Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994104
H. Wen, A. Daruwalla, F. Ayazi
This paper presents, for the first time, the effective quadrature cancellation in a high-frequency pitch or roll bulk acoustic wave (BAW) gyroscope to enable perfect mode-matching for sensitivity improvement and noise reduction. The presented gyroscope has a high operation frequency of 0.5MHz and high translational stiffness for shock and vibration robustness. Quadrature cancellation, which is the biggest challenge in high-performance pitch or roll gyroscopes, is achieved by incorporating nano-gap slanted electrodes through the new HARPSS+ fabrication process, which combines anisotropic wet-etching of silicon with conventional DRIE-based HARPSS process. The HARPSS+ process enables precision capacitive transduction and tuning in all desired orientations, providing tuning coverage over typical process corners and significantly improving the yield of pitch or roll gyroscopes. Quadrature cancellation is verified on fabricated devices, allowing a perfectly mode-matched operation with a scale factor of 95.2pA/(°/s) and an open-loop bandwidth of 15Hz. The HARPS S+ process also enables simultaneous fabrication of single-chip tri-axial BAW gyroscopes: high-frequency (0.5–5MHz) gyroscopic modes with high quality factors (10,000s–100,000s) are measured on both yaw and pitch/roll BAW gyroscopes on the same wafer.
{"title":"A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation","authors":"H. Wen, A. Daruwalla, F. Ayazi","doi":"10.1109/TRANSDUCERS.2017.7994104","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994104","url":null,"abstract":"This paper presents, for the first time, the effective quadrature cancellation in a high-frequency pitch or roll bulk acoustic wave (BAW) gyroscope to enable perfect mode-matching for sensitivity improvement and noise reduction. The presented gyroscope has a high operation frequency of 0.5MHz and high translational stiffness for shock and vibration robustness. Quadrature cancellation, which is the biggest challenge in high-performance pitch or roll gyroscopes, is achieved by incorporating nano-gap slanted electrodes through the new HARPSS+ fabrication process, which combines anisotropic wet-etching of silicon with conventional DRIE-based HARPSS process. The HARPSS+ process enables precision capacitive transduction and tuning in all desired orientations, providing tuning coverage over typical process corners and significantly improving the yield of pitch or roll gyroscopes. Quadrature cancellation is verified on fabricated devices, allowing a perfectly mode-matched operation with a scale factor of 95.2pA/(°/s) and an open-loop bandwidth of 15Hz. The HARPS S+ process also enables simultaneous fabrication of single-chip tri-axial BAW gyroscopes: high-frequency (0.5–5MHz) gyroscopic modes with high quality factors (10,000s–100,000s) are measured on both yaw and pitch/roll BAW gyroscopes on the same wafer.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126092282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994169
T. Manzaneque, Ruochen Lu, Yansong Yang, S. Gong
This paper reports a lithium niobate (LiNbO3) resonant transformer with an extracted passive open-circuit voltage gain of 38. The result has been attained thanks to a high figure of merit (FoM=kt2 · Q) of 136 that results from a high electromechanical coupling (kt2) of 28% and a high Q of 480. To our knowledge, this is the highest FoM that has been demonstrated for a two-port MEMS resonator. The fabricated transformer also features a factional bandwidth of 0.21%, thus providing a large operation temperature range (±18 K) over which a high gain can be maintained. This work has shown promising results for wake-up radio applications, where transformers can be exploited for detection of faint signals with very low or zero power consumption.
{"title":"A high FoM lithium niobate resonant transformer for passive voltage amplification","authors":"T. Manzaneque, Ruochen Lu, Yansong Yang, S. Gong","doi":"10.1109/TRANSDUCERS.2017.7994169","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994169","url":null,"abstract":"This paper reports a lithium niobate (LiNbO3) resonant transformer with an extracted passive open-circuit voltage gain of 38. The result has been attained thanks to a high figure of merit (FoM=kt2 · Q) of 136 that results from a high electromechanical coupling (kt2) of 28% and a high Q of 480. To our knowledge, this is the highest FoM that has been demonstrated for a two-port MEMS resonator. The fabricated transformer also features a factional bandwidth of 0.21%, thus providing a large operation temperature range (±18 K) over which a high gain can be maintained. This work has shown promising results for wake-up radio applications, where transformers can be exploited for detection of faint signals with very low or zero power consumption.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125007452","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994119
D. D. Shin, Yunhan Chen, I. Flader, T. Kenny
This paper reports, for the first time, on-chip ovenization of an epitaxially encapsulated resonant accelerometer to improve the stability of scale factor and bias. A double-ended tuning fork (DETF) resonator that shares the anchor with the sensing resonators is used to measure the device temperature. The measured temperature is maintained at a fixed set point using an on-chip silicon heater defined in the encapsulation layer. Preliminary results show significant improvement beyond the device's intrinsic passive temperature compensation. Over the temperature range from −20°C to 80°C, the 0g bias error is reduced by a factor of three, and the scale factor stability is improved by over an order of magnitude.
{"title":"Epitaxially encapsulated resonant accelerometer with an on-chip micro-oven","authors":"D. D. Shin, Yunhan Chen, I. Flader, T. Kenny","doi":"10.1109/TRANSDUCERS.2017.7994119","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994119","url":null,"abstract":"This paper reports, for the first time, on-chip ovenization of an epitaxially encapsulated resonant accelerometer to improve the stability of scale factor and bias. A double-ended tuning fork (DETF) resonator that shares the anchor with the sensing resonators is used to measure the device temperature. The measured temperature is maintained at a fixed set point using an on-chip silicon heater defined in the encapsulation layer. Preliminary results show significant improvement beyond the device's intrinsic passive temperature compensation. Over the temperature range from −20°C to 80°C, the 0g bias error is reduced by a factor of three, and the scale factor stability is improved by over an order of magnitude.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123414490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994261
D. Alveringh, T. Schut, R. Wiegerink, W. Sparreboom, J. C. Lotters
We report on a novel resistive pressure sensor that is completely integrated with a Coriolis mass flow sensor on one chip, without the need for extra fabrication steps or different materials. Two pressure sensors are placed in-line with the Coriolis sensor without requiring any changes to the fluid path. This enables the measurement over the pressure drop of the Coriolis mass flow sensor and ΔP flow sensing. By combining this pressure drop with the output signal of the Coriolis mass flow sensor, real-time viscosity characterization is also possible. Since the pressure sensor consists of a Wheatstone bridge, no complex interfacing electronics are needed. The first characterization of the sensor shows a linear sensitivity of 4 μVbar−1 for a pressure range from 0 bar to 1 bar.
{"title":"Resistive pressure sensors integrated with a coriolis mass flow sensor","authors":"D. Alveringh, T. Schut, R. Wiegerink, W. Sparreboom, J. C. Lotters","doi":"10.1109/TRANSDUCERS.2017.7994261","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994261","url":null,"abstract":"We report on a novel resistive pressure sensor that is completely integrated with a Coriolis mass flow sensor on one chip, without the need for extra fabrication steps or different materials. Two pressure sensors are placed in-line with the Coriolis sensor without requiring any changes to the fluid path. This enables the measurement over the pressure drop of the Coriolis mass flow sensor and ΔP flow sensing. By combining this pressure drop with the output signal of the Coriolis mass flow sensor, real-time viscosity characterization is also possible. Since the pressure sensor consists of a Wheatstone bridge, no complex interfacing electronics are needed. The first characterization of the sensor shows a linear sensitivity of 4 μVbar−1 for a pressure range from 0 bar to 1 bar.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131365364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994313
Keigo Nakanishi, F. Sassa, K. Hayashi
We developed a dynamic photo-tunable gas adsorbent based on smart (photo sensitive) material and molecularly imprinted polymer (MIP) technology [1]. Gas adsorption property of the material, mixture of photochromic materials and polymethyl methacrylate (PMMA), can be controlled reversible and continuously by irradiation of with light different wavelength. As a result, gas sensor which is composed of a quartz crystal microbalance (QCM) coated with the developed adsorbent was fabricated. This sensor system can detect a certain gas molecule corresponding to the adsorbent property from gas mixture with only one sensor node.
{"title":"Photo-tunable molecular recognizing smart material for gas sensing","authors":"Keigo Nakanishi, F. Sassa, K. Hayashi","doi":"10.1109/TRANSDUCERS.2017.7994313","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994313","url":null,"abstract":"We developed a dynamic photo-tunable gas adsorbent based on smart (photo sensitive) material and molecularly imprinted polymer (MIP) technology [1]. Gas adsorption property of the material, mixture of photochromic materials and polymethyl methacrylate (PMMA), can be controlled reversible and continuously by irradiation of with light different wavelength. As a result, gas sensor which is composed of a quartz crystal microbalance (QCM) coated with the developed adsorbent was fabricated. This sensor system can detect a certain gas molecule corresponding to the adsorbent property from gas mixture with only one sensor node.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130709681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994374
G. Lemercier, F. Sekli-Belaïdi, V. Vajrala, E. Descamps, N. Sojic, S. Arbault, J. Sarry, P. Temple-Boyer, J. Launay
This work deals with the development of electrochemical transducers for the analysis of the metabolic status of mitochondria isolated from leukemic cells. It proposes the use of ring nanoelectrodes (RNE) integrated into microwell arrays for the simultaneous monitoring of the oxygen (O2) consumption and the hydrogen peroxide (H2O2) production. The sensor enabled the real-time recording of the oxygen consumption of approximately 10,000 isolated mitochondria. Solutions are now proposed to detect H2O2 production and to reduce the number of mitochondria under test, targeting the single mitochondrion analysis.
{"title":"Toward the analysis of mitochondria isolated from leukemic cells with electrochemically instrumented microwell arrays","authors":"G. Lemercier, F. Sekli-Belaïdi, V. Vajrala, E. Descamps, N. Sojic, S. Arbault, J. Sarry, P. Temple-Boyer, J. Launay","doi":"10.1109/TRANSDUCERS.2017.7994374","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994374","url":null,"abstract":"This work deals with the development of electrochemical transducers for the analysis of the metabolic status of mitochondria isolated from leukemic cells. It proposes the use of ring nanoelectrodes (RNE) integrated into microwell arrays for the simultaneous monitoring of the oxygen (O2) consumption and the hydrogen peroxide (H2O2) production. The sensor enabled the real-time recording of the oxygen consumption of approximately 10,000 isolated mitochondria. Solutions are now proposed to detect H2O2 production and to reduce the number of mitochondria under test, targeting the single mitochondrion analysis.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134319849","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993977
A. S. Herbawi, L. Kiessner, O. Paul, P. Ruther
This paper presents the design, fabrication and characterization of CMOS-based neural probes with a densely-packed electrode array. A hierarchical addressing scheme is implemented in the system which allows to integrate up to 1600 recording sites (17×17 μm2) arranged in 50 blocks of 32 electrodes each along a 100-μm-wide and 10-mm-long probe shaft. The electrodes within each block have a vertical and horizontal pitch of 20 μm resulting in an electrode-to-electrode separation of 3 μm. Single recording sites as well as combinations of 2×2 adjacent electrodes forming a virtually larger recording site of reduced impedance can be read out via 32 parallel analog output channels. The system was designed and fabricated in a 0.18 μm CMOS technology followed by an in-house post-CMOS process used to realize the electrode metallization and define the probe geometry. System functionality for electrode selection was verified by activating individual blocks along the shaft and switching recording sites to specific output channels. Impedance characterization of the electrodes revealed absolute values of 2.2±0.3 MΩ and 550±50 kΩ at 1 kHz for individual Pt electrodes and 2×2 electrode combinations, respectively.
{"title":"High-density CMOS neural probe implementing a hierarchical addressing scheme for 1600 recording sites and 32 output channels","authors":"A. S. Herbawi, L. Kiessner, O. Paul, P. Ruther","doi":"10.1109/TRANSDUCERS.2017.7993977","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993977","url":null,"abstract":"This paper presents the design, fabrication and characterization of CMOS-based neural probes with a densely-packed electrode array. A hierarchical addressing scheme is implemented in the system which allows to integrate up to 1600 recording sites (17×17 μm2) arranged in 50 blocks of 32 electrodes each along a 100-μm-wide and 10-mm-long probe shaft. The electrodes within each block have a vertical and horizontal pitch of 20 μm resulting in an electrode-to-electrode separation of 3 μm. Single recording sites as well as combinations of 2×2 adjacent electrodes forming a virtually larger recording site of reduced impedance can be read out via 32 parallel analog output channels. The system was designed and fabricated in a 0.18 μm CMOS technology followed by an in-house post-CMOS process used to realize the electrode metallization and define the probe geometry. System functionality for electrode selection was verified by activating individual blocks along the shaft and switching recording sites to specific output channels. Impedance characterization of the electrodes revealed absolute values of 2.2±0.3 MΩ and 550±50 kΩ at 1 kHz for individual Pt electrodes and 2×2 electrode combinations, respectively.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129696262","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994389
D. Huang, Deyao Zhao, Jinhui Li, Lili Du, Zewen Wei, Zicai Liang, Zhihong Li
This paper reports a minimally invasive in vivo electroporation method utilizing parylene-based flexible electrode, after a treatment of microneedle device, Dermalroller®.[1] Upon penetrating high-resistance stratum corneum, the sufficient hypodermic electric field can be established under low voltage condition. Benefiting from more uniform electric field under skin, good biocompatibility, and lower applied voltage, the transfection rate is higher and the electroporated skin is less likely to be harmed compared to the commercial device. Furthermore, the low cost and convenient operation offer vast potential for clinical applications.
{"title":"A minimally invasive in vivo electroporation method utilizing flexile electrode and microneedle roller","authors":"D. Huang, Deyao Zhao, Jinhui Li, Lili Du, Zewen Wei, Zicai Liang, Zhihong Li","doi":"10.1109/TRANSDUCERS.2017.7994389","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994389","url":null,"abstract":"This paper reports a minimally invasive in vivo electroporation method utilizing parylene-based flexible electrode, after a treatment of microneedle device, Dermalroller®.[1] Upon penetrating high-resistance stratum corneum, the sufficient hypodermic electric field can be established under low voltage condition. Benefiting from more uniform electric field under skin, good biocompatibility, and lower applied voltage, the transfection rate is higher and the electroporated skin is less likely to be harmed compared to the commercial device. Furthermore, the low cost and convenient operation offer vast potential for clinical applications.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132727700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We for the first time report on in-situ, real-time monitoring of nitrate and phosphorous uptake of plants grown in a microfluidic plant chip using integrated nutrient sensors. The plant chip contains the growth medium with known ingredients and initial concentrations for growing plants. As the roots uptake the nutrients from the medium, the embedded sensors detect concentration reductions of target nutrient ions in the medium. The nutrient reduction in the medium indicates the nutrient uptake by the plant. Therefore, real-time monitoring of nutrient use efficiency can be realized on the plant chip. Using rice plants as a model system, we have demonstrated accurate and continuous detection of variations of phosphate and nitrate concentrations in growth medium over 15 days. The integration of the miniature nutrient sensors with the microfluidic plant chips will provide a powerful tool in the area of plant science to help advance our understanding of plant responses to nutrient stress.
{"title":"In-situ, real-time monitoring of nutrient uptake on plant chip integrated with nutrient sensor","authors":"Huawei Jiang, Md. Azahar Ali, Yueyi Jiao, Bing Yang, Liang Dong","doi":"10.1109/TRANSDUCERS.2017.7994045","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994045","url":null,"abstract":"We for the first time report on in-situ, real-time monitoring of nitrate and phosphorous uptake of plants grown in a microfluidic plant chip using integrated nutrient sensors. The plant chip contains the growth medium with known ingredients and initial concentrations for growing plants. As the roots uptake the nutrients from the medium, the embedded sensors detect concentration reductions of target nutrient ions in the medium. The nutrient reduction in the medium indicates the nutrient uptake by the plant. Therefore, real-time monitoring of nutrient use efficiency can be realized on the plant chip. Using rice plants as a model system, we have demonstrated accurate and continuous detection of variations of phosphate and nitrate concentrations in growth medium over 15 days. The integration of the miniature nutrient sensors with the microfluidic plant chips will provide a powerful tool in the area of plant science to help advance our understanding of plant responses to nutrient stress.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124765422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994020
K. H. Shoji, Kenei Matsudaira, T. Tsukagoshi, Thanh-Vinh Nguyen, K. Noda, I. Shimoyama
This paper reports a sensor to directly measure the traction forces generated by migrating cells in a confined space. The sensor consists of an array of miniaturized piezoresistive cantilevers which are surrounded by a pluronic-F127 pattern. The pattern allows the self-alignment and directional migration of the cells to the cantilever array as the adhesion of cells to pluronic-F127 is poor. Our method enables the quantitative evaluation of the traction forces of cells with controlled migrating direction.
{"title":"Cantilever array for measuring traction forces of cells in a confined space","authors":"K. H. Shoji, Kenei Matsudaira, T. Tsukagoshi, Thanh-Vinh Nguyen, K. Noda, I. Shimoyama","doi":"10.1109/TRANSDUCERS.2017.7994020","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994020","url":null,"abstract":"This paper reports a sensor to directly measure the traction forces generated by migrating cells in a confined space. The sensor consists of an array of miniaturized piezoresistive cantilevers which are surrounded by a pluronic-F127 pattern. The pattern allows the self-alignment and directional migration of the cells to the cantilever array as the adhesion of cells to pluronic-F127 is poor. Our method enables the quantitative evaluation of the traction forces of cells with controlled migrating direction.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127722426","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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