Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994293
W. F. Quirós-Solano, N. Gaio, C. Silvestri, G. Pandraud, P. Sarro
Polymeric (PEDOT:PSS) strain gauges embedded in PDMS membranes fabricated using a full wafer-scale fabrication process capable of realizing reproducible small features, are reported. The devices are characterized using a customized setup, which provides mechanical stretch while dynamically reading the electrical resistance. Measurements show relative resistance changes of approximately 11% for applied pressure up to 4 kPa. The process described is tailored to fabricate pressure sensors and microelectrodes for a flexible substrate-based Organ-on-Chip platform.
{"title":"Polymeric strain gauges as pressure sensors for microfabricated organ-on-chips","authors":"W. F. Quirós-Solano, N. Gaio, C. Silvestri, G. Pandraud, P. Sarro","doi":"10.1109/TRANSDUCERS.2017.7994293","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994293","url":null,"abstract":"Polymeric (PEDOT:PSS) strain gauges embedded in PDMS membranes fabricated using a full wafer-scale fabrication process capable of realizing reproducible small features, are reported. The devices are characterized using a customized setup, which provides mechanical stretch while dynamically reading the electrical resistance. Measurements show relative resistance changes of approximately 11% for applied pressure up to 4 kPa. The process described is tailored to fabricate pressure sensors and microelectrodes for a flexible substrate-based Organ-on-Chip platform.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115691296","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994196
Yong-Hoon Yoon, Yunsu Jin, Chang-Keun Kim, Songcheol Hong, Jun‐Bo Yoon
This paper reports a unique 4-terminal MEMS relay (actuation is electrically isolated with signal passage) employing a novel one-contact design to overcome high contact resistance problem of the conventional 4-terminal MEMS relay which utilizes a typical two-contact design. The fabricated 4-terminal MEMS relay with the one-contact design demonstrated a contact resistance of 18 mΩ, which is two order-of-magnitude lower value than that of the conventional two-contact design. To the best of our knowledge, this result is the lowest value in the 4-terminal MEMS relay and comparable value with the state-of-the-art in 3-terminal MEMS relay [14]. In addition, the relay was operated up to 1.1 × 106 cycles at 1 V / 50 mA in an air and hot switching condition with negligible contact resistance variation. The lifetime is 10 times longer than that of the conventional 4-terminal MEMS relay.
本文报道了一种独特的4端MEMS继电器(驱动与信号通道电隔离)，采用新颖的单触点设计，克服了传统4端MEMS继电器采用典型的双触点设计的高接触电阻问题。采用单触点设计的4端MEMS继电器的触点电阻为18 mΩ，比传统的双触点设计低两个数量级。据我们所知，该结果是4端MEMS继电器中的最低值，与最先进的3端MEMS继电器相当[14]。此外，该继电器在1 V / 50 mA的空气和热开关条件下可运行1.1 × 106个周期，接触电阻变化可忽略不计。寿命是传统4端MEMS继电器的10倍。
{"title":"4-Terminal MEMS relay with an extremely low contact resistance employing a novel one-contact design","authors":"Yong-Hoon Yoon, Yunsu Jin, Chang-Keun Kim, Songcheol Hong, Jun‐Bo Yoon","doi":"10.1109/TRANSDUCERS.2017.7994196","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994196","url":null,"abstract":"This paper reports a unique 4-terminal MEMS relay (actuation is electrically isolated with signal passage) employing a novel one-contact design to overcome high contact resistance problem of the conventional 4-terminal MEMS relay which utilizes a typical two-contact design. The fabricated 4-terminal MEMS relay with the one-contact design demonstrated a contact resistance of 18 mΩ, which is two order-of-magnitude lower value than that of the conventional two-contact design. To the best of our knowledge, this result is the lowest value in the 4-terminal MEMS relay and comparable value with the state-of-the-art in 3-terminal MEMS relay [14]. In addition, the relay was operated up to 1.1 × 106 cycles at 1 V / 50 mA in an air and hot switching condition with negligible contact resistance variation. The lifetime is 10 times longer than that of the conventional 4-terminal MEMS relay.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124431992","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994059
Wenting Dai, Avinash Kankipati, Xiaowei Yu, B. Mahajan, H. Pan, Xian Huang
This paper presents an ultrathin stretchable device capable of soft lamination onto the skin with a releasable film for wireless measurement of biophysiological signal on skin. The device contains metallic electrodes and graphite strips, and can be attached to multiple skin locations in a conformal manner. Experimental results demonstrate that the device offers ease of skin releasing with reliable biopotential and strain measurement capability. This device when combined with other sensing mechanisms can yield a comprehensive sleep evaluation system capable of revealing influencing factors that are specific to a person, allowing highly individualized treatment plans for patients with sleep disorders.
{"title":"Epidermal wireless sensors on releasable films for biophysical signal measurement on facial areas","authors":"Wenting Dai, Avinash Kankipati, Xiaowei Yu, B. Mahajan, H. Pan, Xian Huang","doi":"10.1109/TRANSDUCERS.2017.7994059","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994059","url":null,"abstract":"This paper presents an ultrathin stretchable device capable of soft lamination onto the skin with a releasable film for wireless measurement of biophysiological signal on skin. The device contains metallic electrodes and graphite strips, and can be attached to multiple skin locations in a conformal manner. Experimental results demonstrate that the device offers ease of skin releasing with reliable biopotential and strain measurement capability. This device when combined with other sensing mechanisms can yield a comprehensive sleep evaluation system capable of revealing influencing factors that are specific to a person, allowing highly individualized treatment plans for patients with sleep disorders.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125210532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994393
M. Punjiya, Hojat Rezaei, Muhammed Arif Zeeshan, S. Sonkusale
In this paper, we present a pH sensing bandage constructed with pH sensing smart threads for chronic wound monitoring. The bandage is integrated with custom CMOS readout electronics for wireless monitoring and data transmission and is capable of continuously monitoring wound pH. Threads exhibit pH sensitivity of 54mV/pH and reach their steady state value within 2 minutes.
{"title":"A flexible pH sensing smart bandage with wireless CMOS readout for chronic wound monitoring","authors":"M. Punjiya, Hojat Rezaei, Muhammed Arif Zeeshan, S. Sonkusale","doi":"10.1109/TRANSDUCERS.2017.7994393","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994393","url":null,"abstract":"In this paper, we present a pH sensing bandage constructed with pH sensing smart threads for chronic wound monitoring. The bandage is integrated with custom CMOS readout electronics for wireless monitoring and data transmission and is capable of continuously monitoring wound pH. Threads exhibit pH sensitivity of 54mV/pH and reach their steady state value within 2 minutes.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117262978","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994022
Y. Choi, Youichi Shinozaki, Kazuhiro Takahashi, T. Iwata, S. Koizumi, K. Sawada
We proposed a cell analysis system without optical filters using a filter-free fluorescence sensor which used wavelength dependent absorption depth in a silicon substrate. Excitation light and fluorescence from fluorescently labeled cells were separated and their light intensities were measured at the same time by applying the proposed parameter. This result shows the filter-free fluorescence sensor can be used to detect cell labeled with various fluorescence reagents. The measured fluorescence of cells was good agreement with fluorescence intensity observed by conventional fluorescence microscopy.
{"title":"Cell analysis system using a filter-free fluorescence sensor","authors":"Y. Choi, Youichi Shinozaki, Kazuhiro Takahashi, T. Iwata, S. Koizumi, K. Sawada","doi":"10.1109/TRANSDUCERS.2017.7994022","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994022","url":null,"abstract":"We proposed a cell analysis system without optical filters using a filter-free fluorescence sensor which used wavelength dependent absorption depth in a silicon substrate. Excitation light and fluorescence from fluorescently labeled cells were separated and their light intensities were measured at the same time by applying the proposed parameter. This result shows the filter-free fluorescence sensor can be used to detect cell labeled with various fluorescence reagents. The measured fluorescence of cells was good agreement with fluorescence intensity observed by conventional fluorescence microscopy.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127487684","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994236
H. Zou, Jiachou Wang, Fang Chen, Haifei Bao, Xinxin Li
Single-sided fabricated monolithic tri-axis piezoresistive high-shock accelerometers are reported in this paper. A single-cantilever structure and two dual-cantilever structures are designed and employed to detect the Z-axis and X-/Y-axis high-shock accelerations, respectively. Different longitudinal dimensions of the cantilevers can be achieved and well controlled with a (111) wafer single-sided process. The remained smooth backside facilitates simple post-packaging without chip bonding. The results of the high shock test show the sensitivity of X-/Y-axis and Z-axis is 0.80–0.85 μV/g and 1.36 μV/g, respectively. The proposed single-sided process is also promising to fabricate other complex structures with different longitudinal sizes.
{"title":"Monolithic tri-axis cantilever high-shock accelerometers fabricated with a single-sided process in (111) wafers","authors":"H. Zou, Jiachou Wang, Fang Chen, Haifei Bao, Xinxin Li","doi":"10.1109/TRANSDUCERS.2017.7994236","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994236","url":null,"abstract":"Single-sided fabricated monolithic tri-axis piezoresistive high-shock accelerometers are reported in this paper. A single-cantilever structure and two dual-cantilever structures are designed and employed to detect the Z-axis and X-/Y-axis high-shock accelerations, respectively. Different longitudinal dimensions of the cantilevers can be achieved and well controlled with a (111) wafer single-sided process. The remained smooth backside facilitates simple post-packaging without chip bonding. The results of the high shock test show the sensitivity of X-/Y-axis and Z-axis is 0.80–0.85 μV/g and 1.36 μV/g, respectively. The proposed single-sided process is also promising to fabricate other complex structures with different longitudinal sizes.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125003860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994480
T. Hatsuzawa, Y. Yanagida, T. Nisisako
Three types of micro actuation mechanisms for the kinetic energy harvesting by microorganisms were fabricated by optical lithography and 3D printing. A phytoplankton and a zooplankton have been selected for the driving source because of its nature of phototaxis, which unites the swimming direction to a specific orientation of the mechanism. First, a reciprocating micro-float was driven by Artemia, which is a salt water zooplankotn, with a driving speed of 0.3mm/s. Next, a rotary micro-ratchet was also driven by Artemia larva, with a rotation speed of 0.35 rpm. Lastly, a micro-ratchet is driven by Volvox — a phytoplankton, and achieved a rotation speed of 3.5rpm. Those may provide a new micro-actuators driven by microorganisms, which may develop an alternative kinetic energy harvesting and environment monitoring technology.
{"title":"Microorganisms driven micro actuation mechanisms for the kinetic energy harvesting","authors":"T. Hatsuzawa, Y. Yanagida, T. Nisisako","doi":"10.1109/TRANSDUCERS.2017.7994480","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994480","url":null,"abstract":"Three types of micro actuation mechanisms for the kinetic energy harvesting by microorganisms were fabricated by optical lithography and 3D printing. A phytoplankton and a zooplankton have been selected for the driving source because of its nature of phototaxis, which unites the swimming direction to a specific orientation of the mechanism. First, a reciprocating micro-float was driven by Artemia, which is a salt water zooplankotn, with a driving speed of 0.3mm/s. Next, a rotary micro-ratchet was also driven by Artemia larva, with a rotation speed of 0.35 rpm. Lastly, a micro-ratchet is driven by Volvox — a phytoplankton, and achieved a rotation speed of 3.5rpm. Those may provide a new micro-actuators driven by microorganisms, which may develop an alternative kinetic energy harvesting and environment monitoring technology.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125300691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994098
C. Chuang, H. Weng, J. Cheng, M. Shaikh
In this study, we propose an ultrasonic tactile sensor for real time contact force measurements and high-resolution shape recognition to enable safe and reliable robotic grasping of objects that may vary in compliance or texture. The sensing mechanism utilizes piezoelectric transduction where an AC signal is applied to a polyvinylidene fluoride (PVDF) thin film to generate pulses of ultrasound waves that travel upwards through the sensor components to the contact interface while a receiver PVDF thin film detects the reflected waves and produces a localized voltage output that is detected by the TFT (Thin-Film Transistor) array layer. The ability of the tactile sensor to detect contact forces can be attributed to the sensor surface having a thin compliant PDMS layer with a microstructure array. When the sensor contacts objects, the microstructures act as force concentrators, resulting in the localized deformation of the PDMS layer and an observed linear response to normal static forces in the range of 1 to 6 N. The TFT array output after signal processing produces a two-dimensional grayscale image that enables not only high-resolution imaging but also contact force information for improved robotic grasping performance.
{"title":"Ultrasonic tactile sensor integrated with TFT array for contact force measurements","authors":"C. Chuang, H. Weng, J. Cheng, M. Shaikh","doi":"10.1109/TRANSDUCERS.2017.7994098","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994098","url":null,"abstract":"In this study, we propose an ultrasonic tactile sensor for real time contact force measurements and high-resolution shape recognition to enable safe and reliable robotic grasping of objects that may vary in compliance or texture. The sensing mechanism utilizes piezoelectric transduction where an AC signal is applied to a polyvinylidene fluoride (PVDF) thin film to generate pulses of ultrasound waves that travel upwards through the sensor components to the contact interface while a receiver PVDF thin film detects the reflected waves and produces a localized voltage output that is detected by the TFT (Thin-Film Transistor) array layer. The ability of the tactile sensor to detect contact forces can be attributed to the sensor surface having a thin compliant PDMS layer with a microstructure array. When the sensor contacts objects, the microstructures act as force concentrators, resulting in the localized deformation of the PDMS layer and an observed linear response to normal static forces in the range of 1 to 6 N. The TFT array output after signal processing produces a two-dimensional grayscale image that enables not only high-resolution imaging but also contact force information for improved robotic grasping performance.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125509978","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994076
C. Rawlings, M. Spieser, C. Schwemmer, T. Kulmala, Y. Cho, S. Bonanni, U. Duerig, P. Paul, A. Knoll
Thermal scanning probe lithography (t-SPL) has demonstrated unique capabilities for maskless lithography. A heated atomic force microscope tip is used to locally remove a thermally sensitive resist. This process is able to fabricate precise 3D patterns and high resolution structures without the use of charged particles, such as electrons, which have been implicated in substrate damage. Here we outline our work to improve the throughput of t-SPL via integration with a laser writer for the patterning of large features and the development of independently addressable cantilever arrays.
{"title":"High throughput lithography using thermal scanning probes","authors":"C. Rawlings, M. Spieser, C. Schwemmer, T. Kulmala, Y. Cho, S. Bonanni, U. Duerig, P. Paul, A. Knoll","doi":"10.1109/TRANSDUCERS.2017.7994076","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994076","url":null,"abstract":"Thermal scanning probe lithography (t-SPL) has demonstrated unique capabilities for maskless lithography. A heated atomic force microscope tip is used to locally remove a thermally sensitive resist. This process is able to fabricate precise 3D patterns and high resolution structures without the use of charged particles, such as electrons, which have been implicated in substrate damage. Here we outline our work to improve the throughput of t-SPL via integration with a laser writer for the patterning of large features and the development of independently addressable cantilever arrays.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125583091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-01DOI: 10.1109/TRANSDUCERS.2017.7994233
G. Luo, S. Fung, Qi Wang, Y. Kusano, Jon Lasiter, D. Kidwell, D. Horsley
This study presents a high fill-factor array of aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducers (PMUTs) fabricated on a transparent substrate. PMUTs with diameters ranging from 40 microns to 100 microns were fabricated, resulting in resonant frequencies from 3 MHz to 18 MHz in air. A high fill factor of 62% was achieved. Immersed pulse-echo experiments were conducted at 2.5 MHz.
{"title":"High fill factor piezoelectric micromachined ultrasonic transducers on transparent substrates","authors":"G. Luo, S. Fung, Qi Wang, Y. Kusano, Jon Lasiter, D. Kidwell, D. Horsley","doi":"10.1109/TRANSDUCERS.2017.7994233","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994233","url":null,"abstract":"This study presents a high fill-factor array of aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducers (PMUTs) fabricated on a transparent substrate. PMUTs with diameters ranging from 40 microns to 100 microns were fabricated, resulting in resonant frequencies from 3 MHz to 18 MHz in air. A high fill factor of 62% was achieved. Immersed pulse-echo experiments were conducted at 2.5 MHz.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115105893","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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