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Influence of laser beam size on the determination of LIDT 激光光束大小对测定 LIDT 的影响
Pub Date : 2023-11-24 DOI: 10.1117/12.2686177
M. Mureșan, J. Vanda, Saulius Pakalnis, Martin Mydlář, J. Brajer
With numerous manufacturers providing different laser-induced damage threshold (LIDT) values in the nanosecond regime, a simple ranking based on numbers alone may not provide a clear picture of the best choice. Variations in testing procedures, albeit following the ISO 21254 standard, further complicate the selection process. By employing a comprehensive 1-on-1 test procedure, it becomes possible to observe various parameters that influence LIDT values. When sharing test results within the community, adhering to good practices and meticulous attention to the error budget and its contributors are crucial. Above all, laser optics users must comprehend the intricacies of laser-induced damage testing and seek detailed information instead of relying solely on numerical comparisons. This study explores the challenges and considerations in selecting and testing laser optics, emphasizing the importance of a comprehensive approach.
由于众多制造商提供的纳秒级激光诱导损伤阈值(LIDT)各不相同,仅根据数字进行简单的排序可能无法清楚地说明最佳选择。尽管测试程序遵循 ISO 21254 标准,但其中的差异使选择过程更加复杂。通过采用全面的 1 对 1 测试程序,可以观察到影响 LIDT 值的各种参数。在社区内共享测试结果时,遵守良好的操作规范、仔细关注误差预算及其影响因素至关重要。最重要的是,激光光学用户必须了解激光诱导损伤测试的复杂性,并寻求详细信息,而不是仅仅依赖数字比较。本研究探讨了选择和测试激光光学器件的挑战和注意事项,强调了综合方法的重要性。
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引用次数: 0
Temporally and spatially resolved photoluminescence of laser-induced damage sites of fused silica 激光诱导熔融石英损伤点的时间和空间分辨光致发光
Pub Date : 2023-11-24 DOI: 10.1117/12.2683719
Jae Hyuck Yoo, Yoonsoo Rho, Christopher F. Miller, Robin E. Yancey, Ted A. Laurence, C. W. Carr
We present a temporally and spatially resolved photoluminescence (PL) measurement technique developed to rapidly characterize fused silica damage sites and determine their propensity to grow under subsequent laser irradiation. A diffusional model is used to describe the observed PL dynamics and correlation to the local damage morphologies. We believe that our measurement and analysis approach can allow rapid identification of growth-prone damage sites, providing a pathway to fast, non-destructive predictions of laser-induced damage growth and enable selective damage site mitigation which will greatly reduce the time required to recycle NIF’s optics.
我们介绍了一种时间和空间分辨光致发光(PL)测量技术,该技术用于快速确定熔融石英损伤点的特征,并确定其在后续激光照射下的生长倾向。我们使用扩散模型来描述观察到的光致发光动态以及与局部损伤形态的相关性。我们相信,我们的测量和分析方法可以快速识别易生长的损伤点,为快速、非破坏性地预测激光诱导的损伤生长提供途径,并实现选择性损伤点缓解,这将大大缩短回收 NIF 光学器件所需的时间。
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引用次数: 0
Study of high-performance IBS coatings for near-IR laser applications 用于近红外激光应用的高性能 IBS 涂层研究
Pub Date : 2023-11-24 DOI: 10.1117/12.2685243
Alex Ribeaud, Jürgen Pistner, Mathias Soulier, Julien Lumeau, Laurent Gallais, Rico Benz, Christoph Sturzenegger, B. Eiermann, Christian Mühlig, Thomas Gischkat, Sven Schröder
In many laser applications, there is a higher and higher demand for more efficient coatings with reduced losses, in terms of absorption and scattering as those are contributing factors to diverse laser damage regimes. Ion Beam Sputtering (IBS) is a known technique to provide such high optical quality thin films. Indeed, it allows to achieve high density layers with low absorption and scattering. In this work, various coatings were developed using Bühler IBS technology. Then, total losses were measured using Cavity Ring Down, absorption using Laser Induced Deflection or Laser thermography, and Total Integrated Scatter using dedicated scatterometers. A correlation between the effect of the chosen deposition method and parameters and the measurement performances were made with the aim of a better understanding of the level and the origin of losses in the coatings. Finally, highly reflecting mirror coatings for 1064 nm wavelength were fabricated with different designs and deposition parameters. The results of the different measurements of absorption, scattering and total losses using different equipment are presented and discussed.
在许多激光应用中,由于吸收和散射是造成各种激光损伤的因素,因此对减少损耗的高效涂层的需求越来越高。离子束溅射 (IBS) 是一种已知的技术,可提供这种高光学质量的薄膜。事实上,它可以实现低吸收和低散射的高密度镀层。在这项工作中,使用布勒 IBS 技术开发了各种涂层。然后,使用腔环向下法测量了总损耗,使用激光诱导偏转或激光热成像仪测量了吸收,并使用专用散射计测量了总综合散射。所选沉积方法和参数的影响与测量性能之间存在相关性,目的是更好地了解涂层中损耗的水平和来源。最后,采用不同的设计和沉积参数制作了波长为 1064 nm 的高反射镜涂层。本文介绍并讨论了使用不同设备对吸收、散射和总损耗进行不同测量的结果。
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引用次数: 0
Laser-induced damage of CaF2 optics at 193 nm 193 纳米波长下 CaF2 光学元件的激光诱导损伤
Pub Date : 2023-11-24 DOI: 10.1117/12.2685720
Jue Wang, Gerald P. Cox, Keith J. Donohue, Ronald W. Davis, Ying Shi, Cody V. Cushman, A. Rezikyan, Galan G. Moore, James E. Tingley, Keith J. Becken, Matthew R. Ross, Michael D. Thomas
Laser-induced damage (LID) tests were conducted on CaF2 optics at 193 nm using ISO S-on-1 method with the S varying from a standard 200 to 103, 104, and 105 shots/site and fluences ranging from 0.1 J/cm2 to 4.0 J/cm2. Using a flat-top beam profile and a beam footprint of 250 μm × 250 μm, absorption-derived LID was observed on the standard 200-on-1 test. Defect-initiated LID was detected by increasing the pulse count with a reduced fluence. The absorption-driven LID was attribute to subsurface damage and two-photon absorption. The former was eliminated by using a FemtoFinish polishing process. The latter was experimentally determined by using laser calorimetric measurement. Improved crystal bulk and surface finishing quality were confirmed by X-ray diffraction and laser calorimetric measurement. Accelerated lifetime damage test (ALDT) was further conducted with an increased pulse count up to 106 shots/site. The results confirm an enhanced lifespan prediction of the demanding laser optics.
使用 ISO S-on-1 方法在 193 nm 波长的 CaF2 光学器件上进行了激光诱导损伤(LID)测试,S 值从标准的 200 到 103、104 和 105 次/点,流量从 0.1 J/cm2 到 4.0 J/cm2。使用平顶光束轮廓和 250 μm × 250 μm 的光束足迹,在标准的 200-on-1 试验中观察到了由吸收引起的 LID。通过增加脉冲数并降低通量,检测到了缺陷引发的 LID。吸收驱动的 LID 可归因于次表层损伤和双光子吸收。使用 FemtoFinish 抛光工艺消除了前者。后者是通过激光热量测量实验确定的。X 射线衍射和激光热量测量证实了晶体体积和表面抛光质量的改善。此外,还进行了加速寿命损伤测试(ALDT),脉冲数增加到 106 次/点。结果证实,要求苛刻的激光光学器件的寿命预测得到了提高。
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引用次数: 0
Characterization of micron scale periodic fluence variation and its possible impact on laser damage 微米尺度周期性通量变化的特征及其对激光损伤的可能影响
Pub Date : 2023-11-24 DOI: 10.1117/12.2685137
Isaac L. Bass, Eyal Feigenbaum, James Vickers, Gabriel Guss, W. Carr
Cones machined into the surface of the final fused silica optics on the NIF have been used to remove laser induced damage from exposure to high fluence 351 nm laser light. When applied to the input surface of an optic, a shadow is created on the exit surface due to the divergence of the laser light by the cone walls. In recent years input surface cones have been utilized to shadow exit surface damage and thus arrest its continued growth. The expanding waves from the cone walls interfere with the incident beam to create a high fluence intensification at the exit surface. This intensification has the characteristic periodic spatial variation on a scale of the order of the 351 nm wavelength. The question arises as to how the damage density probability, ρ(Φ), is affected by this variation as compared to a uniform fluence. Does it follow the local periodic variation, or is it averaged over that variation. We consider both cases, how it can be predicted by direct measurement of the intensification as opposed to costly damage tests, and how we might measure the effect directly.
在 NIF 上的最终熔融石英光学器件表面加工的锥体已被用于消除因暴露于高通量 351 nm 激光而造成的激光损伤。当应用于光学器件的输入表面时,由于锥壁对激光的发散作用,会在出口表面产生阴影。近年来,人们利用输入表面锥来遮挡出口表面的损伤,从而阻止其继续发展。锥壁产生的膨胀波与入射光束发生干涉,从而在出口表面产生高通量强化。这种强化具有周期性空间变化的特征,其尺度为 351 纳米波长的数量级。由此产生的问题是,与均匀通量相比,损坏密度概率 ρ(Φ)如何受到这种变化的影响。它是遵循局部周期性变化,还是在这种变化中求取平均值。我们将考虑这两种情况,如何通过直接测量强度而不是昂贵的破坏试验来预测,以及如何直接测量这种影响。
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引用次数: 0
Study of the probability of growth of silica exit surface damage on the National Ignition Facility (NIF) final optics 国家点火装置(NIF)最终光学器件二氧化硅出口表面损伤增长概率研究
Pub Date : 2023-11-24 DOI: 10.1117/12.2688143
Christopher F. Miller, Ryan M. Gini, C. W. Carr
Surface damage of silica optics routinely limits the operation of high energy laser systems. Initiated damage can grow upon additional laser pulses, eventually requiring optic removal/replacement. However, when damage is first initiated, small damage sites grow in a stochastic manner, readily parameterized by the size of the damage site, surface of residence, and the fluence and pulse duration of subsequent laser exposures. The National Ignition Facility (NIF), which exposes ~100 m2 of fused silica optics surface to high-energy-nanosecond-laser light on every full system shot, provides an ideal platform to study the growth behavior of laser-induced damage. High-resolution microscopy of individual damage sites is captured as part of the standard NIF recycling loop. However, not all damage sites are repaired depending on the age and quality of the host optic leaving many thousands sub-50-micron damages sites to resume growth after being imaged. By measuring such sites each time an optic is removed for recycling, high-resolution microscopy becomes available for many thousands of sites before and after exposure to various shot sequences on the NIF laser. Using this observed growth, a multi-shot description was fit to predict the likelihood of exit surface damage site growth under exposure from 3ω, nanosecond regime pulses for shot sequence lengths between 1-100 laser exposures. This provides a basis for accurately predicting when a recycled optic will require additional repair.
二氧化硅光学器件的表面损伤通常会限制高能激光系统的运行。初始损伤会随着激光脉冲的增加而扩大,最终需要拆卸/更换光学器件。然而,当损伤首次出现时,小的损伤点会以随机的方式增长,而损伤点的大小、停留的表面以及后续激光照射的流率和脉冲持续时间都是很容易确定的参数。美国国家点火装置(NIF)在每次全系统点火时都会将约 100 平方米的熔融石英光学表面暴露在高能纳秒激光下,这为研究激光诱导损伤的生长行为提供了一个理想的平台。对单个损伤点进行高分辨率显微镜观察是标准 NIF 循环的一部分。然而,并不是所有的损伤点都能得到修复,这取决于主光学器件的使用年限和质量,因此成千上万个 50 微米以下的损伤点在成像后会重新生长。通过在每次拆卸光学器件进行回收时对这些损伤点进行测量,就可以在 NIF 激光器上对数千个损伤点进行照射前后的高分辨率显微镜观察。利用这种观测到的生长情况,对多脉冲描述进行了拟合,以预测在 3ω、纳秒级脉冲照射下,1-100 次激光照射时,出口表面损伤点生长的可能性。这为准确预测回收光学器件何时需要额外修复提供了依据。
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引用次数: 0
In-situ scanning tunneling microscopy of ultrafast laser damage on Si (100) surface in ultra-high vacuum 在超高真空中对 Si (100) 表面的超快激光损伤进行原位扫描隧道显微镜观察
Pub Date : 2023-11-24 DOI: 10.1117/12.2685136
Zhihan Li, L. Clink, C. Kuz, Jay A. Gupta, Enam Chowdhury
A novel instrumentation design and operation to study ultrafast laser damage with atomic scale characterization by scanning tunneling microscopy is described here. The STM system operates in an ultrahigh vacuum chamber, fitted with an in situ objective allowing for tight focusing of laser excitation onto the sample. A combination of in situ and ex situ laser machining is used to define fiducial registry markers that help identify the overlap region for the optical excitation and STM scanning, aided by simultaneous confocal imaging and far-field cameras. We report initial measurements of laser damage on silicon in UHV with 10 pulses (77 fs compressed width, 0.67J/cm2 peak fluence) from a 1030nm Yb:KGW laser. STM imaging of damage sites show several characteristic regions with sharply defined boundaries determined by underlying damage thresholds, including an ablation crater and the beginnings of periodic surface structures.
本文介绍了利用扫描隧道显微镜研究超快激光损伤和原子尺度特征的新型仪器设计和操作。STM 系统在超高真空室中运行,配有原位物镜,可将激光激发紧密聚焦到样品上。原位和非原位激光加工相结合,用于定义靶标登记标记,帮助确定光学激发和 STM 扫描的重叠区域,并通过同步共焦成像和远场相机进行辅助。我们报告了在超高真空条件下使用 1030nm Yb:KGW 激光器发出的 10 个脉冲(77 fs 压缩宽度,0.67J/cm2 峰值能量)对硅进行激光损伤的初步测量结果。损伤点的 STM 成像显示了几个特征区域,其边界由潜在的损伤阈值决定,包括烧蚀坑和周期性表面结构的开端。
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引用次数: 0
Dielectric quantized nanolaminates for laser optics 用于激光光学的介电量子化纳米层压板
Pub Date : 2023-11-24 DOI: 10.1117/12.2685241
Thomas Willemsen
In general, there are just a few numbers of available dielectric materials suitable to produce laser optics. Such binary dielectric films are limited by fixed optical properties e.g. index of refraction and intrinsic laser induced damage threshold (LIDT). Optical properties of dielectric layers need to be manipulated precisely for further improvement. One approach is given by the deposition of ternary composites. The other approach is well known for crystalline materials and takes benefit of quantized effects. In the last years it could be shown that such effects can be utilized in amorphous dielectric layers as well. As a major benefit quantized nanolaminates enable the possibility to keep the index of refraction high with improved optical band gap. This proceeding gives an overview about key experiments of manufactured dielectric quantized nanolaminate samples and its advantages compared to ternary composites.
一般来说,只有少数几种可用的介电材料适合生产激光光学器件。这些二元介质薄膜受限于固定的光学特性,如折射率和内在激光诱导损伤阈值(LIDT)。为了进一步改善介电层的光学特性,需要对其进行精确控制。一种方法是沉积三元复合材料。另一种方法是众所周知的晶体材料,利用量子化效应。最近几年的研究表明,非晶介电层也可以利用这种效应。量子化纳米层压材料的一个主要优点是可以保持较高的折射率,同时改善光带隙。本论文概述了制造电介质量子化纳米层压板样品的关键实验及其与三元复合材料相比的优势。
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引用次数: 0
Laser-induced damage of dielectric-enhanced surface-modified single-point-diamond-turned Al-6061 multiband mirrors 介电增强表面改性单点金刚石翻转 Al-6061 多波段反射镜的激光诱导损伤
Pub Date : 2023-11-24 DOI: 10.1117/12.2685665
Jue Wang, L. Wamboldt, Ronald W. Davis, Ying Shi, Todd L. Heck, Craig Ungaro, A. B. Ruffin, Michael D. Thomas
Laser-induced damage threshold (LIDT) tests were performed at 1064 nm and 20 ns. Nodule defects were identified as the LIDT-limiting factor. The results suggest that the scale of the nodules is associated with the size of defects residing on the aluminum substrate surface. 3D finite-difference time-domain (FDTD) simulation was employed to calculate the electric field intensity (EFI) enhancement at the nodular defects with a seed diameter ranging from 0.35 μm to 2.5 μm. A direct linkage between the EFI enhancement and laser-induced damage morphology was established. Additional LIDT tests were conducted on surface modified aluminum substrate by using Corning aluminum process (CAP). The surface modification led to a 10x increase of the LIDT. Finally, LIDT of the multiband mirrors was predicted based on the absorption-driven damage and defect-driven damage. The results suggested that a combination of the CAP-modified Al6061 and low defect deposition process of the dielectric enhanced layers lead to high laser durability.
在 1064 nm 和 20 ns 波长下进行了激光诱导损伤阈值(LIDT)测试。结节缺陷被确定为 LIDT 限制因素。结果表明,结节的大小与铝基板表面缺陷的大小有关。采用三维有限差分时域 (FDTD) 仿真来计算种子直径从 0.35 μm 到 2.5 μm 的结节缺陷处的电场强度 (EFI) 增强。EFI 增强与激光诱导损伤形态之间建立了直接联系。使用康宁铝工艺 (CAP) 在表面改性的铝基板上进行了其他 LIDT 测试。表面改性使 LIDT 提高了 10 倍。最后,根据吸收驱动损伤和缺陷驱动损伤预测了多波段反射镜的 LIDT。结果表明,CAP 改性的 Al6061 与介质增强层的低缺陷沉积工艺相结合,可实现较高的激光耐用性。
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引用次数: 0
Measurement of optical coatings absorption at 1570 nm and simulations of photo-induced modifications of spectral function under high power laser exposure 1570 纳米波长光学镀膜吸收测量以及高功率激光照射下光谱功能光诱导修正模拟
Pub Date : 2023-11-24 DOI: 10.1117/12.2685174
Mathias Soulier, Laurent Gallais, Julien Lumeau, H. Krol, Emilie Steck, Mathieu Boutillier
Free space communications between ground stations and geostationary satellites offer high-speed and secure data transmission, but compensating for atmospheric absorption poses a significant challenge. The need for high levels of beam power to overcome atmospheric losses calls for optics that can withstand strong flux, especially in the continuous wave (CW) regime. In this context, the absorption of optics at 1.5 µm is a critical parameter that must be accurately measured and understood to develop efficient and reliable photonic systems. This study focuses on the absorption of optical coatings at 1570 nm. Lock-In Thermography (LIT) has been developed to measure the total absorption of the coatings with high sensitivity under 1 ppm. A modulated 100 W CW laser is used to induce heating into the coating stack, and the resulting rise in internal temperature is measured with a thermal camera. The LIT experimental setup offers a non-destructive and non-contact measurement technique, making it ideal for assessing the absorption of delicate thin-film coatings. To understand the photo induced effects in a stack of thin film layers subjected to high-power laser heating, a finite element model is developed using COMSOL. The model simulates the index and thickness variations of each layer and predicts the shift in optical function resulting from photo induced effects. The results offer valuable insights into the impact of laser-induced heating on the optical properties of the coatings and provide guidelines for designing robust and reliable photonic systems.
地面站与地球静止卫星之间的自由空间通信可提供高速、安全的数据传输,但补偿大气吸收是一项重大挑战。需要高水平的光束功率来克服大气损耗,这就要求光学器件能够承受强流量,尤其是在连续波(CW)模式下。在这种情况下,1.5 µm 处光学器件的吸收是一个关键参数,必须对其进行精确测量和了解,才能开发出高效可靠的光子系统。本研究的重点是 1570 纳米波长光学涂层的吸收。我们开发了锁定热成像技术(LIT)来测量涂层的总吸收率,其灵敏度低于 1 ppm。使用调制的 100 W CW 激光对涂层堆栈进行加热,并使用热像仪测量由此产生的内部温度升高。LIT 实验装置提供了一种非破坏性和非接触式测量技术,因此非常适合评估精密薄膜涂层的吸收情况。为了解在高功率激光加热下薄膜层堆栈的光诱导效应,使用 COMSOL 开发了一个有限元模型。该模型模拟了每一层的折射率和厚度变化,并预测了光诱发效应导致的光学函数变化。研究结果为了解激光诱导加热对涂层光学特性的影响提供了宝贵的见解,并为设计坚固可靠的光子系统提供了指导。
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引用次数: 0
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Laser Damage
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