AlN/ScAlN composite films-based spurious free A1 mode lamb wave resonator with adjustable effective electromechanical coupling coefficient
基于 AlN/ScAlN 复合薄膜的无杂散 A1 模式羔羊波谐振器,具有可调节的有效机电耦合系数
IF 3.4
3区 物理与天体物理
Q2 PHYSICS, APPLIED
Pub Date : 2024-09-06
DOI: 10.1088/1361-6463/ad7150
Zesheng Liu, Yan Liu, Xiang Chen, Ying Xie, Yuanhang Qu, Xiyu Gu, Xin Tong, Haiyang Li, Wenjuan Liu, Yao Cai, Shishang Guo, Chengliang Sun