用了各向同性导电膜(ACF)来粘合。传统的基于压力下热能的方法在高温过程中故障率高,特别是由于粘接时间长,生产率低。为了避免这些问题,我们提出了热压缩超声方法,并通过实验进行了验证。实验结果表明,低于ACF规范推荐的键合压力和温度值均可实现可靠的键合,证明了超声键合技术的可行性。此外,我们提出了一种用于高精度粘接的新概念喇叭设计。由于所提出的方法是利用机械振动,凸起和垫之间的错位可能是主要问题。为解决这一问题,进一步探讨了主动可控变角的设计。
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引用次数: 4
Precise control of 8 terminal capacitor placement on fully populated PGA singulated substrate 在完全填充的PGA模拟衬底上精确控制8个终端电容器的放置
H. Habib, Ow Yong Soon Tatt
Attaching small component size of 8 Terminal Capacitors onto fully populated pin of PGA substrate has become very challenging during assembly process. A methodology was developed to precisely control the 50 um high accuracy of capacitor placement prior to solder paste reflow. Four corners holding top clamp on chip shooter machine was used to ensure the sitting of all singulated substrates onto respective cavity of carrier are firmed hold. Single piece nozzle design made of ceramic for capacitor pickup has proven to effectively holding the capacitor during pickup, transporting and placement without damaging the nozzle tip which can cause misaligned capacitor during placement. Besides, implementation of interval blow-off feature before each capacitor pickup has managed to eliminate dust clogging in the nozzle. Additional periodical placement accuracy checking for calibration on precise singulated glass plate per carrier cavity matrix was carried out to control equipment capability in achieving 50 um placement accuracy at all time.
在组装过程中,将8个终端电容的小元件尺寸贴合到PGA衬底的满填充引脚上是非常具有挑战性的。在锡膏回流之前,开发了一种精确控制50 μ m高精度电容器放置的方法。在切片机上使用四角夹持顶夹,以确保所有的单一基板都固定在各自的载体腔上。电容器拾取的陶瓷单片喷嘴设计已被证明在拾取,运输和放置过程中有效地保持电容器,而不会损坏喷嘴尖端,从而导致放置过程中的电容器错位。此外,每次电容拾取前的间隔吹灭功能的实施已经设法消除了喷嘴中的灰尘堵塞。额外的定期放置精度检查用于校准每个载波腔矩阵的精确单一玻璃板,以控制设备始终达到50 um放置精度的能力。
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引用次数: 0
Interconnection via technology and wafer level package for crystal unit device 晶体单元器件的互连技术和晶圆级封装
Tae Hoon Kim, J. Jeon, Y. P. Kwak, Tae Ho Kim, Yun Jung Lim, Jang Ho Park, Seogmoon Choi, Sung Yi
Most important technology for developing of wafer level packaging is studied in this paper. That is the process of drilling the via hole that are needed filling of conductive material for electrical connection or non-conductive material for reliability. Several kinds of drilling and filling methods of via holes for the interconnection were studied. The via formation for interconnection is based on smaller and lower cost package process. However, glass wafer which is substrate material of wafer level package for crystal unit device is difficult to make via by using novel method. The structure of wafer level crystal unit package for low cost and high performance is designed and optimized. The glass and Si wafer for package substrate and lid is chosen and considered as the structure for its mechanical and thermal strength and effective process of mass production. The interconnection via is formed through glass wafer by using sand blasting or laser drilling and Cu electro-plating method that enable the connection of the signal electrode on the quartz blank. The interconnection via process for wafer level crystal unit package with 2.0×1.6×0.45 mm3 size and results of electrical performance is evaluated.
本文研究了晶圆级封装发展的关键技术。即钻通孔的过程,为了电气连接需要填充导电材料或为了可靠性需要填充非导电材料。研究了几种互连通孔的钻孔和填充方法。互连的通孔形成是基于更小和更低成本的封装工艺。然而,作为晶圆单元器件晶圆级封装衬底材料的玻璃晶圆,很难用新方法制造。设计并优化了低成本、高性能的晶圆级晶元封装结构。选择用于封装基板和盖的玻璃和硅晶片作为结构,考虑其机械和热强度以及有效的量产工艺。采用喷砂或激光打孔和镀铜的方法在玻璃晶圆上形成互连孔,使信号电极连接在石英坯上。对尺寸为2.0×1.6×0.45 mm3的晶圆级晶元封装的互连工艺及其电性能结果进行了评价。
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引用次数: 1
The challenges in automotive Low-k fine pitch bonding 汽车低k细间距粘接的挑战
Rusli Ibrahim, Au Yin Kheng, Y. Choi
Gold ball bonding remains to be the key technology in the assembly of semiconductor packaging. In response to the demand for higher I/O's and increased package functionality, the bond pad pitch (BPP) and bond pad opening (BPO) will subsequently decrease. This technology trend demands the use of finer wire diameters and provide good wire bonding process. However, wire bond reliability continues to be the most challenging area with ever finer pitch devices, particularly to meet automotive requirement. Non-stick on pad (NSOP) and insufficient intermetallic coverage (IMC) due to either wafer surface contaminants, wire bond process and material set are still the main issue in Low-K wire bonding technology. Decapsulation and wire pull after temperature cycling is another challenge that needs in depth focus. This paper specifically discusses various phenomenons of bondability, wafer variation and reliability issue towards meeting the automotive reliability requirements. Failure analysis results are also briefly discussed.
金球键合仍然是半导体封装组装中的关键技术。为了响应更高的I/O和增加的封装功能的需求,键接垫间距(BPP)和键接垫开口(BPO)随后将减小。这种技术趋势要求使用更细的线径,并提供良好的线粘接工艺。然而,随着设备间距越来越小,特别是为了满足汽车需求,线键的可靠性仍然是最具挑战性的领域。焊盘不粘接(NSOP)和金属间覆盖(IMC)不足(由于晶圆表面污染物、线键合工艺和材料设置)仍然是低k线键合技术的主要问题。温度循环后的解封装和拉丝是另一个需要深入关注的挑战。本文针对满足汽车可靠性要求的各种粘结性现象、晶圆变化和可靠性问题进行了具体讨论。并简要讨论了失效分析结果。
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引用次数: 1
Analysis and characterization of green compound material for high voltage application 高压用绿色复合材料的分析与表征
S. Hian, A. M. Yassin, Y. S. Won
Anhydride hardener molding compound has been widely accepted as an encapsulation technology for high voltage application products. The roles of encapsulation materials extend beyond just encapsulating the device; these materials also provide heat dissipation and insulation between the device and the package that essentially affects the performance of the device while operating in the field. The recent more stringent electrical test requirement for high voltage application package raises a great challenge to the molding encapsulation technology especially those without using anhydride hardener in the formulation. Anhydride hardener is particularly attractive because of its known intrinsic superior electrical properties and high degree of cross-linking. In this paper, material properties analysis, moldability studies, electrical performance and reliability testing for several types of molding compounds such as anhydride hardener, crystalline filler, low stress Ortho Cresol Novolac (OCN), and Biphenyl/Phenolic molding encapsulations will be presented. The low stress OCN green molding compound was found to work exceptionally well with no significant degradation of electrical performance when compared to anhydride hardener molding compound. More importantly, the low stress OCN molding encapsulation is more cost-effective, provides excellent moldability, good delamination performance and possibly a more reliable package.
酸酐硬化剂成型复合材料作为一种高压应用产品的封装技术已被广泛接受。封装材料的作用不仅仅是封装设备;这些材料还提供器件和封装之间的散热和绝缘,这从根本上影响器件在现场工作时的性能。近年来,高压应用封装的电气测试要求越来越严格,对成型封装技术提出了很大的挑战,特别是在配方中不使用酸酐硬化剂的成型封装技术。酸酐硬化剂是特别有吸引力的,因为它已知的内在优越的电性能和高度的交联。本文将介绍几种成型化合物的材料性能分析、成型性研究、电性能和可靠性测试,如酸酐硬化剂、结晶填料、低应力邻甲酚(OCN)和联苯/酚醛成型封装。与酸酐硬化剂成型化合物相比,低应力OCN绿色成型化合物工作非常好,没有显著的电气性能退化。更重要的是,低应力OCN成型封装更具成本效益,提供卓越的可塑性,良好的分层性能,可能是更可靠的封装。
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引用次数: 2
期刊
2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)
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