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Polarization-independent surface nanostructuring by femtosecond laser irradiation via microsphere in far field and ambient air 飞秒激光经远场和环境空气微球辐照制备非偏振表面纳米结构
Q1 OPTICS Pub Date : 2026-02-11 DOI: 10.1038/s41377-025-02091-7
Jingbo Yin, Hao Luo, Tun Cao, Minghui Hong
Ultrafast lasers have garnered significant interest in the realm of surface nanofabrication. However, their dynamic electric field distribution is influenced by the polarization direction when pursuing high machining precision, which leads to high polarization dependence of laser nanostructuring. Here, polarization-independent surface nanostructuring is realized on Sb2S3 thin films by femtosecond laser irradiation via a microsphere in the far field and ambient air. The formation of nanogrooves is ascribed to surface thermal stress during melting, re-solidification, and super-cooling under high-repetition-rate femtosecond laser irradiation. The influence of materials melting and ablation on the electric field distribution during the laser processing is analyzed. In the molten state, the distribution of the electric field remains unaffected by polarization, enabling the realization of polarization-independent nanoprocessing based on the thermal stress induced by a temperature gradient. The feature sizes of surface nanostructures can be precisely adjusted by varying laser fluence, and the minimum size down to approximately 38 nm (λ/27) is achieved. This innovative laser nanostructuring technique, operating in the far field and ambient air, holds considerable promise for advancing next-generation nanofabrication.
超快激光器在表面纳米制造领域引起了极大的兴趣。然而,在追求高加工精度的过程中,其动态电场分布受到极化方向的影响,导致激光纳米结构对极化的依赖性较高。本文利用飞秒激光在远场和环境空气中通过微球照射Sb2S3薄膜,实现了与极化无关的表面纳米结构。纳米沟槽的形成归因于高重复频率飞秒激光照射下熔化、再凝固和过冷却过程中的表面热应力。分析了激光加工过程中材料熔化和烧蚀对电场分布的影响。在熔融状态下,电场的分布不受极化的影响,从而实现了基于温度梯度引起的热应力的非极化纳米加工。表面纳米结构的特征尺寸可以通过改变激光辐照强度来精确调节,最小尺寸约为38 nm (λ/27)。这种创新的激光纳米结构技术,在远场和环境空气中运行,对推进下一代纳米制造具有相当大的希望。
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引用次数: 0
Flexible, stretchable, on-chip optical tweezers for high-throughput bioparticle manipulation 灵活的,可拉伸的,芯片上的光学镊子,用于高通量生物颗粒操作
Q1 OPTICS Pub Date : 2026-02-03 DOI: 10.1038/s41377-026-02199-4
Ziyi He, Jianyun Xiong, Yang Shi, Ting Pan, Shaobiao Chen, Xin Zhang, Yizhen Chen, Xiangxian Wang, Baojun Li, Hongbao Xin
High-throughput trapping and precision manipulation of individual pathogenic bioparticles in complex microenvironments are of great importance for in-vitro diagnostics and drug screening. Although optical tweezers have been widely used for bioparticle trapping and manipulation, the throughput, functionality, and adaptability are still limited for on-chip integrated bioparticle manipulation in complex and dynamic bioenvironments. Here, we report flexible, stretchable, on-chip optical tweezers (FSOT) based on large-scale orderly assembled microlenses for high-throughput manipulation of bioparticles in complex bio-environments and on flexible substrates, including soft bio-substrates such as skin and intestines. Large-scale (up to 1000) photonic nanojet effect of the microlenses enables high-throughput trapping, sorting, and modulation of individual bioparticles with sizes ranging from sub-100 nm to tens of micrometers, such as exosomes, bacteria and mammalian cells. Our FSOT exhibits high flexibility, which enables bioparticle trapping and sorting in complex and curved biological microenvironments. Importantly, our FSOT also exhibits high deformability and stretchability, which facilitates the control of inter-cellular distance between trapped neighboring cells, enabling real-time modulating and monitoring the interaction between single pathogenic bacteria and macrophage. Our FSOT represents a new class of on-chip optical tweezers for high-throughput bioparticle trapping and manipulation with the features of high flexibility and stretchability, and holds great promises as an integrated on-chip platform for high-throughput dynamic analysis of bioparticles, for revealing inter-cellular interactions between pathogenic bioparticles and host cells, and for precise drug screening.
在复杂微环境中高通量捕获和精确操作单个致病生物颗粒对体外诊断和药物筛选具有重要意义。尽管光镊已广泛应用于生物粒子捕获和操作,但在复杂和动态的生物环境中,片上集成生物粒子操作的吞吐量、功能和适应性仍然有限。在这里,我们报告了基于大规模有序组装微透镜的柔性,可拉伸的片上光学镊子(FSOT),用于在复杂生物环境和柔性基板(包括柔软的生物基板,如皮肤和肠道)上对生物颗粒进行高通量操作。微透镜的大规模(高达1000)光子纳米射流效应能够实现高通量捕获、分选和调制单个生物颗粒,其尺寸范围从亚100纳米到几十微米,如外泌体、细菌和哺乳动物细胞。我们的FSOT具有很高的灵活性,可以在复杂和弯曲的生物微环境中捕获和分类生物颗粒。重要的是,我们的FSOT还具有高的变形性和拉伸性,这有助于控制被困相邻细胞之间的细胞间距离,从而实时调节和监测单个致病菌与巨噬细胞之间的相互作用。我们的FSOT代表了一种用于高通量生物颗粒捕获和操作的新型片上光学镊子,具有高灵活性和可拉伸性的特点,并有望作为高通量生物颗粒动态分析的集成片上平台,用于揭示致病性生物颗粒与宿主细胞之间的细胞间相互作用,以及精确的药物筛选。
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引用次数: 0
Anti-interference diffractive deep neural networks for multi-object recognition 用于多目标识别的抗干扰衍射深度神经网络
Q1 OPTICS Pub Date : 2026-02-03 DOI: 10.1038/s41377-026-02188-7
Zhiqi Huang, Yufei Liu, Nan Zhang, Zian Zhang, Qiming Liao, Cong He, Shendong Liu, Youhai Liu, Hongtao Wang, Xingdu Qiao, Joel K. W. Yang, Yan Zhang, Lingling Huang, Yongtian Wang
Optical neural networks (ONNs) are emerging as a promising neuromorphic computing paradigm for object recognition, offering unprecedented advantages in light-speed computation, ultra-low power consumption, and inherent parallelism. However, most of ONNs are only capable of performing simple object classification tasks. These tasks are typically constrained to single-object scenarios, which limits their practical applications in multi-object recognition tasks. Here, we propose an anti-interference diffractive deep neural network (AI D2NN) that can accurately and robustly recognize targets in multi-object scenarios, including intra-class, inter-class, and dynamic interference. By employing different deep-learning-based training strategies for targets and interference, two transmissive diffractive layers form a physical network that maps the spatial information of targets all-optically into the power spectrum of the output light, while dispersing all interference as background noise. We demonstrate the effectiveness of this framework in classifying unknown handwritten digits under dynamic scenarios involving 40 categories of interference, achieving a simulated blind testing accuracy of 87.4% using terahertz waves. The presented framework can be physically scaled to operate at any electromagnetic wavelength by simply scaling the diffractive features in proportion to the wavelength range of interest. This work can greatly advance the practical application of ONNs in target recognition and pave the way for the development of real-time, high-throughput, low-power all-optical computing systems, which are expected to be applied to autonomous driving perception, precision medical diagnosis, and intelligent security monitoring.
光学神经网络(ONNs)作为一种有前途的目标识别神经形态计算范式,在光速计算、超低功耗和固有并行性方面具有前所未有的优势。然而,大多数onn只能执行简单的对象分类任务。这些任务通常局限于单目标场景,这限制了它们在多目标识别任务中的实际应用。在此,我们提出了一种抗干扰衍射深度神经网络(AI D2NN),该网络可以准确、鲁棒地识别多目标场景下的目标,包括类内、类间和动态干扰。通过对目标和干扰采用不同的基于深度学习的训练策略,两个透射衍射层形成一个物理网络,将目标的空间信息全光地映射到输出光的功率谱中,同时将所有干扰作为背景噪声分散。我们证明了该框架在涉及40类干扰的动态场景下对未知手写数字进行分类的有效性,使用太赫兹波实现了87.4%的模拟盲测准确率。所提出的框架可以通过简单地按比例缩放衍射特征来在任何电磁波长下操作。这项工作可以极大地推进ONNs在目标识别中的实际应用,为开发实时、高通量、低功耗的全光计算系统铺平道路,有望应用于自动驾驶感知、精准医疗诊断、智能安全监控等领域。
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引用次数: 0
Polarization-sensitive neuromorphic vision sensing enabled by pristine black arsenic-phosphorus 由原始黑色砷磷实现的偏振敏感神经形态视觉感应
Q1 OPTICS Pub Date : 2026-02-02 DOI: 10.1038/s41377-025-02125-0
Shi Zhang, Shuguang Zhu, Shijian Tian, Libo Zhang, Cheng Chen, Kening Xiao, Wenqi Mo, Shicong Hou, Yunduo Zhang, Yuanfeng Wen, Yiran Tan, Kaixuan Zhang, Jiayue Han, Changlong Liu, Jiale He, Weiwei Tang, Jun Wang, Guanhai Li, Kai Zhang, Lin Wang, Xiaoshuang Chen
Polarization-sensitive neuromorphic vision sensing excels in distinguishing light polarization states, offering intrinsic advantages in reducing glare and enhancing visual clarity in complex lighting environments, enabling advanced applications in autonomous driving, optical communication, and bioinspired imaging across the visible-to-infrared spectrum. Here, we present a polarization-sensitive neuromorphic phototransistor based on a high-quality, intrinsically anisotropic two-dimensional black arsenic-phosphorus nanosheet, which exhibits exceptional optoelectronic performance with a peak responsivity of 2.88 A W-1, a polarization ratio of 4.7 and a dynamic range of 40 dB within the near-infrared communication band. Through multidimensional input control, including polarization and gate voltage, the phototransistor successfully simulates synaptic behaviors analogous to human neural responses to visual stimuli, with paired-pulse facilitation values reaching 201%. Critically, the device demonstrates gate-tunable short-term plasticity, with optical persistence triggering stable long-term plasticity states that underpin memory consolidation. The neuromorphic properties enable the development of a hybrid optical-electronic neural network which achieves a classification accuracy of over 90% on the Fashion-MNIST dataset and a reconstruction accuracy of 71.38% using data from the Yale Face Database under 0º linear polarization. We demonstrate a polarization-resolved imaging approach utilizing the black arsenic-phosphorus phototransistor to reconstruct hidden targets with high fidelity through Stokes parameter extraction and degree of linear polarization mapping, revealing intricate polarization features invisible to conventional imaging systems. Our work establishes a foundational platform for high-performance neuromorphic vision systems with integrated polarization imaging, computation, and communication functionalities, addressing critical challenges in scalable brain-inspired optoelectronic technologies.
偏振敏感的神经形态视觉传感在区分光偏振状态方面表现出色,在复杂的照明环境中提供了减少眩光和提高视觉清晰度的内在优势,使自动驾驶,光通信和生物启发成像在可见到红外光谱中的先进应用成为可能。在这里,我们提出了一种极化敏感的神经形态光电晶体管,基于高质量的,本质各向异性的二维黑色砷磷纳米片,具有优异的光电性能,峰值响应率为2.88 a W-1,极化比为4.7,近红外通信波段动态范围为40 dB。通过多维输入控制,包括极化和栅极电压,光电晶体管成功地模拟了类似于人类神经对视觉刺激反应的突触行为,其对脉冲易化值达到201%。关键的是,该器件显示出门可调的短期可塑性,光持久性触发稳定的长期可塑性状态,巩固记忆。该神经形态特性使光电混合神经网络的发展成为可能,该网络在Fashion-MNIST数据集上实现了超过90%的分类精度,在0º线偏振下使用耶鲁人脸数据库的数据实现了71.38%的重建精度。我们展示了一种偏振分辨成像方法,利用黑色砷磷光电晶体管通过Stokes参数提取和线性偏振度映射来高保真地重建隐藏目标,揭示了传统成像系统不可见的复杂偏振特征。我们的工作建立了一个具有集成偏振成像、计算和通信功能的高性能神经形态视觉系统的基础平台,解决了可扩展的脑启发光电技术的关键挑战。
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引用次数: 0
Monolithic III-V membrane photonic crystal lasers on SOI using selective lateral heteroepitaxy. 基于选择性横向异质外延的单片III-V膜光子晶体激光器。
Q1 OPTICS Pub Date : 2026-01-30 DOI: 10.1038/s41377-025-02074-8
Cong Zeng,Zhaojie Ren,Zili Lei,Donghui Fu,Yingzhi Zhao,Ying Yu,Yu Han,Siyuan Yu
III-V photonic crystal (PhC) lasers with small footprints and low power consumption are potential ultra-compact and power-efficient light sources for future on-chip optical interconnects. Conventional PhC lasers fabricated by vertical epitaxy require suspended air-bridge structures and air holes etched through the gain medium, severely compromising mechanical resistance to external impacts and pumping efficiency. While bonding and regrowth can mitigate these issues, their fabrication complexity substantially increases process costs and hinders mass production. Here, we address these issues using selective lateral heteroepitaxy and demonstrate monolithically integrated III-V membrane PhC lasers on (001) silicon-on-insulator (SOI). By leveraging selective lateral heteroepitaxy and metal organic chemical vapor deposition (MOCVD), we achieved the growth of dislocation-free InP membranes on SOI wafers patterned in Si-photonics foundries. The unique III-V-on-insulator avoids the formation of air-suspended structures and significantly enhances the mechanical stability of the devices. We also precisely positioned the laterally grown InGaAs/InP quantum wells (QWs) at the center of the InP membrane to avoid etching air holes through the gain medium, thus eliminating surface recombination and drastically improving pumping efficiency. We fabricated near-infrared and telecom PhC lasers using laterally grown III-V membranes, and achieved room-temperature lasing at 910 nm and 1430 nm with low thresholds of 17.5 μJ/cm² and 5.7 μJ/cm², respectively. Our results establish a novel approach for fabricating PhC lasers and provide an elegant solution for monolithically integrated PhC lasers in next-generation optical interconnects.
III-V光子晶体(PhC)激光器占地面积小,功耗低,是未来片上光学互连的潜在超紧凑和节能光源。通过垂直外延制造的传统PhC激光器需要悬浮的气桥结构和通过增益介质蚀刻的空气孔,这严重影响了外部冲击的机械阻力和泵浦效率。虽然粘合和再生可以缓解这些问题,但它们的制造复杂性大大增加了工艺成本,阻碍了大规模生产。在这里,我们利用选择性横向异质外延解决了这些问题,并在(001)绝缘体上硅(SOI)上展示了单片集成III-V膜PhC激光器。通过利用选择性横向异质外延和金属有机化学气相沉积(MOCVD),我们在硅光子学代工厂的SOI晶圆上实现了无位错InP膜的生长。独特的iii - v -on-绝缘子避免了空气悬浮结构的形成,显著提高了设备的机械稳定性。我们还精确地将横向生长的InGaAs/InP量子阱(QWs)定位在InP膜的中心,以避免通过增益介质蚀刻空气孔,从而消除表面复合并大大提高泵浦效率。利用横向生长的III-V薄膜制备了近红外和电信PhC激光器,实现了910 nm和1430 nm的室温激光,低阈值分别为17.5 μJ/cm²和5.7 μJ/cm²。我们的研究结果建立了一种制造PhC激光器的新方法,并为下一代光互连中的单片集成PhC激光器提供了一种优雅的解决方案。
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引用次数: 0
Experimental observation of topological Dirac vortex mode in terahertz photonic crystal fibers. 太赫兹光子晶体光纤拓扑狄拉克涡旋模式的实验观察。
Q1 OPTICS Pub Date : 2026-01-30 DOI: 10.1038/s41377-026-02197-6
Hongyang Xing,Zhanqiang Xue,Perry Ping Shum,Longqing Cong
Photonic crystal fibers have significantly advanced optoelectronics, enabling a wide range of applications from communications to sensing and imaging. A long-standing challenge in these areas has been achieving pure single-polarization single-mode (SPSM) waveguiding for high-quality information transmission. Traditional approaches, however, inevitably introduce polarization dispersion and operate within a narrow bandwidth. Recent advancements in topological phases offer a promising opportunity to access previously unattainable mode properties, though experimental demonstrations remain scarce. In this work, we present the first experimental observation of a topologically protected photonic Dirac vortex mode that supports pure SPSM propagation in terahertz fibers. Utilizing terahertz scanning near-field microscopic spectroscopy, we map the temporal, spectral, and spatial characteristics of the topological mode, providing insights into its mode profile, dispersion, effective area, and numerical aperture. We demonstrate a single linearly dispersed Dirac vortex mode with a single vortex polarization and a broad 85.7% fractional bandwidth. This breakthrough fills a crucial gap in the development of SPSM fibers and introduces a comprehensive methodology for exploring mode properties, paving the way for advancements in terahertz optoelectronics, topological photonics, and specialty optical fibers.
光子晶体光纤具有显著先进的光电子技术,能够实现从通信到传感和成像的广泛应用。实现高质量信息传输的纯单极化单模(SPSM)波导是这些领域长期存在的挑战。然而,传统的方法不可避免地引入极化色散,并且在窄带宽内工作。拓扑相位的最新进展为获得以前无法获得的模式特性提供了有希望的机会,尽管实验证明仍然很少。在这项工作中,我们首次对拓扑保护光子狄拉克涡旋模式进行了实验观察,该模式支持纯SPSM在太赫兹光纤中传播。利用太赫兹扫描近场显微光谱学,我们绘制了拓扑模式的时间、光谱和空间特征,提供了对其模式轮廓、色散、有效面积和数值孔径的见解。我们证明了一个单线性分散的Dirac涡旋模式,具有单涡旋极化和85.7%的宽分数带宽。这一突破填补了SPSM光纤发展的关键空白,并引入了一种探索模式特性的综合方法,为太赫兹光电子学、拓扑光子学和特种光纤的发展铺平了道路。
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引用次数: 0
Exploring the feedback limits of quantum dot lasers for isolator-free photonic integrated circuits. 探索无隔离器光子集成电路中量子点激光器的反馈极限。
Q1 OPTICS Pub Date : 2026-01-30 DOI: 10.1038/s41377-026-02185-w
Ying Shi,Bozhang Dong,Xiangpeng Ou,Artem Prokoshin,Chen Shang,John E Bowers,Yating Wan
Reflections from on-chip components pose significant challenges to stable laser operation in photonic integrated circuits (PICs). Quantum dot (QD) lasers, with low linewidth enhancement factors and high damping rates, are promising for isolator-free integration, yet earlier feedback studies were capped near -10 dB feedback and never reached coherence collapse (CC). As a result, one could only conclude that QD lasers tolerate feedback up to -10 dB, leaving open whether they remain reliable in practical PICs where lower coupling losses allow much stronger feedback. Here, we optimized QD lasers through advanced epitaxial growth and fabrication and developed a setup that delivers feedback up to 0 dB. Under these conditions, we observed CC at -6.7 dB (21.4% feedback), extending the feedback tolerance by tens of decibels beyond quantum-well (QW) lasers. We further demonstrated penalty-free 10 Gbps operation, robust thermal stability with ±0.5 dB drift across 15-45 °C, >100 h continuous testing, and ~±0.3 dB reproducibility across devices. Modeling indicates even stronger tolerance in realistic PIC cavities, and benchmarking shows our device rivals hybrid DFB-resonator platforms while outperforming other QW, QD, and VCSEL lasers. Together, this work provides the most comprehensive assessment of QD laser feedback tolerance to date and establishes practical design rules for isolator-free PICs.
片上元件的反射对光子集成电路中激光器的稳定工作提出了重大挑战。量子点(QD)激光器具有低线宽增强因子和高阻尼率,有望实现无隔离器集成,但早期的反馈研究仅限于-10 dB反馈,从未达到相干坍缩(CC)。因此,人们只能得出这样的结论:QD激光器可以承受高达-10 dB的反馈,但它们在实际的pic中是否仍然可靠,因为更低的耦合损耗允许更强的反馈。在这里,我们通过先进的外延生长和制造优化了QD激光器,并开发了一种提供高达0 dB反馈的设置。在这些条件下,我们观察到-6.7 dB(21.4%反馈)的CC,比量子阱(QW)激光器的反馈容限延长了数十分贝。我们进一步证明了无损耗的10gbps操作,在15-45°C范围内具有±0.5 dB漂移的强大热稳定性,bbb100 h连续测试,以及~±0.3 dB的器件再现性。建模表明在实际的PIC腔中具有更强的容忍度,基准测试表明我们的器件与混合dfb谐振器平台竞争,同时优于其他QW, QD和VCSEL激光器。总之,这项工作提供了迄今为止最全面的QD激光反馈容差评估,并为无隔离器的PICs建立了实用的设计规则。
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引用次数: 0
1-MHz linewidth VCSEL enabled by monolithically integrated passive cavity for high-stability chip-scale atomic clocks. 1 mhz线宽VCSEL由单片集成无源腔实现,用于高稳定性芯片级原子钟。
Q1 OPTICS Pub Date : 2026-01-29 DOI: 10.1038/s41377-026-02192-x
Zhiting Tang,Chuanlin Li,Xuhao Zhang,Wuyang Ren,Kai Shen,Chuang Li,Qingsong Bai,Jin Li,Aobo Ren,Hao Wang,Xiaorong Luo,Hongxing Xu,Jiang Wu
Narrow-linewidth vertical-cavity surface-emitting lasers (VCSELs) are key enablers for chip-scale atomic clocks and quantum sensors, yet conventional designs suffer from short cavity lengths and excess spontaneous emission, resulting in broad linewidths and degraded frequency stability. Here, we demonstrate a monolithically integrated VCSEL operating at the cesium D1 line (894.6 nm) that achieves intrinsic linewidth compression to ~1 MHz, without requiring external optical feedback. This performance is enabled by embedding a passive cavity adjacent to the active region, which spatially redistributes the optical field into a low-loss region, extending photon lifetime while suppressing higher-order transverse and longitudinal modes. The resulting device exhibits robust single-mode operation over a wide current and temperature range, with side-mode suppression ratio (SMSR) > 35 dB, orthogonal polarization suppression ratio (OPSR) > 25 dB and a beam divergence of ~7°. Integrated into a Cesium vapor-cell atomic clock, the VCSEL supports a frequency stability of 1.89 × 10-12 τ-1/2. These results position this VCSEL architecture as a compact, scalable solution for next-generation quantum-enabled frequency references and sensing platforms.
窄线宽垂直腔面发射激光器(VCSELs)是芯片级原子钟和量子传感器的关键推动因素,但传统设计存在腔长短和自发发射过多的问题,导致线宽和频率稳定性下降。在这里,我们展示了一个单片集成的VCSEL,工作在铯D1线(894.6 nm)上,实现了~1 MHz的固有线宽压缩,而不需要外部光反馈。这种性能是通过在有源区域附近嵌入一个无源腔来实现的,该无源腔在空间上将光场重新分配到低损耗区域,在抑制高阶横向和纵向模式的同时延长光子寿命。该器件在较宽的电流和温度范围内具有良好的单模工作性能,侧模抑制比(SMSR)为bbb35 dB,正交极化抑制比(OPSR)为> 25 dB,波束发散度为~7°。集成到铯蒸汽电池原子钟,VCSEL支持1.89 × 10-12 τ-1/2的频率稳定性。这些结果使VCSEL架构成为下一代量子频率参考和传感平台的紧凑,可扩展的解决方案。
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引用次数: 0
Nonlinear nanophotonics for high-dimensional quantum states 高维量子态的非线性纳米光子学
Q1 OPTICS Pub Date : 2026-01-29 DOI: 10.1038/s41377-025-02179-0
Liat Nemirovsky-Levy, Amit Kam, Meir Lederman, Meir Orenstein, Uzi Pereg, Guy Bartal, Mordechai Segev
Quantum nanophotonics merges the precision of nanoscale light manipulation with the capabilities of quantum technologies, offering a pathway for enhanced light-matter interaction and compact realization of quantum devices. Here, we show how a recently-demonstrated nonlinear nanophotonic process can be employed to selectively create photonic high-dimensional quantum states (qudits). We utilize the nonlinearity on the surface of the nanophotonic device to dress, through the polarization of the pump field, the near-field modes carrying angular momentum and their superpositions. This idea is an important step towards experimental realizations of quantum state generation and manipulation through nonlinearity within nanophotonic platforms, and enables new capabilities for on-chip quantum devices.
量子纳米光子学将纳米级光操纵的精度与量子技术的能力相结合,为增强光-物质相互作用和量子器件的紧凑实现提供了一条途径。在这里,我们展示了最近证明的非线性纳米光子过程如何被用来选择性地创建光子高维量子态(qudits)。我们利用纳米光子器件表面的非线性特性,通过泵浦场的偏振来修饰携带角动量的近场模及其叠加态。这一想法是通过纳米光子平台内的非线性来实现量子态生成和操纵的重要一步,并为片上量子器件提供了新的功能。
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引用次数: 0
Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches. 高纵横比复合微沟槽三维形貌的傅里叶平面相干扫描干涉测量。
Q1 OPTICS Pub Date : 2026-01-29 DOI: 10.1038/s41377-026-02189-6
Yin Li,Qun Yuan,Xiao Huo,Shumin Wang,Hongtao He,Zhishan Gao
Non-destructive and accurate characterization of high aspect ratio (HAR) and composite micro-trenches is critical for advanced microfabrication but remains a major challenge. Conventional coherence scanning interferometry (CSI), while widely adopted, suffers from low signal-to-noise ratio (SNR) and limited lateral resolution when applied to HAR and composite microstructures. Here, we present Fourier ptychographic coherence scanning interferometry (FP-CSI), the first transmissive CSI modality that integrates the aperture synthesis strategy of Fourier ptychographic microscopy with the quantitative phase-resolved capability of interferometry. FP-CSI enables robust three-dimensional morphology reconstruction with enhanced SNR and improved lateral resolution, without reliance on iterative phase retrieval. We demonstrate accurate measurements of a HAR micro-trench (300 μm depth, 30:1 aspect ratio) and micro-electro-mechanical system (MEMS) devices (aspect ratios 6:1-20:1). FP-CSI achieves lateral resolution up to the incoherent diffraction limit and maintains this performance even at trench bottoms. Owing to its fidelity, robustness, and non-destructive operation, FP-CSI provides a powerful new metrology platform for next-generation semiconductor inspection, precision manufacturing, and emerging micro-optoelectronic systems.
高纵横比(HAR)和复合材料微沟槽的无损和精确表征是先进微制造的关键,但仍然是主要挑战。传统的相干扫描干涉测量(CSI)虽然被广泛采用,但在用于HAR和复合材料微结构时存在低信噪比(SNR)和横向分辨率有限的问题。在这里,我们提出了傅里叶平面相干扫描干涉术(FP-CSI),这是第一个将傅里叶平面显微术的孔径合成策略与干涉术的定量相位分辨能力相结合的透射CSI模式。FP-CSI可以实现鲁棒的三维形态重建,具有增强的信噪比和提高的横向分辨率,而不依赖于迭代相位检索。我们展示了HAR微沟(300 μm深度,30:1长宽比)和微机电系统(MEMS)器件(6:1-20:1长宽比)的精确测量。FP-CSI可以达到非相干衍射极限的横向分辨率,即使在海沟底部也能保持这种性能。由于其保真度,坚固性和非破坏性操作,FP-CSI为下一代半导体检测,精密制造和新兴的微光电系统提供了强大的新计量平台。
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Light-Science & Applications
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