Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6720808
A. C. Fryer, A. Flewitt, C. Ramsdale
Self-switching diodes have been fabricated within a single layer of indium-gallium zinc oxide (IGZO). Current-voltage (I-V) measurements show the nanometer-scale asymmetric device gave a diode-like response. Full current rectification was achieved using very narrow channel widths of 50nm, with a turn-on voltage, Von, of 2.2V. The device did not breakdown within the -10V bias range measured. This single diode produced a current of 0.1μA at 10V and a reverse current of less than 0.1nA at -10V. Also by adjusting the channel width for these devices, Von could be altered; however, the effectiveness of the rectification also changed.
{"title":"DC current rectification using indium-gallium zinc oxide-based selfswitching diodes","authors":"A. C. Fryer, A. Flewitt, C. Ramsdale","doi":"10.1109/NANO.2013.6720808","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720808","url":null,"abstract":"Self-switching diodes have been fabricated within a single layer of indium-gallium zinc oxide (IGZO). Current-voltage (I-V) measurements show the nanometer-scale asymmetric device gave a diode-like response. Full current rectification was achieved using very narrow channel widths of 50nm, with a turn-on voltage, Von, of 2.2V. The device did not breakdown within the -10V bias range measured. This single diode produced a current of 0.1μA at 10V and a reverse current of less than 0.1nA at -10V. Also by adjusting the channel width for these devices, Von could be altered; however, the effectiveness of the rectification also changed.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"84 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123270209","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6720822
Hyunse Kim, Y. Lee, Euisu Lim
In this article, a 3 MHz near-field megasonic waveguide for nano-particle control was developed. In the design process, an impedance graph of the megasonic system with the piezoelectric actuator was obtained by analysis using finite element method (FEM) software ANSYS. After analysis, the maximum value of the anti-resonance frequency was obtained as 2997 kHz, which coincided with the design value. Additionally, acoustic pressure distribution of the system was predicted by FEM. After fabricating the waveguide using the analysis results, the system performance was assessed by measuring acoustic pressures. The maximum value and standard deviation of measured data were analyzed and compared with a conventional megasonic system to evaluate the system performance. As a result, the maximum value was decreased by 35.6%, and the standard deviation of the developed system was decreased by 10.4% compared to the conventional type both at the same average acoustic pressure. And to evaluate cleaning ability, the particle removal efficiency (PRE) test was performed with 80 nm particles. The PRE result showed that the system cleaned 93.1% particles. Considering these results, the developed megasonic system is thought to have an improved cleaning ability with more uniform acoustic pressures. These imply that the megasonic system can be applied to nano-particle cleaning process with higher energy efficiency and lower consumption of chemical and ultra pure water (UPW).
{"title":"Design, fabrication and performance test of a 3 MHz megasonic waveguide for nano-particle cleaning","authors":"Hyunse Kim, Y. Lee, Euisu Lim","doi":"10.1109/NANO.2013.6720822","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720822","url":null,"abstract":"In this article, a 3 MHz near-field megasonic waveguide for nano-particle control was developed. In the design process, an impedance graph of the megasonic system with the piezoelectric actuator was obtained by analysis using finite element method (FEM) software ANSYS. After analysis, the maximum value of the anti-resonance frequency was obtained as 2997 kHz, which coincided with the design value. Additionally, acoustic pressure distribution of the system was predicted by FEM. After fabricating the waveguide using the analysis results, the system performance was assessed by measuring acoustic pressures. The maximum value and standard deviation of measured data were analyzed and compared with a conventional megasonic system to evaluate the system performance. As a result, the maximum value was decreased by 35.6%, and the standard deviation of the developed system was decreased by 10.4% compared to the conventional type both at the same average acoustic pressure. And to evaluate cleaning ability, the particle removal efficiency (PRE) test was performed with 80 nm particles. The PRE result showed that the system cleaned 93.1% particles. Considering these results, the developed megasonic system is thought to have an improved cleaning ability with more uniform acoustic pressures. These imply that the megasonic system can be applied to nano-particle cleaning process with higher energy efficiency and lower consumption of chemical and ultra pure water (UPW).","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"49 14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122743650","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6720809
Y. Yang, W. Zhao
This paper intends to study the phenomena of thermal-caused material modifications in the principle of nanoscale electro spark during the SPM-based electric lithography. Since the direct observation of the electro spark process seems impossible in the nanoscale gap region, the molecular dynamics (MD) simulation method is applied to help investigate the influence of the thermal effect due to the Joule heating generated by the electro spark. The simplified heat source model is constructed based on the local temperature profile of the sample material beneath the tip, which is calculated through the Joule heating equation by the finite element method (FEM). The material removal process of local Cu and graphite sample subjected to the heat input is respectively simulated by the MD method to semi-quantitatively identify the thermal effect on the SPM-based electric nanofabrication results.
{"title":"Molecular dynamics simulation of the thermal-caused material removal process by the SPM-based electric nanofabrication","authors":"Y. Yang, W. Zhao","doi":"10.1109/NANO.2013.6720809","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720809","url":null,"abstract":"This paper intends to study the phenomena of thermal-caused material modifications in the principle of nanoscale electro spark during the SPM-based electric lithography. Since the direct observation of the electro spark process seems impossible in the nanoscale gap region, the molecular dynamics (MD) simulation method is applied to help investigate the influence of the thermal effect due to the Joule heating generated by the electro spark. The simplified heat source model is constructed based on the local temperature profile of the sample material beneath the tip, which is calculated through the Joule heating equation by the finite element method (FEM). The material removal process of local Cu and graphite sample subjected to the heat input is respectively simulated by the MD method to semi-quantitatively identify the thermal effect on the SPM-based electric nanofabrication results.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129330773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6720992
Seunghyun Lee, Kyu Han Kim, Yong-Jun Park, S. Jang
In this paper, previous experimental data of thermal conductivity and viscosity of water-based SiO2 nanofluids are summarized and the thermal performances of those nanofluids are assessed. As a criterion of thermal performance of nanofluids, the performance factor is defined under laminar flow condition. Moreover, to organize the experimental data in a consistent manner, the experimental data of thermal conductivities and viscosities of water-based SiO2 nanofluids are summarized in accordance with the data reduction methodology presented in this paper and those results are classified according to the SiO2 nanoparticle manufacturers. Based on the established criterion and summarized experimental database, the thermal performance of water-based SiO2 nanofluids is evaluated according to the nanoparticle manufacturers and their ranking is presented. As a result, it is expected that the results of this paper will be helpful to select proper SiO2 nanofluids in the practical applications.
{"title":"Evaluation of thermal performance for water-based SiO2 nanofluids","authors":"Seunghyun Lee, Kyu Han Kim, Yong-Jun Park, S. Jang","doi":"10.1109/NANO.2013.6720992","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720992","url":null,"abstract":"In this paper, previous experimental data of thermal conductivity and viscosity of water-based SiO2 nanofluids are summarized and the thermal performances of those nanofluids are assessed. As a criterion of thermal performance of nanofluids, the performance factor is defined under laminar flow condition. Moreover, to organize the experimental data in a consistent manner, the experimental data of thermal conductivities and viscosities of water-based SiO2 nanofluids are summarized in accordance with the data reduction methodology presented in this paper and those results are classified according to the SiO2 nanoparticle manufacturers. Based on the established criterion and summarized experimental database, the thermal performance of water-based SiO2 nanofluids is evaluated according to the nanoparticle manufacturers and their ranking is presented. As a result, it is expected that the results of this paper will be helpful to select proper SiO2 nanofluids in the practical applications.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129443893","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6721017
Masaru Takeuchi, M. Nakajima, H. Tajima, T. Fukuda
In this paper, we developed the thermoresponsive gel probe (GeT probe) to conduct micro-nano manipulation under an optical microscope. We developed the GeT probe to use in the solution which is not containing thermoresponsive polymer. The fixation force by the probe was measured using an atomic force microscope (AFM) cantilever. The evaluation of the probe showed that the probe can generate almost the same fixation force in thermoresponsive polymer solution and in the pure water. The developed GeT probe has more than 50 μm tip size and it makes difficult to handle sub-micron objects. Therefore, the new fabrication procedure to miniaturize the probe tip was also proposed to manipulate nano-scale objects. The fabrication method has the potential to minimize the probe tip in sub-micron scale.
{"title":"Development of thermoresponsive gel probe for manipulation from micro to nano scale","authors":"Masaru Takeuchi, M. Nakajima, H. Tajima, T. Fukuda","doi":"10.1109/NANO.2013.6721017","DOIUrl":"https://doi.org/10.1109/NANO.2013.6721017","url":null,"abstract":"In this paper, we developed the thermoresponsive gel probe (GeT probe) to conduct micro-nano manipulation under an optical microscope. We developed the GeT probe to use in the solution which is not containing thermoresponsive polymer. The fixation force by the probe was measured using an atomic force microscope (AFM) cantilever. The evaluation of the probe showed that the probe can generate almost the same fixation force in thermoresponsive polymer solution and in the pure water. The developed GeT probe has more than 50 μm tip size and it makes difficult to handle sub-micron objects. Therefore, the new fabrication procedure to miniaturize the probe tip was also proposed to manipulate nano-scale objects. The fabrication method has the potential to minimize the probe tip in sub-micron scale.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128843135","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6720841
T. Ishiyama, T. Fujii, Y. Ishii, M. Fukuda
Arrays of single-crystal zinc oxide (ZnO) nanowires have been synthesized on silicon substrates by vapor-liquid-solid growth techniques. The effect of growth conditions including substrate temperature and Ar gas flow rate on growth properties of ZnO nanowire arrays were studied. Structural and optical characterization was performed using scanning electron microscopy (SEM), X-ray diffraction (XRD) and photoluminescence (PL) spectroscopy. The XRD measurements showed that the single crystal nanowires exhibited growth in the (002) direction. SEM images of the ZnO nanowire arrays grown at various Ar gas flow rates indicated that the alignment and structural features of ZnO nanowires were affected by the gas flow rate. The PL of the ZnO nanowire arrays exhibited strong ultraviolet (UV) emission at 380□nm and weak green emission around 510□nm. A blue shift and broadening of the UV emission was observed with an increment of Ar gas flow rate.
{"title":"Photoluminescence properties of ZnO nanowire arrays fabricated on silicon substrate","authors":"T. Ishiyama, T. Fujii, Y. Ishii, M. Fukuda","doi":"10.1109/NANO.2013.6720841","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720841","url":null,"abstract":"Arrays of single-crystal zinc oxide (ZnO) nanowires have been synthesized on silicon substrates by vapor-liquid-solid growth techniques. The effect of growth conditions including substrate temperature and Ar gas flow rate on growth properties of ZnO nanowire arrays were studied. Structural and optical characterization was performed using scanning electron microscopy (SEM), X-ray diffraction (XRD) and photoluminescence (PL) spectroscopy. The XRD measurements showed that the single crystal nanowires exhibited growth in the (002) direction. SEM images of the ZnO nanowire arrays grown at various Ar gas flow rates indicated that the alignment and structural features of ZnO nanowires were affected by the gas flow rate. The PL of the ZnO nanowire arrays exhibited strong ultraviolet (UV) emission at 380□nm and weak green emission around 510□nm. A blue shift and broadening of the UV emission was observed with an increment of Ar gas flow rate.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127703693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6720861
Rong Liu, R. Rallo, Y. Cohen
Quantitative Structure-Activity-Relationships (QSARs) were investigated for cellular uptake of nanoparticles (NPs) using a dataset comprised of 109 NPs of the same iron oxide core but with different surface-modifying organic molecules. QSARs were built using both linear and non-linear model building methods along with a forward descriptor selection from an initial pool of 184 chemical descriptors calculated for the NP surface-modifying organic molecules. The resulting QSAR was a robust Relevance Vector Machine (RVM) model built with nine descriptors, which demonstrated prediction accuracy as quantified by a 5-fold cross-validated squared correlation coefficient (RCV2) of 0.77. The William's plot for the RVM based QSAR shows that the nine selected descriptors spanned a reasonable applicability domain. The developed QSAR can provide useful insight regarding parameters that affect NP cellular uptake and thus provide guidance for the selection and/or design of NPs for biomedical applications.
{"title":"Quantitative Structure-Activity-Relationships for cellular uptake of nanoparticles","authors":"Rong Liu, R. Rallo, Y. Cohen","doi":"10.1109/NANO.2013.6720861","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720861","url":null,"abstract":"Quantitative Structure-Activity-Relationships (QSARs) were investigated for cellular uptake of nanoparticles (NPs) using a dataset comprised of 109 NPs of the same iron oxide core but with different surface-modifying organic molecules. QSARs were built using both linear and non-linear model building methods along with a forward descriptor selection from an initial pool of 184 chemical descriptors calculated for the NP surface-modifying organic molecules. The resulting QSAR was a robust Relevance Vector Machine (RVM) model built with nine descriptors, which demonstrated prediction accuracy as quantified by a 5-fold cross-validated squared correlation coefficient (RCV2) of 0.77. The William's plot for the RVM based QSAR shows that the nine selected descriptors spanned a reasonable applicability domain. The developed QSAR can provide useful insight regarding parameters that affect NP cellular uptake and thus provide guidance for the selection and/or design of NPs for biomedical applications.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127779720","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6720812
D. Jung, L. Overzet, Gil S. Lee
Spin-capable multi-walled carbon nanotube (MWCNT) forests that form webs, sheets, and yarns can play an important role in means for advancing various technologies. It is critical to understand the parameters that affect to grow spin-capable carbon nanotubes (CNTs) in a repeatable fashion. In this paper, we investigated the effects of carrier gases on the catalytic properties of iron (Fe) in the synthesis of CNT forest. We found that helium as carrier gas could effectively activate the Fe catalyst during the chemical vapor deposition (CVD) process, and increase the nucleation density of MWCNTs. Moreover, adding of hydrogen (H2) gas is crucial for the synthesis of high-density MWCNTs. H2 gas can suppress the agglomeration of Fe nanoparticles by Ostwald effect, which is useful for synthesizing high density. At the same time, it is also found that height of the CNT forest really depends on the growth time. A growth time of 5 min can achieve suitable sized nanoparticles with sufficient density to produce CNT forests with a higher areal density and a shorter tube spacing.
{"title":"Influence of gas condition and growth time on the growth of a spin-capable multi-walled carbon nanotube","authors":"D. Jung, L. Overzet, Gil S. Lee","doi":"10.1109/NANO.2013.6720812","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720812","url":null,"abstract":"Spin-capable multi-walled carbon nanotube (MWCNT) forests that form webs, sheets, and yarns can play an important role in means for advancing various technologies. It is critical to understand the parameters that affect to grow spin-capable carbon nanotubes (CNTs) in a repeatable fashion. In this paper, we investigated the effects of carrier gases on the catalytic properties of iron (Fe) in the synthesis of CNT forest. We found that helium as carrier gas could effectively activate the Fe catalyst during the chemical vapor deposition (CVD) process, and increase the nucleation density of MWCNTs. Moreover, adding of hydrogen (H2) gas is crucial for the synthesis of high-density MWCNTs. H2 gas can suppress the agglomeration of Fe nanoparticles by Ostwald effect, which is useful for synthesizing high density. At the same time, it is also found that height of the CNT forest really depends on the growth time. A growth time of 5 min can achieve suitable sized nanoparticles with sufficient density to produce CNT forests with a higher areal density and a shorter tube spacing.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128973977","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6720828
Chen Li, Qiu-lin Tan, Ying-ping Hong, B. Ge, Wei Wang, J. Xiong
This article describes a manufacturing method of embedded cavity using zirconia casting-belt and multi-layer lamination technology for the high temperature ceramics, as the present high temperature ceramics are difficult to form a sealed cavity and encapsulation is complicated. Complete the preparation of high temperature ceramics sealed cavity, by using punching machines to punch out the cavity in zirconia green tapes, selecting different temperature process parameters in the high-temperature sintering process, with carbon film filled or not filled in the cavity. Using SEM (the scanning electron microscope) to analysis the sample cavity, it showed that when the carbon film is filled in the cavity to select the appropriate sintering curves, it can effectively prevent the sagging, apophysis, and warpage of the cavity. This manufacturing method is available for structural integrity, high strength and good air tightness ceramics sealed cavity, it can be used for gas sensors, flow sensors, pressure sensors and capacitance type high temperature pressure sensor.
{"title":"Embedded seal cavity preparation technology based on the zirconia","authors":"Chen Li, Qiu-lin Tan, Ying-ping Hong, B. Ge, Wei Wang, J. Xiong","doi":"10.1109/NANO.2013.6720828","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720828","url":null,"abstract":"This article describes a manufacturing method of embedded cavity using zirconia casting-belt and multi-layer lamination technology for the high temperature ceramics, as the present high temperature ceramics are difficult to form a sealed cavity and encapsulation is complicated. Complete the preparation of high temperature ceramics sealed cavity, by using punching machines to punch out the cavity in zirconia green tapes, selecting different temperature process parameters in the high-temperature sintering process, with carbon film filled or not filled in the cavity. Using SEM (the scanning electron microscope) to analysis the sample cavity, it showed that when the carbon film is filled in the cavity to select the appropriate sintering curves, it can effectively prevent the sagging, apophysis, and warpage of the cavity. This manufacturing method is available for structural integrity, high strength and good air tightness ceramics sealed cavity, it can be used for gas sensors, flow sensors, pressure sensors and capacitance type high temperature pressure sensor.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"1109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127430836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/NANO.2013.6720924
Shuangyun Ma, Ming Hu, Mingda Li, Jiran Liang, Changqing Li
A novel composite structure of WO3 nanowires/porous silicon has been successfully synthesized via a convenient thermal evaporation method without using any catalysts. The diameters and lengths of nanowires are 40-60 nm and 20-30 μm, respectively, and the aspect ratio (length/diameter) of nanowires could be in range of 500-750. The obtained products were investigated by scanning electron microscopy, transmission electron microscopy, and energy dispersive spectroscopy. The response to NO2 of WO3 nanowires/porous silicon composite was investigated. It was found that the composite sensor had a good response to NO2 at 50 °C. The lowest concentration of NO2 detected was 1ppm and the response could be up to 6.17 at NO2 concentration of 6 ppm. The novel composite structure improved sensing properties which are significant for future applications.
{"title":"Synthesis of tungsten oxide nanowires/porous silicon composite and its sensing properties for NO2","authors":"Shuangyun Ma, Ming Hu, Mingda Li, Jiran Liang, Changqing Li","doi":"10.1109/NANO.2013.6720924","DOIUrl":"https://doi.org/10.1109/NANO.2013.6720924","url":null,"abstract":"A novel composite structure of WO3 nanowires/porous silicon has been successfully synthesized via a convenient thermal evaporation method without using any catalysts. The diameters and lengths of nanowires are 40-60 nm and 20-30 μm, respectively, and the aspect ratio (length/diameter) of nanowires could be in range of 500-750. The obtained products were investigated by scanning electron microscopy, transmission electron microscopy, and energy dispersive spectroscopy. The response to NO2 of WO3 nanowires/porous silicon composite was investigated. It was found that the composite sensor had a good response to NO2 at 50 °C. The lowest concentration of NO2 detected was 1ppm and the response could be up to 6.17 at NO2 concentration of 6 ppm. The novel composite structure improved sensing properties which are significant for future applications.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133793155","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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