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Charge reservoir as a design concept for plasmonic antennas 电荷库作为等离子体天线的设计概念
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0421
Rostislav Řepa, Michal Horák, Tomáš Šikola, Vlastimil Křápek
Plasmonic antennas exploit localized surface plasmons to shape, confine, and enhance electromagnetic fields with subwavelength resolution. The field enhancement is contributed to by various effects, such as the inherent surface localization of plasmons or the plasmonic lightning-rod effect. Inspired by nanofocusing observed for propagating plasmons, we test the hypothesis that plasmonic antennas with a large cross-section represent a large charge reservoir, enabling large induced charge and field enhancement. Our study reveals that a large charge reservoir is accompanied by large radiative losses, which are the dominant factor, resulting in a low field enhancement.
等离子体天线利用局部表面等离子体来塑造、限制和增强具有亚波长分辨率的电磁场。磁场增强是由各种效应引起的,如等离子体激元固有的表面局域化或等离子体避雷针效应。受观察到的传播等离子体的纳米聚焦的启发,我们验证了具有大截面的等离子体天线代表大电荷库的假设,从而实现了大的感应电荷和场增强。研究表明,大电荷库伴随着大的辐射损失,这是导致低场增强的主要因素。
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引用次数: 0
Lithography-free subwavelength metacoatings for high thermal radiation background camouflage empowered by deep neural network 基于深度神经网络的无光刻亚波长超镀膜高热辐射背景伪装
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0409
Qianli Qiu, Kang Li, Dongjie Zhou, Yuyang Zhang, Jinguo Zhang, Zongkun Zhang, Yan Sun, Lei Zhou, Ning Dai, Junhao Chu, Jiaming Hao
The long wavelength infrared (LWIR) range (8–14 µm) is crucial for thermal radiation detection, necessitating effective camouflage against advanced infrared technologies. Conventional camouflage approaches often rely on complicated photonic structures, facing significant implementation challenges. This study introduces a novel polarization-insensitive and angle-robust metacoating emitter for LWIR camouflage, inversely designed through a deep neural network (DNN) framework. The DNN framework facilitates the automatic optimization of the metacoating’s structural and material parameters. The resulting emitter achieves an average emissivity of 0.96 covering the LWIR range and a low emissivity of 0.25 in the other mid-infrared (MIR) region. Enhanced electromagnetic wave localization and energy dissipation, driven by high-lossy materials like bismuth and titanium, contribute to these properties. Infrared imaging confirms the emitter’s superior camouflage performance, maintain effectiveness at incident angle up to 70° while exhibiting strong polarization independence. This inverse-designed metacoating demonstrates significant potential to advance infrared camouflage technology, providing robust countermeasures against modern, wide-angle, and polarization-sensitive detection systems.
长波红外(LWIR)范围(8-14µm)对于热辐射探测至关重要,需要有效的伪装来对抗先进的红外技术。传统的伪装方法往往依赖于复杂的光子结构,面临着重大的实现挑战。本研究通过深度神经网络(DNN)框架反设计了一种用于LWIR伪装的新型偏振不敏感、角度鲁棒的稳态发射极。深度神经网络框架有助于自动优化涂层的结构和材料参数。由此产生的发射器在低红外范围内的平均发射率为0.96,在其他中红外(MIR)区域的平均发射率为0.25。由铋和钛等高损耗材料驱动的电磁波局部化和能量耗散增强有助于这些特性。红外成像证实了发射器优越的伪装性能,在射入角高达70°时保持有效性,同时表现出很强的偏振独立性。这种反设计的稳消显示了推进红外伪装技术的巨大潜力,为现代广角和偏振敏感探测系统提供了强大的对抗措施。
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引用次数: 0
Chirality-driven all-optical image differentiation 手性驱动的全光学图像微分
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0479
Stefanos Fr. Koufidis, Zeki Hayran, Francesco Monticone, John B. Pendry, Martin W. McCall
Optical analog computing enables powerful functionalities, including spatial differentiation, image processing, and ultrafast linear operations. Yet, most existing approaches rely on resonant or periodic structures, whose performance is strongly wavelength-dependent, imposing bandwidth limitations and demanding stringent fabrication tolerances. Here, to address some of these challenges, we introduce a highly tunable platform for optical processing, composed of two cascaded uniform slabs exhibiting both circular and linear birefringence, whose response exhibits features relevant to optical processing without relying on resonances. Specifically, using a coupled-wave theory framework we show that sharp reflection minima, referred to as spectral holes, emerge from destructive interference between counter-propagating circularly polarized waves in uniform birefringent slabs, and can be engineered solely through parameter tuning without requiring any spatial periodicity. When operated in the negative-refraction regime enabled by giant chirality, the interference response acquires a highly parabolic form around the reflection minimum, giving rise to a polarization-selective Laplacian-like operator that performs accurate spatial differentiation over a broad spatial-frequency range. This functionality is demonstrated through an edge-detection proof of concept. The required material parameters align closely with recent experimental demonstrations of giant, tunable chirality via meta-optics, presenting a promising pathway towards compact and reconfigurable platforms for all-optical pattern recognition and image restoration.
光学模拟计算实现了强大的功能,包括空间区分、图像处理和超快速线性运算。然而,大多数现有的方法依赖于谐振或周期结构,其性能与波长密切相关,施加带宽限制并要求严格的制造公差。在这里,为了解决这些挑战,我们引入了一个高度可调的光学处理平台,由两个级联均匀板组成,具有圆形和线性双折射,其响应表现出与光学处理相关的特征,而不依赖于共振。具体来说,我们使用耦合波理论框架表明,锐利反射极小值(称为光谱洞)出现在均匀双折射平板中反向传播的圆偏振波之间的破坏性干涉中,并且可以通过参数调整单独设计,而不需要任何空间周期性。当在巨大手性的负折射状态下操作时,干涉响应在反射最小值周围获得高度抛物线形式,从而产生偏振选择性拉普拉斯算子,在广泛的空间频率范围内执行精确的空间分异。该功能通过边缘检测概念验证进行演示。所需的材料参数与最近通过元光学获得的巨大可调手性的实验证明密切相关,为全光学模式识别和图像恢复提供了紧凑且可重构的平台。
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引用次数: 0
Wavelength- and angle-multiplexed full-color 3D metasurface hologram 波长和角度复用全彩色三维超表面全息图
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0504
Tetsuhito Omori, Kentaro Iwami
Metasurface holography is a promising technology for next-generation 3D displays, however, conventional approaches for full-colorization have faced challenges. Wavelength multiplexing based on spatial segmentation/interleaving inevitably reduces pixel density, while techniques reliant on the Pancharatnam–Berry (PB) phase are inherently polarization-dependent and have a theoretical efficiency limit of 50 %. In this work, we propose and experimentally demonstrate a design strategy that overcomes these limitations. The core of our approach is a single, polarization-independent meta-atom, realized with cross-shaped nanopillars made of silicon nitride (SiN), which enables the simultaneous and independent phase control over the three primary colors required for faithful 3D image reconstruction. This single-unit strategy surpasses the pixel density limitations of wavelength multiplexing. Furthermore, we combine this innovation with crosstalk elimination via spatial division of target 3D images and precise angle correction to ensure high-fidelity, superimposed reconstruction. Experimentally, we have successfully reconstructed high-definition, noise-free 3D full-color holograms. Our work resolves the critical limitations of pixel density and polarization dependence in metasurface holography, providing a robust pathway toward practical, high-performance holographic displays.
超表面全息技术是一种很有前途的下一代3D显示技术,然而,传统的全彩色方法面临着挑战。基于空间分割/交错的波长复用不可避免地降低了像素密度,而依赖于Pancharatnam-Berry (PB)相位的技术固有地依赖于偏振,并且理论效率限制为50%。在这项工作中,我们提出并实验证明了一种克服这些限制的设计策略。我们的方法的核心是一个单一的,偏振无关的元原子,由氮化硅(SiN)制成的十字形纳米柱实现,它可以同时独立地控制三原色,从而实现忠实的3D图像重建。这种单单元策略超越了波长复用的像素密度限制。此外,我们将这一创新与通过对目标3D图像进行空间划分和精确角度校正来消除串扰相结合,以确保高保真的叠加重建。实验上,我们已经成功地重建了高清晰度、无噪声的3D全彩色全息图。我们的工作解决了超表面全息术中像素密度和偏振依赖的关键限制,为实用的高性能全息显示提供了一条强大的途径。
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引用次数: 0
Synergistic enhancement of magneto-optical response in cobalt-based metasurfaces via plasmonic, lattice, and cavity modes 通过等离子体、晶格和腔模式协同增强钴基超表面的磁光响应
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0495
Alberto Santonocito, Alessio Gabbani, Barbara Patrizi, Guido Toci, Francesco Pineider
Static metasurfaces offer precise control over light but lack reconfigurability, limiting their use in dynamic applications. Introducing tunability via external stimuli, such as magnetic fields, enables active control of their optical response, broadening their functionality. In this computational study, we present the design of a metal–dielectric–metal magnetoplasmonic metasurface with improved magnetic field tunability, surpassing the magneto-optical response of unstructured ferromagnetic materials. This improvement arises from the synergistic effect of localized plasmon excitation, surface lattice resonance, and Fabry–Pérot cavity modes. The design approach presented here consists in matching the characteristic resonance frequencies of the three phenomena by iteratively adjusting the structural parameters of the metasurface: nanostructure size, lattice period, and cavity layer thickness. This optimization led to a substantial enhancement in the reflectance modulation induced by an external magnetic field, with the overall contrast exceeding that of an unstructured cavity by more than an order of magnitude across various regions of the visible to near-infrared spectrum, under relatively low magnetic fields. This unique capability makes the system a promising tool for magnetic field-sensitive optical modulation of reflected light intensity, with potential applications as a laser amplitude modulator.
静态超表面提供对光的精确控制,但缺乏可重构性,限制了它们在动态应用中的使用。通过外部刺激(如磁场)引入可调性,可以主动控制其光学响应,扩大其功能。在这项计算研究中,我们提出了一种具有改进磁场可调性的金属-介电-金属磁等离子体超表面的设计,超越了非结构铁磁材料的磁光响应。这种改进来自于局域等离子激元激发、表面晶格共振和法布里-帕氏腔模式的协同效应。本文提出的设计方法是通过迭代调整超表面的结构参数(纳米结构尺寸、晶格周期和空腔层厚度)来匹配三种现象的特征共振频率。这种优化导致了由外部磁场引起的反射调制的显著增强,在相对较低的磁场下,在可见光到近红外光谱的各个区域,总体对比度超过了非结构化腔的一个数量级以上。这种独特的能力使该系统成为反射光强度的磁场敏感光学调制的有前途的工具,具有作为激光调幅器的潜在应用。
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引用次数: 0
Mitigate the variation of energy band gap with electric field induced by quantum confinement Stark effect via a gradient quantum system for frequency-stable laser diodes 利用梯度量子系统研究了频率稳定激光二极管中量子约束斯塔克效应引起的能带隙随电场的变化
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0380
Yuhong Wang, Yiwei Zhang, Zihan Jiang, Jian Wu, Chunqing Gao
Most light-emitting devices based on quantum-confined structures are commonly utilized as electrically injected devices. However, the electric-field-dependent energy band gap induced by the quantum confinement Stark effect (QCSE) usually hinders the realization of frequency-stable laser devices. This is because the change in the energy band gap, which also means the corresponding change in the photon energy, will result in an electric-field-dependent frequency. Here, we propose a novel approach to mitigate this electric-field-dependent variation in the energy band gap by employing a gradient quantum system. In this system, the energy band edges are inclined due to the action of the indium (In)-segregation effect. This special design can effectively weaken the changes in the band profile associated with the electric field effect and counteract the electric-field-dependent band gap variations within the active region to a certain extent. Experimental studies indicate that the energy band gap of this gradient quantum system remains almost unchanged (<18.9 μeV cm 2 /A) even under a relatively strong applied electric field. Meanwhile, compared with the traditional GaAs quantum well, the efficiency improvement in the band gap stability of our nanowire–well gradient system is 64.1 % and 70.6 % for the TE and TM polarization modes, respectively, which suggests that our proposed gradient quantum structure can significantly mitigate the electric-field-induced change in the energy band gap. This achievement is of great significance for advancing the development of high-performance frequency-stable laser devices in some advanced fields, such as quantum sensing systems and optical communications.
大多数基于量子约束结构的发光器件通常用作电注入器件。然而,由量子约束斯塔克效应(QCSE)引起的电场相关能带隙通常阻碍了频率稳定激光器件的实现。这是因为能带隙的变化,也意味着光子能量的相应变化,将导致与电场相关的频率。在这里,我们提出了一种新的方法,通过使用梯度量子系统来减轻这种电场依赖的能带隙变化。在该体系中,由于铟(In)偏析效应的作用,能带边缘发生倾斜。这种特殊的设计可以有效地减弱与电场效应相关的带廓变化,并在一定程度上抵消有源区内电场相关的带隙变化。实验研究表明,在较强的外加电场作用下,该梯度量子系统的能带几乎保持不变(18.9 μeV cm 2 /A)。同时,与传统的GaAs量子阱相比,我们的纳米线-阱梯度系统在TE和TM极化模式下的带隙稳定性效率分别提高了64.1%和70.6%,这表明我们提出的梯度量子结构可以显著减轻电场引起的带隙变化。这一成果对于推进量子传感系统、光通信等先进领域高性能稳频激光器件的发展具有重要意义。
{"title":"Mitigate the variation of energy band gap with electric field induced by quantum confinement Stark effect via a gradient quantum system for frequency-stable laser diodes","authors":"Yuhong Wang, Yiwei Zhang, Zihan Jiang, Jian Wu, Chunqing Gao","doi":"10.1515/nanoph-2025-0380","DOIUrl":"https://doi.org/10.1515/nanoph-2025-0380","url":null,"abstract":"Most light-emitting devices based on quantum-confined structures are commonly utilized as electrically injected devices. However, the electric-field-dependent energy band gap induced by the quantum confinement Stark effect (QCSE) usually hinders the realization of frequency-stable laser devices. This is because the change in the energy band gap, which also means the corresponding change in the photon energy, will result in an electric-field-dependent frequency. Here, we propose a novel approach to mitigate this electric-field-dependent variation in the energy band gap by employing a gradient quantum system. In this system, the energy band edges are inclined due to the action of the indium (In)-segregation effect. This special design can effectively weaken the changes in the band profile associated with the electric field effect and counteract the electric-field-dependent band gap variations within the active region to a certain extent. Experimental studies indicate that the energy band gap of this gradient quantum system remains almost unchanged (&lt;18.9 μeV cm <jats:sup>2</jats:sup> /A) even under a relatively strong applied electric field. Meanwhile, compared with the traditional GaAs quantum well, the efficiency improvement in the band gap stability of our nanowire–well gradient system is 64.1 % and 70.6 % for the TE and TM polarization modes, respectively, which suggests that our proposed gradient quantum structure can significantly mitigate the electric-field-induced change in the energy band gap. This achievement is of great significance for advancing the development of high-performance frequency-stable laser devices in some advanced fields, such as quantum sensing systems and optical communications.","PeriodicalId":19027,"journal":{"name":"Nanophotonics","volume":"19 1","pages":""},"PeriodicalIF":7.5,"publicationDate":"2025-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145703945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nanodomain poling unlocking backward nonlinear light generation in thin film lithium niobate 纳米畴极化解锁薄膜铌酸锂的后向非线性光产生
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0429
Alessandra Sabatti, Jost Kellner, Robert J. Chapman, Rachel Grange
Nonlinear frequency conversion offers powerful capabilities for applications in telecommunications, signal processing, and computing. Thin-film lithium niobate (TFLN) has emerged as a promising integrated photonics platform due to its strong electro-optic effect and second-order nonlinearity, which can be exploited through periodic poling. However, conventional poling techniques in x-cut TFLN are constrained to minimum period sizes on the order of microns, restricting access to highly phase-mismatched interactions such as counter- and backward-propagating frequency conversion. In this work, we demonstrate scalable periodic poling of x-cut TFLN with domains periods as short as 215 nm and realize devices that support both counter- and back-propagating phase matching. We estimate conversion efficiencies of 1,474 %/W/cm 2 and 45 %/W/cm 2 for the two interaction types, respectively. Sum frequency generation measurements confirm that the nonlinear generation takes place in the desired direction. Furthermore, we report spontaneous parametric down conversion for the counter-propagating configuration and, for the first time, for a backward propagating device. This breakthrough provides unprecedented control over engineering of ferroelectric domain geometries in TFLN, leading into the generation of photon pairs with precisely tailored spatial and spectral characteristics. Such capabilities hold strong potential for advancing quantum signal processing, scalable quantum computing architectures, and precision quantum metrology.
非线性变频为电信、信号处理和计算等领域的应用提供了强大的能力。薄膜铌酸锂(TFLN)由于其强大的电光效应和二阶非线性特性而成为一种有前途的集成光子学平台。然而,在x-cut TFLN中,传统的轮询技术被限制在微米量级的最小周期尺寸,限制了访问高度相位不匹配的相互作用,如反向传播和反向传播频率转换。在这项工作中,我们展示了x-cut TFLN的可扩展周期性轮调,其域周期短至215 nm,并实现了支持反向和反向传播相位匹配的器件。我们估计这两种交互类型的转换效率分别为1474% /W/ cm2和45% /W/ cm2。和频率产生测量证实非线性产生发生在期望的方向上。此外,我们报道了反传播结构的自发参数下转换,并首次报道了反向传播装置的自发参数下转换。这一突破为TFLN中铁电畴几何结构的工程控制提供了前所未有的控制,从而产生了具有精确定制空间和光谱特征的光子对。这种能力在推进量子信号处理、可扩展量子计算架构和精密量子计量方面具有强大的潜力。
{"title":"Nanodomain poling unlocking backward nonlinear light generation in thin film lithium niobate","authors":"Alessandra Sabatti, Jost Kellner, Robert J. Chapman, Rachel Grange","doi":"10.1515/nanoph-2025-0429","DOIUrl":"https://doi.org/10.1515/nanoph-2025-0429","url":null,"abstract":"Nonlinear frequency conversion offers powerful capabilities for applications in telecommunications, signal processing, and computing. Thin-film lithium niobate (TFLN) has emerged as a promising integrated photonics platform due to its strong electro-optic effect and second-order nonlinearity, which can be exploited through periodic poling. However, conventional poling techniques in x-cut TFLN are constrained to minimum period sizes on the order of microns, restricting access to highly phase-mismatched interactions such as counter- and backward-propagating frequency conversion. In this work, we demonstrate scalable periodic poling of x-cut TFLN with domains periods as short as 215 nm and realize devices that support both counter- and back-propagating phase matching. We estimate conversion efficiencies of 1,474 %/W/cm <jats:sup>2</jats:sup> and 45 %/W/cm <jats:sup>2</jats:sup> for the two interaction types, respectively. Sum frequency generation measurements confirm that the nonlinear generation takes place in the desired direction. Furthermore, we report spontaneous parametric down conversion for the counter-propagating configuration and, for the first time, for a backward propagating device. This breakthrough provides unprecedented control over engineering of ferroelectric domain geometries in TFLN, leading into the generation of photon pairs with precisely tailored spatial and spectral characteristics. Such capabilities hold strong potential for advancing quantum signal processing, scalable quantum computing architectures, and precision quantum metrology.","PeriodicalId":19027,"journal":{"name":"Nanophotonics","volume":"22 1","pages":""},"PeriodicalIF":7.5,"publicationDate":"2025-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145703940","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Broadband variable beamsplitter made of a subwavelength-thick metamaterial 由亚波长厚度的超材料制成的宽带可变分束器
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0512
Yasuhiro Tamayama, Yugo Shibata
We propose and validate a method for designing a broadband variable beamsplitter using a metamaterial with subwavelength thickness. Through theoretical analysis and numerical simulations, we demonstrate that the reflectance-to-transmittance ratio of a single-layer resonant metamaterial at its resonance frequency can be controlled by varying the spatial arrangement of the constituent meta-atoms, without altering their individual structures. Building on this theory, we further conjecture a method for achieving a frequency-independent reflectance-to-transmittance ratio across a broad spectral range. Numerical results confirm that a metamaterial with subwavelength thickness can be engineered to function as a broadband variable beamsplitter using the proposed approach. These findings contribute to the advancement of techniques for splitting and combining electromagnetic waves in compact systems.
我们提出并验证了一种利用亚波长厚度的超材料设计宽带可变分束器的方法。通过理论分析和数值模拟,我们证明了单层共振超材料在其共振频率下,可以通过改变组成元原子的空间排列来控制其反射率与透射率,而不改变其单个结构。在此理论的基础上,我们进一步推测了一种在宽光谱范围内实现与频率无关的反射率-透射比的方法。数值结果证实,利用该方法可以设计具有亚波长厚度的超材料作为宽带可变分束器。这些发现有助于在紧凑系统中分裂和结合电磁波的技术的进步。
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引用次数: 0
AI-based analysis algorithm incorporating nanoscale structural variations and measurement-angle misalignment in spectroscopic ellipsometry 基于人工智能的椭圆偏振光谱结构变化与测量角度偏差分析算法
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0515
Juwon Jung, Leeju Hwang, Nagyeong Kim, Kibaek Kim, Seri Kim, Jongkyoon Park, Won Chegal, Yong Jai Cho, Young-Joo Kim
Spectroscopic ellipsometry (SE) is a powerful, non-destructive technique for nanoscale structural characterization. However, conventional SE data analysis typically assumes perfectly periodic specimen structures, overlooking fabrication-induced structural variations and thereby reducing the accuracy of predicted structural parameters. We have developed an enhanced analysis framework that explicitly accounts for both nanoscale structural variations and measurement-angle misalignment by introducing the concept of an average Mueller matrix (MM), which represents statistical distributions of nanoscale structures. In addition, we introduce a high-throughput MM-generation neural network that enables rapid data preparation by approximating rigorous coupled-wave analysis (RCWA) simulations for large numbers of specimens across a broad range of structural parameters. The model achieves a mean-squared error of 9.99 × 10 −8 MSE when validated against RCWA-simulated MM data for one-dimensional SiO 2 nanogratings. Finally, we apply our analysis framework to experimentally measured MM data, achieving highly accurate dimensional predictions with errors below 0.4 nm when compared with structural parameters measured by scanning electron microscopy (SEM). We believe that this analysis algorithm significantly advances the potential for high-precision SE-based metrology in semiconductor, photonic, and display manufacturing.
光谱椭偏法(SE)是一种强大的、非破坏性的纳米结构表征技术。然而,传统的SE数据分析通常假设完美的周期性试样结构,忽略了制造引起的结构变化,从而降低了预测结构参数的准确性。我们已经开发了一个增强的分析框架,通过引入平均穆勒矩阵(MM)的概念,明确地解释了纳米级结构的变化和测量角度偏差,这代表了纳米级结构的统计分布。此外,我们还引入了一个高通量mm生成神经网络,通过近似严格的耦合波分析(RCWA)模拟,在广泛的结构参数范围内对大量样品进行快速数据准备。通过rcwa模拟的一维sio2纳米光栅的MM数据验证,该模型的均方误差为9.99 × 10−8 MSE。最后,我们将我们的分析框架应用于实验测量的MM数据,与扫描电子显微镜(SEM)测量的结构参数相比,实现了高度精确的尺寸预测,误差小于0.4 nm。我们相信,这种分析算法显著提高了半导体、光子和显示制造业中高精度se计量的潜力。
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引用次数: 0
Modelling Purcell enhancement of metasurfaces supporting quasi -bound states in the continuum 连续介质中支持准束缚态的超表面的Purcell增强模型
IF 7.5 2区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-08 DOI: 10.1515/nanoph-2025-0456
Joshua T. Y. Tse, Taisuke Enomoto, Shunsuke Murai, Katsuhisa Tanaka
Bound states in the continuum (BIC) exhibit extremely high quality factors due to the lack of radiation loss and thus are widely studied for Purcell enhancement. However, a closer examination reveals that the enhancement is absent at the BIC due to the lack of out-coupling capability, but the strong enhancement is only observed at nearby configuration, namely quasi -BIC. To study this unique behavior of the Purcell enhancement near BIC, we built an analytical model with spectral parameters to analyze the Purcell enhancement on metasurfaces supporting quasi -BIC. Our analytical model predicts the average Purcell enhancement by metasurfaces coupled to a luminescent medium, utilizing parameters that are formulated through the temporal coupled-mode theory and can be derived from measured spectra such as transmissivity and reflectivity. We analyzed several metasurfaces supporting quasi -BIC numerically and experimentally to study the behavior of the spectral parameters as well as the resultant Purcell enhancement. We formulated the interdependence between the quality factor and the out-coupling efficiency, and revealed the existence of optimal detuning from the BIC. We also discovered that our findings are general and applicable towards realistic metasurfaces that are lossy and/or asymmetric. This discovery provides an intuitive model to understand the modal qualities of quasi -BIC and will facilitate optimization of quasi -BIC for luminescence enhancement applications.
连续介质中的束缚态(BIC)由于缺乏辐射损失而表现出极高的质量因子,因此被广泛研究用于Purcell增强。然而,仔细观察发现,由于缺乏外耦合能力,在BIC处没有增强,而只在附近的结构,即准-BIC处观察到强增强。为了研究在BIC附近Purcell增强的这种独特行为,我们建立了一个带有光谱参数的分析模型来分析支持准BIC的元表面上的Purcell增强。我们的分析模型预测了耦合到发光介质的超表面的平均珀塞尔增强,利用通过时间耦合模式理论制定的参数,可以从测量的光谱(如透射率和反射率)中得出。我们通过数值和实验分析了几种支持准bic的超表面,以研究光谱参数的行为以及由此产生的Purcell增强。我们建立了质量因子与出耦效率之间的相互依赖关系,并揭示了从BIC出发的最优失谐的存在。我们还发现,我们的发现是普遍的,适用于现实的元表面是有损和/或不对称。这一发现为理解准bic的模态质量提供了一个直观的模型,并将促进准bic在发光增强应用中的优化。
{"title":"Modelling Purcell enhancement of metasurfaces supporting quasi -bound states in the continuum","authors":"Joshua T. Y. Tse, Taisuke Enomoto, Shunsuke Murai, Katsuhisa Tanaka","doi":"10.1515/nanoph-2025-0456","DOIUrl":"https://doi.org/10.1515/nanoph-2025-0456","url":null,"abstract":"Bound states in the continuum (BIC) exhibit extremely high quality factors due to the lack of radiation loss and thus are widely studied for Purcell enhancement. However, a closer examination reveals that the enhancement is absent at the BIC due to the lack of out-coupling capability, but the strong enhancement is only observed at nearby configuration, namely <jats:italic>quasi</jats:italic> -BIC. To study this unique behavior of the Purcell enhancement near BIC, we built an analytical model with spectral parameters to analyze the Purcell enhancement on metasurfaces supporting <jats:italic>quasi</jats:italic> -BIC. Our analytical model predicts the average Purcell enhancement by metasurfaces coupled to a luminescent medium, utilizing parameters that are formulated through the temporal coupled-mode theory and can be derived from measured spectra such as transmissivity and reflectivity. We analyzed several metasurfaces supporting <jats:italic>quasi</jats:italic> -BIC numerically and experimentally to study the behavior of the spectral parameters as well as the resultant Purcell enhancement. We formulated the interdependence between the quality factor and the out-coupling efficiency, and revealed the existence of optimal detuning from the BIC. We also discovered that our findings are general and applicable towards realistic metasurfaces that are lossy and/or asymmetric. This discovery provides an intuitive model to understand the modal qualities of <jats:italic>quasi</jats:italic> -BIC and will facilitate optimization of <jats:italic>quasi</jats:italic> -BIC for luminescence enhancement applications.","PeriodicalId":19027,"journal":{"name":"Nanophotonics","volume":"208 1","pages":""},"PeriodicalIF":7.5,"publicationDate":"2025-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145703942","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Nanophotonics
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