Over the past decade, metamaterials have emerged as a revolutionary class of engineered materials, capturing significant attention across diverse scientific domains. Metasurfaces, composed of two-dimensional arrays of engineered meta-atoms, offer precise control over electromagnetic wave amplitude, phase, and polarization at subwavelength scales. This capability makes them an ideal platform for the design of ultra-compact, high-performance components in the THz regime. A critical challenge in transitioning these innovations to practical applications lies in the scalable fabrication of large-area, uniform, and high-resolution micro/nanostructures compatible with THz operation. This review explores the current state-of-the-art fabrication techniques for THz metasurfaces, including lithography, two-photon polymerization, 3D printing, and other advanced fabrication techniques. Each technique’s applicability, advantages, and limitations in achieving structural precision and optimal performance are highlighted. Additionally, challenges in the THz metasurface fabrication are addressed, along with potential solutions to guide future advancements in high-performance THz devices.
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