Abstract La 1-x Sr x MnO 3 manganite oxides have shown great potential for infrared sensing. In this study, La 0.7 Sr 0.3 MnO 3 (LSMO) nanofibers, synthesized by a simple electrospinning process, are suspended between gold interdigitated electrodes(IDE). These electrodes, which acts as a supporting platform for the dangling nanofiber, are Microelectromechanical systems (MEMS) based that can be fabricated quickly and economically with fewer fabrication steps. Due to the large surface-area-to-volume ratio, these fibers have outstanding thermo-electrical properties, which puts them in the leagues of materials suitable for infrared sensing. Performance-wise these hanging nanofibers belong to a class of promising thermal sensors due to negligible thermal loss. The optoelectrical characterization shows its TCR is -1.48 %K -1 , and its electrical resistance follows an inverse square law for distance from the infrared source. The fabricated LSMO nanofibers based Microbolometer has a significantly low thermal time constant with average thermal response and recovery time of 63 ms and 77 ms, respectively. Furthermore, they show encouraging bolometric properties with thermal conductance, thermal capacitance, and voltage responsivity,and thermal noise limited detectivity of 3.6 x 10 -3 WK -1 , 0.23 x 10 -3 JK -1 , and 1.96 x 10 5 VW- 1 and 3.7 x 108 cm Hz1/2/W respectively. The high voltage responsivity and TCR, commensurate with the ultralow response and recovery time confirm that the fabricated Microbolometer can find industrial applications as thermal sensors.
摘要La 1-x Sr x mno3锰氧化物在红外传感领域显示出巨大的潜力。在本研究中，通过简单的静电纺丝工艺合成了la0.7 Sr 0.3 mno3 (LSMO)纳米纤维，并将其悬浮在金交错电极(IDE)之间。这些电极作为悬浮纳米纤维的支撑平台，是基于微机电系统(MEMS)的，可以用更少的制造步骤快速、经济地制造。由于大的表面积体积比，这些纤维具有出色的热电性能，这使它们成为适合红外传感的材料之一。性能方面，由于热损失可以忽略不计，这些悬挂纳米纤维属于一类有前途的热传感器。光电特性表明，其TCR为- 1.48% K -1，其电阻与红外源距离呈平方反比规律。制备的LSMO纳米纤维微测热计具有较低的热时间常数，平均热响应和恢复时间分别为63 ms和77 ms。此外，它们在热导、热电容和电压响应性方面表现出令人鼓舞的热特性，热噪声限制探测率分别为3.6 × 10 -3 WK -1、0.23 × 10 -3 JK -1、1.96 × 10 - 5 VW- 1和3.7 × 108 cm Hz1/2/W。高电压响应率和TCR，与超低响应和恢复时间相匹配，证实了所制造的微热计可以作为热传感器找到工业应用。
{"title":"Fabrication and Characterization of suspended La<sub>0.7</sub>Sr<sub>0.3</sub>MnO<sub>3</sub>Nanofibers for high-sensitive and fast-responsive Infrared Bolometer","authors":"nirupam paul, Sudharshan vandala, satish bonam, Amit Agrawal, Siva Rama Krishna Vanjari, Shiv Govind Singh","doi":"10.1088/1361-6439/ad0a3c","DOIUrl":"https://doi.org/10.1088/1361-6439/ad0a3c","url":null,"abstract":"Abstract La 1-x Sr x MnO 3 manganite oxides have shown great potential for infrared sensing. In this study, La 0.7 Sr 0.3 MnO 3 (LSMO) nanofibers, synthesized by a simple electrospinning process, are suspended between gold interdigitated electrodes(IDE). These electrodes, which acts as a supporting platform for the dangling nanofiber, are Microelectromechanical systems (MEMS) based that can be fabricated quickly and economically with fewer fabrication steps. Due to the large surface-area-to-volume ratio, these fibers have outstanding thermo-electrical properties, which puts them in the leagues of materials suitable for infrared sensing. Performance-wise these hanging nanofibers belong to a class of promising thermal sensors due to negligible thermal loss. The optoelectrical characterization shows its TCR is -1.48 %K -1 , and its electrical resistance follows an inverse square law for distance from the infrared source. The fabricated LSMO nanofibers based Microbolometer has a significantly low thermal time constant with average thermal response and recovery time of 63 ms and 77 ms, respectively. Furthermore, they show encouraging bolometric properties with thermal conductance, thermal capacitance, and voltage responsivity,and thermal noise limited detectivity of 3.6 x 10 -3 WK -1 , 0.23 x 10 -3 JK -1 , and 1.96 x 10 5 VW- 1 and 3.7 x 108 cm Hz1/2/W respectively. The high voltage responsivity and TCR, commensurate with the ultralow response and recovery time confirm that the fabricated Microbolometer can find industrial applications as thermal sensors.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"183 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135479649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-11-02DOI: 10.1088/1361-6439/ad08ef
Jikke de Winter, Tomás Manzaneque, Murali Krishna Ghatkesar
Abstract The emerging high-resolution 3D printing technique called two-photon polymerization (2PP) enables to print devices bottom-up rapidly, contrary to the top-down lithography-based fabrication methods. In this work, various polymer microbeams are 3D printed and their resonant characteristics are analyzed to understand the origin of damping. The 2PP printed polymer resonators have shown less damping than other polymer devices reported earlier, with tensile-stressed clamped-clamped beams reaching a record quality factor of 1819. The resonant energy loss was dominant by bulk friction damping. These results pave the path towards using 3D printed microresonators as mass sensors with improved design and fabrication flexibility.
{"title":"Damping of 3D-printed polymer microbeam resonators","authors":"Jikke de Winter, Tomás Manzaneque, Murali Krishna Ghatkesar","doi":"10.1088/1361-6439/ad08ef","DOIUrl":"https://doi.org/10.1088/1361-6439/ad08ef","url":null,"abstract":"Abstract The emerging high-resolution 3D printing technique called two-photon polymerization (2PP) enables to print devices bottom-up rapidly, contrary to the top-down lithography-based fabrication methods. In this work, various polymer microbeams are 3D printed and their resonant characteristics are analyzed to understand the origin of damping. The 2PP printed polymer resonators have shown less damping than other polymer devices reported earlier, with tensile-stressed clamped-clamped beams reaching a record quality factor of 1819. The resonant energy loss was dominant by bulk friction damping. These results pave the path towards using 3D printed microresonators as mass sensors with improved design and fabrication flexibility.&#xD;","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"19 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-11-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135876176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abstract This paper proposes a microelectromechanical system triaxial piezoresistive force sensor probe with high sensitivity and stiffness. The sensor probe is composed of a cantilever and four supporting beams. Two of the four beams had horizontal notch parts at the root, and sidewall-doped piezoresistors were utilised to detect the in-plane deformation. There was a vertical notch at the root of the remaining two beams and a surface-doping piezoresistor in one beam to detect the out-of-plane deformation. Thus, the proposed sensor probe measures the three directional forces applied to the cantilever tip with high sensitivity and stiffness owing to the corresponding piezoresistive notch structures. We demonstrate a fabrication process that forms the notch structure and the surface and sidewall doping methods. Our fabricated device was confirmed capable of measuring triaxial forces with a force resolution at the sub-micro-Newton level.
{"title":"Triaxial piezoresistive force sensor probe with high sensitivity and stiffness using 3D notch structure","authors":"Hidetoshi Takahashi, Yusuke Takei, Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama","doi":"10.1088/1361-6439/ad00c6","DOIUrl":"https://doi.org/10.1088/1361-6439/ad00c6","url":null,"abstract":"Abstract This paper proposes a microelectromechanical system triaxial piezoresistive force sensor probe with high sensitivity and stiffness. The sensor probe is composed of a cantilever and four supporting beams. Two of the four beams had horizontal notch parts at the root, and sidewall-doped piezoresistors were utilised to detect the in-plane deformation. There was a vertical notch at the root of the remaining two beams and a surface-doping piezoresistor in one beam to detect the out-of-plane deformation. Thus, the proposed sensor probe measures the three directional forces applied to the cantilever tip with high sensitivity and stiffness owing to the corresponding piezoresistive notch structures. We demonstrate a fabrication process that forms the notch structure and the surface and sidewall doping methods. Our fabricated device was confirmed capable of measuring triaxial forces with a force resolution at the sub-micro-Newton level.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"62 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-11-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135874123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-10-20DOI: 10.1088/1361-6439/ad0307
Linjin Shi, Mengjiao Qu, Dongze Lv, Weiting Liu, Jin Xie
Abstract This paper presents a highly accurate two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers (PMUTs) to measure flow rate in small-diameter pipes (9.6 mm). The ultrasonic transducers consist of four 10 by 10 PMUTs arrays with resonant frequency of 1 MHz in air. The ultrasonic transducers are excited by continuous sine voltage, and the transmitted and received signals are subjected to cross-correlation operation to obtain the time delay of the ultrasonic wave in the liquid. A dual-channel design of the flowmeter can reduce measurement errors by taking the average value. To reduce errors in the cross-correlation operation, an iterative algorithm is proposed, which effectively improves the measurement accuracy. The flowmeter is evaluated in flow range of 3.5–10 l min −1 , and has a small relative error of 0.7%.
提出了一种基于AlN压电微机械超声换能器(PMUTs)的高精度双通道超声流量计，用于测量小直径(9.6 mm)管道的流量。超声波换能器由四个10 × 10的pmut阵列组成，在空气中谐振频率为1mhz。超声波换能器在连续正弦电压的激励下，对收发信号进行互相关运算，得到超声波在液体中的时间延迟。流量计采用双通道设计，通过取平均值来减小测量误差。为了减小互相关运算中的误差，提出了一种迭代算法，有效地提高了测量精度。流量计在3.5-10 l min−1的流量范围内进行评估，相对误差较小，为0.7%。
{"title":"A Two-channel Ultrasonic Flowmeter Based on AlN Piezoelectric Micromachined Ultrasonic Transducers Arrays with Improved Cross-correlation Method","authors":"Linjin Shi, Mengjiao Qu, Dongze Lv, Weiting Liu, Jin Xie","doi":"10.1088/1361-6439/ad0307","DOIUrl":"https://doi.org/10.1088/1361-6439/ad0307","url":null,"abstract":"Abstract This paper presents a highly accurate two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers (PMUTs) to measure flow rate in small-diameter pipes (9.6 mm). The ultrasonic transducers consist of four 10 by 10 PMUTs arrays with resonant frequency of 1 MHz in air. The ultrasonic transducers are excited by continuous sine voltage, and the transmitted and received signals are subjected to cross-correlation operation to obtain the time delay of the ultrasonic wave in the liquid. A dual-channel design of the flowmeter can reduce measurement errors by taking the average value. To reduce errors in the cross-correlation operation, an iterative algorithm is proposed, which effectively improves the measurement accuracy. The flowmeter is evaluated in flow range of 3.5–10 l min −1 , and has a small relative error of 0.7%.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"72 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135514436","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-10-18DOI: 10.1088/1361-6439/acfa0b
Melinda A Lake-Speers, SINDHU PREETHAM BURUGUPALLY, David John Hoelzle
Abstract Here, we present a model, design, static and dynamic testing, and analysis of an electrostatic curved electrode actuator in deionized water. The actuator is integrated within a microfluidic device designed for high throughput cell sorting. The actuator shifts the bifurcation point of a Y-shaped microfluidic channel to simultaneously increase the width of one channel while decreasing the width of another channel, thus changing the bias in hydrodynamic resistance between outlet channels. The actuator is modeled as a clamped-roller beam and the static displacement is calculated based on Rayleigh–Ritz energy methods. The model accounts for oxide growth and surface roughness that occurs during fabrication. We observe that modeling a rough contact surface improves the maximum displacement prediction to within less than 20% error from the experimental value. Additionally, the model predicts a release voltage within less than 8% error of the experimental value. We also present dynamic experiments to test the actuator displacement at frequencies from 1 to 4096 Hz and show that the actuator achieves large displacements ( > 8 µ m) at high frequencies ( > 100 Hz).
{"title":"Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces","authors":"Melinda A Lake-Speers, SINDHU PREETHAM BURUGUPALLY, David John Hoelzle","doi":"10.1088/1361-6439/acfa0b","DOIUrl":"https://doi.org/10.1088/1361-6439/acfa0b","url":null,"abstract":"Abstract Here, we present a model, design, static and dynamic testing, and analysis of an electrostatic curved electrode actuator in deionized water. The actuator is integrated within a microfluidic device designed for high throughput cell sorting. The actuator shifts the bifurcation point of a Y-shaped microfluidic channel to simultaneously increase the width of one channel while decreasing the width of another channel, thus changing the bias in hydrodynamic resistance between outlet channels. The actuator is modeled as a clamped-roller beam and the static displacement is calculated based on Rayleigh–Ritz energy methods. The model accounts for oxide growth and surface roughness that occurs during fabrication. We observe that modeling a rough contact surface improves the maximum displacement prediction to within less than 20% error from the experimental value. Additionally, the model predicts a release voltage within less than 8% error of the experimental value. We also present dynamic experiments to test the actuator displacement at frequencies from 1 to 4096 Hz and show that the actuator achieves large displacements ( <?CDATA $gt$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mo>></mml:mo> </mml:math> 8 µ m) at high frequencies ( <?CDATA $gt$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mo>></mml:mo> </mml:math> 100 Hz).","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"53 70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135823308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-10-16DOI: 10.1088/1361-6439/acffd5
Gaurav Anand, Samira Safaripour, Jaynie Tercovich, Jenna Capozzi, Mark Griffin, Nathan Schin, Nicholas Mirra, Craig Snoeyink
Abstract A simple and robust electrode insulation technique that can withstand a voltage as high as 1000V , which is equivalent to an electric field strength of ∼1 MV m −1 across a 10μm channel filled with an electrolyte of conductivity ∼0.1 S m −1 , i.e. higher than sea water’s conductivity, is introduced. A multi-dielectric layers approach is adopted to fabricate the blocked electrodes, which helps reduce the number of material defects. Dielectric insulation with an exceptional breakdown electric field strength for an electrolyte confined between electrodes can have a wide range of applications in microfluidics, like high electric field strength-based dielectrophoresis. The voltage-current characteristics are studied for various concentrations of sodium chloride solution to estimate the insulation strength of the proposed materials, and the breakdown strength is calculated at the point where the electrical insulation failed. A detailed adhesion technique is also demonstrated, which will reduce the ambiguity around the fabrication of a sealed channel using SU-8.
摘要:介绍了一种简单而坚固的电极绝缘技术，该技术可以承受高达1000 V的电压，这相当于在10 μ m通道上填充电导率为0.1 S m−1(即高于海水电导率)的电解质的电场强度为1 MV m−1。采用多介电层的方法制备阻塞电极，有助于减少材料缺陷的数量。具有特殊击穿电场强度的介质绝缘在电极之间的电解质中具有广泛的应用，如基于高电场强度的介电电泳。研究了不同浓度氯化钠溶液的电压-电流特性，以估计所提出材料的绝缘强度，并计算了电绝缘失效点的击穿强度。还演示了详细的粘附技术，这将减少使用SU-8制造密封通道的模糊性。
{"title":"A Simple Electrode Insulation and Channel Fabrication Technique for High-Electric Field Microfluidics","authors":"Gaurav Anand, Samira Safaripour, Jaynie Tercovich, Jenna Capozzi, Mark Griffin, Nathan Schin, Nicholas Mirra, Craig Snoeyink","doi":"10.1088/1361-6439/acffd5","DOIUrl":"https://doi.org/10.1088/1361-6439/acffd5","url":null,"abstract":"Abstract A simple and robust electrode insulation technique that can withstand a voltage as high as <?CDATA $mathrm{1000,V}$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mrow> <mml:mn>1000</mml:mn> <mml:mi mathvariant=\"normal\">V</mml:mi> </mml:mrow> </mml:math> , which is equivalent to an electric field strength of <?CDATA ${sim}1$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mrow> <mml:mo>∼</mml:mo> </mml:mrow> <mml:mn>1</mml:mn> </mml:math> MV m −1 across a <?CDATA $10,mumathrm{m}$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mn>10</mml:mn> <mml:mi>μ</mml:mi> <mml:mrow> <mml:mi mathvariant=\"normal\">m</mml:mi> </mml:mrow> </mml:math> channel filled with an electrolyte of conductivity <?CDATA ${sim}0.1$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mrow> <mml:mo>∼</mml:mo> </mml:mrow> <mml:mn>0.1</mml:mn> </mml:math> S m −1 , i.e. higher than sea water’s conductivity, is introduced. A multi-dielectric layers approach is adopted to fabricate the blocked electrodes, which helps reduce the number of material defects. Dielectric insulation with an exceptional breakdown electric field strength for an electrolyte confined between electrodes can have a wide range of applications in microfluidics, like high electric field strength-based dielectrophoresis. The voltage-current characteristics are studied for various concentrations of sodium chloride solution to estimate the insulation strength of the proposed materials, and the breakdown strength is calculated at the point where the electrical insulation failed. A detailed adhesion technique is also demonstrated, which will reduce the ambiguity around the fabrication of a sealed channel using SU-8.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"136078074","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-29DOI: 10.1088/1361-6439/acfe86
Meera Vikas Garud, Rudra Pratap
Abstract Miniaturization of electro-mechanical sensors and actuators has benefited from an advancement in CMOS technology over the years. However, miniaturization of audio speakers has seen considerable development only in the recent times. This paper reviews the developments in MEMS audio speaker research and the initial commercial products available in the market. At first glance, it appears that the relatively slow development of MEMS speakers can be attributed to the fact that the principle of actuation has remained unchanged for several decades. Unfortunately, the physics behind audible sound production holds us back from exclusively adopting miniaturized speakers — sound pressure level is directly proportional to the area of the sound radiating surface. Nevertheless, researchers are continuing to explore new avenues for designing and developing MEMS speakers, without limiting themselves to the existing actuation principles. With newly discovered materials and improving technology, the research in MEMS speakers is gaining attention and new products are emerging. A speaker design based on piezoelectric actuation or electrostatics actuation is favourable at MEMS scale. Indian research community is also contributing to advances in MEMS speakers and near-ultrasonic devices. This paper reviews the development in MEMS audio speakers in India and in the world. The tabulated review findings aim to offer readers an overview of the development of micro-speakers and to provide guidance for designing new micro-speakers.
{"title":"Review Paper: MEMS Audio Speakers","authors":"Meera Vikas Garud, Rudra Pratap","doi":"10.1088/1361-6439/acfe86","DOIUrl":"https://doi.org/10.1088/1361-6439/acfe86","url":null,"abstract":"Abstract Miniaturization of electro-mechanical sensors and actuators has benefited from an advancement in CMOS technology over the years. However, miniaturization of audio speakers has seen considerable development only in the recent times. This paper reviews the developments in MEMS audio speaker research and the initial commercial products available in the market. At first glance, it appears that the relatively slow development of MEMS speakers can be attributed to the fact that the principle of actuation has remained unchanged for several decades. Unfortunately, the physics behind audible sound production holds us back from exclusively adopting miniaturized speakers — sound pressure level is directly proportional to the area of the sound radiating surface. Nevertheless, researchers are continuing to explore new avenues for designing and developing MEMS speakers, without limiting themselves to the existing actuation principles. With newly discovered materials and improving technology, the research in MEMS speakers is gaining attention and new products are emerging. A speaker design based on piezoelectric actuation or electrostatics actuation is favourable at MEMS scale. Indian research community is also contributing to advances in MEMS speakers and near-ultrasonic devices. This paper reviews the development in MEMS audio speakers in India and in the world. The tabulated review findings aim to offer readers an overview of the development of micro-speakers and to provide guidance for designing new micro-speakers.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135193488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abstract The possibly complex impacts of volunteer’s heavy backpacks, chronic neck pain are significant concerns and must be considered by the scientific and academic community. However already existing several alert systems can tackle these issues, but the evaluation approaches are costly and complicated. In this regard, ReSe 2 /Ti 3 C 2 T x nanohybrid based flexible sensors were fabricated by low-cost vacuum filtration technique and integrated into cervical collar strain and shoulder load detection alert systems to tackle these issues. The fabricated sensor displayed an excellent gauge factor of 14.38 and an improved sensitivity of 14.06 kPa −1 . The response and recovery time of the pressure and strain sensor were 288 and 90 msec at 15% strain and 95 and 182 msec at 1.477 kPa pressure. There was a negligible degradation in performance when the pressure sensor was assessed for 5000 and the strain sensor for 4500 cycles, proving that the fabricated sensors are highly durable. The comprehensive underlying transduction mechanism is elucidated by intrinsic piezoresistive properties of nanohybrid (ReSe 2 /Ti 3 C 2 T x ) and Schottky barrier height mechanism with complete electronic bandstructure realization using real-time ultraviolet photoelectron spectroscopy. Also, to transfer/receive data wirelessly on an Android/ios based smartphone, the fabricated sensors were connected to an electrical circuit with a microcontroller and Bluetooth module. The effective corroboration of the ReSe 2 /Ti 3 C 2 T x nanohybrid based physical sensors initiates innovative prospects in the field of flexible electronics.
志愿者沉重的背包和慢性颈部疼痛可能产生的复杂影响是值得关注的，必须得到科学界和学术界的重视。然而，现有的几个警报系统可以解决这些问题，但评估方法昂贵且复杂。为此，采用低成本真空过滤技术制备了基于ReSe 2 /Ti 3 C 2 T x纳米杂化柔性传感器，并将其集成到颈部应变和肩部负载检测报警系统中。该传感器的测量系数为14.38，灵敏度为14.06 kPa−1。压力和应变传感器在15%应变下的响应时间为288和90 msec，在1.477 kPa压力下的响应时间为95和182 msec。当压力传感器被评估为5000次，应变传感器被评估为4500次时，性能的下降可以忽略不计，证明制造的传感器是高度耐用的。利用实时紫外光电子能谱技术，利用纳米杂化材料(ReSe 2 / ti3c2tx)的固有压阻特性和完整电子带结构的肖特基势垒高度机制，阐明了全面的潜在转导机制。此外，为了在基于Android/ios的智能手机上无线传输/接收数据，制造的传感器与微控制器和蓝牙模块连接在一起。ReSe 2 / ti3c2tx纳米杂化物理传感器的有效验证，为柔性电子领域开辟了创新的前景。
{"title":"MXene (Ti3C2Tx)/TMD (ReSe2) Nanohybrid-based Flexible Electromechanical Sensors for Cervical Collar Strain and Shoulder Load Detection Applications","authors":"Vivek Adepu, Manav Tathacharya, Raghuram CS, Parikshit Sahatiya","doi":"10.1088/1361-6439/acfc52","DOIUrl":"https://doi.org/10.1088/1361-6439/acfc52","url":null,"abstract":"Abstract The possibly complex impacts of volunteer’s heavy backpacks, chronic neck pain are significant concerns and must be considered by the scientific and academic community. However already existing several alert systems can tackle these issues, but the evaluation approaches are costly and complicated. In this regard, ReSe 2 /Ti 3 C 2 T x nanohybrid based flexible sensors were fabricated by low-cost vacuum filtration technique and integrated into cervical collar strain and shoulder load detection alert systems to tackle these issues. The fabricated sensor displayed an excellent gauge factor of 14.38 and an improved sensitivity of 14.06 kPa −1 . The response and recovery time of the pressure and strain sensor were 288 and 90 msec at 15% strain and 95 and 182 msec at 1.477 kPa pressure. There was a negligible degradation in performance when the pressure sensor was assessed for 5000 and the strain sensor for 4500 cycles, proving that the fabricated sensors are highly durable. The comprehensive underlying transduction mechanism is elucidated by intrinsic piezoresistive properties of nanohybrid (ReSe 2 /Ti 3 C 2 T x ) and Schottky barrier height mechanism with complete electronic bandstructure realization using real-time ultraviolet photoelectron spectroscopy. Also, to transfer/receive data wirelessly on an Android/ios based smartphone, the fabricated sensors were connected to an electrical circuit with a microcontroller and Bluetooth module. The effective corroboration of the ReSe 2 /Ti 3 C 2 T x nanohybrid based physical sensors initiates innovative prospects in the field of flexible electronics.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135131304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-27DOI: 10.1088/1361-6439/acfdb5
Ye Wang, Shengshun Duan, Jiachen Liu, Fangzhi Zhao, Pinzhen Chen, Qiongfeng Shi, Jun Wu
Abstract Flexible microstructural pressure sensors (FMPSs) have been widely used in different areas including health monitoring, human-machine interaction and electronic skin for their good reliability, easy fabrication, and highly sensitive sensing performance. Although the use of a sensing layer with microstructure improves the sensor sensitivity, it also results in limited sensitive pressure range, slow response and poor cyclic stability, which prevents the sensors from being utilized in applications requiring wide detect range, real-time response and high durability. Here, we propose an advanced micro-structured sensing layer through doping thermally expandable microspheres (EP) into the screen-printing carbon black (CB) slurry to enhance its mechanical properties. An FMPS is then developed based on this enhanced micro-structured sensing layer. Benefiting from the expanded microsphere-like microstructure, the as-prepared sensor features high sensitivity (37.16 kPa-1), fast response/recovery time (126 / 52 ms), and good mechanical stability (over 3000 cycles). In addition, a home-made and effective collision avoidance system consisting of a robotic arm, the pressure sensor, a MEGA2560 microcontroller unit (MCU) and a computer is constructed to indicate the sensor’s outstanding tactile perception characteristic, making it a promising candidate for intelligent robotic applications such as human-robot collaboration (HRC). Furthermore, we develop a pressure sensor array and demonstrate its ability to spatial pressure distribution perception. The developed microsphere-based pressure sensor and its array show great potential to be adopted in various monitoring and interactive applications such as humanoid robots, smart home, human-machine interaction, etc.
{"title":"Highly-sensitive expandable microsphere-based flexible pressure sensor for human-machine interaction","authors":"Ye Wang, Shengshun Duan, Jiachen Liu, Fangzhi Zhao, Pinzhen Chen, Qiongfeng Shi, Jun Wu","doi":"10.1088/1361-6439/acfdb5","DOIUrl":"https://doi.org/10.1088/1361-6439/acfdb5","url":null,"abstract":"Abstract Flexible microstructural pressure sensors (FMPSs) have been widely used in different areas including health monitoring, human-machine interaction and electronic skin for their good reliability, easy fabrication, and highly sensitive sensing performance. Although the use of a sensing layer with microstructure improves the sensor sensitivity, it also results in limited sensitive pressure range, slow response and poor cyclic stability, which prevents the sensors from being utilized in applications requiring wide detect range, real-time response and high durability. Here, we propose an advanced micro-structured sensing layer through doping thermally expandable microspheres (EP) into the screen-printing carbon black (CB) slurry to enhance its mechanical properties. An FMPS is then developed based on this enhanced micro-structured sensing layer. Benefiting from the expanded microsphere-like microstructure, the as-prepared sensor features high sensitivity (37.16 kPa-1), fast response/recovery time (126 / 52 ms), and good mechanical stability (over 3000 cycles). In addition, a home-made and effective collision avoidance system consisting of a robotic arm, the pressure sensor, a MEGA2560 microcontroller unit (MCU) and a computer is constructed to indicate the sensor’s outstanding tactile perception characteristic, making it a promising candidate for intelligent robotic applications such as human-robot collaboration (HRC). Furthermore, we develop a pressure sensor array and demonstrate its ability to spatial pressure distribution perception. The developed microsphere-based pressure sensor and its array show great potential to be adopted in various monitoring and interactive applications such as humanoid robots, smart home, human-machine interaction, etc.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135534350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-26DOI: 10.1088/1361-6439/acf93f
Nianqiang Zhang, Jin Ji, Jilai Wang, Zhenyu Shi, Chengpeng Zhang
Abstract With the in-depth development and continuous innovation of micro and nano manufacturing technology, flexible strain sensors are more and more widely used in various fields, including soft robots, smart clothing and so on, and high-performance sensors are more in demand. An efficient tactic for enhancing the performance of flexible strain sensors is to design and create hierarchical structures, and its efficient and controllable manufacturing is a key problem. The controllable manufacturing of V-groove/wrinkles hierarchical structure is realized by nano-imprint and prestretch-release process, which provides an effective method for large-area controllable preparation of hierarchical structure, and provides a foundation for the construction of high-performance flexible strain sensor. Single-factor experiments were carried out on the slope of the primary structure, pre-strain and substrate thickness, and response surface analysis was carried out by Box–Behnken experiments. The results of the structure’s formation are significantly influenced by the slope and substrate thickness, and the optimal process parameters are obtained by response surface analysis. Then the impact of each process parameter was investigated using a process simulation model. Finally, the forming conditions of hierarchical structure are analyzed. This study can provide guidance for the efficient and controllable manufacturing of micro/nano hierarchical structures.
{"title":"Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array","authors":"Nianqiang Zhang, Jin Ji, Jilai Wang, Zhenyu Shi, Chengpeng Zhang","doi":"10.1088/1361-6439/acf93f","DOIUrl":"https://doi.org/10.1088/1361-6439/acf93f","url":null,"abstract":"Abstract With the in-depth development and continuous innovation of micro and nano manufacturing technology, flexible strain sensors are more and more widely used in various fields, including soft robots, smart clothing and so on, and high-performance sensors are more in demand. An efficient tactic for enhancing the performance of flexible strain sensors is to design and create hierarchical structures, and its efficient and controllable manufacturing is a key problem. The controllable manufacturing of V-groove/wrinkles hierarchical structure is realized by nano-imprint and prestretch-release process, which provides an effective method for large-area controllable preparation of hierarchical structure, and provides a foundation for the construction of high-performance flexible strain sensor. Single-factor experiments were carried out on the slope of the primary structure, pre-strain and substrate thickness, and response surface analysis was carried out by Box–Behnken experiments. The results of the structure’s formation are significantly influenced by the slope and substrate thickness, and the optimal process parameters are obtained by response surface analysis. Then the impact of each process parameter was investigated using a process simulation model. Finally, the forming conditions of hierarchical structure are analyzed. This study can provide guidance for the efficient and controllable manufacturing of micro/nano hierarchical structures.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"328 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134903936","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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