首页 > 最新文献

Journal of Vacuum Science & Technology B最新文献

英文 中文
Mechanism and solution of sharp defects in trench double-diffused metal-oxide semiconductor polysilicon recess etching 沟槽双扩散金属氧化物半导体多晶硅凹槽刻蚀尖锐缺陷的机理及解决方法
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001395
Wenwen Zhang, Yongzhi Fang, Renrui Huang, Wenming Zhu
{"title":"Mechanism and solution of sharp defects in trench double-diffused metal-oxide semiconductor polysilicon recess etching","authors":"Wenwen Zhang, Yongzhi Fang, Renrui Huang, Wenming Zhu","doi":"10.1116/6.0001395","DOIUrl":"https://doi.org/10.1116/6.0001395","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"7 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75908117","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser 衍射光栅分束器，干涉光刻纳米图形与多纵模二极管激光器
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001377
Vineeth Sasidharan, A. Neumann, S. Brueck
{"title":"Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser","authors":"Vineeth Sasidharan, A. Neumann, S. Brueck","doi":"10.1116/6.0001377","DOIUrl":"https://doi.org/10.1116/6.0001377","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"63 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84112770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding 利用微转移模塑技术研究Norland光学胶81在纳米沟槽上的图案转移保真度
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001333
Rahman Sabahi-Kaviani, R. Luttge
We demonstrated the microtransfer molding of Norland Optical Adhesive 81 (NOA81) thin films. NOA81 nanogrooves and flat thin films were transferred from a flexible polydimethylsiloxane (PDMS) working mold. In the case of nanogrooves, the mold’s feature area of 15 × 15mm contains a variety of pattern dimensions in a set of smaller nanogroove fields of a few mm each. We demonstrated that at least six microtransfers can be performed from the same PDMS working mold. Within the restriction of our atomic force microscopy measurement technique, nanogroove height varies with 82 ± 11 nm depending on the pattern dimensions of the measured fields. Respective micrographs of two of these fields, i.e., one field designated with narrower grooves (D1000L780, case 1) and the other designated with wider grooves (D1000L230, case 2) but with the same periodicity values, demonstrate faithful transfer of the patterns. The designated pattern dimensions refer to the periodicity (D) and the ridge width (L) in the original design process of the master mold (dimensional units are nm). In addition, neither NOA81 itself (flat films) nor NOA81 nanogroove thin films with a thickness of 1.6 μm deteriorate the imaging quality in optical cell microscopy. © 2021 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). https://doi.org/10.1116/6.0001333
我们展示了NOA81薄膜的微转移成型。从柔性聚二甲基硅氧烷(PDMS)工作模上转移NOA81纳米沟槽和平面薄膜。在纳米沟槽的情况下，模具的15 × 15mm的特征区域在一组较小的纳米沟槽域中包含各种图案尺寸，每个纳米沟槽只有几毫米。我们证明了至少可以从相同的PDMS工作模中进行六次微转移。在我们的原子力显微镜测量技术的限制下，纳米沟槽的高度根据被测场的模式尺寸变化为82±11 nm。其中两个视场的各自显微照片，即一个视场指定为较窄的凹槽(D1000L780，案例1)，另一个视场指定为较宽的凹槽(D1000L230，案例2)，但具有相同的周期性值，显示了图案的忠实传递。指定的图案尺寸是指主模原设计过程中的周期(D)和脊宽(L)(尺寸单位为nm)。此外，NOA81本身(平面膜)和厚度为1.6 μm的NOA81纳米槽薄膜都不会影响光学细胞显微镜成像质量。©2021作者。除另有说明外，所有文章内容均遵循知识共享署名(CC BY)许可协议(http://creativecommons.org/licenses/by/4.0/)。https://doi.org/10.1116/6.0001333
{"title":"Investigating the pattern transfer fidelity of Norland Optical Adhesive 81\u0000 for nanogrooves by microtransfer molding","authors":"Rahman Sabahi-Kaviani, R. Luttge","doi":"10.1116/6.0001333","DOIUrl":"https://doi.org/10.1116/6.0001333","url":null,"abstract":"We demonstrated the microtransfer molding of Norland Optical Adhesive 81 (NOA81) thin films. NOA81 nanogrooves and flat thin films were transferred from a flexible polydimethylsiloxane (PDMS) working mold. In the case of nanogrooves, the mold’s feature area of 15 × 15mm contains a variety of pattern dimensions in a set of smaller nanogroove fields of a few mm each. We demonstrated that at least six microtransfers can be performed from the same PDMS working mold. Within the restriction of our atomic force microscopy measurement technique, nanogroove height varies with 82 ± 11 nm depending on the pattern dimensions of the measured fields. Respective micrographs of two of these fields, i.e., one field designated with narrower grooves (D1000L780, case 1) and the other designated with wider grooves (D1000L230, case 2) but with the same periodicity values, demonstrate faithful transfer of the patterns. The designated pattern dimensions refer to the periodicity (D) and the ridge width (L) in the original design process of the master mold (dimensional units are nm). In addition, neither NOA81 itself (flat films) nor NOA81 nanogroove thin films with a thickness of 1.6 μm deteriorate the imaging quality in optical cell microscopy. © 2021 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). https://doi.org/10.1116/6.0001333","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"94 12 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76489220","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Surface wetting on micromilled and laser-etched aluminum with ion-beam postprocessing 离子束后处理对微铣削和激光蚀刻铝表面润湿的影响
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001282
K. Misiiuk, S. Lowrey, R. Blaikie, Josselin Juras, A. Sommers, J. Leveneur
{"title":"Surface wetting on micromilled and laser-etched aluminum with ion-beam postprocessing","authors":"K. Misiiuk, S. Lowrey, R. Blaikie, Josselin Juras, A. Sommers, J. Leveneur","doi":"10.1116/6.0001282","DOIUrl":"https://doi.org/10.1116/6.0001282","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"5 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73143461","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Synthesis of NiS2 nanomaterial as wide range pressure sensor NiS2纳米材料宽量程压力传感器的合成
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001344
Zehui Peng, Jing Zhang, Zhong Ma, Shuai Lou, Yumeng Xue, Shancheng Yan
{"title":"Synthesis of NiS2 nanomaterial as wide range pressure sensor","authors":"Zehui Peng, Jing Zhang, Zhong Ma, Shuai Lou, Yumeng Xue, Shancheng Yan","doi":"10.1116/6.0001344","DOIUrl":"https://doi.org/10.1116/6.0001344","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"7 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82211060","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of Cd-free ZnCuInS/ZnS based inverted quantum dot light-emitting diode: Considering substrate temperature effect on sputtered ZnO layer 无镉ZnCuInS/ZnS基反向量子点发光二极管的制备:考虑衬底温度对溅射ZnO层的影响
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001365
M. M. R. Biswas, Md. Faruk Hossain, M. Morimoto, S. Naka, H. Okada
{"title":"Fabrication of Cd-free ZnCuInS/ZnS based inverted quantum dot light-emitting diode: Considering substrate temperature effect on sputtered ZnO layer","authors":"M. M. R. Biswas, Md. Faruk Hossain, M. Morimoto, S. Naka, H. Okada","doi":"10.1116/6.0001365","DOIUrl":"https://doi.org/10.1116/6.0001365","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"17 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75495714","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth 不影响反射镜穿透深度的法布里-珀罗腔折光法
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001501
C. Forssén, I. Silander, J. Zakrisson, M. Zelan, O. Axner
{"title":"Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth","authors":"C. Forssén, I. Silander, J. Zakrisson, M. Zelan, O. Axner","doi":"10.1116/6.0001501","DOIUrl":"https://doi.org/10.1116/6.0001501","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"675 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76863077","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats 静电纺纳米纤维垫上的光刻图案可拉伸金属微布线
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001279
Yutika Badhe, P. E. Rocha-Flores, W. Voit, David Remer, Lauren Costella, A. Joshi-Imre
{"title":"Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats","authors":"Yutika Badhe, P. E. Rocha-Flores, W. Voit, David Remer, Lauren Costella, A. Joshi-Imre","doi":"10.1116/6.0001279","DOIUrl":"https://doi.org/10.1116/6.0001279","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"12 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84257841","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
100 keV vacuum sealed field emission gun for high resolution electron microscopy 用于高分辨率电子显微镜的100kev真空密封场发射枪
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001275
M. El-Gomati, T. Wells, X. Zha, R. Sykes, C. Russo, R. Henderson, G. McMullan
{"title":"100 keV vacuum sealed field emission gun for high resolution electron microscopy","authors":"M. El-Gomati, T. Wells, X. Zha, R. Sykes, C. Russo, R. Henderson, G. McMullan","doi":"10.1116/6.0001275","DOIUrl":"https://doi.org/10.1116/6.0001275","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"63 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84673142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes TiZrV-， Pd-或Pd/TiZrV-涂层铜管热解吸和泵送性能的比较研究
IF 1.4 4区 工程技术
Journal of Vacuum Science & Technology B
Pub Date : 2021-12-01 DOI: 10.1116/6.0001475
X. Jin, T. Uchiyama, Y. Tanimoto, T. Honda
{"title":"Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes","authors":"X. Jin, T. Uchiyama, Y. Tanimoto, T. Honda","doi":"10.1116/6.0001475","DOIUrl":"https://doi.org/10.1116/6.0001475","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"25 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81858868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
首页 上一页 下一页 尾页
类型
全部 化学•材料 生命科学 医学 物理 工程技术 环境•农林 材料科学 地球科学 法学 管理学 化学 环境科学与生态学 计算机科学 教育学 经济学 农林科学 人文科学 生物学 数学 物理与天体物理 心理学 综合性期刊 其他 工业工程 理学 历史学 农学 文学 信息工程
数据库
全部 ACS Publications Elsevier ieeexplore Springer The Royal Society of Chemistry Wiley
期刊
Journal of Vacuum Science & Technology B
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
﹀
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号：481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们：info@booksci.cn
Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1