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1980 International Electron Devices Meeting最新文献

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Impediment of the majority carrier current by grain boundary potential in Al-poly-Si Schottky barrier solar cells Al-poly-Si Schottky势垒太阳能电池中晶界电位对多数载流子电流的阻碍
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189795
E. Yang, E. Poon, C.M. Wu, H. Card, W. Hwang
A theoretical analysis is made to explain the non-exponential current-voltage characteristics observed in Al-Poly-Si (Wacker) Schottky-barrier solar cells fabricated in our laboratory. In this model, we consider an effective grain boundary in parallel with the Schottky junction. Comparison between experimental data and numerical calculation indicates that the grain boundary may be represented by a fixed interface charge, a uniformly distributed interface state density and a neutral level Eo. Diodes fabricated in regions with high-angle grain boundaries behave in a manner which conforms closely with the proposed model.
本文从理论上分析了本实验室制备的Al-Poly-Si (Wacker) schottky势垒太阳能电池的非指数电流电压特性。在这个模型中,我们考虑了与肖特基结平行的有效晶界。实验数据与数值计算结果的对比表明,晶界可以由固定的界面电荷、均匀分布的界面态密度和中性能级Eo来表示。在高角度晶界区域制造的二极管的行为方式与所提出的模型非常吻合。
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引用次数: 2
Multi-color thin film emitters 多色薄膜发射器
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189937
L. Hale, B. García, R. D. Ketchpel, T. C. Lim
There is an increasing demand for multi-color flat panel matrix displays. Recent work (1) has shown that thin film electroluminescent devices fabricated from ZnS doped with manganese, sandwiched between two dielectric layers, are capable of high brightness and long life. These devices exhibit many of the characteristics required for flat matrix panels. Using the same structure as above, a green emitting film has been developed which used TbF3as the activator. The brightness of this film is 700 fl which is three times brighter and requires significantly lower drive voltage than previously reported (2). Data will be presented indicating the results of annealing at different temperatures in order to optimize the light output. Electro-optic data indicates that the tunnel field emission model previously reported for Mn activated ZnS films is valid for the TbF3activated ZnS films. Spectroscopic data will be given on other rare earth activated films.
对多色平板矩阵显示器的需求日益增长。最近的研究(1)表明,将掺杂锰的ZnS夹在两个介电层之间制成的薄膜电致发光器件具有高亮度和长寿命的特点。这些器件具有平面矩阵面板所需的许多特性。采用与上述相同的结构,制备了以tbf3为活化剂的绿色发光膜。该薄膜的亮度为700 fl,亮度是之前报道的三倍,并且所需的驱动电压明显低于之前的报道(2)。为了优化光输出,将给出在不同温度下退火的结果数据。电光数据表明,先前报道的Mn活化ZnS膜的隧道场发射模型对tbf3活化ZnS膜是有效的。本文将给出其它稀土活化膜的光谱数据。
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引用次数: 2
An experimental study of reverse-bias second breakdown 反向偏置二次击穿的实验研究
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189818
D. Blackburn, D. Berning
Experimental results showing the influence of reverse-base current, case temperature, collector inductance, and peak collector current on the reverse-bias second breakdown (RBSB) behavior of high-voltage n+-p-n--n+power transistors are presented. The results are in qualitative agreement with the theory that avalanche injection initiates RBSB. The inductance and peak collector current results are in conflict with the theory that RBSB is initiated at a critical temperature. It is concluded that for these devices for the condition studied, RBSB is not initiated at a critical temperature. It is shown that the theory of current focusing, in conjunction with the theory of avalanche injection, does not accurately predict the RBSB conditions during device sustaining. It is proposed that other mechanisms in addition to current focusing contribute to the nonuniformity of current during transistor turnoff.
实验结果显示了反基极电流、壳体温度、集电极电感和集电极峰值电流对高压n+-p-n—n+功率晶体管反偏置二次击穿(RBSB)行为的影响。结果与雪崩注入引发RBSB的理论在定性上一致。电感和峰值集电极电流的结果与RBSB在临界温度下启动的理论相冲突。结果表明,在所研究的条件下,这些装置在临界温度下不会启动RBSB。结果表明,电流聚焦理论和雪崩注入理论不能准确地预测器件维持过程中的RBSB条件。提出除电流聚焦外,还有其他机制导致晶体管关断时电流的不均匀性。
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引用次数: 23
An MOS chip for surface impedance measurement and moisture monitoring 用于表面阻抗测量和水分监测的MOS芯片
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189928
S. Garverick, S. Senturia
Surface impedance measurements are employed in a variety of applications such as moisture sensing (1), (2). Sheet resistances as high as 1016Ohms/sq are often encountered (3), and reliable measurements are difficult to obtain. This paper reports a planar MOS device and associated measurement technique that can be used to make AC sheet resistance measurements in the frequency range 1 Hz - 10 kHz, and which yields reproducible measurements for sheet resistances as high as 1016Ohms/sq.
表面阻抗测量用于各种应用,如湿度传感(1),(2)。经常遇到高达1016欧姆/平方的薄片电阻(3),并且难以获得可靠的测量。本文报道了一种平面MOS器件和相关的测量技术,可用于测量频率范围为1hz - 10khz的交流片电阻,并可对高达1016欧姆/平方的片电阻进行可重复性测量。
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引用次数: 4
A 6000 V, 1500 A light activated thyristor 一个6000v, 1500a光激活晶闸管
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189916
N. Konishi, M. Mori, M. Naito, T. Tanaka, K. Miyata, M. Okamura
A high-voltage light activated thyristor for high-voltage direct-current (HVDC) coverters has been developed. An excellent trade-off between dv/dt capability and optical triggering sensitivity has been achieved by irradiating the light through the thin n-emitter layer of the gate thyristor. The developed 80 mm diameter thyristor has the blocking voltage of 6000 V, average on-state current 1500 A, the dv/dt capability of more than 2000 V/µs, the minimum triggering light power of less than 10 mW.
研制了一种用于高压直流(HVDC)变流器的高压光激活晶闸管。通过栅极晶闸管的薄n-发射层照射光,实现了dv/dt能力和光触发灵敏度之间的良好权衡。所研制的80 mm直径晶闸管阻断电压为6000 V,平均导通电流为1500 A, dv/dt能力大于2000 V/µs,最小触发光功率小于10 mW。
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引用次数: 2
Recessed gate junction field effect transistors 凹槽栅结场效应晶体管
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189955
B. Baliga
A recessed gate structure is described for vertical channel junction gate field effect transistors. This structure can be fabricated using a self-aligned source-gate process with the use of only two masking steps for the fabrication of the device active region. Devices fabricated with this structure exhibit blocking voltages of upto 400 volts with blocking gains ranging from 3 to 12 depending upon the groove depth. These devices have a unity power gain cut-off frequency above 500 MHz.
描述了一种用于垂直沟道结栅场效应晶体管的凹槽栅结构。该结构可以使用自对准源栅工艺制造,仅使用两个屏蔽步骤来制造器件有源区域。用这种结构制造的器件表现出高达400伏的阻塞电压,阻塞增益范围从3到12,取决于凹槽深度。这些器件的单位功率增益截止频率在500mhz以上。
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引用次数: 2
Experimental evaluation of PPM focussed electron beams PPM聚焦电子束的实验评价
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189873
G. Dohler, W. Bowen, F. Scafuri, G. Groshart
To determine allowable tolerances in TWT manufacturing, a beam tester capable of mapping the beam automatically in three dimensions within the PPM stack has been made operational. Beam position and beam ripple have been measured as a function of beam injection eccentricity, gun tilt, and anode-to-barrel spacing. The influence of cross fields in the PPM stack appears to be severe. Correlation between experimental results and the two-dimensional Hermannsfeldt computer code predictions have been made.
为了确定行波管制造中的允许公差,一种能够在PPM堆栈内自动绘制三维光束的光束测试仪已经投入使用。测量了光束位置和光束脉动作为光束喷射偏心、枪倾斜和阳极与枪管间距的函数。PPM叠加中交叉场的影响显得很严重。实验结果与二维Hermannsfeldt计算机代码预测之间存在相关性。
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引用次数: 0
Micromechanical accelerometer integrated with MOS detection circuitry 集成MOS检测电路的微机械加速度计
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189925
K. Petersen, A. Shartel
A cantilever beam accelerometer has been demonstrated in which the small cantilever sensing element is integrated with and fabricated alongside MOS detection circuitry. Fully compatible and conventional materials and processing steps are employed throughout the fabrication schedule. Accelerations of the chip normal to its surface induce motions in the cantilever beam. These motions result in capacitance variations (40 attofarads/g of acceleration) which drive the simple MOS detection circuit. Sensitivities greater than 2 mV/g of acceleration were measured, corresponding to beam motions of about 58 nm/g, in close agreement with calculations. The total area of the detector/circuit combination was about 15,000 µm2(24 mil2), at least two orders of magnitude smaller than any other solid state analog accelerometer yet reported.
在一种悬臂梁加速度计中,小悬臂梁传感元件与MOS检测电路集成并制造在一起。在整个制造计划中采用完全兼容的传统材料和加工步骤。垂直于芯片表面的加速度引起了悬臂梁的运动。这些运动导致电容变化(40阿法拉/g加速度),驱动简单的MOS检测电路。测量到的灵敏度大于2 mV/g的加速度,对应于大约58 nm/g的光束运动,与计算结果非常吻合。探测器/电路组合的总面积约为15,000µm2(24mil2),比迄今报道的任何其他固态模拟加速度计至少小两个数量级。
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引用次数: 10
Comparative status report on microwave sources 微波源比较现状报告
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189780
J. A. Saloom
At most conference sessions microwave tube workers present their results with few, if any, semiconductor workers in the audience. The semiconductor conferences likewise are not attended by microwave tube workers. The purpose of this paper is to present recent technology advances in both tubes and semiconductor based sources and amplifiers. In addition, the areas of clear advantage of each type source/amplifier will be delineated. Where the choice of tube/solid state source is not clear at this time the technology trends will be discussed. The market sizes and trends in the marketplace will also be presented.
在大多数会议上,微波管工作人员展示他们的成果时,听众中几乎没有半导体工作人员。半导体会议同样没有微波管工人参加。本文的目的是介绍在电子管和半导体为基础的光源和放大器的最新技术进展。此外,每种类型的源/放大器的明显优势领域将被划定。在管源/固态源的选择尚不明确的情况下,将讨论技术趋势。市场规模和市场趋势也将被介绍。
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引用次数: 0
Current collection mechanisms in p-n junction a-Si:H solar cells using spectral response analysis 利用光谱响应分析p-n结a-Si:H太阳能电池的电流收集机制
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189889
M. Han, W. Anderson, R. Lahri, J. Coleman, H. Wiesmann
Measurement of short circuit current of P-N junction a-Si:H solar cells shows that photogenerated carriers are collected by field assisted process from the depletion region of the N-I layer in N-I-P devices and the P-I layer in P-I-N devices. The I-layer behaves as an N-layer under the illumination. The results of spectral response analysis indicate a very strong absorption in the doped layer. Reduction of doped layer thickness from a few hundred angstroms to less than 100Å improves Jscby 20-30%.
对P-N结a-Si:H太阳能电池短路电流的测量表明,在N-I- p器件中的N-I层和P-I- n器件中的P-I层的耗尽区采用场辅助工艺收集光生载流子。在光照下,i层表现为n层。光谱响应分析结果表明,在掺杂层中有很强的吸收。将掺杂层厚度从几百埃减少到小于100Å, jscy提高了20-30%。
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1980 International Electron Devices Meeting
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