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All-glass metasurface laser optics for lensing, antireflections, and waveplates 用于透镜、抗反射和波峰板的全玻璃超表面激光光学元件
Pub Date : 2023-11-24 DOI: 10.1117/12.2685561
Eyal Feigenbaum, N. Ray, Jae Hyuck Yoo, Hoang T. Nguyen, Michael A. Johnson
Metasurfaces exhibit great potential to redefine limitations inhibiting high power laser optics. Some areas of expected improvement include throughput improvement with enhanced design flexibility, mitigation of filamentation damage by enabling thinner optics, and reduction in system complexity and price. Metasurface utilize engineered surface ‘layer’ with thickness on the order of the design wavelength, which consists of an array of sub-wavelength elements. Our methodology is based on scalable generation of sacrificial metal nanoparticle mask followed by directional etching to pattern the glass. The end-result all-glass metasurface has high laser damage durability, mechanical robustness, design flexibility and controllability of the metasurface features, and the ability to craft antireflective layers and basic optical elements. Recent advancements have been made resulting in ultra-broadband antireflective layers, induced birefringence in the glass for waveplates, and refined optical elements.
元表面在重新定义阻碍高功率激光光学的限制方面展现出巨大的潜力。预期改进的一些领域包括:通过提高设计灵活性来提高产量;通过实现更薄的光学器件来减轻丝状损伤;以及降低系统复杂性和价格。元表面利用厚度与设计波长相当的工程表面 "层",它由亚波长元件阵列组成。我们的方法基于可扩展的牺牲金属纳米粒子掩模的生成,然后通过定向蚀刻对玻璃进行图案化。最终得到的全玻璃元表面具有很高的激光损伤耐久性、机械坚固性、设计灵活性和元表面特征的可控性,以及制作抗反射层和基本光学元件的能力。最近取得的进展包括超宽带抗反射层、用于波板的玻璃中的诱导双折射以及精制光学元件。
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引用次数: 0
Influence of the multilayer dielectric design on the laser damage resistance of pulse-compression gratings 多层电介质设计对脉冲压缩光栅抗激光损伤能力的影响
Pub Date : 2023-11-24 DOI: 10.1117/12.2685304
Saaxewer Diop, Nicolas Bonod, M. Chorel, E. Lavastre, N. Roquin, Lilian Heymans, Pierre Brianceau, Laurent Gallais, L. Lamaignère
Multilayer dielectric (MLD) gratings provide high diffraction efficiency and a high damage threshold. They represent the main solution to compressing a high-power laser beam. However, the laser resistance of MLD gratings limits the power of such facilities. The community devoted a lot of resources to increasing the damage threshold of those components. Today, it is well known that the etching profile plays a key role in the electric field distribution and consequently the laser resistance. In this paper, we focused our optimization on the multilayer dielectric stack to increase the laser-induced damage threshold (LIDT). We numerically and experimentally demonstrated the impact of the MLD stack on the electric field distribution and the LIDT. We manufactured two sets of three samples with identical etching profiles. The calculated electric field intensities were in good agreement with the measured LIDTs. These results demonstrated how to further optimize grating designs through the dielectric stack.
多层介质(MLD)光栅具有高衍射效率和高损坏阈值。它们是压缩高功率激光束的主要解决方案。然而,MLD光栅的激光阻抗限制了此类设备的功率。社会各界投入了大量资源来提高这些元件的损伤阈值。如今,众所周知,蚀刻轮廓在电场分布中起着关键作用,从而影响激光电阻。在本文中,我们重点优化了多层电介质堆栈,以提高激光诱导损伤阈值(LIDT)。我们通过数值和实验证明了 MLD 叠层对电场分布和 LIDT 的影响。我们制作了两组蚀刻曲线完全相同的三个样品。计算得出的电场强度与测量得到的 LIDT 非常吻合。这些结果表明了如何通过介电堆栈进一步优化光栅设计。
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引用次数: 0
Sapphire optics for contamination resistance and extreme power density applications 蓝宝石光学器件,用于抗污染和极高功率密度应用
Pub Date : 2023-11-24 DOI: 10.1117/12.2685118
Sam Zilavy, Adam Argondizzo, Kyle Branigan, Gregg E. Davis
The power available in many industrial high-power 1 µm laser-cutting systems now exceeds 10 kW. To take advantage of that power, systems must be fast and nimble in order to accurately trace toolpaths at high speed. These power levels drive focusing head designs to be compact and lightweight. The best way to achieve this, in general, is with an all-transmissive design consisting of lenses and windows. The industry-standard material for lenses is fused silica, which has extremely low absorption. However, should the lens become contaminated, the poor thermal conductivity of fused silica traps much of the absorbed power inside the optic, raising its temperature and index of refraction, which causes the focus of the system to shift back toward the focusing head. At some point, the amount of focus shift becomes unsuitable for material processing and the focusing head must be replaced or refurbished with clean optics. Sapphire is an alternative lens material that until recently was only used in windows due to optical fabrication challenges in the polishing of aspheric surfaces. At Coherent Corp., we have overcome many of those challenges and currently offer sapphire aspheres. The key advantage of sapphire over fused silica is its relatively high thermal conductivity. This enables any absorbed power to quickly reach the edge of a sapphire optic where water-cooled mounts can remove the heat and keep the lens temperature low. Accounting for all the property differences between the two materials, sapphire should result in less focus shift than a comparable fused silica optic with the same absorbed power. The purpose of this study is to measure and compare the focus shift properties of the two materials in a controlled setting at high and low levels of absorbed power. Sapphire was also tested for laser-induced-damage threshold (LIDT) by Spica Technologies Inc.
目前,许多工业用高功率 1 µm 激光切割系统的功率已超过 10 kW。为了充分利用这种功率,系统必须快速灵活,以便高速准确地跟踪刀具路径。这些功率水平促使聚焦头的设计必须紧凑、轻便。一般来说,实现这一目标的最佳方法是采用由透镜和窗口组成的全透射设计。透镜的行业标准材料是熔融石英,其吸收率极低。然而,如果透镜受到污染,熔融石英的不良导热性会将大部分吸收功率吸附在光学器件内部,从而提高其温度和折射率,导致系统的焦点向聚焦头后移。在某些情况下,焦距偏移量不适合材料加工,聚焦头必须更换或翻新为干净的光学器件。蓝宝石是一种可供选择的透镜材料,但由于非球面表面抛光的光学制造难题,这种材料直到最近才被用于窗户。在 Coherent 公司,我们已经克服了其中的许多挑战,目前可提供蓝宝石非球面。与熔融石英相比,蓝宝石的主要优势在于其相对较高的热传导率。这使得任何吸收的功率都能迅速到达蓝宝石光学元件的边缘,在那里,水冷支架可以带走热量并保持透镜的低温。考虑到两种材料之间的所有特性差异,在吸收功率相同的情况下,蓝宝石应该比熔融石英光学镜片的焦距偏移更小。本研究的目的是测量和比较两种材料在高吸收功率和低吸收功率条件下的聚焦偏移特性。Spica Technologies 公司还对蓝宝石进行了激光诱导损伤阈值(LIDT)测试。
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引用次数: 0
Pulse duration dependence of single-shot pulsed laser ablation of gallium based III-V compound semiconductors 镓基 III-V 族化合物半导体单次脉冲激光烧蚀的脉冲持续时间相关性
Pub Date : 2023-11-24 DOI: 10.1117/12.2685122
Marnix Vreugdenhil, Dries van Oosten
We experimentally study single-shot laser ablation of GaSb, GaAs, GaP and GaN, for laser pulse durations ranging from 200 fs to 20 ps. We find that the laser ablation threshold fluence of GaSb is almost independent of pulse duration, whereas the ablation threshold for GaN depends strongly on pulse duration. More generally we find that the larger the bandgap, the stronger the dependence of pulse duration. This is expected, as intrinsic laser absorption is mainly linear when the bandgap is small compared to the photon energy, whereas a larger bandgap requires strong field ionization. Thus a larger bandgap leads to a stronger influence of the peak intensity of the pulse and therefore a stronger dependence on the pulse duration, when compared to smaller bandgaps.
我们通过实验研究了单次激光烧蚀 GaSb、GaAs、GaP 和 GaN 的情况,激光脉冲持续时间从 200 fs 到 20 ps 不等。我们发现 GaSb 的激光烧蚀阈值流量几乎与脉冲持续时间无关,而 GaN 的烧蚀阈值则与脉冲持续时间密切相关。一般来说,我们发现带隙越大,脉冲持续时间的依赖性就越强。这是意料之中的,因为当带隙与光子能量相比较小时,本征激光吸收主要是线性的,而带隙越大,需要的场电离就越强。因此,与较小的带隙相比,较大的带隙对脉冲峰值强度的影响更大,因此对脉冲持续时间的依赖性也更强。
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引用次数: 0
Damage mitigation in the Kagome hollow core fiber used for the delivery of short high-energy pulses 用于输送短高能脉冲的Kagome空心芯纤维的损伤缓解
Pub Date : 2022-12-05 DOI: 10.1117/12.2642773
Radek Poboril, J. Vanda, Martin Mydlář, Helena Picmausova, M. Smrž, T. Mocek
This article is focused on the design of a beam delivery system based on hollow-core photonic crystal fiber. For our experiment, we chose a fiber with the Kagome structure developed by GLOphotonics. The central wavelength of the delivered beam was 1030 nm, so we chose the fiber PMC-C-Yb-7C. The first part of the article is a brief introduction to PERLA 100, the laser used for testing the efficiency of the beam delivery system developed by HiLASE Centre. The reader will be acquainted with the laser system parameters. The input beam parameters play an important role in the efficiency of focusing into the fiber. One of the key parameters is the M2 of the beam, as it has a direct effect on the size of the waist at the point of entry into the fiber. Another important parameter is the maximum energy in one pulse which can destroy the fiber structure. The size of the focusing point must match the size of the MFD of the fiber. Therefore, it is necessary to precisely define the size of the input beam into the focusing assembly with an accuracy of micrometers and to get rid of as many degrees of freedom as possible in the actual setup of the entire system. Another critical parameter is the size of the fiber input angle. The article aims to eliminate as many critical points as possible when setting up a focusing system and thus prevent damage to the fiber structure. One of the points is the simulation and calculation of the maximum possible loading of the fiber microstructure before its damage. With the help of gradual design modification, the aim is to achieve a coupling efficiency of more than 90 % by scaling the PERLA 100 output power from units of W up to 100 W.
本文主要研究了一种基于空心光子晶体光纤的光束传输系统的设计。在我们的实验中,我们选择了GLOphotonics公司开发的Kagome结构的光纤。传输光束的中心波长为1030 nm,因此我们选择了PMC-C-Yb-7C光纤。文章的第一部分简要介绍了PERLA 100,这是HiLASE中心开发的用于测试光束传输系统效率的激光器。读者将熟悉激光系统的参数。输入光束的参数对聚焦到光纤中的效率起着重要的作用。其中一个关键参数是光束的M2,因为它对进入光纤时腰围的大小有直接影响。另一个重要的参数是一个脉冲能破坏光纤结构的最大能量。聚焦点的大小必须与光纤的MFD的大小相匹配。因此,有必要以微米级的精度精确定义聚焦组件的输入光束的大小,并在整个系统的实际设置中尽可能多地消除自由度。另一个关键参数是光纤输入角的大小。本文的目的是在设置调焦系统时尽可能多地消除关键点,从而防止对光纤结构的破坏。其中一个重点是模拟和计算纤维微结构在损伤前的最大可能载荷。在逐步修改设计的帮助下,目标是通过将PERLA 100的输出功率从单位W扩展到100 W,从而实现90%以上的耦合效率。
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引用次数: 0
UV fatigue of laser optics: laser-induced contamination 激光光学的紫外疲劳:激光引起的污染
Pub Date : 2022-12-02 DOI: 10.1117/12.2638404
B. Arnold, Cyrus Rashvand, L. Willis, M. Dabney
Laser-induced contamination (LIC) can be a major concern of using UV laser systems. Surface contamination occurs via interactions between the UV laser and particulates, water vapor condensate, organics, and airborne molecular contaminates (AMC) from the environment or outgassing from system materials. A brief review of contamination of optics will lead into present results from long-term 355 nm quasi-CW laser transmission experiments at Edmund Optics. Time lapse microscopy was used to monitor nucleation and growth of surface contaminants. Laser burn boxes were constructed for use as a controlled UV LIC testbed; experimental results are presented on transmission losses for various material preparation methods.
激光引起的污染(LIC)可能是使用紫外激光系统的主要问题。表面污染是通过紫外线激光与环境中的微粒、水蒸气冷凝物、有机物和空气中的分子污染物(AMC)或系统材料的排气之间的相互作用发生的。对光学污染的简要回顾将引出埃德蒙光学公司355nm准连续波激光长期传输实验的结果。时间推移显微镜用于监测表面污染物的成核和生长。激光燃烧箱被构建为一个受控的UV LIC测试平台;给出了各种材料制备方法的传输损耗实验结果。
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引用次数: 1
Non-destructive testing of subsurface damage for early indication of laser-induced damage threshold in fused silica 熔融二氧化硅激光损伤阈值早期指示的亚表面损伤无损检测
Pub Date : 2022-12-02 DOI: 10.1117/12.2642749
Anne-Sophie Munser, M. Trost, C. Mühlig, Nora Tadewaldt, S. Kuhn, L. Coriand, Ulf Hallmeyer
Subsurface damage (SSD) in optical components is almost unavoidably caused by mechanical forces involved during grinding and polishing and can be a limiting factor, particularly for applications that require high laser powers. In this contribution, non-destructive characterization techniques are evaluated with respect to their capability to determine SSD in fused silica. For this, differently polished surfaces with different SSD levels have been prepared. An initial destructive analysis using etching in hydrofluoric acid in combination with white light interferometry revealed a high amount of SSD in one of the sample types compared to a very low amount of SSD in a second one. It is shown that nondestructive absorption as well as scattering measurements are sensitive towards SSD related differences in the samples. Finally, laser-induced damage tests proved a significant impact of SSD on the laser stability by determining a reduced damage threshold of 31 ± 3 J/cm² for the sample with high amount of SSD compared to 45 ± 5 J/cm² for the high-quality polished sample.
光学元件的亚表面损伤(SSD)几乎不可避免地是由磨削和抛光过程中涉及的机械力引起的,这可能是一个限制因素,特别是对于需要高激光功率的应用。在这篇文章中,非破坏性表征技术评估了它们在熔融二氧化硅中测定固态硬盘的能力。为此,制备了具有不同SSD级别的不同抛光表面。采用氢氟酸蚀刻结合白光干涉法进行的初步破坏性分析显示,其中一种样品中固态硬盘含量很高,而另一种样品中固态硬盘含量很低。结果表明,无损吸收和散射测量对样品中SSD相关的差异很敏感。最后,激光诱导损伤测试证明了固态硬盘对激光稳定性的显著影响,通过确定高含量固态硬盘样品的损伤阈值为31±3 J/cm²,而高质量抛光样品的损伤阈值为45±5 J/cm²。
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引用次数: 0
LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment LIDT测试作为优化加工窗口的工具,用于D263玻璃片的TGV处理
Pub Date : 2022-12-02 DOI: 10.1117/12.2642866
J. Vanda, Martin Mydlář, Kateřina Pilná, H. Turčičova, Radek Poboril, J. Brajer, T. Mocek, B. Stoklasa, Stepan Venos
Laser-Induced Deep Etching (LIDE) is considered as the one of the most promising techniques for production of so-called TGVs (Through Glass Vias). In the production process, thin glass sheet is treated with ultra-short lasers pulses to induce surface and volume modification, allowing efficient wet etching and formation of through hole. Precise knowledge of damage threshold of such glass is essential when optimizing the whole process and scaling up the production via laser beam parallelization. In following paper, we present recent results on LIDT measurement of D263 glass sheets at wavelengths 1030 nm and 515 nm, effective utilization of such knowledge for setting up multi-Bessel beam processing optics, and we demonstrate resulting substrates with TGVs.
激光诱导深度蚀刻(LIDE)被认为是生产所谓的tgv(玻璃通孔)最有前途的技术之一。在生产过程中,用超短激光脉冲处理薄玻璃片,诱导表面和体积改性,实现高效的湿法蚀刻和通孔的形成。在优化整个过程和通过激光束并行化扩大生产规模时,精确了解这种玻璃的损伤阈值是必不可少的。在接下来的论文中,我们介绍了波长1030 nm和515 nm的D263玻璃片的LIDT测量的最新结果,有效地利用了这些知识来建立多贝塞尔光束处理光学器件,我们展示了用tgv得到的基板。
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引用次数: 0
Damage threshold testing of UV optics under a Titan environment for NASA’s Dragonfly mission NASA蜻蜓任务在泰坦环境下紫外线光学的损伤阈值测试
Pub Date : 2022-12-02 DOI: 10.1117/12.2642897
P. Stysley, D. B. Coyle, M. Mullin, J. Rabinowitz, M. Trainer
The Dragonfly Mass Spectrometer (DraMS) being developed at NASA’s Goddard Space Flight Center will use a solidstate 266-nm pulsed Nd:YAG laser to perform compositional analysis on the surface of Titan. Due to the high fluence of the focused pulse energy on the laser’s beam steering unit (BSU) and the mass spectrometer window, the damage threshold of these optics in a Titan atmosphere needed to be characterized. This paper details the test setup and the successful demonstration of testing the highest fluence optics for the expected mission duration of 2 million laser pulses in a Titanrelevant atmosphere.
美国宇航局戈达德太空飞行中心开发的蜻蜓质谱仪(DraMS)将使用固态266纳米脉冲Nd:YAG激光器对泰坦表面进行成分分析。由于聚焦脉冲能量对激光光束导向单元(BSU)和质谱仪窗口的高影响,需要对这些光学元件在土卫六大气中的损伤阈值进行表征。本文详细介绍了在泰坦相关大气中测试200万激光脉冲预期任务持续时间的最高通量光学系统的测试设置和成功演示。
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引用次数: 1
Laser conditioning effect for all-silica mirrors 全硅反射镜的激光调理效果
Pub Date : 2022-12-02 DOI: 10.1117/12.2641172
Lukas Ramalis, R. Buzelis, Gustė Dolmantaitė, T. Tolenis
Optical elements are the main parts in laser system, which limit the total generated output power due to optical resistivity. The increase of beam diameter dimensions may compensate the optical performance of elements, however it leads to the increase of laser system size. Thus, any improvement in optical coatings has impact on either higher output power or lowering the size of system itself. Glancing angle deposition method is presented to produce porous nanostructured coatings, which are characterized by low inner stress. Multilayer Bragg mirrors are formed using only silica material to achieve high laser-induced damage threshold value. Laser conditioning effect is applied, to improve optical performance in ns regime and reach LIDT values over 180 J/cm2.
光学元件是激光系统的主要组成部分,由于光学电阻率限制了激光系统的总输出功率。光束直径尺寸的增大可以补偿元件的光学性能,但也会导致激光系统尺寸的增大。因此,光学涂层的任何改进都会对更高的输出功率或降低系统本身的尺寸产生影响。采用掠角沉积法制备了具有低内应力的多孔纳米结构涂层。多层布拉格反射镜仅使用二氧化硅材料形成,以达到高激光诱导损伤阈值。利用激光调节效应,提高了ns波段的光学性能,LIDT值达到180 J/cm2以上。
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引用次数: 0
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Laser Damage
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