Pub Date : 2017-07-26DOI: 10.1109/TRANSDUCERS.2017.7994444
Cheng-Hua Li, Kuan-Wei Chen, Chia-Ming Hsu, Chin-Lung Yang, K. Hsieh, Che-Hsin Lin
This paper presents a novel microchip integrated with a GHz complementary split-ring resonator (CSRR) and a microfluidic channel for non-contact detecting the ionic strength of solutions. An upper C-ring resonator induced with an underneath linear micro-strip is used to generate the complementary resonance. The induced electromagnetic resonance is sensitive to surrounding material properties including complex permittivity and thickness of materials. The insertion loss of the GHz signal increases with the increasing material permittivity nearby the CSRR. Therefore, this technique is good to measure the ionic strength of solutions without using physical electrodes to contact the solutions. Results show that the developed CSRR chip is capable of detecting NaCl solutions of the concentration ranging in 10−3∼5.0 M with a sensitivity of 1.5 dB/M at high concentration range. The CSRR chip is also capable of distinguishing solutions of same concentration but different ionic charges. The developed CSRR chip has shown its potentials for remote monitoring the solution properties.
{"title":"Non-contact detecting solution ionic strength in microfluidic channel utilizing GHz complementary split-ring resonator (CSRR)","authors":"Cheng-Hua Li, Kuan-Wei Chen, Chia-Ming Hsu, Chin-Lung Yang, K. Hsieh, Che-Hsin Lin","doi":"10.1109/TRANSDUCERS.2017.7994444","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994444","url":null,"abstract":"This paper presents a novel microchip integrated with a GHz complementary split-ring resonator (CSRR) and a microfluidic channel for non-contact detecting the ionic strength of solutions. An upper C-ring resonator induced with an underneath linear micro-strip is used to generate the complementary resonance. The induced electromagnetic resonance is sensitive to surrounding material properties including complex permittivity and thickness of materials. The insertion loss of the GHz signal increases with the increasing material permittivity nearby the CSRR. Therefore, this technique is good to measure the ionic strength of solutions without using physical electrodes to contact the solutions. Results show that the developed CSRR chip is capable of detecting NaCl solutions of the concentration ranging in 10−3∼5.0 M with a sensitivity of 1.5 dB/M at high concentration range. The CSRR chip is also capable of distinguishing solutions of same concentration but different ionic charges. The developed CSRR chip has shown its potentials for remote monitoring the solution properties.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-07-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124967603","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-26DOI: 10.1109/TRANSDUCERS.2017.7994272
M. Bora, A. Kottapalli, J. Miao, M. S. TriantaJyllou
Biological hair cell sensors are ubiquitous in nature and are widely investigated for development of artificial sensors. Robustness and flexibility are highly desirable in sensors besides efficiency and sensitivity. This work reports a novel biomimetic approach for hair cell based sensors for flow sensing applications. We mimic the sensory organ of cavefish using flexible sensing membrane and hydrogel encapsulated carbon nanotube bundle. Infusion of hydrogel into the nanotubes ensures enhanced transmission of flow stimulus. Air flow testing results demonstrate the ability of these sensors to detect steady state flows. This approach simplifies the design of flow sensors while utilizing the functions of individual components efficiently.
{"title":"Hydrogel infused carbon nanotube bundle for flow sensing applications","authors":"M. Bora, A. Kottapalli, J. Miao, M. S. TriantaJyllou","doi":"10.1109/TRANSDUCERS.2017.7994272","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994272","url":null,"abstract":"Biological hair cell sensors are ubiquitous in nature and are widely investigated for development of artificial sensors. Robustness and flexibility are highly desirable in sensors besides efficiency and sensitivity. This work reports a novel biomimetic approach for hair cell based sensors for flow sensing applications. We mimic the sensory organ of cavefish using flexible sensing membrane and hydrogel encapsulated carbon nanotube bundle. Infusion of hydrogel into the nanotubes ensures enhanced transmission of flow stimulus. Air flow testing results demonstrate the ability of these sensors to detect steady state flows. This approach simplifies the design of flow sensors while utilizing the functions of individual components efficiently.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-07-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128722406","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-26DOI: 10.1109/TRANSDUCERS.2017.7994129
Masahito Hosokawa, Yohei Nishikawa, M. Kogawa, H. Takeyama
Single-cell genomics has enabled the exploration of cellular diversity in environmental microbes. However, current genome sequencing techniques, which utilizes next-generation sequencing (NGS), typically require nanogram to microgram levels of input DNA sample. Since single bacterial cells contain only a few femtograms of DNA, we have to amplify their genomes to adequate amount for sequencing. We aimed to develop a novel system for precise and high throughput single-cell genomics, to elucidate environmental microbial diversity. In this study, we have developed droplet-based microfluidic system to produce the compartmentalized reaction vessels for single-cell genome sequencing.
{"title":"Analysis of environmental bacteria at single-cell level","authors":"Masahito Hosokawa, Yohei Nishikawa, M. Kogawa, H. Takeyama","doi":"10.1109/TRANSDUCERS.2017.7994129","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994129","url":null,"abstract":"Single-cell genomics has enabled the exploration of cellular diversity in environmental microbes. However, current genome sequencing techniques, which utilizes next-generation sequencing (NGS), typically require nanogram to microgram levels of input DNA sample. Since single bacterial cells contain only a few femtograms of DNA, we have to amplify their genomes to adequate amount for sequencing. We aimed to develop a novel system for precise and high throughput single-cell genomics, to elucidate environmental microbial diversity. In this study, we have developed droplet-based microfluidic system to produce the compartmentalized reaction vessels for single-cell genome sequencing.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-07-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117347764","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-26DOI: 10.1109/TRANSDUCERS.2017.7994368
Je-Wei Lan, I. Huang, Yu-Cheng Lin, Wen-Hui Huang, C. Yeh, Chia-Hsu Hsieh
Conventional flexural plate-wave (FPW) devices usually have high insertion loss, so we designed focus-type interdigital transducers (IDTs) that can effectively constrain launched wave energy, and adopted a focus-type silicon-grooved reflective grating structure (RGS) to reduce wave propagation loss. The results reveal that the proposed FPW devices have lower insertion loss (−38.698 dB). Then, we used the improved FPW device to develop a novel FPW-based biosensor for rapid detection of Tetrahydrocannabinol (THC) concentration in human urine by integrating. This FPW-THC biosensor has low detection limit (40 ng/mL), high sensitivity (126.67 cm2/g), and high sensing linearity (R-square=0.916).
{"title":"FPW biosensor with low insertion loss for detection of Tetrahydrocannabinol antigen","authors":"Je-Wei Lan, I. Huang, Yu-Cheng Lin, Wen-Hui Huang, C. Yeh, Chia-Hsu Hsieh","doi":"10.1109/TRANSDUCERS.2017.7994368","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994368","url":null,"abstract":"Conventional flexural plate-wave (FPW) devices usually have high insertion loss, so we designed focus-type interdigital transducers (IDTs) that can effectively constrain launched wave energy, and adopted a focus-type silicon-grooved reflective grating structure (RGS) to reduce wave propagation loss. The results reveal that the proposed FPW devices have lower insertion loss (−38.698 dB). Then, we used the improved FPW device to develop a novel FPW-based biosensor for rapid detection of Tetrahydrocannabinol (THC) concentration in human urine by integrating. This FPW-THC biosensor has low detection limit (40 ng/mL), high sensitivity (126.67 cm2/g), and high sensing linearity (R-square=0.916).","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-07-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127769188","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-26DOI: 10.1109/TRANSDUCERS.2017.7994185
K. Sano, R. Karasawa, T. Yanagitani
Large piezoelectricity in 43% Sc doped ScAlN thin film has been recently reported. The thickness extensional mode resonant frequency, where ultrasonic generation efficiency become large, is inversely proportional to the thickness of films. Bulk ScAlN thick plates are attractive for the low frequency and high power ultrasonic applications such as actuators and medical ultrasonics because ScAlN possess lower mechanical and dielectric losses compared with well-used PZT. The thick ScAlN films, however, has not been reported. The electromechanical coupling coefficient kt2 was determined to be 19% using the thickness extensional mode at 81 MHz. This frequency is extremely low compared to well-reported ScAlN thin films in the GHz ranges.
{"title":"Thick ScAlN film for high efficient ultrasonic transducer in low frequency of 81 MHz","authors":"K. Sano, R. Karasawa, T. Yanagitani","doi":"10.1109/TRANSDUCERS.2017.7994185","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994185","url":null,"abstract":"Large piezoelectricity in 43% Sc doped ScAlN thin film has been recently reported. The thickness extensional mode resonant frequency, where ultrasonic generation efficiency become large, is inversely proportional to the thickness of films. Bulk ScAlN thick plates are attractive for the low frequency and high power ultrasonic applications such as actuators and medical ultrasonics because ScAlN possess lower mechanical and dielectric losses compared with well-used PZT. The thick ScAlN films, however, has not been reported. The electromechanical coupling coefficient kt2 was determined to be 19% using the thickness extensional mode at 81 MHz. This frequency is extremely low compared to well-reported ScAlN thin films in the GHz ranges.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-07-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129183851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994235
H. Takahashi, R. Furuya, T. Yano, K. Ito, T. Takahata, I. Shimoyama
This paper reports on measurement of landing force of a fruit fly (Drosophila melanogaster) using a MEMS force plate. By measuring the landing force of fruit flies, we found that the maximum force correlated with the landing velocity, which varied from several to 80 times larger than its weight. The experimental result suggested that there was the threshold value of the maximum landing force per weight for legs, which determined that a fruit fly lands with contacting with six legs or colliding bodily to the ground according to the landing velocity. The threshold value was thought to be the maximum force capacity of legs during landing motion.
{"title":"Maximum force capacity of legs of a fruit fly during landing motion","authors":"H. Takahashi, R. Furuya, T. Yano, K. Ito, T. Takahata, I. Shimoyama","doi":"10.1109/TRANSDUCERS.2017.7994235","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994235","url":null,"abstract":"This paper reports on measurement of landing force of a fruit fly (Drosophila melanogaster) using a MEMS force plate. By measuring the landing force of fruit flies, we found that the maximum force correlated with the landing velocity, which varied from several to 80 times larger than its weight. The experimental result suggested that there was the threshold value of the maximum landing force per weight for legs, which determined that a fruit fly lands with contacting with six legs or colliding bodily to the ground according to the landing velocity. The threshold value was thought to be the maximum force capacity of legs during landing motion.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115275905","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993990
Y. Kusano, J. Segovia-Fernandez, S. Sonmezoglu, R. Amirtharajah, D. Horsley
Acoustic sensors that can detect specific sounds in everyday environments are of growing interest. Our approach to enable a low-power signal recognition system is to create a frequency-selective microphone that is tuned to match a frequency of interest. We present a frequency-selective MEMS microphone achieved by utilizing spiral-shaped acoustic resonators inspired by the spiral-shaped structures found in the human ear. The resonators were fabricated by 3D-printing and easily integrated with our test circuit board. Here, we demonstrate simulation results investigating the effect of output aperture locations, and experimental results achieving a 2.7× increase in sensitivity at the 430 Hz resonance frequency.
{"title":"Frequency selective MEMS microphone based on a bioinspired spiral-shaped acoustic resonator","authors":"Y. Kusano, J. Segovia-Fernandez, S. Sonmezoglu, R. Amirtharajah, D. Horsley","doi":"10.1109/TRANSDUCERS.2017.7993990","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993990","url":null,"abstract":"Acoustic sensors that can detect specific sounds in everyday environments are of growing interest. Our approach to enable a low-power signal recognition system is to create a frequency-selective microphone that is tuned to match a frequency of interest. We present a frequency-selective MEMS microphone achieved by utilizing spiral-shaped acoustic resonators inspired by the spiral-shaped structures found in the human ear. The resonators were fabricated by 3D-printing and easily integrated with our test circuit board. Here, we demonstrate simulation results investigating the effect of output aperture locations, and experimental results achieving a 2.7× increase in sensitivity at the 430 Hz resonance frequency.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127369366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994004
Enqi He, Liangyuan Cai, D. Guo, Yinglin Zhou, Xinxiang Zhang, Zhihong Li
This paper reports a portable, low-cost, user-friendly and ultrasensitive microcapsule array for quantitative fluorescence detection of copper ions based on functional nucleic acid strategy. Since the reagents are pre-sealed through ice printing technique and stored in frozen microcapsules before application, long-term stability of this device is guaranteed. Trace Cu2+ sample is simply injected into the thawy microcapsule by microsyringe, and after 15 minutes the fluorescence results are shown under an LED transilluminator. This assay shows great sensitivity with the minimum detection limit of 100 nM (100 fmol/μL) and specificity. Furthermore, it can be applied into other assays based on DNA fluorescence detection.
{"title":"A microcapsule array for quantitative fluorescence detection of copper ions based on functional nucleic acid","authors":"Enqi He, Liangyuan Cai, D. Guo, Yinglin Zhou, Xinxiang Zhang, Zhihong Li","doi":"10.1109/TRANSDUCERS.2017.7994004","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994004","url":null,"abstract":"This paper reports a portable, low-cost, user-friendly and ultrasensitive microcapsule array for quantitative fluorescence detection of copper ions based on functional nucleic acid strategy. Since the reagents are pre-sealed through ice printing technique and stored in frozen microcapsules before application, long-term stability of this device is guaranteed. Trace Cu2+ sample is simply injected into the thawy microcapsule by microsyringe, and after 15 minutes the fluorescence results are shown under an LED transilluminator. This assay shows great sensitivity with the minimum detection limit of 100 nM (100 fmol/μL) and specificity. Furthermore, it can be applied into other assays based on DNA fluorescence detection.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116430443","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993988
Y. Fuji, M. Hara, Y. Higashi, S. Kaji, K. Masunishi, T. Nagata, A. Yuzawa, K. Otsu, K. Okamoto, S. Baba, T. Ono, A. Hori, H. Fukuzawa
Here we report the first spintronic strain-gauge sensor (Spin-SGS) based on a magnetic tunnel junction (MTJ) with a high gauge factor in excess of 5000, which was realized by adopting a novel amorphous Fe-B-based sensing layer with high magnetostriction and low coercivity in a high magnetoresistance MgO barrier MTJ. We also demonstrate a novel "Spintronic MEMS (Spin-MEMS) microphone," in which a series of Spin-SGSs are integrated onto a bulk micromachined diaphragm. The Spin-MEMS microphone exhibits a signal-to-noise ratio (SNR) of 57 dB(A) due to the high strain sensitivity of the Spin-SGSs. Furthermore a Spin-MEMS microphone with a first resonance frequency of 74 kHz is also fabricated that exhibits an SNR of 45 dB(A). This demonstrates the feasibility of Spin-SGSs in highly sensitive MEMS sensor applications.
{"title":"An ultra-sensitive spintronic strain-gauge sensor with gauge factor of 5000 and demonstration of a Spin-MEMS Microphone","authors":"Y. Fuji, M. Hara, Y. Higashi, S. Kaji, K. Masunishi, T. Nagata, A. Yuzawa, K. Otsu, K. Okamoto, S. Baba, T. Ono, A. Hori, H. Fukuzawa","doi":"10.1109/TRANSDUCERS.2017.7993988","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993988","url":null,"abstract":"Here we report the first spintronic strain-gauge sensor (Spin-SGS) based on a magnetic tunnel junction (MTJ) with a high gauge factor in excess of 5000, which was realized by adopting a novel amorphous Fe-B-based sensing layer with high magnetostriction and low coercivity in a high magnetoresistance MgO barrier MTJ. We also demonstrate a novel \"Spintronic MEMS (Spin-MEMS) microphone,\" in which a series of Spin-SGSs are integrated onto a bulk micromachined diaphragm. The Spin-MEMS microphone exhibits a signal-to-noise ratio (SNR) of 57 dB(A) due to the high strain sensitivity of the Spin-SGSs. Furthermore a Spin-MEMS microphone with a first resonance frequency of 74 kHz is also fabricated that exhibits an SNR of 45 dB(A). This demonstrates the feasibility of Spin-SGSs in highly sensitive MEMS sensor applications.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129661828","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994166
C. Chapin, Ruth A. Miller, Ruiqi Chen, Karen M. Bowling, D. Senesky
A ring-shaped InAlN/GaN high electron mobility transistor (HEMT) is leveraged as the sensing element of a micro-pressure sensor. The microfabrication process, which uses an InAlN/GaN-on-Si substrate, enables monolithic integration with other electronic devices, as well as operation within harsh environments. The micro-pressure sensor was characterized from 0 to 14 psig at room temperature (RT) and −3°C. Current-voltage (I-V) measurements under applied pressures exhibited a decrease in percent change in current (sensitivity) at −3°C, compared to RT. At RT and −3°C (VgS = — 4 V), the maximum current sensitivity is 0.61%/psig (at VDS = 3.4 V) and 0.39%/psig (at VDS = 4 V), respectively. These results suggest that the InAlN/GaN platform can extend sensing capabilities to cold harsh environments (e.g., space and Arctic exploration).
{"title":"Low-temperature and pressure response of InAlN/GaN ring-shaped high electron mobility transistors","authors":"C. Chapin, Ruth A. Miller, Ruiqi Chen, Karen M. Bowling, D. Senesky","doi":"10.1109/TRANSDUCERS.2017.7994166","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994166","url":null,"abstract":"A ring-shaped InAlN/GaN high electron mobility transistor (HEMT) is leveraged as the sensing element of a micro-pressure sensor. The microfabrication process, which uses an InAlN/GaN-on-Si substrate, enables monolithic integration with other electronic devices, as well as operation within harsh environments. The micro-pressure sensor was characterized from 0 to 14 psig at room temperature (RT) and −3°C. Current-voltage (I-V) measurements under applied pressures exhibited a decrease in percent change in current (sensitivity) at −3°C, compared to RT. At RT and −3°C (Vg<inf>S</inf> = — 4 V), the maximum current sensitivity is 0.61%/psig (at V<inf>DS</inf> = 3.4 V) and 0.39%/psig (at V<inf>DS</inf> = 4 V), respectively. These results suggest that the InAlN/GaN platform can extend sensing capabilities to cold harsh environments (e.g., space and Arctic exploration).","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129098176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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