A. Schels, S. Edler, F. Herdl, W. Hansch, M. Bachmann, Daniela Ritter, Markus Dudeck, F. Düsberg, M. Meyer, A. Pahlke, M. Hausladen, P. Buchner, R. Schreiner
{"title":"In situ quantitative field emission imaging using a low-cost CMOS imaging sensor","authors":"A. Schels, S. Edler, F. Herdl, W. Hansch, M. Bachmann, Daniela Ritter, Markus Dudeck, F. Düsberg, M. Meyer, A. Pahlke, M. Hausladen, P. Buchner, R. Schreiner","doi":"10.1116/6.0001551","DOIUrl":"https://doi.org/10.1116/6.0001551","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"48 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90801860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes","authors":"D. Ogawa, E. Abdel-Fattah, Keiji Nakamura","doi":"10.1116/6.0001373","DOIUrl":"https://doi.org/10.1116/6.0001373","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"27 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82634695","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer","authors":"Yuki Yamada, M. Yahagi, J. Koike","doi":"10.1116/6.0001536","DOIUrl":"https://doi.org/10.1116/6.0001536","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"30 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90269311","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions","authors":"Xiaojun Sun, Chao Wu, Yachao Wang, D. Guo","doi":"10.1116/6.0001601","DOIUrl":"https://doi.org/10.1116/6.0001601","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"2 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75140807","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Brahim Ahammou, A. Abdelal, J. Landesman, C. Levallois, P. Mascher
{"title":"Strain engineering in III-V photonic components through structuration of SiNx films","authors":"Brahim Ahammou, A. Abdelal, J. Landesman, C. Levallois, P. Mascher","doi":"10.1116/6.0001352","DOIUrl":"https://doi.org/10.1116/6.0001352","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"6 33 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87683551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
D. Bizen, Fumiya Ishizaka, M. Sakakibara, Makoto Suzuki, N. Tsuno, T. Yokosuka, H. Kazumi
{"title":"Observing secondary-electron yield and charging in an insulating material by ultralow-voltage scanning electron microscope","authors":"D. Bizen, Fumiya Ishizaka, M. Sakakibara, Makoto Suzuki, N. Tsuno, T. Yokosuka, H. Kazumi","doi":"10.1116/6.0001465","DOIUrl":"https://doi.org/10.1116/6.0001465","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"1 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91079834","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Comparison of single and concentric split-ring resonator generated microplasmas","authors":"A. Walsten, Roberto A. Dextre, K. Polzin, K. Xu","doi":"10.1116/6.0001483","DOIUrl":"https://doi.org/10.1116/6.0001483","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"15 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75765269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Not long after the laser was invented, it has been marked as a candidate source of strong, high-frequency electromagnetic radiation for acceleration of particles. Indeed, while the complex particle accelerator facilities today are an astonishing culmination of decades of work contributed by generations of physicists, engineers, and a host of scientists, new trends and acceleration technologies have been recently proposed and demonstrated. One of these technologies involves the miniaturization of particle accelerators, which is achieved by replacing the radio-frequency electromagnetic fields accelerating the particles with fields in the optical frequency range, using lasers. This entails using nanophotonics structures to provide the required field distribution. Recently, individual elements towards the nanophotonics counterpart of RF accelerators have been demonstrated. Similarly, active electron transport through such a structure has been shown, which was based on the concept of alternating phase focusing. In this contribution, we discuss and augment on the recently-demonstrated principle of alternating phase focusing using optical frequencies, and provide new insights from relevant simulations and experiments. In particular, we show how to identify possible imprecisions and parasitic effects from time delay scans and discuss how the transmission of electrons through the nanometric structure depends on the temporal overlap between electron and laser pulses, and show how the incidence angle of the electron beam can affect the measured transmission of electrons through the structure.
{"title":"Experimental considerations in electron beam transport on a nanophotonic chip using alternating phase focusing","authors":"R. Shiloh, T. Chlouba, P. Hommelhoff","doi":"10.1116/6.0001598","DOIUrl":"https://doi.org/10.1116/6.0001598","url":null,"abstract":"Not long after the laser was invented, it has been marked as a candidate source of strong, high-frequency electromagnetic radiation for acceleration of particles. Indeed, while the complex particle accelerator facilities today are an astonishing culmination of decades of work contributed by generations of physicists, engineers, and a host of scientists, new trends and acceleration technologies have been recently proposed and demonstrated. One of these technologies involves the miniaturization of particle accelerators, which is achieved by replacing the radio-frequency electromagnetic fields accelerating the particles with fields in the optical frequency range, using lasers. This entails using nanophotonics structures to provide the required field distribution. Recently, individual elements towards the nanophotonics counterpart of RF accelerators have been demonstrated. Similarly, active electron transport through such a structure has been shown, which was based on the concept of alternating phase focusing. In this contribution, we discuss and augment on the recently-demonstrated principle of alternating phase focusing using optical frequencies, and provide new insights from relevant simulations and experiments. In particular, we show how to identify possible imprecisions and parasitic effects from time delay scans and discuss how the transmission of electrons through the nanometric structure depends on the temporal overlap between electron and laser pulses, and show how the incidence angle of the electron beam can affect the measured transmission of electrons through the structure.","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"112 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86587048","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}