Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994209
F. Lucklum, Frank Bunge, M. Vellekoop
In this contribution, we focus on the analysis of complete omnidirectional acoustic band gaps in additively manufactured three-dimensional (3D) phononic crystals. We present a numerical analysis of band structure and phononic band gaps of different cubic unit cell geometries. For validation, we report experimental results for transmission of acoustic waves in different characteristic spatial directions through various phononic crystal samples. These results are supplemented by numerical transmission analysis. The elements form the building blocks of wideband, high-resolution phononic-fluidic systems for measuring physical properties such as fluid density, speed of sound, and concentration.
{"title":"Experimental and numerical analysis of complete acoustic band gaps in three-dimensional phononic crystals","authors":"F. Lucklum, Frank Bunge, M. Vellekoop","doi":"10.1109/TRANSDUCERS.2017.7994209","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994209","url":null,"abstract":"In this contribution, we focus on the analysis of complete omnidirectional acoustic band gaps in additively manufactured three-dimensional (3D) phononic crystals. We present a numerical analysis of band structure and phononic band gaps of different cubic unit cell geometries. For validation, we report experimental results for transmission of acoustic waves in different characteristic spatial directions through various phononic crystal samples. These results are supplemented by numerical transmission analysis. The elements form the building blocks of wideband, high-resolution phononic-fluidic systems for measuring physical properties such as fluid density, speed of sound, and concentration.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114075315","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994366
Parham Ghassemi, Xiang Ren, J. Strobl, M. Agah
The paper reports the integration of bioimpedance sensing and cell deformability assays in a unique microfluidic channel for label-free and image-free analysis of single-cell biophysical (biomechanical) attributes. The all-transparent microfluidic chip consists of a constriction channel and an array of embedded indium-tin-oxide (ITO) electrodes through which cell position can be tracked with high resolution. Therefore, information regarding cell transit times and velocities during cell deformation can be readily assessed without the use of video microscopy. The deformability chip is also unique in that it separates the delivery and sensing channel thereby preventing cell clogging. The performance of the chip has been verified by single-cell analysis of breast cancer cells.
{"title":"An embedded single-cell impedametric positioning tracker in microfluidic deformability assays","authors":"Parham Ghassemi, Xiang Ren, J. Strobl, M. Agah","doi":"10.1109/TRANSDUCERS.2017.7994366","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994366","url":null,"abstract":"The paper reports the integration of bioimpedance sensing and cell deformability assays in a unique microfluidic channel for label-free and image-free analysis of single-cell biophysical (biomechanical) attributes. The all-transparent microfluidic chip consists of a constriction channel and an array of embedded indium-tin-oxide (ITO) electrodes through which cell position can be tracked with high resolution. Therefore, information regarding cell transit times and velocities during cell deformation can be readily assessed without the use of video microscopy. The deformability chip is also unique in that it separates the delivery and sensing channel thereby preventing cell clogging. The performance of the chip has been verified by single-cell analysis of breast cancer cells.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129782318","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993994
M. E. Galanko, Abhay S. Kochhar, G. Piazza, T. Mukherjee, G. Fedder
We demonstrate a CMOS-MEMS resonant demodulator for use in a nanoWatt-power RF wake-up sensor. "Near-zero" power operation is enabled through voltage step-up and frequency keying in passive MEMS elements. The integrated MEMS demodulator minimizes parasitic capacitance to maximize gain and performs high-Q filtering to prevent false triggering due to interference signal feedthrough. High-frequency testing of a demodulator with a minimum transduction gap size of 400 nm agrees with device models.
{"title":"CMOS-MEMS resonant demodulator for near-zero-power RF wake-up receiver","authors":"M. E. Galanko, Abhay S. Kochhar, G. Piazza, T. Mukherjee, G. Fedder","doi":"10.1109/TRANSDUCERS.2017.7993994","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993994","url":null,"abstract":"We demonstrate a CMOS-MEMS resonant demodulator for use in a nanoWatt-power RF wake-up sensor. \"Near-zero\" power operation is enabled through voltage step-up and frequency keying in passive MEMS elements. The integrated MEMS demodulator minimizes parasitic capacitance to maximize gain and performs high-Q filtering to prevent false triggering due to interference signal feedthrough. High-frequency testing of a demodulator with a minimum transduction gap size of 400 nm agrees with device models.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125642854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994191
Sungho Kang, Z. Qian, Vageeswar Rajaram, A. Alú, M. Rinaldi
This paper reports on the experimental demonstration of wide-angle and polarization insensitive ultranarrowband mid-infrared (MIR) plasmonic absorbers for multispectral sensing and imaging applications. By optimizing geometry and fabrication process of an ultra-thin (400 nm) metal-insulator-metal (MIM) metamaterial structure, we have been able to experimentally demonstrate high absorptivity (η>91%) mid-IR absorbers with the narrowest absorption bandwidth reported to date (full width at half maximum, FWHM∼225 nm, 4.29% at λ=5.23μm), while maintaining angle (θ=0∼60°) and polarization insensitivity. The unprecedented performance of such batch-microfabricated and lithographically defined ultra-thin absorbers paves the way to the development of new classes of plasmonically-enhanced multi-spectral sensing and imaging microsystems for non-invasive chemical sensing and IR spectral signature detection.
{"title":"Ultra narrowband infrared absorbers for omni-directional and polarization insensitive multi-spectral sensing microsystems","authors":"Sungho Kang, Z. Qian, Vageeswar Rajaram, A. Alú, M. Rinaldi","doi":"10.1109/TRANSDUCERS.2017.7994191","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994191","url":null,"abstract":"This paper reports on the experimental demonstration of wide-angle and polarization insensitive ultranarrowband mid-infrared (MIR) plasmonic absorbers for multispectral sensing and imaging applications. By optimizing geometry and fabrication process of an ultra-thin (400 nm) metal-insulator-metal (MIM) metamaterial structure, we have been able to experimentally demonstrate high absorptivity (η>91%) mid-IR absorbers with the narrowest absorption bandwidth reported to date (full width at half maximum, FWHM∼225 nm, 4.29% at λ=5.23μm), while maintaining angle (θ=0∼60°) and polarization insensitivity. The unprecedented performance of such batch-microfabricated and lithographically defined ultra-thin absorbers paves the way to the development of new classes of plasmonically-enhanced multi-spectral sensing and imaging microsystems for non-invasive chemical sensing and IR spectral signature detection.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116029342","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993975
K. Johnson
Robotic networks of platforms carrying physical, chemical, and biological sensors that can monitor basic metabolic processes are required to observe ocean health. The sensors must operate for the 5 to 10 year period between research vessel visits with no direct human intervention and little or no chance for sensor recalibration. The sensors and the platforms that carry them must operate from the surface to depths of several kilometers. Here I describe work done by marine scientists to develop integrated networks of chemical sensors with these properties. Much of the focus will be on chemical sensors that can operate for years at a time without laboratory recalibration.
{"title":"Developing chemical sensors to observe the health of the global ocean","authors":"K. Johnson","doi":"10.1109/TRANSDUCERS.2017.7993975","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993975","url":null,"abstract":"Robotic networks of platforms carrying physical, chemical, and biological sensors that can monitor basic metabolic processes are required to observe ocean health. The sensors must operate for the 5 to 10 year period between research vessel visits with no direct human intervention and little or no chance for sensor recalibration. The sensors and the platforms that carry them must operate from the surface to depths of several kilometers. Here I describe work done by marine scientists to develop integrated networks of chemical sensors with these properties. Much of the focus will be on chemical sensors that can operate for years at a time without laboratory recalibration.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126513690","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994079
Y. Hirai, K. Terashima, Katsuo Nakamura, T. Tsuchiya, O. Tabata
We propose a low temperature process of alkali-metal vapor cells for microfabricated atomic clocks using alkali-metal source tablets (AMSTs) as alkali metal dispensers. An AMST contains precise quantities of cesium aside (CsN3) inside the porous alumina that is used to produce of Cs by thermal decomposition of CsN3. The AMST technology together with sequential plasma activated Si/glass bonding is a combination of technology that enables the low temperature wafer-level process of Cs vapor cells, resulting good quality of spectroscopic measurement for atomic clocks. The short-term frequency stability obtained with the fabricated cell was measured to be 2 × 10−11 at an integration time of 1 sec.
{"title":"Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks","authors":"Y. Hirai, K. Terashima, Katsuo Nakamura, T. Tsuchiya, O. Tabata","doi":"10.1109/TRANSDUCERS.2017.7994079","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994079","url":null,"abstract":"We propose a low temperature process of alkali-metal vapor cells for microfabricated atomic clocks using alkali-metal source tablets (AMSTs) as alkali metal dispensers. An AMST contains precise quantities of cesium aside (CsN3) inside the porous alumina that is used to produce of Cs by thermal decomposition of CsN3. The AMST technology together with sequential plasma activated Si/glass bonding is a combination of technology that enables the low temperature wafer-level process of Cs vapor cells, resulting good quality of spectroscopic measurement for atomic clocks. The short-term frequency stability obtained with the fabricated cell was measured to be 2 × 10−11 at an integration time of 1 sec.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128164511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994375
Weijie Chen, Beitong Tian, Jianfeng Lan, Di Chen, Zhen Zhu
This paper presents a method to identify the life stages of Caenorhabditis elegans (C. elegans) by means of electrical impedance spectroscopy (EIS). A simple microfluidic chip, composed of a straight microchannel and a pair of coplanar electrodes was designed to form a microfluidic impedance cytometry. The electrodes were used to perform the impedance measurement of C. elegans nematodes when worms were flowing through the channel. Electrical signals and concurrent videos were recorded and analyzed to investigate the relationship between the impedance amplitude and the worm length. The result demonstrated that the length of nematodes is linearly correlated to the cubic root of EIS signal amplitude. Therefore, the life stages of C. elegans can be identified through this microfluidic impedance cytometry.
{"title":"Using microfluidic impedance cytometry to identify the life stages of C. elegans nematodes","authors":"Weijie Chen, Beitong Tian, Jianfeng Lan, Di Chen, Zhen Zhu","doi":"10.1109/TRANSDUCERS.2017.7994375","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994375","url":null,"abstract":"This paper presents a method to identify the life stages of Caenorhabditis elegans (C. elegans) by means of electrical impedance spectroscopy (EIS). A simple microfluidic chip, composed of a straight microchannel and a pair of coplanar electrodes was designed to form a microfluidic impedance cytometry. The electrodes were used to perform the impedance measurement of C. elegans nematodes when worms were flowing through the channel. Electrical signals and concurrent videos were recorded and analyzed to investigate the relationship between the impedance amplitude and the worm length. The result demonstrated that the length of nematodes is linearly correlated to the cubic root of EIS signal amplitude. Therefore, the life stages of C. elegans can be identified through this microfluidic impedance cytometry.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128851713","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994101
Kaisi Xu, Fushuai Jiang, Yangxi Zhang, Wei Zhang, Y. Hao
An original design of a self-adaptive nonlinear system (SANS) for shock protection of MEMS is presented here for the first time. The internally integrated passive silicon structure, with increasing amplitudes of shock, realizes nonlinear growth in shock resistance and reveals positive selectivity and compatibility, through three energy dissipation modes. This approach enables a generic batch fabrication requiring no additional processes or excessive area expansion (290μm×320μm for an 8cm×8cm device in this work). The SANS has been verified to provide enhanced shock robustness over conventional shock protective structures, namely the hard stop (∼2 times) and the flexible spring stop (∼1.5 times).
{"title":"Micromachined integrated shock protection via a self-adaptive nonlinear system","authors":"Kaisi Xu, Fushuai Jiang, Yangxi Zhang, Wei Zhang, Y. Hao","doi":"10.1109/TRANSDUCERS.2017.7994101","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994101","url":null,"abstract":"An original design of a self-adaptive nonlinear system (SANS) for shock protection of MEMS is presented here for the first time. The internally integrated passive silicon structure, with increasing amplitudes of shock, realizes nonlinear growth in shock resistance and reveals positive selectivity and compatibility, through three energy dissipation modes. This approach enables a generic batch fabrication requiring no additional processes or excessive area expansion (290μm×320μm for an 8cm×8cm device in this work). The SANS has been verified to provide enhanced shock robustness over conventional shock protective structures, namely the hard stop (∼2 times) and the flexible spring stop (∼1.5 times).","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117164340","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994257
Thanh-Vinh Nguyen, Hidetoshi Takahashi, I. Shimoyama
We report on a sensor design to measure the vibration of small droplets. The sensor consists of a piezoresistive cantilever and a chamber covered with a superoleophobic membrane. The vibration of a droplet on the membrane causes the pressure of the chamber to change. Since the cantilever is able to detect a pressure change of less than 0.1 Pa, the vibration of the droplet can be precisely measured by the cantilever. In comparison to previously developed MEMS-based force sensor to measure the droplet vibration, the current sensor design offers several benefits including: wide range of usable liquids, simple sensing scheme (only one sensor is required) and capability to be disposable. With these advantages, our method is believed to be useful in measuring viscosity of small droplet for point-of-care application.
{"title":"MEMS-based pressure sensor with a superoleophobic membrane for measuring droplet vibration","authors":"Thanh-Vinh Nguyen, Hidetoshi Takahashi, I. Shimoyama","doi":"10.1109/TRANSDUCERS.2017.7994257","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994257","url":null,"abstract":"We report on a sensor design to measure the vibration of small droplets. The sensor consists of a piezoresistive cantilever and a chamber covered with a superoleophobic membrane. The vibration of a droplet on the membrane causes the pressure of the chamber to change. Since the cantilever is able to detect a pressure change of less than 0.1 Pa, the vibration of the droplet can be precisely measured by the cantilever. In comparison to previously developed MEMS-based force sensor to measure the droplet vibration, the current sensor design offers several benefits including: wide range of usable liquids, simple sensing scheme (only one sensor is required) and capability to be disposable. With these advantages, our method is believed to be useful in measuring viscosity of small droplet for point-of-care application.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114219303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994134
Xudong Fan, Jiwon Lee, Hongbo Zhu, Menglian Zhou, Robert Nidetz, K. Kurabayashi, S. Sayler, Richard L. Neitzel, R. Richardson
We report the progress made in the past few years in the development of a high performance portable multi-dimensional gas chromatography (GC) device that is capable of rapidly analyzing a large number of compounds with high sensitivity. We discuss the multi-dimensional GC architecture and its components, followed by a few field analysis examples using our portable GC devices.
{"title":"Portable multi-dimensional gas chromatography device for rapid field analysis of chemical compounds","authors":"Xudong Fan, Jiwon Lee, Hongbo Zhu, Menglian Zhou, Robert Nidetz, K. Kurabayashi, S. Sayler, Richard L. Neitzel, R. Richardson","doi":"10.1109/TRANSDUCERS.2017.7994134","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994134","url":null,"abstract":"We report the progress made in the past few years in the development of a high performance portable multi-dimensional gas chromatography (GC) device that is capable of rapidly analyzing a large number of compounds with high sensitivity. We discuss the multi-dimensional GC architecture and its components, followed by a few field analysis examples using our portable GC devices.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114734504","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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