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Synthesis and Characterization of LPCVD Polysilicon and Silicon Nitride Thin Films for MEMS Applications 用于MEMS的LPCVD多晶硅和氮化硅薄膜的合成和表征
Pub Date : 2014-04-14 DOI: 10.1155/2014/954618
N. Sharma, M. Hooda, S. Sharma
Inherent residual stresses during material deposition can have profound effects on the functionality and reliability of fabricated MEMS devices. Residual stress often causes device failure due to curling, buckling, or fracture. Typically, the material properties of thin films used in surface micromachining are not very well controlled during deposition. The residual stress, for example, tends to vary significantly for different deposition conditions; experiments were carried out to study the polysilicon and silicon nitride deposited by Low Pressure Chemical Vapor Deposition (LPCVD) method at wide range of process conditions. High temperature annealing effects on stress in case polysilicon are also reported. The reduced residual stress levels can significantly improve device performance, reliability, and yield as MEMS devices become smaller.
材料沉积过程中的固有残余应力会对MEMS器件的功能和可靠性产生深远的影响。残余应力往往导致设备故障,由于卷曲,屈曲,或断裂。通常,用于表面微加工的薄膜的材料性能在沉积过程中不是很好地控制。例如,在不同的沉积条件下,残余应力趋于显著变化;对低压化学气相沉积法(LPCVD)制备的多晶硅和氮化硅进行了实验研究。还报道了高温退火对壳体多晶硅应力的影响。随着MEMS器件的小型化,减小的残余应力水平可以显著提高器件性能、可靠性和良率。
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引用次数: 37
A Reconciliation of Packed Column Permeability Data: Column Permeability as a Function of Particle Porosity 填充柱渗透率数据的调和:柱渗透率作为颗粒孔隙度的函数
Pub Date : 2014-04-01 DOI: 10.1155/2014/636507
H. Quinn
In his textbook teaching of packed bed permeability, Georges Guiochon uses mobile phase velocity as the fluid velocity term in his elaboration of the Darcy permeability equation. Although this velocity frame makes a lot of sense from a thermodynamic point of view, it is valid only with respect to permeability at a single theoretical boundary condition. In his more recent writings, however, Guiochon has departed from his long-standing mode of discussing permeability in terms of the Darcy equation and has embraced the well-known Kozeny-Blake equation. In this paper, his teaching pertaining to the constant in the Kozeny-Blake equation is examined and, as a result, a new correlation coefficient is identified and defined herein based on the velocity frame used in his teaching. This coefficient correlates pressure drop and fluid velocity as a function of particle porosity. We show that in their experimental protocols, Guiochon et al. have not adhered to a strict material balance of permeability which creates a mismatch of particle porosity and leads to erroneous conclusions regarding the value of the permeability coefficient in the Kozeny-Blake equation. By correcting the experimental data to properly reflect particle porosity we reconcile the experimental results of Guiochon and Giddings, resulting in a permeability reference chart which is presented here for the first time. This reference chart demonstrates that Guiochon’s experimental data, when properly normalized for particle porosity and other related discrepancies, corroborates the value of 267 for the constant in the Kozeny-Blake equation which was derived by Giddings in 1965.
Georges Guiochon在讲授充填层渗透率的教科书中,在阐述达西渗透率方程时,使用了流动相速度作为流体速度项。虽然从热力学的角度来看,这个速度框架很有意义,但它只对渗透率在单一理论边界条件下有效。然而,在他最近的著作中,Guiochon抛弃了他长期以来用Darcy方程来讨论渗透率的模式,转而采用了著名的Kozeny-Blake方程。本文考察了他关于Kozeny-Blake方程常数的教学,并根据他的教学中使用的速度系,确定并定义了一个新的相关系数。该系数将压降和流体速度作为颗粒孔隙度的函数联系起来。我们表明,在他们的实验方案中,Guiochon等人没有遵守严格的渗透率物质平衡,这造成了颗粒孔隙度的不匹配,并导致关于Kozeny-Blake方程中渗透率系数值的错误结论。通过对实验数据进行校正,使之更准确地反映颗粒孔隙度,并与Guiochon和Giddings的实验结果进行了协调,得到了渗透率参考图。该参考图表表明,Guiochon的实验数据,在适当地对颗粒孔隙度和其他相关差异进行归一化后,证实了Giddings在1965年推导的Kozeny-Blake方程中的常数为267。
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引用次数: 16
The Construction of the Dupin Cyclides in a Smectic A Polygonal Texture 单晶a多边形纹理中Dupin圈的构造
Pub Date : 2014-03-30 DOI: 10.1155/2014/145375
Claire Meyer, Brice Jonckheere, Coline Penaud
We report experimental observations with optical microscopy of the usual so-called polygonal texture. We have made simulations of the Dupin cyclides in one small region of the sample.
我们报告用光学显微镜对通常所谓的多边形纹理的实验观察。我们在样本的一个小区域模拟了杜宾周期。
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引用次数: 2
Effect of Sn Addition on Thermal and Optical Properties of Glass 添加锡对玻璃热光学性能的影响
Pub Date : 2014-03-27 DOI: 10.1155/2014/318262
V. Modgil, V. S. Rangra
Study of thermal and optical parameters of glass has been undertaken. Crystallization and glass transition kinetics has been investigated under nonisothermal conditions by DSC technique. Phase separation has been observed in the material and is investigated by taking the XRD of annealed bulk samples. The material possesses good glass forming ability, high value of glass transition temperature about 420 K, and glass stability. Optical band gap and other optical constants such as refractive index and extinction coefficient have been determined. The isoelectronic substitution of Ge with Sn in the glassy system reduces the optical band gap and enhances the thermal properties.
对玻璃的热、光学参数进行了研究。用DSC技术研究了非等温条件下的结晶和玻璃化转变动力学。在材料中观察到相分离现象,并对退火后的样品进行了XRD分析。该材料具有良好的玻璃化成型能力,玻璃化转变温度高达420 K,玻璃化稳定性好。测定了光学带隙和其他光学常数,如折射率和消光系数。在玻璃化体系中,Ge与Sn的等电子取代减小了光学带隙,提高了热性能。
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引用次数: 19
Synthesis and Characterization of Aluminum Doped Zinc Oxide Nanostructures via Hydrothermal Route 水热法制备掺铝氧化锌纳米结构及表征
Pub Date : 2014-03-25 DOI: 10.1155/2014/235638
A. Al-Kahlout, N. Dahoudi, I. Grobelsek, M. Jilavi, P. Oliveira
Stable crystalline aluminum doped zinc oxide (AZO) nanopowders were synthesized using hydrothermal treatment processing. Three different aluminum precursors have been used. The Al-precursors were found to affect the morphology of the obtained nanopowders. AZO nanoparticles based on zinc acetate and aluminum nitrate have been prepared with different Al/Zn molar ratios. XRD investigations revealed that all the obtained powders have single phase zincite structure with purity of about 99%. The effect of aluminum doping ratio in AZO nanoparticles (based on Al-nitrate precursor) on structure, phase composition, and particle size has been investigated. The incorporation of Al in ZnO was confirmed by UV-Vis spectroscopy revealing a blue shift due to Burstein-Moss effect.
采用水热法合成了稳定晶型铝掺杂氧化锌纳米粉体。使用了三种不同的铝前体。al前驱体影响了所得纳米粉体的形貌。以乙酸锌和硝酸铝为基材,制备了不同Al/Zn摩尔比的AZO纳米颗粒。XRD研究表明,所得粉体均为单相锌矿结构,纯度约为99%。研究了以硝酸铝为前驱体的AZO纳米颗粒中铝的掺杂比例对其结构、相组成和粒径的影响。通过紫外-可见光谱证实了Al在ZnO中的掺入,显示出由于Burstein-Moss效应而产生的蓝移。
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引用次数: 41
Structural Lightweight Concrete Production by Using Oil Palm Shell 利用油棕壳生产结构轻量化混凝土
Pub Date : 2014-03-20 DOI: 10.1155/2014/870247
Habibur Rahman Sobuz, Noor Md. Sadiqul Hasan, N. Tamanna, M. S. Islam
Conventional building materials are widely used in a developing country like Malaysia. This type of material is costly. Oil palm shell (OPS) is a type of farming solid waste in the tropical region. This paper aims to investigate strength characteristics and cost analysis of concrete produced using the gradation of OPS 0–50% on conventional coarse aggregate with the mix proportions 1 : 1.65 : 2.45, 1 : 2.5 : 3.3, and 1 : 3.3 : 4.2 by the weight of ordinary Portland cement, river sand, crushed stone, and OPS as a substitution for coarse aggregate. The corresponding w/c ratios were used: 0.45, 0.6, and 0.75, respectively, for the defined mix proportions. Test results indicate that compressive strength of concrete decreased as the percentage of the OPS increased in each mix ratio. Other properties of OPS concrete, namely, modulus of rupture, modulus of elasticity, splitting tensile strength, and density, were also determined and compared to the corresponding properties of conventional concrete. Economic analysis also indicates possible cost reduction of up to 15% due to the use of OPS as coarse aggregate. Finally, it is concluded that the use of OPS has great potential in the production of structural lightweight concrete.
传统建筑材料在马来西亚这样的发展中国家被广泛使用。这种材料很贵。油棕壳是热带地区的一种农业固体废弃物。本文以普通硅酸盐水泥、河砂、碎石、OPS替代粗集料为原料,按1:1.65:2.45、1:2.5:3.3、1:3.3:4.2的配合比,在常规粗集料上配以OPS 0-50%级配生产混凝土的强度特性及成本分析。相应的w/c比值分别为:0.45、0.6和0.75。试验结果表明,在各配合比下,混凝土抗压强度随OPS掺量的增加而降低。测定了OPS混凝土的其他性能,即断裂模量、弹性模量、劈裂抗拉强度和密度,并与常规混凝土的相应性能进行了比较。经济分析也表明,由于使用项目事务处作为粗骨料,可能减少高达15%的费用。最后得出OPS在结构轻量化混凝土生产中的应用潜力巨大的结论。
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引用次数: 27
Acid Corrosion Inhibition and Adsorption Behaviour of Ethyl Hydroxyethyl Cellulose on Mild Steel Corrosion 乙基羟乙基纤维素对低碳钢腐蚀的酸缓蚀及吸附行为
Pub Date : 2014-03-13 DOI: 10.1155/2014/101709
I. Arukalam, I. O. Madu, N. T. Ijomah, C. Ewulonu, G. N. Onyeagoro
The corrosion inhibition of mild steel in 1.0 M H2SO4 solution by ethyl hydroxyethyl cellulose has been studied in relation to the concentration of the additive using weight loss measurement, EIS, polarization, and quantum chemical calculation techniques. The results indicate that EHEC inhibited corrosion reaction in the acid medium and inhibition efficiency increased with EHEC concentration. Further increase in inhibition efficiency is observed in the presence of iodide ions, due to synergistic effect. Impedance results reveal that EHEC is adsorbed on the corroding metal surface. Adsorption followed a modified Langmuir isotherm, with very high negative values of the free energy of adsorption . The polarization data indicate that the inhibitor was of mixed type, with predominant effect on the cathodic partial reaction. The frontier molecular orbitals, HOMO (the highest occupied molecular orbital) and LUMO (the lowest unoccupied molecular orbital) as well as local reactivity of the EHEC molecule, were analyzed theoretically using the density functional theory to explain the adsorption characteristics at a molecular level. The theoretical predictions showed good agreement with experimental results.
采用失重测量、EIS、极化和量子化学计算等方法研究了乙基羟乙基纤维素在1.0 M H2SO4溶液中对低碳钢的缓蚀作用与添加剂浓度的关系。结果表明,肠出血性大肠杆菌对酸性介质中的腐蚀反应有抑制作用,且抑制效果随肠出血性大肠杆菌浓度的增加而增加。在碘离子存在时,由于协同作用,抑制效率进一步提高。阻抗结果表明,EHEC吸附在腐蚀金属表面。吸附遵循改进的Langmuir等温线,吸附自由能的负值非常高。极化数据表明,缓蚀剂为混合型,对阴极部分反应的影响较大。利用密度泛函理论,从理论上分析了EHEC分子的前沿分子轨道HOMO(最高占据分子轨道)和LUMO(最低未占据分子轨道)以及局部反应性,在分子水平上解释了EHEC分子的吸附特性。理论预测与实验结果吻合较好。
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引用次数: 32
Synthesis and Characterization of Optically Active Fractal Seed Mediated Silver Nickel Bimetallic Nanoparticles 光活性分形种子介导的银镍双金属纳米粒子的合成与表征
Pub Date : 2014-03-11 DOI: 10.1155/2014/184216
J. A. Adekoya, E. O. Dare, M. Mesubi, N. Revaprasadu
The synthesis of new seed mediated AgNi allied bimetallic nanocomposites was successfully carried out by the successive reduction of the metal ions in diethylene glycol, ethylene glycol, glycerol, and pentaerythritol solutions, with concomitant precipitation of Ag/Ni bimetal sols. The optical measurement revealed the existence of distinct band edge with surface plasmon resonance (SPR) in the region of 400–425 nm and excitonic emission with maximum peak at 382 nm which were reminiscent of cluster-in-cluster surface enriched bimetallic silver-nickel sols. The morphological characterization by transmission electron microscopy, high resolution transmission electron microscopy, and X-ray diffraction analyses complimented by surface scan using X-ray photoelectron spectroscopy strongly supported the formation of intimately alloyed face-centered silver/nickel nanoclusters.
通过在二甘醇、乙二醇、甘油和季戊四醇溶液中连续还原金属离子,并伴随Ag/Ni双金属溶胶的沉淀,成功地合成了新型种子介导的AgNi双金属纳米复合材料。光学测量表明,在400 ~ 425 nm区域存在明显的带边,表面等离子体共振(SPR),激子发射峰在382 nm处,使人联想到团簇中表面富集的双金属银镍溶胶。通过透射电子显微镜、高分辨率透射电子显微镜和x射线衍射分析以及x射线光电子能谱表面扫描进行的形态学表征有力地支持了紧密合金面心银/镍纳米团簇的形成。
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引用次数: 11
Fabrication of Thermoelectric Sensor and Cooling Devices Based on Elaborated Bismuth-Telluride Alloy Thin Films 基于精细碲化铋合金薄膜的热电传感器及冷却装置的制备
Pub Date : 2014-03-10 DOI: 10.1155/2014/430410
A. Boulouz, A. Giani, B. Sorli, L. Koutti, A. Massaq, F. Pascal-Delannoy
The principal motivation of this work is the development and realization of smart cooling and sensors devices based on the elaborated and characterized semiconducting thermoelectric thin film materials. For the first time, the details design of our sensor and the principal results are published. Fabrication and characterization of Bi/Sb/Te (BST) semiconducting thin films have been successfully investigated. The best values of Seebeck coefficient (α(T)) at room temperature for Bi2Te3, and (Bi1−xSbx)2Te3 with x = 0.77 are found to be −220 µV/K and
这项工作的主要动机是开发和实现智能冷却和传感器设备的基础上精心设计和表征的半导体热电薄膜材料。首次公开了该传感器的详细设计和主要结果。成功地研究了Bi/Sb/Te (BST)半导体薄膜的制备和表征。在室温下,Bi2Te3和(Bi1−xSbx)2Te3 (x = 0.77)的塞贝克系数(α(T))的最佳值为- 220µV/K和
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引用次数: 6
Investigating the Physical Properties of Sintered Alumina in the Presence of MgO Nanopowder 纳米氧化镁粉末存在下烧结氧化铝的物理性质研究
Pub Date : 2014-03-05 DOI: 10.1155/2014/496146
M. Dadkhah, A. Saboori, M. Jafari
Magnesium oxide nanopowder is synthesized using magnesium nitrate hexahydrate and oxalic acid as precursors via the sol-gel method. In order to investigate the effect of magnesia nanopowders on the physical properties of sintered alumina, 0.1, 0.3, and 0.5 wt% of MgO are added to alumina. The prepared specimens were sintered at 1570°C for 4 hours under an inert atmosphere. The morphology and size of nanopowders were characterized by transmission electron microscope (TEM) and scanning electron microscope (SEM). Structural analysis was investigated by means of Fourier transform infrared spectroscopy (FT-IR) and X-ray diffraction (XRD). Outcomes show that by increasing the percentage of MgO, spinel phase (MgAl2O4) has been formed in the structure of alumina. During the sintering process, spinel phase diffused through the grain boundaries and pinned the grain boundaries which led to decrease in grain sizes. So, by decreasing the grain size, the physical properties of sintered alumina have improved.
以六水硝酸镁和草酸为前驱体,采用溶胶-凝胶法制备了氧化镁纳米粉体。为了研究氧化镁纳米粉对烧结氧化铝物理性能的影响,在氧化铝中分别添加0.1、0.3和0.5 wt%的氧化镁。将制备好的试样在1570℃惰性气氛下烧结4小时。采用透射电子显微镜(TEM)和扫描电子显微镜(SEM)对纳米粉体的形貌和粒径进行了表征。采用傅里叶变换红外光谱(FT-IR)和x射线衍射(XRD)对其进行了结构分析。结果表明:随着MgO含量的增加,氧化铝结构中形成尖晶石相(MgAl2O4);在烧结过程中,尖晶石相通过晶界扩散,钉住晶界,导致晶粒尺寸减小。因此,通过减小晶粒尺寸,烧结氧化铝的物理性能得到了改善。
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引用次数: 13
期刊
Journal: Materials
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