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2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)最新文献

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Ultrasensitive electronic detection of DNA using Si nanograting FETs coated with PNA probes 利用包覆PNA探针的硅纳米光栅场效应管进行DNA的超灵敏电子检测
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6720911
S. Regonda, L. Spurgin, Walter Hu
We report the label-free rapid detection of single stranded DNA segments using lithographic Si nanograting (NG) FET devices coated with single stranded PNA probes. The NGFETs shows improved signal to noise ratio and similar sensitivity in comparison with the single nanowire FETs fabricated on the same chip. The limit of detection of our finFETs reaches sub-femtoMolar. The same devices do not respond significantly to high concentrations of non-complementary DNA segments.
我们报道了使用涂覆单链PNA探针的光刻Si纳米光栅(NG) FET器件对单链DNA片段的无标记快速检测。与在同一芯片上制作的单纳米线场效应管相比,ngfet具有更高的信噪比和相似的灵敏度。我们的微型场效应管的检测极限达到亚飞摩尔。同样的装置对高浓度的非互补DNA片段没有明显的反应。
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引用次数: 2
Monte Carlo simulation of high-energy electron beam lithography process 蒙特卡罗模拟高能电子束光刻过程
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6720956
Jiang-Yong Pan, Zaifa Zhou, Q. Gan, Wen-Qin Xu
The complex scattering process of the high-energy electron beams in resist is simulated by Monte Carlo method. The energy deposition distributions are presented under different exposure conditions. The three-dimensional (3-D) development profiles are obtained with the developing threshold model. It is found that, in the high energy range, higher electron beam energy, thinner resist, appropriate dose and lower substrate's atom number will cause lower proximity effect. Based on the simulations, we can explain the proximity effect and the dose control on proximity effect correction via the three-dimensional development profiles. The results will be useful to optimize the exposure conditions in electron beam lithography, and to provide more accurate data for proximity effect correction.
用蒙特卡罗方法模拟了高能电子束在抗蚀剂中的复杂散射过程。给出了不同曝光条件下的能量沉积分布。利用发育阈值模型得到了三维发育剖面图。研究发现,在高能范围内,较高的电子束能量、较薄的抗蚀剂、适当的剂量和较低的衬底原子序数会降低接近效应。在模拟的基础上,我们可以解释邻近效应和剂量控制对邻近效应校正的作用。这将有助于优化电子束光刻的曝光条件,并为接近效应校正提供更准确的数据。
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引用次数: 0
Musical tuning enhanced in-vitro micro/nano palpation for multi-scale biological entities 音乐调音增强了对多尺度生物实体的体外微/纳米触诊
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6721020
Yudong Luo, Yantao Shen, Jie Li
This paper presents our recent research efforts on creating a musical tuning enhanced in-vitro micro/nano palpation system that will help to intuitively and interactively identify (by hearing) the mechanical signature or bio-marker of multi-scale biological entities, including cells, embryos, tissues, and organs. This work takes the concept of acoustic stethoscope and applies it to intuitively understand clues between micro or nano mechanical properties change and pathology of biological entities through humans' multi-modal perception capabilities. During implementation, a developed highly sensitive micro-force sensor serves as “acoustic stethoscope” that be able to access the surface of biological entity and measures its mechanical properties and changes. These measurements are then converted into 88-key piano musical voices for hearing and identification in real time. Preliminary experimental results demonstrate the performance of the developed micro-force sensor and the musical tuning methodology, as well successful in-vitro micro palpation on the fruit vesicles. Our research is a major step towards a multi-modal, intuitive, and interactive system engineering approach for biomedical studies such as cellular pathology, tissue engineering, plant and animal physiology.
本文介绍了我们最近在创建音乐调谐增强的体外微/纳米触诊系统方面的研究成果,该系统将有助于直观地和交互式地识别(通过听觉)多尺度生物实体(包括细胞,胚胎,组织和器官)的机械特征或生物标记。本研究采用听诊器的概念,通过人的多模态感知能力,直观地理解生物实体的微纳力学特性变化与病理之间的线索。在实现过程中,开发的高灵敏度微力传感器作为“声学听诊器”,能够进入生物实体表面并测量其力学特性和变化。然后将这些测量值转换为88键钢琴音乐声音,以便实时听到和识别。初步的实验结果证明了所开发的微力传感器和音乐调谐方法的性能,并成功地对水果囊泡进行了体外微触诊。我们的研究是朝着生物医学研究(如细胞病理学、组织工程、植物和动物生理学)的多模式、直观和互动系统工程方法迈出的重要一步。
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引用次数: 1
In-situ crystallization study of amorphous Ni-P nanoparticles with high P content 高磷非晶Ni-P纳米颗粒原位结晶研究
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6720928
Y. Tan, D. Sun, B. Yang, Y. Gong, S. Yan, R. Du, H. L. Guo, W. Chen, X. Xing, G. Mo, Z. J. Chen, Q. Cai, Z. H. Wu, H. Y. Yu
The crystallization behavior of amorphous Ni-P nanoparticles produced by liquid pulsed-discharge was studied by using in situ high temperature XRD at beamline 4B9A of Beijing Synchrotron Radiation Facility. Transmission electron microscope (TEM) was used to observe the morphology and Inductively Coupled Plasma-Atomic Emission Spectrometry (ICP-AES) was used to analyze the chemical composition of the as-prepared Ni-P nanoparticles. TEM results show that the average size of the as-prepared nanoparticles is about 13.5 nm. ICP-AES identifies the Ni-P nanoparticles contain 13.16 wt. % (21.85 at. %) of P and 86.84 wt. % (78.15% at. %) of Ni. Eight XRD patterns were, respectively, collected at 300, 373, 473, 573, 673, 773, 873 and 973K under low-vacuum condition (0.1 Pa). XRD results show that the as-prepared Ni-P nanoparticles are amorphous, no peaks of crystalline phases can be observed until 573K. Afterwards, the crystallization of the amorphous phase undergoes the formation and decomposition of some metastable phases. Finally, the obtained stable phases are the bct Ni3P and fcc Ni cryatalline phases. Both are randomly distributed in the sample. The crystallization mechanisms of the as-prepared amorphous Ni-P nanoparticles has also been discussed at the end of this paper.
在北京同步辐射装置4B9A束线上,利用原位高温XRD研究了液体脉冲放电制备的非晶态Ni-P纳米颗粒的结晶行为。采用透射电镜(TEM)观察形貌,电感耦合等离子体原子发射光谱(ICP-AES)分析制备的Ni-P纳米颗粒的化学成分。TEM结果表明,制备的纳米颗粒的平均尺寸约为13.5 nm。ICP-AES鉴定出Ni-P纳米颗粒含有13.16 wt. % (21.85 at。%)和86.84 %(78.15%)。%)的Ni。在低真空(0.1 Pa)条件下,分别在300、373、473、573、673、773、873、973K处采集了8种XRD图谱。XRD结果表明,制备的Ni-P纳米颗粒为非晶态,在573K温度下均未出现晶相峰。之后,非晶相的结晶经历了一些亚稳相的形成和分解。最后,得到的稳定相是bct Ni3P和fcc Ni结晶相。两者都是随机分布在样本中的。本文最后还对制备的非晶Ni-P纳米粒子的结晶机理进行了讨论。
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引用次数: 1
Comparison between front- and back-gating of Silicon Nanoribbons in real-time sensing experiments 实时传感实验中硅纳米带前后门控的比较
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6721024
E. Accastelli, G. Cappi, J. Buckley, T. Ernst, C. Guiducci
Field-effect transistors (FETs) with open gate structures such as Silicon Nanoribbons (SiNRs) are promising candidates to become general platforms for ultrasensitive, label-free and real-time detection of biochemical interactions on surface. This work proposes and demonstrates the viability of a solution for integrating Ag/AgCl reference electrodes with the microfluidics. A comparison between different polarization schemes is carried out with an analysis of the respective advantages and disadvantages.
具有开栅结构的场效应晶体管(fet),如硅纳米带(SiNRs),有望成为超灵敏、无标记和实时检测表面生化相互作用的通用平台。这项工作提出并证明了将Ag/AgCl参考电极与微流体集成的解决方案的可行性。对不同的极化方案进行了比较,分析了各自的优缺点。
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引用次数: 5
Planar technology integration of monocrystalline Silicon-membranes using nanoholes 单晶硅膜纳米孔平面集成技术研究
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6720903
S. Ebschke, R. Poloczek, K. Kallis, H. Fiedler
An experimental research on a novelty method of creating monocrystalline Silicon-membranes by using nanoholes is shown in this paper. A Silicon-on-insulator (SOI) wafer is used as a substrate, whose buried oxide (BOX) demonstrates the sacrificial layer for creating the cavities and its top-silicon layer is used as the monocrystalline membrane. This new method uses electron-beam lithography to create oblong nanoholes (120nm*2μm). These holes provide the possibility of sealing the cavity via thermal annealing. This creates a cavity with a monocrystalline membrane. The membrane shows the advantage of a full CMOS integration. Furthermore, this is made only by using planar technology processes which are widely spread and an extra bonding process for sealing the membrane is not needed. Different tasks could also be applicable with this membrane (e.g. 3-D integration).
本文研究了一种利用纳米孔制备单晶硅膜的新方法。使用绝缘体上硅(SOI)晶圆作为衬底,其埋藏氧化物(BOX)表示产生空腔的牺牲层,其顶部硅层用作单晶膜。这种新方法利用电子束光刻技术制造出长方形的纳米孔(120nm*2μm)。这些孔提供了通过热退火密封腔体的可能性。这就形成了一个带有单晶膜的空腔。该薄膜显示了完全CMOS集成的优势。此外,这仅通过使用广泛应用的平面技术工艺来实现,并且不需要额外的粘合过程来密封膜。不同的任务也可以使用这种膜(例如3-D集成)。
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引用次数: 2
Moisture effects on nano-mechanical properties of epoxy-based materials 水分对环氧基材料纳米力学性能的影响
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6721061
Denvid Lau
The nanoindentation of epoxy-based material has been conducted successfully using SU-8 as an example. In such a small scale characterization, it is noticed that moisture has a little effect on the change of bulk material properties in terms of Young's modulus and hardness, probably due to hydrolysis. However, there is an observable change of SU-8 under the optical microscope when the specimens were moisture conditioned. Even though moisture has only a minimal effect on the bulk material properties, it results in a detrimental effect on the interface fracture energy eventually leading to a premature failure of the bonded system, causing a durability problem, which has been reported in various research studies. It is envisioned that the overall deterioration of SU-8 is originated from its interface when bonded with other materials.
以SU-8为例,成功地进行了环氧基材料的纳米压痕制备。在这样一个小尺度的表征中,我们注意到水分对块体材料的杨氏模量和硬度的变化影响很小,这可能是由于水解的原因。然而,在光学显微镜下,SU-8在水分条件下有明显的变化。尽管水分对大块材料性能的影响很小,但它会对界面断裂能产生不利影响,最终导致粘结体系过早破坏,从而导致耐久性问题,这在各种研究中都有报道。可以设想,SU-8的整体劣化源于它与其他材料结合时的界面。
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引用次数: 2
The shortest path method for quantum Boolean circuits construction 构造量子布尔电路的最短路径方法
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6721055
Chin-Yung Lu, Shiou-An Wang
At present, only the exhaustive synthesis algorithm can find all the optimal quantum Boolean circuits. It is more difficult to synthesize a more complicated quantum Boolean circuit. In this paper, we use the method of circuit bipartition to partition a more complicated quantum Boolean circuit into simpler circuits in order to reduce the difficulty of the more complicated quantum Boolean circuit synthesis. And find these partitioned quantum Boolean circuits by searched the database of quantum Boolean circuits according the method of the shortest path in the circuit. Finally, combine these partitioned circuits to become the more complicated quantum Boolean circuit. This approach can significantly reduce the synthesis complexity of a more complicated quantum Boolean circuit. We can see that the results are very close to the optimal circuits according to the experimental results of all the 3-variable reversible functions.
目前,只有穷举综合算法才能找到所有最优的量子布尔电路。较复杂的量子布尔电路的合成难度较大。为了降低较复杂的量子布尔电路的合成难度,本文采用电路双分拆的方法将较复杂的量子布尔电路划分为较简单的电路。并根据电路中最短路径的方法,在量子布尔电路数据库中搜索这些划分的量子布尔电路。最后,将这些分割电路组合成更复杂的量子布尔电路。这种方法可以显著降低较复杂的量子布尔电路的合成复杂度。从所有3变量可逆函数的实验结果可以看出,结果非常接近最优电路。
{"title":"The shortest path method for quantum Boolean circuits construction","authors":"Chin-Yung Lu, Shiou-An Wang","doi":"10.1109/NANO.2013.6721055","DOIUrl":"https://doi.org/10.1109/NANO.2013.6721055","url":null,"abstract":"At present, only the exhaustive synthesis algorithm can find all the optimal quantum Boolean circuits. It is more difficult to synthesize a more complicated quantum Boolean circuit. In this paper, we use the method of circuit bipartition to partition a more complicated quantum Boolean circuit into simpler circuits in order to reduce the difficulty of the more complicated quantum Boolean circuit synthesis. And find these partitioned quantum Boolean circuits by searched the database of quantum Boolean circuits according the method of the shortest path in the circuit. Finally, combine these partitioned circuits to become the more complicated quantum Boolean circuit. This approach can significantly reduce the synthesis complexity of a more complicated quantum Boolean circuit. We can see that the results are very close to the optimal circuits according to the experimental results of all the 3-variable reversible functions.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132787862","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Scalable behavior modeling for nano crossbar ESD protection structures by Verilog-A 基于Verilog-A的纳米交叉棒ESD保护结构的可扩展行为建模
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6720949
Li Wang, Xin Wang, Zitao Shi, R. Ma, Jian Liu, Z. Dong, Chen Zhang, Fei Lu, L. Lin, H Zhao, Albert Z. H. Wang, Yuhua Cheng
This paper reports a new scalable behavioral modeling technique for novel nano crossbar ESD protection structures using Verilog-A language. Accurate models for nano crossbar ESD protection structures with different sizes were developed, which were validated by circuit level simulation and transmission line pulsing ESD measurement.
本文报道了一种基于Verilog-A语言的新型纳米交叉棒ESD保护结构的可扩展行为建模技术。建立了不同尺寸纳米交叉棒ESD保护结构的精确模型,并通过电路级仿真和传输线脉冲ESD测量对模型进行了验证。
{"title":"Scalable behavior modeling for nano crossbar ESD protection structures by Verilog-A","authors":"Li Wang, Xin Wang, Zitao Shi, R. Ma, Jian Liu, Z. Dong, Chen Zhang, Fei Lu, L. Lin, H Zhao, Albert Z. H. Wang, Yuhua Cheng","doi":"10.1109/NANO.2013.6720949","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720949","url":null,"abstract":"This paper reports a new scalable behavioral modeling technique for novel nano crossbar ESD protection structures using Verilog-A language. Accurate models for nano crossbar ESD protection structures with different sizes were developed, which were validated by circuit level simulation and transmission line pulsing ESD measurement.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133718948","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Experimental study on electrical properties and stability of CNT bumps in high density interconnects 高密度互连中碳纳米管凸点电学性能及稳定性的实验研究
Pub Date : 2013-08-01 DOI: 10.1109/NANO.2013.6720972
Yan Zhang, Ying Zhou, Jing-yu Fan, D. Jiang, Yifeng Fu, Shiwei Ma, Johan Liu
With the minimization development of electronic devices and products, nanotechnology and nanomaterials are widely applied in different fields of electronic packaging. Carbon nanotube (CNT) is an ideal material due to its excellent electrical and thermal conductivities. In the present paper, the application of CNT bundles as chip bumps was experimentally investigated. The electrical resistances of the CNT interconnects were measured, and the thermal and humidity test were conducted. In addition, the CNT forests on fine pitch copper lines under various environmental test conditions were observed to evaluate the stability.
随着电子器件和产品的小型化发展,纳米技术和纳米材料在电子封装的各个领域得到了广泛的应用。碳纳米管具有优良的导电性和导热性,是一种理想的材料。本文通过实验研究了碳纳米管束作为芯片碰撞点的应用。测量了碳纳米管互连的电阻,并进行了热湿测试。此外,在不同的环境试验条件下,对细间距铜线上的碳纳米管森林进行了观察,以评价其稳定性。
{"title":"Experimental study on electrical properties and stability of CNT bumps in high density interconnects","authors":"Yan Zhang, Ying Zhou, Jing-yu Fan, D. Jiang, Yifeng Fu, Shiwei Ma, Johan Liu","doi":"10.1109/NANO.2013.6720972","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720972","url":null,"abstract":"With the minimization development of electronic devices and products, nanotechnology and nanomaterials are widely applied in different fields of electronic packaging. Carbon nanotube (CNT) is an ideal material due to its excellent electrical and thermal conductivities. In the present paper, the application of CNT bundles as chip bumps was experimentally investigated. The electrical resistances of the CNT interconnects were measured, and the thermal and humidity test were conducted. In addition, the CNT forests on fine pitch copper lines under various environmental test conditions were observed to evaluate the stability.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"17 8","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131839501","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)
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