Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993991
Taiyu Okatani, A. Nakai, T. Takahata, I. Shimoyama
We report on a MEMS slip sensor that estimates triaxial force as well as coefficient of static friction for prediction of a slip. The sensor was composed of the outer and inner elastomers separated by a hard substrate, which enable to measure triaxial force independently of coefficient of static friction. We fabricated a prototype of the sensor and evaluated it by pressing and sliding it on various conditions of coefficient of static friction.
{"title":"A MEMS slip sensor: Estimations of triaxial force and coefficient of static friction for prediction of a slip","authors":"Taiyu Okatani, A. Nakai, T. Takahata, I. Shimoyama","doi":"10.1109/TRANSDUCERS.2017.7993991","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993991","url":null,"abstract":"We report on a MEMS slip sensor that estimates triaxial force as well as coefficient of static friction for prediction of a slip. The sensor was composed of the outer and inner elastomers separated by a hard substrate, which enable to measure triaxial force independently of coefficient of static friction. We fabricated a prototype of the sensor and evaluated it by pressing and sliding it on various conditions of coefficient of static friction.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121606094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993981
Kenei Matsudaira, Thanh-Vinh Nguyen, K. H. Shoji, T. Tsukagoshi, T. Takahata, I. Shimoyama
We report a force sensor array that can measure iPS cell-derived cardiomyocytes (iPS-CMs) contractility with high sensitivity and high temporal resolution. The fabricated device has six piezoresistive cantilevers whose sensitivities were higher than 9.1 × 10−5 nN−1. Using the device, we measured the contraction force of an iPS-CMs layer. As a result, contractile forces ranging from 1 to 12 nN were measured.
{"title":"Mems force sensor array for evaluating the contractility of IPS cell-derived cardiomyocytes","authors":"Kenei Matsudaira, Thanh-Vinh Nguyen, K. H. Shoji, T. Tsukagoshi, T. Takahata, I. Shimoyama","doi":"10.1109/TRANSDUCERS.2017.7993981","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993981","url":null,"abstract":"We report a force sensor array that can measure iPS cell-derived cardiomyocytes (iPS-CMs) contractility with high sensitivity and high temporal resolution. The fabricated device has six piezoresistive cantilevers whose sensitivities were higher than 9.1 × 10−5 nN−1. Using the device, we measured the contraction force of an iPS-CMs layer. As a result, contractile forces ranging from 1 to 12 nN were measured.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115949367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994487
A. Sinding, A. Parent, I. Ocak, W. Syed, A. Chatterjee, C. Welham, Shuangqin Liu, Jun Yan, S. Breit, Hyun-Kee Chang, I. Elfadel, Z. Sbiaa
We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the fingers. Comparison with standard numerical simulation shows a difference in damping coefficient of less than 1%. One application is to predict the Q factors of resonant MEMS such as gyroscopes for which a high Q-factor ensures stable oscillations and certain magnetometers for which it amplifies the sensitivity. The model is validated against experimental Q factors of a magnetometer, predicted values are within 10% of measurement from 0.01MPa to 100Pa.
{"title":"A novel squeezed-film damping model for MEMS comb structures","authors":"A. Sinding, A. Parent, I. Ocak, W. Syed, A. Chatterjee, C. Welham, Shuangqin Liu, Jun Yan, S. Breit, Hyun-Kee Chang, I. Elfadel, Z. Sbiaa","doi":"10.1109/TRANSDUCERS.2017.7994487","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994487","url":null,"abstract":"We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the fingers. Comparison with standard numerical simulation shows a difference in damping coefficient of less than 1%. One application is to predict the Q factors of resonant MEMS such as gyroscopes for which a high Q-factor ensures stable oscillations and certain magnetometers for which it amplifies the sensitivity. The model is validated against experimental Q factors of a magnetometer, predicted values are within 10% of measurement from 0.01MPa to 100Pa.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133334996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993973
B. J. Woo, George Liu, E. Cheng, Ivan Wu, Shih-Fen Huang, D. N. Yaung, A. Kalnitsky
"Smart" cars, houses, offices, cities, etc. require increasingly large variety of sensors and associated electronics. This paper describes T SMC's activities in motion, pressure, optical and bio sensors that we hope will help transform "smart everything" into an "intelligent world" we will live in.
{"title":"From sensors to intelligence","authors":"B. J. Woo, George Liu, E. Cheng, Ivan Wu, Shih-Fen Huang, D. N. Yaung, A. Kalnitsky","doi":"10.1109/TRANSDUCERS.2017.7993973","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993973","url":null,"abstract":"\"Smart\" cars, houses, offices, cities, etc. require increasingly large variety of sensors and associated electronics. This paper describes T SMC's activities in motion, pressure, optical and bio sensors that we hope will help transform \"smart everything\" into an \"intelligent world\" we will live in.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131881995","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994216
S. Bhadra, K. Waluś
This paper describes a low-cost high-quality acoustic device for measuring complex shear modulus of contact fluid. The sensor is based on thickness shear mode (TSM) piezoelectric resonator. It consists of stretched and poled polyvinylidene fluoride (PVDF) films utilizing the shear piezoelectric properties of PVDF. The resonant frequency and quality factor of a 1 mm thick sensor in air is measured to be respectively, 590 kHz and 140. Experiments demonstrate that the sensor can effectively measure the change of complex shear modulus with a sensitivity of 0.035 kHz/Pa and detection limit of 108 Pa over 50–900 Pa range.
{"title":"Polymer based thickness shear mode acoustic resonator for sensing of fluid complex shear modulus","authors":"S. Bhadra, K. Waluś","doi":"10.1109/TRANSDUCERS.2017.7994216","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994216","url":null,"abstract":"This paper describes a low-cost high-quality acoustic device for measuring complex shear modulus of contact fluid. The sensor is based on thickness shear mode (TSM) piezoelectric resonator. It consists of stretched and poled polyvinylidene fluoride (PVDF) films utilizing the shear piezoelectric properties of PVDF. The resonant frequency and quality factor of a 1 mm thick sensor in air is measured to be respectively, 590 kHz and 140. Experiments demonstrate that the sensor can effectively measure the change of complex shear modulus with a sensitivity of 0.035 kHz/Pa and detection limit of 108 Pa over 50–900 Pa range.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114388319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994090
Ozgun Civelekoglu, Ruxiu Liu, Mert Boya, Chia-Heng Chu, Ningquan Wang, A. F. Sarioglu
Membrane antigen expression analysis of a cell population is routinely needed in clinical applications and basic biology research. In this work, we introduce a microfluidic device that aims to electronically profile the surface antigen density in a given cell population as a low-cost alternative to fluorescent-activated cell sorter. By coupling magnetophoretic cell sorting with an array of code-multiplexed resistive pulse sensors, our device can electrically quantify magnetic deflection of cells in the sorting process. Experiments using human breast cancer cell line demonstrate the utility of this device in the analysis of heterogeneous cell populations.
{"title":"A microfluidic device for electronic cell surface expression profiling using magnetophoresis","authors":"Ozgun Civelekoglu, Ruxiu Liu, Mert Boya, Chia-Heng Chu, Ningquan Wang, A. F. Sarioglu","doi":"10.1109/TRANSDUCERS.2017.7994090","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994090","url":null,"abstract":"Membrane antigen expression analysis of a cell population is routinely needed in clinical applications and basic biology research. In this work, we introduce a microfluidic device that aims to electronically profile the surface antigen density in a given cell population as a low-cost alternative to fluorescent-activated cell sorter. By coupling magnetophoretic cell sorting with an array of code-multiplexed resistive pulse sensors, our device can electrically quantify magnetic deflection of cells in the sorting process. Experiments using human breast cancer cell line demonstrate the utility of this device in the analysis of heterogeneous cell populations.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125316305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994115
Tse-Ang Lee, Wei-Hao Liao, Y. Tung
This paper reports a microfluidic viscometer with an embedded pressure sensor constructed using electrofluidic circuits, which are electrical circuits constructed by ionic liquid-filled microfluidic channels. The electrofluidic circuit provides a great pressure-sensing scheme with great long-term and thermal stability. The viscosity of the tested fluidic sample is estimated by its flow resistance, which is a function of pressure drop and flow rate, and the geometry of the microfluidic channel. The viscometer can be exploited to measure viscosity of either Newtonian or non-Newtonian power-law fluid under various temperatures. The developed sensor-integrated microfluidic viscometer is made of polydimethylsiloxane (PDMS) with transparent electrofluidic circuit makes it feasible to real-time monitor samples under tests. In addition, the entire device is fully disposable to prevent cross contamination between samples, which is desired for various chemical and biomedical applications.
{"title":"Fully disposable and optically transparent microfluidic viscometer based on electrofluidic pressure sensor","authors":"Tse-Ang Lee, Wei-Hao Liao, Y. Tung","doi":"10.1109/TRANSDUCERS.2017.7994115","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994115","url":null,"abstract":"This paper reports a microfluidic viscometer with an embedded pressure sensor constructed using electrofluidic circuits, which are electrical circuits constructed by ionic liquid-filled microfluidic channels. The electrofluidic circuit provides a great pressure-sensing scheme with great long-term and thermal stability. The viscosity of the tested fluidic sample is estimated by its flow resistance, which is a function of pressure drop and flow rate, and the geometry of the microfluidic channel. The viscometer can be exploited to measure viscosity of either Newtonian or non-Newtonian power-law fluid under various temperatures. The developed sensor-integrated microfluidic viscometer is made of polydimethylsiloxane (PDMS) with transparent electrofluidic circuit makes it feasible to real-time monitor samples under tests. In addition, the entire device is fully disposable to prevent cross contamination between samples, which is desired for various chemical and biomedical applications.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122707245","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993983
Shin Nanasaki, Hiroshi Horiuchi, H. Inada, Y. Nakamura, F. Dasai, T. Iwata, K. Takahashi, J. Nabekura, K. Sawada
A needle type pH image sensor with 32×128 pixels for in-vivo application was developed. The pixel pitch of the sensor is 23 μm and the time resolution is about 20msec (50flame/sec). To insert in the brain of a mouse, the geometry was modified to needle structure with 1.76×11.46 mm and 100 μm thickness. The needle type pH image sensor was covered by parylene C with a thickness of 4 μm without pH sensing area for waterproofing. In this study, we observed dynamic change of pH immediately after insert the sensor into cortex. Interestingly, we found that cortical pH is depth-dependent. Furthermore, pH in superficial layer was decreased by pharmacological manipulation and sensory stimulation whereas pH in deep layer increased. Finally, we found that spike-like responses are caused by pharmacological and sensory stimulation.
{"title":"Development of novel pH image sensor for in-vivo apprication","authors":"Shin Nanasaki, Hiroshi Horiuchi, H. Inada, Y. Nakamura, F. Dasai, T. Iwata, K. Takahashi, J. Nabekura, K. Sawada","doi":"10.1109/TRANSDUCERS.2017.7993983","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993983","url":null,"abstract":"A needle type pH image sensor with 32×128 pixels for in-vivo application was developed. The pixel pitch of the sensor is 23 μm and the time resolution is about 20msec (50flame/sec). To insert in the brain of a mouse, the geometry was modified to needle structure with 1.76×11.46 mm and 100 μm thickness. The needle type pH image sensor was covered by parylene C with a thickness of 4 μm without pH sensing area for waterproofing. In this study, we observed dynamic change of pH immediately after insert the sensor into cortex. Interestingly, we found that cortical pH is depth-dependent. Furthermore, pH in superficial layer was decreased by pharmacological manipulation and sensory stimulation whereas pH in deep layer increased. Finally, we found that spike-like responses are caused by pharmacological and sensory stimulation.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122734468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994084
Ting-Yuan Liu, Chia-Chun Chu, Ming-Huang Li, Chun-You Liu, C. Lo, Sheng-Shian Li
In this work, a high-performance mass sensor utilizing CMOS-MEMS thermal-piezoresistive resonator (TPR) sustained by an instrumental Lock-in and PLL circuit for oscillation is demonstrated. Under a low dc power consumption of the device with only 1.75 mW, the motional transconductance (gm) of the proposed TPR reaches record-high values both in vacuum (118.4 μA/V) and air (16.96 μA/V) among all reported CMOS-MEMS TPRs [1] and even on par with single crystal silicon (SCS) TPRs [2]. The unique design of a butterfly-shaped TPR with its low thermal capacitance (Cth) actuator beams is the key to improve the transduction efficiency and sensor sensitivity. The mass resolution of the proposed thermal-piezoresistive oscillator (TPO) attains 29.8 fg, which is extracted from the measured Allan deviation of 89 ppb. To verify the mass sensing capability, a pico-liter ink jet printing setup was used to demonstrate the real time response and frequency shifts corresponding to a number of droplets printed onto the proof-masses of the TPO with a high sensitivity of 1.946 Hz/pg, well suited for future aerosol detection.
{"title":"CMOS-MEMS thermal-piezoresistive oscillators with high transduction efficiency for mass sensing applications","authors":"Ting-Yuan Liu, Chia-Chun Chu, Ming-Huang Li, Chun-You Liu, C. Lo, Sheng-Shian Li","doi":"10.1109/TRANSDUCERS.2017.7994084","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994084","url":null,"abstract":"In this work, a high-performance mass sensor utilizing CMOS-MEMS thermal-piezoresistive resonator (TPR) sustained by an instrumental Lock-in and PLL circuit for oscillation is demonstrated. Under a low dc power consumption of the device with only 1.75 mW, the motional transconductance (gm) of the proposed TPR reaches record-high values both in vacuum (118.4 μA/V) and air (16.96 μA/V) among all reported CMOS-MEMS TPRs [1] and even on par with single crystal silicon (SCS) TPRs [2]. The unique design of a butterfly-shaped TPR with its low thermal capacitance (Cth) actuator beams is the key to improve the transduction efficiency and sensor sensitivity. The mass resolution of the proposed thermal-piezoresistive oscillator (TPO) attains 29.8 fg, which is extracted from the measured Allan deviation of 89 ppb. To verify the mass sensing capability, a pico-liter ink jet printing setup was used to demonstrate the real time response and frequency shifts corresponding to a number of droplets printed onto the proof-masses of the TPO with a high sensitivity of 1.946 Hz/pg, well suited for future aerosol detection.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127816885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994171
Yong-Ha Song, S. Gong
This paper reports on the design, analysis, and demonstration of a lithium niobate (LiNbO3) wideband radio frequency (RF) microelectromechanical systems (MEMS) filter with a low insertion loss of 2.1 dB, a wide bandwidth of 4.9 %, and a spurious-free passband response at 1.17 GHz. Such high performance is achieved by arraying resonators designed with pronounced 3rd order shear horizontal (SH0) mode resonances. The 3rd order SH0 mode was selected to attain a 3× higher resonant frequency, and subsequently enable a filter center frequency beyond 1 GHz without resorting to costly fine-resolution lithography. To suppress the unwanted modes while maintaining a large electromechanical coupling (kt2), and a large fractional bandwidth, the ratio of the electrode pitch (Wp) to the total width of the resonator (W) has been optimized using finite element analyses.
{"title":"A 1.17 GHz wideband MEMS filter using higher order SH0 lithium niobate resonators","authors":"Yong-Ha Song, S. Gong","doi":"10.1109/TRANSDUCERS.2017.7994171","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994171","url":null,"abstract":"This paper reports on the design, analysis, and demonstration of a lithium niobate (LiNbO3) wideband radio frequency (RF) microelectromechanical systems (MEMS) filter with a low insertion loss of 2.1 dB, a wide bandwidth of 4.9 %, and a spurious-free passband response at 1.17 GHz. Such high performance is achieved by arraying resonators designed with pronounced 3rd order shear horizontal (SH0) mode resonances. The 3rd order SH0 mode was selected to attain a 3× higher resonant frequency, and subsequently enable a filter center frequency beyond 1 GHz without resorting to costly fine-resolution lithography. To suppress the unwanted modes while maintaining a large electromechanical coupling (kt2), and a large fractional bandwidth, the ratio of the electrode pitch (Wp) to the total width of the resonator (W) has been optimized using finite element analyses.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115909263","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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