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Glass-engraved metasurfaces: the path to ultra-low reflectance, extreme broadband performance, and high acceptance angle for high power laser applications 玻璃雕刻超表面:超低反射率、极宽带性能和高接收角的路径,适用于高功率激光应用
Pub Date : 2022-12-02 DOI: 10.1117/12.2641631
N. Ray, J. Yoo, Hoang T. Nguyen, Michael A. Johnson, E. Feigenbaum
Recent work utilizing metal etching masks to fabricate substrate-engraved metasurfaces have been handicapped by the available etching depth, restricting the bandwidth of antireflective performance. Advances made to etch mask technology to facilitate deeper etching will be discussed here, and the taller ensuant metasurface features will be presented. The antireflective performance of these high aspect ratio structures (broad acceptance angles and broadband antireflective performance for both polarizations) will be discussed.
最近利用金属蚀刻掩模制造基板雕刻超表面的工作受到可用蚀刻深度的限制,限制了抗反射性能的带宽。本文将讨论刻蚀掩模技术的进展,以促进更深的刻蚀,并介绍更高的超表面特征。这些高纵横比结构的抗反射性能(宽接收角和宽频带抗反射性能的两个偏振)将被讨论。
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引用次数: 0
RAR nano-textured diamond pulsed LIDT RAR纳米纹理金刚石脉冲LIDT
Pub Date : 2022-12-02 DOI: 10.1117/12.2641596
A. Manni, B. MacLeod, D. S. Hobbs
Subwavelength, low-haze, anti-reflective (AR) nano-textured surfaces are an effective replacement for thin-film AR coatings (TFARCs) with the potential to increase reliability and minimize thermo-optic effects in kW-class diamond-based laser systems. Etched directly into optical surfaces, AR nano-textured surfaces can yield high optical damage resistance combined with high transmission, low back reflection, and low absorption values equivalent to the bulk substrate material. In this initial study, Random AR (RAR) nano-structures were etched into monocrystalline chemical vapor deposited (CVD) diamond windows. Photothermal common-path interferometry (PCI) measurements at 1064nm were conducted in order to characterize the level of absorption at the surfaces and through the bulk of diamond substrates. Nano-second pulsed laser induced damage threshold (LiDT) measurements at 1064nm were conducted, and damage sites were analyzed via scanning electron microscopy (SEM) to understand damage mechanisms in both as-polished and RAR nano-textured diamond samples.
亚波长、低雾度、抗反射(AR)纳米纹理表面是薄膜AR涂层(TFARCs)的有效替代品,具有提高可靠性和最小化kw级金刚石基激光系统热光效应的潜力。直接蚀刻到光学表面上,AR纳米纹理表面可以产生高的光学损伤抗力,同时具有高透射率、低背反射和低吸收值,相当于大块衬底材料。在这项初步研究中,随机AR (RAR)纳米结构被蚀刻到单晶化学气相沉积(CVD)金刚石窗口中。光热共路干涉测量(PCI)在1064nm进行测量,以表征在表面和通过金刚石衬底的吸收水平。在1064nm处进行了纳秒脉冲激光诱导损伤阈值(LiDT)测量,并通过扫描电子显微镜(SEM)分析了损伤部位,以了解抛光和RAR纳米纹理金刚石样品的损伤机制。
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引用次数: 0
Nonlinear optical switching in thin film coatings in relation to the damage threshold 薄膜涂层中非线性光开关与损伤阈值的关系
Pub Date : 2022-12-02 DOI: 10.1117/12.2642756
M. Steinecke, K. Kiedrowski, M. Jupé, A. Wienke, D. Ristau
We demonstrate a novel concept for an all-optical switch based on the optical Kerr-effect in thin film interference coatings. The switching between transmittance and reflectance relies on highly Kerr-active coating materials in combination with large internal intensity enhancement in thin film interference coatings. The paper investigates the switching performance as well as its relation to the laser induced damage threshold of these novel components. A modulation depth of 30 % was achieved without damage to the component, which very promising for later applications as power limiters or mode locking components.
我们展示了一种基于薄膜干涉涂层中光学克尔效应的全光开关的新概念。透过率和反射率之间的切换依赖于高克尔活性涂层材料,并结合薄膜干涉涂层中较大的内部强度增强。本文研究了这些新型元件的开关性能及其与激光损伤阈值的关系。在不损坏元件的情况下实现了30%的调制深度,这对于后来的功率限制器或模式锁定元件的应用非常有希望。
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引用次数: 0
Comparison of high power sputtered dielectric mirrors for PW laser PW激光器高功率溅射介质反射镜的比较
Pub Date : 2022-12-02 DOI: 10.1117/12.2642134
T. Willemsen, T. Gross, M. Gauch, H. Ehlers, D. Kramer, P. Velpula, W. Ebert
Latest advances of high intensity laser facilities enable the beam transport of petawatt laser pulses and can provide novel fundamental insights in high energy plasma physics or laser fusion. The very high peak intensities put enormous demands on the required large sized optics. Beam transport mirrors reflect pulses with only several tens of fs and maintain their phase while providing best possible laser induced damage threshold. State of the art, such mirrors are mostly manufactured by thermal evaporation techniques as they provide a large and uniform deposition area. Their porous layer structure causes changing spectral characteristics and wavefront when vacuum-air cycled. Especially large sized mirrors can show crazing and thereby decrease up-time of PW beamlines. In contrast, sputtered layers are very compact and provide non changing characteristics. Stable and reproducible sputter processes enable the deposition of more complex design structures necessary for further optimization of the laser induced damage threshold. However, deposition rate is slow and an uniform large sized area difficult to achieve for sputtered coatings. In our study, we show a self-constructed and built-up ion beam sputtering (IBS) machine capable to deposit large sized substrates up to a diameter of 550 mm. A design study is presented to evaluate best HR810nm mirror to meet demanding spectral requirements and providing maximized laser damage threshold for HAPLS at ELI beamlines. In the end, a field optimized design is applied with a measured LIDT of 0.9 J/cm2 at 42 fs and 1 kHz. This design is used to manufacture beam transport mirrors for HAPLS applying IBS.
高强度激光设备的最新进展使激光脉冲的光束传输成为可能,并为高能等离子体物理或激光聚变提供了新的基础见解。非常高的峰值强度对所需的大尺寸光学器件提出了巨大的要求。光束传输镜反射只有几十秒的脉冲,并保持其相位,同时提供最好的激光诱导损伤阈值。目前,这种反射镜大多是通过热蒸发技术制造的,因为它们提供了一个大而均匀的沉积区域。它们的多孔层结构导致真空-空气循环时光谱特性和波前发生变化。特别是大尺寸的反射镜会出现裂纹,从而减少PW光束线的正常运行时间。相比之下,溅射层非常紧凑,并提供不变的特性。稳定和可重复的溅射过程使沉积更复杂的设计结构成为进一步优化激光诱导损伤阈值所必需的。然而,溅射涂层的沉积速度较慢,且难以形成均匀的大面积。在我们的研究中,我们展示了一个自行构建的离子束溅射(IBS)机器,能够沉积直径达550毫米的大尺寸衬底。提出了一项设计研究,以评估最佳的HR810nm反射镜,以满足苛刻的光谱要求,并为ELI光束线的HAPLS提供最大的激光损伤阈值。最后,应用了一种现场优化设计,在42 fs和1 kHz下测量LIDT为0.9 J/cm2。本设计用于利用IBS技术制造HAPLS光束传输镜。
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引用次数: 0
Sub-ps MHz green laser-induced contamination on dielectric coatings in air 亚ps兆赫兹绿色激光对空气中介质涂层的污染
Pub Date : 2022-12-02 DOI: 10.1117/12.2642516
M. Stehlik, J. Zideluns, F. Wagner, F. Lemarchand, Camille Petite, A. Moreau, A. Lereu, M. Minissale, J. Lumeau, L. Gallais
Laser-induced contamination (LIC) degrades the performance of optical components and can result in optical losses or even laser-induced damage. LIC deposit formation limits reliable operation of high repetition rate industrial lasers. In this work, we investigate LIC growth on dielectric oxide thin films in air environment irradiated by MHz sub-ps laser at 515 nm. We study the LIC growth dynamic in dependence on thin film deposition method, thin film material and thin film thickness.
激光诱导污染(Laser-induced pollution, LIC)会降低光学元件的性能,导致光学损耗甚至激光损伤。LIC沉积层的形成限制了高重复率工业激光器的可靠运行。本文研究了在515 nm波长的MHz亚ps激光照射下,介质氧化物薄膜上LIC的生长。我们研究了薄膜沉积方法、薄膜材料和薄膜厚度对LIC生长动态的影响。
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引用次数: 0
Development of a novel large damage site mitigation technique 一种新型的大损伤部位缓解技术的发展
Pub Date : 2022-12-02 DOI: 10.1117/12.2642467
Allison E. M. Browar, E. Feigenbaum, I. Bass, J. Vickers, G. Guss, W. Carr
We present the development of carefully tailored shape - increased size (0.9 mm diameter) input surface mitigation sites that shadow and thus supress damage growth on the exit surface of optics. Results from downstream intensification measurements and laser induced damage experiments are presented. The results show a 6X reduction in expanding wave intensification on the exit surface of an optic, being the dominant damage onset mechanism. The tailored rounded cone design can withstand over 30 J/cm2 sub aperture input surface fluence. A significant decrease in laser induced damage initiation and growth was observed compared to shadow cones with linear profiles at input fluences higher than 10 J/cm2.
我们提出了精心定制的形状-增加尺寸(0.9 mm直径)的输入表面缓解点的发展,这些缓解点可以遮蔽并从而抑制光学出口表面的损伤增长。给出了下游强化测量和激光诱导损伤实验的结果。结果表明,光学元件出口表面的膨胀波强度降低了6倍,这是主要的损伤发生机制。量身定制的圆锥形设计可以承受超过30 J/cm2的亚孔径输入表面影响。与线性轮廓的阴影锥相比,在输入影响大于10 J/cm2时,激光诱导损伤的发生和生长显著减少。
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引用次数: 1
Performance of multiple cone arrays as shadow cone blockers on NIF 多锥体阵列在NIF上作为阴影锥体阻挡器的性能
Pub Date : 2022-12-02 DOI: 10.1117/12.2642917
I. Bass, E. Feigenbaum, R. Raman, K. Palma, J. Vickers, G. Guss, M. Norton, W. Carr
Exit surface damage on high value fused silica final optics on the NIF is sometimes too large to be mitigated with the currently used technique of removing the damage by CO2 laser machining a cone into the surface. To extend the service life of the optic, a 2 cm diameter shadow is created at the damage using a programmable spatial light modulator at the front end of the laser system. The use of this shadow technique is limited by the obscuration due to the large size of the shadow. An alternative approach is to create the shadow by machining a cone on the input surface opposite the damage. This reduces the shadow a rea, and thus the obscuration by several orders of magnitude. Additional benefits in service life of optics would be realized if the shadow cone size could be increased from current 600 m diameter. There are fabrication challenges encountered when the cone size is increased. To overcome this problem, the shadow performance of a hexagonal array of four 600 m diameter cones has been tested. We report on shadow leakage, bulk damage, and exit surface intensification issues presented by this array and techniques to address those issues.
NIF上高价值熔融石英最终光学器件的出口表面损伤有时太大,无法用目前使用的CO2激光加工锥体表面去除损伤的技术来减轻。为了延长光学的使用寿命,在激光系统的前端使用可编程空间光调制器在损坏处创建一个直径2厘米的阴影。这种阴影技术的使用受到由于阴影的大尺寸而造成的模糊的限制。另一种方法是通过在损伤对面的输入表面上加工一个锥体来创建阴影。这减少了阴影面积,从而减少了几个数量级的遮挡。如果阴影锥的直径可以从目前的600m增加,光学元件的使用寿命将得到额外的好处。当锥体尺寸增大时,会遇到制造方面的挑战。为了克服这个问题,我们测试了四个直径为600m的六边形锥体阵列的阴影性能。我们报告了该阵列提出的阴影泄漏,散装损坏和出口表面强化问题以及解决这些问题的技术。
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引用次数: 0
1077-nm, CW mirror thin film damage competition 1077nm,连续波镜面薄膜损伤竞赛
Pub Date : 2022-12-02 DOI: 10.1117/12.2641371
R. Negres, C. Stolz, S. DeFrances, D. Bernot, J. Randi, Jeffrey G. Thomas
This year’s competition proposed to survey the damage resistance of near-IR high reflectors designed for continuous-wave (CW) laser applications. The requirements for the coatings were a minimum reflection of 99.5% at normal incidence for 1077-nm light. The participants in this effort selected the coating materials, coating design, and deposition method. Samples were damage tested at a single testing facility using a kW fiber laser source capable of delivering up to 10 MW/cm2 peak irradiance on target. A double blind test assured sample and submitter anonymity. The damage performance results, sample rankings, details of the deposition processes, coating materials and substrate cleaning methods are shared. We found that multilayer coatings using tantala or hafnia as high index materials were top performers under CW laser exposure within several coating deposition groups. Namely, dense coatings by ion-beam sputtering (IBS), plasma-enhanced atomic layer deposition (PEALD) and magnetron sputtering (MS) exhibited the lowest absorption & temperature rise upon CW laser irradiation without damage onset up to the maximum power density level available in this study.
今年的竞赛旨在调查用于连续波(CW)激光应用的近红外高反射器的抗损伤性。对涂层的要求是在1077 nm光的正常入射下,最低反射率为99.5%。参与者选择了涂层材料、涂层设计和沉积方法。样品在单个测试设备上使用kW光纤激光源进行损伤测试,该光纤激光源能够在目标上提供高达10 MW/cm2的峰值辐照度。双盲测试保证了样本和提交者的匿名性。损坏性能结果、样品排名、沉积过程的细节、涂层材料和基材清洁方法都是共享的。我们发现,在连续激光照射下,以钽或铪为高折射率材料的多层涂层在几个涂层沉积组中表现最好。也就是说,离子束溅射(IBS)、等离子体增强原子层沉积(PEALD)和磁控溅射(MS)的致密涂层在连续激光照射下具有最低的吸收和温升,并且在达到本研究中可用的最大功率密度水平时不会发生损伤。
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引用次数: 0
An automated damage inspection microscopy system for National Ignition Facility optics 国家点火装置光学系统的自动损伤检测显微系统
Pub Date : 2022-12-02 DOI: 10.1117/12.2642181
Christopher F. Miller, D. Cross, J. Senecal, R. Clark, C. Amorin, L. Kegelmeyer, C. Carr, Ernest Truscott
Identifying laser induced damage on the surface of optical components for the purpose of tracking its growth over time and repairing it is an important part of the economical operation of the National Ignition Facility (NIF). Optics installed on NIF are monitored in situ for damage growth and can be removed as needed for repair and re-use. An ex-situ automated microscopy system is used to inspect full sized NIF optics allowing for the detection of damage sites <10 μm in diameter. Due to the various morphology of laser damage, several algorithms are used to analyze the microscopy data and identify damage regardless of size, while ignoring features not related to laser damage. This system has significantly increased the lifetime of NIF final optics (≈2.3x) thereby extending beyond the capabilities of the in-situ inspection by itself.
识别光学元件表面的激光损伤,跟踪其随时间的增长并进行修复,是国家点火装置经济运行的重要组成部分。安装在NIF上的光学元件可在原位监测损伤生长情况,并可根据需要拆除以进行修复和重新使用。非原位自动显微镜系统用于检查全尺寸NIF光学器件,允许检测直径<10 μm的损伤部位。由于激光损伤形态的多样性,有几种算法用于分析显微镜数据并识别与尺寸无关的损伤,而忽略了与激光损伤无关的特征。该系统显著增加了NIF最终光学元件的寿命(≈2.3倍),从而超出了原位检测本身的能力。
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引用次数: 0
Sub-ps 1030 nm laser-induced damage threshold evaluation of pulsed-laser deposited sesquioxides and magnetron-sputtered metal oxide optical coatings 脉冲激光沉积倍半氧化物和磁控溅射金属氧化物光学涂层的亚ps 1030nm激光诱导损伤阈值评估
Pub Date : 2022-12-02 DOI: 10.1117/12.2641792
M. Stehlik, G. Govindassamy, J. Zideluns, F. Lemarchand, F. Wagner, J. Lumeau, J. Mackenzie, L. Gallais
Crystalline sesquioxide films (Sc2O3, Y2O3, Lu2O3) produced by pulsed-laser deposition were examined for laser damage resistance with pulses of 500 fs duration, at a wavelength of 1030 nm and at a 10 Hz repetition rate. Comparable tests were performed with amorphous magnetron-sputtered thin films (SiO2, HfO2, Nb2O5). We found the laser-induced damage thresholds of the sesquioxides are close to those of HfO2 in the multi-pulse test regime. The results are the basis for designs of damage resistant re ective components used in ultrashort-pulse lasers.
研究了脉冲激光沉积制备的晶体倍半氧化物薄膜(Sc2O3, Y2O3, Lu2O3)在波长为1030 nm,重复频率为10 Hz的500 fs脉冲下的抗激光损伤性能。用非晶磁控溅射薄膜(SiO2, HfO2, Nb2O5)进行了类似的测试。我们发现倍半氧化物的激光损伤阈值与HfO2的激光损伤阈值相近。研究结果为设计用于超短脉冲激光器的抗损伤反射元件提供了依据。
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引用次数: 0
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Laser Damage
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