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Laser removal of PVD coatings 激光去除PVD涂层
Pub Date : 2022-12-02 DOI: 10.1117/12.2642743
Martin Mydlář, J. Vanda, Radek Poboril, J. Brajer
The removal of multi-compound protective thin PVD films for stressed industrial tools using laser ablation could enhance or replace currently used procedures. Developing a laser removal process can shorten the processing time and costs. In the first step, the laser-induced damage threshold of the thin CrAlSiN coating and the WC-Co material was measured. Nanosecond and picosecond laser pulses were used for comparison. Furthermore, the dependence of the ablated material volume and ablation depth on the fluence and the number of pulses was measured. Finally, spectral analysis of the laser plasma generated during ablation was performed.
使用激光烧蚀去除应力工业工具的多重化合物保护薄PVD膜可以增强或取代目前使用的方法。开发激光去除工艺可以缩短加工时间和成本。在第一步中,测量了薄CrAlSiN涂层和WC-Co材料的激光损伤阈值。采用纳秒和皮秒激光脉冲进行比较。此外,还测量了烧蚀材料体积和烧蚀深度对能量通量和脉冲数的依赖关系。最后,对烧蚀过程中产生的激光等离子体进行了光谱分析。
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引用次数: 0
Small-beam damage test scaling for full-aperture damage performance 全孔径损伤性能的小光束损伤试验标度
Pub Date : 2022-12-02 DOI: 10.1117/12.2644342
Z. Liao, T. Spinka
The rapid deployment of high-energy laser systems has significantly pushed the practical limit of laser-induced optics damage. Most systems have chosen to scale the aperture of the laser system to operate within the damage limitations. However, most damage testing protocols do not take into consideration the sampling area of the damage testing beam with respect to the size of the extraction aperture. In this work, we review examples of laser systems where damage testing with small-scale S-on-1 results failed to predict the damage subsequently observed on a full aperture system. We provide guidance on how to adjust the post-coating damage testing protocol to gain confidence that the full-aperture optic will not be damaged during nominal high-fluence operations.
高能激光系统的快速部署极大地推动了激光诱导光学损伤的实际极限。大多数系统选择缩放激光系统的孔径以在损伤限制范围内运行。然而,大多数损伤测试方案没有考虑损伤测试梁的采样面积相对于提取孔径的大小。在这项工作中,我们回顾了激光系统的例子,其中使用小尺寸S-on-1结果的损伤测试无法预测随后在全孔径系统上观察到的损伤。我们提供了关于如何调整涂层后损伤测试方案的指导,以获得在名义高通量操作期间不会损坏全孔径光学器件的信心。
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引用次数: 0
Hot-spot monitoring of ArF laser at HDC and high energy mode using low reflective beam splitter 低反射分束器在HDC和高能量模式下的ArF激光热点监测
Pub Date : 2022-12-02 DOI: 10.1117/12.2641982
Masoud Babaeian, E. Mason, Jue Wang, G. Cox
We developed a low reflective beam splitter (BS) for hot-spot monitoring of argon-fluoride (ArF) laser, and detected hot-spot in a laser beam profile only at high discharge current and high output power mode.
研制了一种用于氟化氩(ArF)激光器热点监测的低反射分束器(BS),实现了仅在大放电电流和高输出功率模式下激光束轮廓中的热点检测。
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引用次数: 1
Impact of a plasma mitigation process on the 266 nm pulsed LiDT of RAR nano-textured fused silica 等离子体减缓工艺对RAR纳米纹理熔融二氧化硅266nm脉冲LiDT的影响
Pub Date : 2022-12-02 DOI: 10.1117/12.2642768
Amile N. Zaaf, H. S. Small, Tadd M. LeRocque, Andrew R. Robson, A. Manni, D. S. Hobbs
The pulsed laser induced damage threshold (LiDT) of Random Anti-Reflective (RAR) nano-textured fused silica optics has been shown to be many times higher than thin-film AR coated optics at wavelengths ranging from the near UV through the NIR. Because an RAR nano-texture is formed by a plasma etch process that removes part of the optic surface, the observed increase in damage resistance has kept track with the LiDT advances attained by low roughness super-polishing and damage pre-cursor mitigation techniques. In this work, nano-second pulse LiDT testing of RAR nano-textured optics was conducted at the deep UV wavelength of 266nm. The effect on 266nm LiDT of the uniform removal of additional surface material from fused silica optics using a dry plasma etch process was investigated. This plasma-polishing (PP), pre-RAR process was varied using fluorine-based chemistries that removed 100-300nm of material from each test surface, with surface roughness then characterized using white-light interferometry. Photothermal interferometry confirmed that no surface absorption was added by the PP, RAR, and PP-RAR plasma etching. Both standard grade, and ultra-low bulk absorption (low-OH) fused silica were included in the tests. RAR nanotextured surfaces showed an average damage threshold of 8.4 J/cm2, a level 3 times higher than a commercially available thin-film AR coated surface. Unexpected from pulsed LiDT testing at many longer wavelengths, all plasma etched surfaces exhibited less than half the damage threshold of the untreated, as-polished fused silica surfaces, and there was no observed correlation with surface roughness or plasma etch depth. From work by others it was theorized that exposure to the deep UV photons generated by the plasma might induce absorptive electronic defects in the fused silica material that could explain the reduced damage resistance relative to non-exposed surfaces. As an initial test of this concept an RAR nano-textured sample was baked at 400C to remove the suspected electronic defect. The subsequent pulsed LiDT of this one annealed sample was found to be 15.5 J/cm2, nearly double that of all other plasma etched samples. Further work to confirm this result is on-going.
随机抗反射(RAR)纳米纹理熔融石英光学器件的脉冲激光诱导损伤阈值(LiDT)在近紫外到近红外波长范围内比薄膜AR涂层光学器件高许多倍。由于RAR纳米纹理是通过等离子蚀刻工艺形成的,该工艺去除了部分光学表面,因此观察到的抗损伤性的增加与低粗糙度超级抛光和损伤预光标缓解技术所取得的LiDT进展保持一致。本文在深紫外波长266nm下对RAR纳米纹理光学器件进行了纳秒脉冲LiDT测试。研究了用干等离子体蚀刻工艺均匀去除熔融石英光学元件表面附加材料对266nm LiDT的影响。这种等离子抛光(PP),预rar工艺使用氟基化学物质进行变化,从每个测试表面去除100-300nm的材料,然后使用白光干涉测量法表征表面粗糙度。光热干涉测量证实,PP、RAR和PP-RAR等离子体刻蚀没有增加表面吸收。标准级和超低体积吸收(低oh)熔融二氧化硅都包括在测试中。RAR纳米织构表面的平均损伤阈值为8.4 J/cm2,是商用AR薄膜涂层表面的3倍。出乎意料的是,在许多较长波长的脉冲LiDT测试中,所有等离子体蚀刻表面的损伤阈值都不到未经处理的、抛光的熔融二氧化硅表面的一半,并且与表面粗糙度或等离子体蚀刻深度没有观察到相关性。根据其他人的工作,理论上认为,暴露在等离子体产生的深紫外光子下可能会导致熔融二氧化硅材料中的吸收性电子缺陷,这可以解释相对于未暴露表面的抗损伤性降低。作为这一概念的初步测试,RAR纳米纹理样品在400℃下烘烤以去除可疑的电子缺陷。该退火样品的后续脉冲LiDT为15.5 J/cm2,几乎是所有其他等离子体蚀刻样品的两倍。进一步确认这一结果的工作正在进行中。
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引用次数: 0
A high-power-handling deformable mirror system employing crystalline coatings 一种采用晶体涂层的高功率处理可变形反射镜系统
Pub Date : 2022-12-02 DOI: 10.1117/12.2641048
G. Cole, C. Nguyen, D. Follman, G. Truong, Egbert Krause, Tobias Böhme
We outline the development of a high-power-handling deformable mirror device, based on a modified Thorlabs DMH40, employing a low-loss substrate-transferred crystalline coating as the reflective element. In standard products, this system features a metal coated (Ag or Al) 18 mm diameter × 150 μm thick BK10 glass substrate mounted to a 40-segment piezoelectric actuator, enabling Zernike compensation up to 4th order, with a peak-to-valley stroke up to ±17.6 μm. In the modified variant described here, the metal coating is replaced with a high-reflectivity (~99.998%) and low-stress (compressive, ~130 MPa) monocrystalline GaAs/AlGaAs Bragg stack transferred to the thin glass substrate via direct bonding. While maintaining similar physical performance, this custom system exhibits a substantial enhancement in power handling, with laser-induced damage tests (performed by Spica Technologies, Inc.) yielding a continuous-wave damage threshold of 75 MW/cm2 at 1070 nm with a 1/e2 spot diameter of 32.8 μm.
我们概述了一种基于改进Thorlabs DMH40的高功率处理可变形反射镜装置的开发,该装置采用低损耗基板转移晶体涂层作为反射元件。在标准产品中,该系统具有金属涂层(Ag或Al)直径18 mm × 150 μm厚的BK10玻璃基板,安装在40段压电驱动器上,实现高达4阶的Zernike补偿,峰谷行程可达±17.6 μm。在本文描述的改进变体中,金属涂层被替换为高反射率(~99.998%)和低应力(压缩,~130 MPa)单晶GaAs/AlGaAs Bragg堆叠,通过直接键合转移到薄玻璃基板上。在保持类似物理性能的同时,该定制系统在功率处理方面表现出了显著的增强,通过激光诱导损伤测试(由Spica Technologies, Inc.进行),在1070 nm处产生75 MW/cm2的连续波损伤阈值,1/e2光斑直径为32.8 μm。
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引用次数: 1
Real-time investigation of the UV nonlinear absorptance in an anti-reflective coated LBO crystals 抗反射涂层LBO晶体紫外非线性吸收的实时研究
Pub Date : 2022-12-02 DOI: 10.1117/12.2641222
Erikas Atkočaitis, A. Melninkaitis
Absorptance is often considered a static feature of an optical element that is determined via standardized measurement procedures. Although such measurements are often performed using optical instruments with low light intensity, in high power laser applications irradiation conditions are considerably different. Optics might become unstable due to highly intense light: optical properties change in a nonlinear way and might eventually lead to laser-induced damage. To study these effects we employed the common-path interferometry technique in combination with a high energy and high average power laser source, operating at 1 MHz repetition rate and delivering 10 ps pulses at 355 nm wavelength. We investigated an anti-reflective (AR@355 nm) coating deposited using ion beam sputtering on a lithium triborate (LBO) crystal. Our preliminary results indicate both strong nonlinear absorptance and fatigue near the damaging fluence, however, damage events were not directly related to the critical absorptance level. An attempt is made to predict the lifetime of an AR coated optics by establishing a numerical model of nonlinear absorption.
吸光度通常被认为是光学元件的静态特性,可以通过标准化的测量程序来确定。虽然这种测量通常使用低光强的光学仪器进行,但在高功率激光应用中,照射条件却大不相同。由于高强度的光,光学器件可能变得不稳定:光学特性以非线性的方式变化,最终可能导致激光引起的损伤。为了研究这些影响,我们采用了共路干涉测量技术,结合高能量和高平均功率激光源,在1 MHz重复频率下工作,在355nm波长下输出10 ps脉冲。研究了在三硼酸锂(LBO)晶体上采用离子束溅射沉积的抗反射涂层(AR@355 nm)。我们的初步研究结果表明,在损伤影响点附近存在较强的非线性吸光度和疲劳,但损伤事件与临界吸光度水平没有直接关系。本文试图通过建立非线性吸收的数值模型来预测AR涂层光学元件的寿命。
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引用次数: 0
Scanning tunneling microscopy analysis of ultrafast laser damage of single crystal silicon 单晶硅超快激光损伤的扫描隧道显微分析
Pub Date : 2022-12-02 DOI: 10.1117/12.2637432
L. Clink, Zhihan Li, C. Kuz, J. Gupta, E. Chowdhury
Laser processing is useful for topographical and band structure modification of semiconductors. We used a Scanning Tunneling Microscope (STM) to map topography and spectra around hydrofluoric acid etched silicon (100) damaged with an ultrafast pulsed Yb:KGW laser at 1030nm with duration of 70fs in high vacuum. STM uses an atomically sharp tip and feedback loop controlled piezoelectric crystals to characterize conductive surfaces with atomic resolution. With this, we have observed periodic surface structures. This information can then be used to understand the laser damage process better and eventually can be used to characterize defect formation without the presence of topographical change.
激光加工对于半导体的形貌和能带结构的修饰是非常有用的。利用扫描隧道显微镜(STM)绘制了氢氟酸蚀刻硅(100)在高真空中被1030nm、持续时间为70fs的超快脉冲Yb:KGW激光破坏后周围的形貌和光谱。STM使用原子尖尖端和反馈回路控制的压电晶体来表征具有原子分辨率的导电表面。有了这个,我们观察到了周期性的表面结构。这些信息可以用来更好地理解激光损伤过程,最终可以用来表征没有地形变化的缺陷形成。
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引用次数: 0
The influence of oxygen partial pressure on the properties of evaporated alumina thin films 氧分压对蒸发氧化铝薄膜性能的影响
Pub Date : 2021-10-12 DOI: 10.1117/12.2599213
Tsion Teklemarim, C. Stolz, M. Brophy, Michael Pierce, P. Kupinski
The effect of oxygen partial pressure on the properties of Al2O3 films deposited by electron beam evaporation has been investigated through a combination of spectrophotometric and interferometric characterization techniques. As oxygen partial pressure increases, a decrease in the refractive index is observed, as well as a shift towards less tensile films once they are exposed to ambient conditions. This decrease in tensile stress was observed to be correlated with water content in the films. Increasing oxygen partial pressure during deposition improved film stoichiometry, absorption, and laser induced damage threshold (LIDT) at 351 nm.
采用分光光度法和干涉法相结合的表征方法,研究了氧分压对电子束蒸发制备的氧化铝薄膜性能的影响。随着氧分压的增加,观察到折射率的降低,以及一旦暴露于环境条件下,向较低张力薄膜的转变。拉伸应力的降低与薄膜中的含水量有关。在沉积过程中增加氧分压改善了薄膜的化学计量、吸收和351nm激光诱导损伤阈值(LIDT)。
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引用次数: 1
Surface damage evolution of KDP crystals induced by conical cracks under irradiation of nanosecond laser 纳秒激光辐照下KDP晶体锥形裂纹表面损伤演化
Pub Date : 2021-10-12 DOI: 10.1117/12.2618820
Wenyu Ding, Mingjun Chen, Jian Cheng, Hao Yang, Linjie Zhao, Qi Liu, Zhichao Liu
The potassium dihydrogen phosphate (KDP) crystals suffer from nanosecond pulse laser irradiation and are susceptible to damage during the operation of ICF system. In particular, the microcracks on the surface of KDP crystals caused by the single-point diamond fly-cutting (SPDF) process are more likely to cause serious damage under the subsequent laser irradiation. However, the mechanism of laser damage is still unclear. A model that can well represents the laser damage response is very important to reveal the mechanism of laser-induced damage. In this work, the electromagnetic field, stress field and temperature field are coupled, the mechanical characteristics of KDP material are considered, and the reasonable strength equation is applied to model the laser damage response of KDP crystal. Then, the conical crack is taken as an example to explore the laser damage response process of KDP crystal caused by surface defects under laser irradiation. It is found that the surface conical cracks have a great influence on the response process and the morphological characteristics of the laser damage. The existence of surface conical crack defects would lead to the extension of the longitudinal cracks beneath the damage crater, which has great disadvantages for the repairing of the laser damage sites. This work is of great guidance for avoiding the defects-induced damage and improving the service life of the crystal applied in ICF systems.
磷酸二氢钾(KDP)晶体受到纳秒脉冲激光的照射,在ICF系统运行过程中容易受到损伤。特别是单点金刚石飞切(SPDF)工艺在KDP晶体表面产生的微裂纹,在后续激光照射下更容易造成严重的损伤。然而,激光损伤的机理尚不清楚。一个能很好地表征激光损伤响应的模型对于揭示激光损伤机理是非常重要的。本文将电磁场、应力场和温度场耦合在一起,考虑KDP材料的力学特性,采用合理的强度方程对KDP晶体的激光损伤响应进行建模。然后,以锥形裂纹为例,探讨了激光照射下表面缺陷引起的KDP晶体激光损伤响应过程。研究发现,表面的锥形裂纹对激光损伤的响应过程和形貌特征有很大的影响。表面锥形裂纹缺陷的存在会导致损伤坑下纵向裂纹的扩展,这对激光损伤部位的修复有很大的不利影响。本文的工作对避免晶体缺陷损伤,提高晶体在ICF系统中的使用寿命具有重要的指导意义。
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引用次数: 0
Generation of UV-defects in UV fibers: comparison between different pulsed UV lasers 紫外纤维中紫外缺陷的产生:不同脉冲紫外激光器的比较
Pub Date : 2021-10-12 DOI: 10.1117/12.2597970
S. Heiden, P. Raithel, K. Klein, G. Hillrichs
Temporal and spectral Laser-induced UV-loss studies in DUV-fibers with undoped synthetic silica core, mainly low-OH silica and modifications, were carried out with an automated set-up using pulsed 213 nm, 266 nm and 355 nm Nd-YAG Lasers. A multiple Gaussian band approximation was used to separate the individual but superimposed optically active UV defects leading to new temporal results of the individual UV defects. The curve shape of spectral losses was found to be different and strongly influenced by the Laser wavelengths, which are within absorption bands in low-OH silica, reducing the correlated defect at the beginning of irradiation significantly. In addition to solarization caused by 266 nm Laser damaging, annealing of some defects was observed. Depending on the fiber type, including hydrogen-treated types, different time constants were determined. Obvious transformations were observed during damaging with Lasers and/or broadband D2-lamp. Finally, an improved fitting of the UV attenuation or UV-induced losses in UV-fibers around 250 nm (ODC-II region) was possible by introducing two bands with slightly different peak wavelengths and temporal behaviors.
采用213 nm、266 nm和355nm脉冲Nd-YAG激光器,对未掺杂合成二氧化硅芯(主要是低oh二氧化硅和改性)的duv光纤的时间和光谱激光诱导紫外损耗进行了研究。采用多高斯波段近似分离单独但叠加的光学活性紫外缺陷,得到单个紫外缺陷的新时域结果。光谱损失曲线形状不同,且受激光波长的影响较大,激光波长在低oh二氧化硅的吸收带内,显著降低了辐照初期的相关缺陷。除了266nm激光损伤引起的日晒外,还观察到了一些缺陷的退火现象。根据纤维类型,包括氢处理类型,确定了不同的时间常数。在激光和/或宽带d2灯的破坏过程中观察到明显的转变。最后,通过引入两个峰值波长和时间行为略有不同的波段,可以改进UV衰减或UV诱导损耗在250 nm (ODC-II区域)附近的UV纤维中的拟合。
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引用次数: 0
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Laser Damage
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