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Nanodomain poling unlocking backward nonlinear light generation in thin film lithium niobate 纳米畴极化解锁薄膜铌酸锂的后向非线性光产生
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0429
Alessandra Sabatti, Jost Kellner, Robert J. Chapman, Rachel Grange
Nonlinear frequency conversion offers powerful capabilities for applications in telecommunications, signal processing, and computing. Thin-film lithium niobate (TFLN) has emerged as a promising integrated photonics platform due to its strong electro-optic effect and second-order nonlinearity, which can be exploited through periodic poling. However, conventional poling techniques in x-cut TFLN are constrained to minimum period sizes on the order of microns, restricting access to highly phase-mismatched interactions such as counter- and backward-propagating frequency conversion. In this work, we demonstrate scalable periodic poling of x-cut TFLN with domains periods as short as 215 nm and realize devices that support both counter- and back-propagating phase matching. We estimate conversion efficiencies of 1,474 %/W/cm 2 and 45 %/W/cm 2 for the two interaction types, respectively. Sum frequency generation measurements confirm that the nonlinear generation takes place in the desired direction. Furthermore, we report spontaneous parametric down conversion for the counter-propagating configuration and, for the first time, for a backward propagating device. This breakthrough provides unprecedented control over engineering of ferroelectric domain geometries in TFLN, leading into the generation of photon pairs with precisely tailored spatial and spectral characteristics. Such capabilities hold strong potential for advancing quantum signal processing, scalable quantum computing architectures, and precision quantum metrology.
非线性变频为电信、信号处理和计算等领域的应用提供了强大的能力。薄膜铌酸锂(TFLN)由于其强大的电光效应和二阶非线性特性而成为一种有前途的集成光子学平台。然而,在x-cut TFLN中,传统的轮询技术被限制在微米量级的最小周期尺寸,限制了访问高度相位不匹配的相互作用,如反向传播和反向传播频率转换。在这项工作中,我们展示了x-cut TFLN的可扩展周期性轮调,其域周期短至215 nm,并实现了支持反向和反向传播相位匹配的器件。我们估计这两种交互类型的转换效率分别为1474% /W/ cm2和45% /W/ cm2。和频率产生测量证实非线性产生发生在期望的方向上。此外,我们报道了反传播结构的自发参数下转换,并首次报道了反向传播装置的自发参数下转换。这一突破为TFLN中铁电畴几何结构的工程控制提供了前所未有的控制,从而产生了具有精确定制空间和光谱特征的光子对。这种能力在推进量子信号处理、可扩展量子计算架构和精密量子计量方面具有强大的潜力。
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引用次数: 0
Broadband variable beamsplitter made of a subwavelength-thick metamaterial 由亚波长厚度的超材料制成的宽带可变分束器
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0512
Yasuhiro Tamayama, Yugo Shibata
We propose and validate a method for designing a broadband variable beamsplitter using a metamaterial with subwavelength thickness. Through theoretical analysis and numerical simulations, we demonstrate that the reflectance-to-transmittance ratio of a single-layer resonant metamaterial at its resonance frequency can be controlled by varying the spatial arrangement of the constituent meta-atoms, without altering their individual structures. Building on this theory, we further conjecture a method for achieving a frequency-independent reflectance-to-transmittance ratio across a broad spectral range. Numerical results confirm that a metamaterial with subwavelength thickness can be engineered to function as a broadband variable beamsplitter using the proposed approach. These findings contribute to the advancement of techniques for splitting and combining electromagnetic waves in compact systems.
我们提出并验证了一种利用亚波长厚度的超材料设计宽带可变分束器的方法。通过理论分析和数值模拟,我们证明了单层共振超材料在其共振频率下,可以通过改变组成元原子的空间排列来控制其反射率与透射率,而不改变其单个结构。在此理论的基础上,我们进一步推测了一种在宽光谱范围内实现与频率无关的反射率-透射比的方法。数值结果证实,利用该方法可以设计具有亚波长厚度的超材料作为宽带可变分束器。这些发现有助于在紧凑系统中分裂和结合电磁波的技术的进步。
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引用次数: 0
AI-based analysis algorithm incorporating nanoscale structural variations and measurement-angle misalignment in spectroscopic ellipsometry 基于人工智能的椭圆偏振光谱结构变化与测量角度偏差分析算法
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0515
Juwon Jung, Leeju Hwang, Nagyeong Kim, Kibaek Kim, Seri Kim, Jongkyoon Park, Won Chegal, Yong Jai Cho, Young-Joo Kim
Spectroscopic ellipsometry (SE) is a powerful, non-destructive technique for nanoscale structural characterization. However, conventional SE data analysis typically assumes perfectly periodic specimen structures, overlooking fabrication-induced structural variations and thereby reducing the accuracy of predicted structural parameters. We have developed an enhanced analysis framework that explicitly accounts for both nanoscale structural variations and measurement-angle misalignment by introducing the concept of an average Mueller matrix (MM), which represents statistical distributions of nanoscale structures. In addition, we introduce a high-throughput MM-generation neural network that enables rapid data preparation by approximating rigorous coupled-wave analysis (RCWA) simulations for large numbers of specimens across a broad range of structural parameters. The model achieves a mean-squared error of 9.99 × 10 −8 MSE when validated against RCWA-simulated MM data for one-dimensional SiO 2 nanogratings. Finally, we apply our analysis framework to experimentally measured MM data, achieving highly accurate dimensional predictions with errors below 0.4 nm when compared with structural parameters measured by scanning electron microscopy (SEM). We believe that this analysis algorithm significantly advances the potential for high-precision SE-based metrology in semiconductor, photonic, and display manufacturing.
光谱椭偏法(SE)是一种强大的、非破坏性的纳米结构表征技术。然而,传统的SE数据分析通常假设完美的周期性试样结构,忽略了制造引起的结构变化,从而降低了预测结构参数的准确性。我们已经开发了一个增强的分析框架,通过引入平均穆勒矩阵(MM)的概念,明确地解释了纳米级结构的变化和测量角度偏差,这代表了纳米级结构的统计分布。此外,我们还引入了一个高通量mm生成神经网络,通过近似严格的耦合波分析(RCWA)模拟,在广泛的结构参数范围内对大量样品进行快速数据准备。通过rcwa模拟的一维sio2纳米光栅的MM数据验证,该模型的均方误差为9.99 × 10−8 MSE。最后,我们将我们的分析框架应用于实验测量的MM数据,与扫描电子显微镜(SEM)测量的结构参数相比,实现了高度精确的尺寸预测,误差小于0.4 nm。我们相信,这种分析算法显著提高了半导体、光子和显示制造业中高精度se计量的潜力。
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引用次数: 0
Modelling Purcell enhancement of metasurfaces supporting quasi -bound states in the continuum 连续介质中支持准束缚态的超表面的Purcell增强模型
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0456
Joshua T. Y. Tse, Taisuke Enomoto, Shunsuke Murai, Katsuhisa Tanaka
Bound states in the continuum (BIC) exhibit extremely high quality factors due to the lack of radiation loss and thus are widely studied for Purcell enhancement. However, a closer examination reveals that the enhancement is absent at the BIC due to the lack of out-coupling capability, but the strong enhancement is only observed at nearby configuration, namely quasi -BIC. To study this unique behavior of the Purcell enhancement near BIC, we built an analytical model with spectral parameters to analyze the Purcell enhancement on metasurfaces supporting quasi -BIC. Our analytical model predicts the average Purcell enhancement by metasurfaces coupled to a luminescent medium, utilizing parameters that are formulated through the temporal coupled-mode theory and can be derived from measured spectra such as transmissivity and reflectivity. We analyzed several metasurfaces supporting quasi -BIC numerically and experimentally to study the behavior of the spectral parameters as well as the resultant Purcell enhancement. We formulated the interdependence between the quality factor and the out-coupling efficiency, and revealed the existence of optimal detuning from the BIC. We also discovered that our findings are general and applicable towards realistic metasurfaces that are lossy and/or asymmetric. This discovery provides an intuitive model to understand the modal qualities of quasi -BIC and will facilitate optimization of quasi -BIC for luminescence enhancement applications.
连续介质中的束缚态(BIC)由于缺乏辐射损失而表现出极高的质量因子,因此被广泛研究用于Purcell增强。然而,仔细观察发现,由于缺乏外耦合能力,在BIC处没有增强,而只在附近的结构,即准-BIC处观察到强增强。为了研究在BIC附近Purcell增强的这种独特行为,我们建立了一个带有光谱参数的分析模型来分析支持准BIC的元表面上的Purcell增强。我们的分析模型预测了耦合到发光介质的超表面的平均珀塞尔增强,利用通过时间耦合模式理论制定的参数,可以从测量的光谱(如透射率和反射率)中得出。我们通过数值和实验分析了几种支持准bic的超表面,以研究光谱参数的行为以及由此产生的Purcell增强。我们建立了质量因子与出耦效率之间的相互依赖关系,并揭示了从BIC出发的最优失谐的存在。我们还发现,我们的发现是普遍的,适用于现实的元表面是有损和/或不对称。这一发现为理解准bic的模态质量提供了一个直观的模型,并将促进准bic在发光增强应用中的优化。
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引用次数: 0
Bridging the scalability gap in van der Waals light guiding with high refractive index MoTe 2 利用高折射率MoTe 2弥补范德华导光的可扩展性差距
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-06 DOI: 10.1515/nanoph-2025-0468
Mikhail K. Tatmyshevskiy, Georgy A. Ermolaev, Dmitriy V. Grudinin, Aleksandr S. Slavich, Nikolay V. Pak, Marwa A. El-Sayed, Alexander Melentev, Elena Zhukova, Roman I. Romanov, Dmitry I. Yakubovsky, Andrey A. Vyshnevyy, Sergey M. Novikov, Aleksey V. Arsenin, Valentyn S. Volkov
van der Waals transition metal dichalcogenides, distinguished by a high refractive index and giant optical anisotropy, are promising materials for integrated photonic devices. However, their superior optical properties are nowadays limited to exfoliated samples with only a micrometer scale, whereas industrial integration requires at least cm-scale dimensions. Here, we resolve this problem for MoTe 2 by demonstrating that chemical vapor deposition synthesis can provide an identical optical response to the benchmark exfoliated samples in a broad spectral range (250–5,000 nm). It allows us to show high-performance waveguiding properties of MoTe 2 with a subwavelength footprint of ∼ λ /8 for telecommunication wavelengths. Therefore, our findings reveal MoTe 2 as an ideal platform for the next-generation nanophotonics.
范德华过渡金属二硫族化合物具有高折射率和巨大的光学各向异性,是一种很有前途的集成光子器件材料。然而,它们优越的光学性能目前仅限于微米尺度的剥离样品,而工业集成至少需要厘米尺度的尺寸。在这里,我们通过证明化学气相沉积合成可以在宽光谱范围内(250-5,000 nm)提供与基准剥离样品相同的光学响应来解决MoTe 2的这个问题。它使我们能够展示MoTe 2的高性能波导特性,其亚波长足迹为电信波长的~ λ /8。因此,我们的研究结果表明MoTe 2是下一代纳米光子学的理想平台。
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引用次数: 0
Nanogap-enhanced terahertz suppression of superconductivity 纳米隙增强的太赫兹超导抑制
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-05 DOI: 10.1515/nanoph-2025-0487
Joonyoung Kim, Gangseon Ji, Hyoung-Taek Lee, Jeonghoon Kim, Han-Seok Park, Uksam Choi, Choongwon Seo, Changhee Sohn, Kyungwan Kim, Byeongwon Kang, Hyeong-Ryeol Park
Superconductivity collapses when all Cooper pairs acquire energies exceeding the superconducting gap. Breaking these pairs requires photons with energy greater than the superconducting gap or strong terahertz (THz) electric fields, which has limited the practical use of superconducting devices at THz frequencies. Here, we show that GdBa 2 Cu 3 O 7-δ (GdBCO) film integrated with 15-nm metal nanogaps exhibit Cooper pair breaking at 20 K, which is lower than its critical temperature T c , under incident THz fields as low as 60 V/cm. It should be noted that the extracted optical constants of the nanogap-integrated film exhibit a characteristic of a non-superconducting state, in contrast to the bare GdBCO film. This suppression of the superconductivity cannot be attributed to heating or fabrication damage but instead arises from the nanogap-enhanced THz fields delivering ponderomotive energy beyond the superconducting gap. Our results establish a non-thermal, low-field pathway for controlling superconductivity, opening opportunities for highly sensitive superconducting optoelectronic devices such as a THz single photon detector.
当所有库珀对获得的能量超过超导间隙时,超导性就会崩溃。打破这些对需要能量大于超导间隙或强太赫兹(THz)电场的光子,这限制了在太赫兹频率下超导设备的实际使用。本文表明,在低至60 V/cm的入射太赫兹场下,集成了15 nm金属纳米隙的GdBa 2 Cu 3 O 7-δ (GdBCO)薄膜在20 K时出现库珀对断裂,低于其临界温度T c。值得注意的是,与裸GdBCO膜相比,提取的纳米隙集成膜的光学常数表现出非超导状态的特征。这种对超导性的抑制不能归因于加热或制造损坏,而是由于纳米隙增强的太赫兹场在超导隙之外提供了重动力能量。我们的研究结果为控制超导性建立了一种非热、低场途径,为高灵敏度超导光电器件(如太赫兹单光子探测器)开辟了机会。
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引用次数: 0
Theory of dynamical superradiance in organic materials 有机材料的动态超辐射理论
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-05 DOI: 10.1515/nanoph-2025-0427
Lukas Freter, Piper Fowler-Wright, Javier Cuerda, Brendon W. Lovett, Jonathan Keeling, Päivi Törmä
We develop the theory of dynamical superradiance – the collective exchange of energy between an ensemble of initially excited emitters and a single-mode cavity – for organic materials where electronic states are coupled to vibrational modes. We consider two models to capture the vibrational effects: first, vibrations treated as a Markovian bath for two-level emitters, via a pure dephasing term in the Lindblad master equation for the system; second, vibrational modes directly included in the system via the Holstein–Tavis–Cummings Hamiltonian. By exploiting the permutation symmetry of the emitters and weak U(1) symmetry, we develop a numerical method capable of exactly solving the Tavis–Cummings model with local dissipation for up to 140 emitters. Using the exact method, we validate mean-field and second-order cumulant approximations and use them to describe macroscopic numbers of emitters. We analyze the dynamics of the average cavity photon number, electronic coherence, and Bloch vector length and show that the effect of vibrational mode coupling goes beyond simple dephasing. Our results show that superradiance is possible in the presence of vibrational mode coupling; for negative cavity detunings, the vibrational coupling may even enhance superradiance. We identify asymmetry of the photon number rise time as a function of the detuning of the cavity frequency as an experimentally accessible signature of such vibrationally assisted superradiance.
我们发展了动态超辐射理论-在初始激发发射体和单模腔之间的集体能量交换-有机材料的电子态与振动模式耦合。我们考虑了两个模型来捕捉振动效应:首先,通过系统的Lindblad主方程中的纯减相项,将振动视为两能级发射器的马尔可夫槽;第二,通过Holstein-Tavis-Cummings哈密顿量直接包含在系统中的振动模态。利用发射体的排列对称性和弱U(1)对称性,我们开发了一种能够精确求解具有局部耗散的Tavis-Cummings模型的数值方法,该模型最多可求解140个发射体。使用精确的方法,我们验证了平均场和二阶累积近似,并用它们来描述发射体的宏观数量。我们分析了平均腔光子数,电子相干性和布洛赫矢量长度的动力学,并表明振动模式耦合的影响不仅仅是简单的减相。我们的结果表明,在振动模式耦合存在的情况下,超辐射是可能的;对于负腔失谐,振动耦合甚至可以增强超辐射。我们确定光子数上升时间的不对称性作为谐振腔频率失谐的函数,作为这种振动辅助超辐射的实验可获得的特征。
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引用次数: 0
Wafer-scale integration of photonic integrated circuits and atomic vapor cells 光子集成电路和原子蒸汽电池的晶圆级集成
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-04 DOI: 10.1515/nanoph-2025-0500
Arieh Grosman, Roy Zektzer, Noa Mazurski, Liron Stern, Uriel Levy
Atom-based technologies have played a central role in both fundamental research and application-driven developments. For example, devices such as atomic clocks and magnetometers are essential for precision time-keeping, navigation, and sensing. However, many of these demonstrations remain confined to laboratory settings due to their reliance on bulky equipment and centimeter-scale atomic vapor cells. In recent years, significant efforts have been made to miniaturize these vapor cells to enable field-deployable systems. Yet, integrating these cells with the necessary photonic components remains a complex and non-scalable process. To address this challenge, we have introduced the atomic-cladded waveguide (ACWG) architecture, which enables the integration of atomic and photonic functions on the same chip. While the ACWG concept provides a significant step forward toward integration, there is still a significant gap related to wafer scale manufacturability. In particular, previous demonstrations of atomic–photonic integration have relied on manual assembly of vapor cells onto single chips, restricting miniaturization, manufacturability, and thermal robustness. To revolutionize manufacturability of these devices, we hereby demonstrate our new generation of ACWG devices that overcomes these constraints. The approach is based on wafer bonding of a silicon wafer – consisting of multiple photonic chips to a glass wafer with pre-etched atomic chambers. This wafer-scale process yields multiple miniaturized integrated photonic–atomic chips in a single batch. The bonded devices operate reliably at elevated temperatures over an extended period of time, allowing higher atomic densities to be used. The fabrication method consists of well-defined, repeatable steps, paving the way for scalable production of mature integrated photonic–atomic systems for next-generation sensing, metrology, and quantum technologies, inspired by commercial complementary metal-oxide-semiconductor-based processes.
基于原子的技术在基础研究和应用驱动的开发中都发挥了核心作用。例如,原子钟和磁力计等设备对于精确计时、导航和传感是必不可少的。然而,由于依赖于笨重的设备和厘米级的原子蒸汽电池,许多这些演示仍然局限于实验室环境。近年来,为了使这些蒸汽电池能够在现场部署,已经做出了重大努力。然而,将这些细胞与必要的光子组件集成仍然是一个复杂且不可扩展的过程。为了应对这一挑战,我们引入了原子包层波导(ACWG)架构,它可以在同一芯片上集成原子和光子功能。虽然ACWG概念为集成提供了重要的一步,但在晶圆规模的可制造性方面仍然存在重大差距。特别是,先前的原子-光子集成的演示依赖于手工将蒸汽电池组装到单个芯片上,限制了小型化、可制造性和热稳定性。为了彻底改变这些设备的可制造性,我们特此展示克服这些限制的新一代ACWG设备。该方法是基于硅晶圆的晶圆键合-由多个光子芯片组成的硅晶圆与预蚀刻原子室的玻璃晶圆。这种晶圆级工艺可以一次批量生产多个小型化集成光子原子芯片。这种键合器件在高温下可靠地工作了很长一段时间,从而允许使用更高的原子密度。该制造方法由定义明确、可重复的步骤组成,受商业互补金属氧化物半导体工艺的启发,为下一代传感、计量和量子技术的成熟集成光子原子系统的可扩展生产铺平了道路。
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引用次数: 0
Light-guided spectral sculpting in chiral azobenzene-doped cholesteric liquid crystals for reconfigurable narrowband unpolarized light sources 可重构窄带非偏振光源手性偶氮苯掺杂胆甾液晶的光导光谱雕刻
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-04 DOI: 10.1515/nanoph-2025-0455
Pravinraj Selvaraj, Ming-Hong Yuan, Cheng-Kai Liu, Ko-Ting Cheng
Precise manipulation of Bragg reflection in cholesteric liquid crystals (CLCs) is essential for advancing reconfigurable optics. However, existing photo-responsive material-doped CLC technologies that rely on single-wavelength photoisomerization encounter several challenges, including slow response times, limited tunability, inadequate spatial control, and instability caused by pitch variations due to diffusion. Here, we present a robust dual-wavelength photoisomerization method to simultaneously achieve trans -to- cis and cis -to- trans photoisomerization of chiral azobenzene-doped CLCs, which enables broadband, reversible, and spatially addressable control over the Bragg reflection spectrum. By employing counterpropagating laser beams at 405 nm and 532 nm, we precisely control the transcis isomerization dynamics of azobenzene chiral dopants, achieving spectral shifts exceeding 100 nm primarily through reversible modulation of the helical pitch of the CLCs. Furthermore, manipulating the intensity ratio and geometry of the excitation beams allows for tailored pitch gradients, reflection bandwidths, and central wavelengths with remarkable fidelity. Our approach enhances pitch boundaries and reduces molecular diffusion, facilitating the micrometer-scale patterning of optical textures, which surpasses traditional single-wavelength methods. Additionally, we present an innovative narrowband spectral filtering technique by sequentially transmitting light through pitch-selective CLC regions under circular polarization control. This reconfigurable manipulation strategy paves the way for developing programmable photonic systems, including adaptive optics, diffractive optics, and tunable displays.
精确控制胆甾液晶(CLCs)中的布拉格反射对于推进可重构光学至关重要。然而,现有的依赖于单波长光异构化的光响应材料掺杂CLC技术面临着一些挑战,包括响应时间慢、可调性有限、空间控制不足以及由扩散引起的间距变化引起的不稳定性。在这里,我们提出了一种鲁棒的双波长光异构化方法,可以同时实现手性偶氮苯掺杂CLCs的反式到顺式和顺式到反式光异构化,从而实现对Bragg反射光谱的宽带、可逆和空间可寻址控制。利用405 nm和532 nm的反向传播激光束,我们精确地控制了偶氮苯手性掺杂剂的反顺异构化动力学,主要通过可逆调制CLCs的螺旋节距实现了超过100 nm的光谱位移。此外,通过控制激发光束的强度比和几何形状,可以定制具有显著保真度的俯仰角梯度、反射带宽和中心波长。我们的方法增强了基音边界,减少了分子扩散,促进了光学纹理的微米尺度图案,这超越了传统的单波长方法。此外,我们提出了一种创新的窄带光谱滤波技术,该技术在圆偏振控制下,通过间距选择性CLC区域顺序传输光。这种可重构的操作策略为开发可编程光子系统铺平了道路,包括自适应光学,衍射光学和可调显示器。
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引用次数: 0
Monolithic temperature-insensitive high- Q Ta 2 O 5 microdisk resonator 单片温度不敏感高Q ta2o5微磁盘谐振器
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-04 DOI: 10.1515/nanoph-2025-0485
Zhen Yang, Zheng Zhang, Peng Cheng, Zhe Long, Qi Cheng, Jiaqi Yang, Yu Lin, Bin Fang, Zhongming Zeng, Zhiping Zhou, Ganapathy Senthil Murugan, Rongping Wang
We demonstrate a temperature-insensitive high- Q tantalum oxide (Ta 2 O 5 ) microdisk resonator fabricated using electron-beam lithography and inductively coupled plasma reactive-ion etching. The microdisks exhibit a loaded Q -factor of 4.25 × 10 5 at 1,550 nm, which more than doubles (∼9.3 × 10 5 ) following thermal annealing at 600 °C. Remarkably, the temperature-dependent resonant wavelength shift is suppressed to less than 10 pm/°C across a broad 100 nm bandwidth. Furthermore, the resonators maintain high optical stability under elevated input powers, with no observed degradation in optical properties such as extinction ratio or Q -factor. The combination of high Q -factors and exceptional thermal stability positions the Ta 2 O 5 microdisk resonators as a promising platform for integrated photonic device applications, including on-chip narrow-linewidth lasers and precision sensing.
我们展示了一种利用电子束光刻和电感耦合等离子体反应蚀刻技术制备的温度不敏感的高Q氧化钽(ta2o5)微盘谐振器。微盘在1,550 nm处表现出4.25 × 10.5的负载Q因子,在600°C热退火后增加了一倍以上(~ 9.3 × 10.5)。值得注意的是,在100 nm宽的带宽范围内,温度相关的谐振波长移被抑制到小于10 pm/°C。此外,谐振器在高输入功率下保持高光学稳定性,没有观察到消光比或Q因子等光学特性的退化。高Q因子和卓越的热稳定性的结合使ta2o微盘谐振器成为集成光子器件应用的有前途的平台,包括片上窄线宽激光器和精密传感。
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引用次数: 0
期刊
Nanophotonics
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