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A laser preconditioning process for improving the laser damage threshold, and the search for subtle laser damage from long-duration laser exposure for IBS thin films 一种提高激光损伤阈值的激光预处理工艺,以及对IBS薄膜长时间激光暴露的细微激光损伤的研究
Pub Date : 2007-10-10 DOI: 10.1117/12.753747
Dale C. Ness, A. Streater
Laser damage testing of ion beam sputtered (IBS) films for 1064 nm, Q-switched, low repetition rate operation typically involves the measurement of small physical defects that can be detected visually or photographically. For this kind of damage the small absorber model adequately describes most of the observations. We discuss why the damage threshold for IBS anti-reflection (AR) coatings is lower than for high reflectors and polarizers. We report on a new process technique that eliminates the physical damage to IBS AR coatings for fluences up to 21 J/cm2, possibly higher. The success of this process and the lower damage for AR's indicates that the small absorbers are at the substrate/coating interface or are in the subsurface region of the substrate. We also discuss ongoing experiments to look for subtle forms of laser damage involving changes of the optical parameters of the thin film materials, under long-term exposure to Q-switched 1064 nm radiation and continuous 355 nm radiation.
离子束溅射(IBS)薄膜的1064nm,调q,低重复率操作的激光损伤测试通常涉及可以通过视觉或摄影检测到的小物理缺陷的测量。对于这种损伤,小吸收器模型充分地描述了大部分观测结果。我们讨论了为什么IBS抗反射(AR)涂层的损伤阈值低于高反射器和偏振器。我们报告了一种新的工艺技术,可以消除对IBS AR涂层的物理损伤,影响高达21 J/cm2,甚至可能更高。该工艺的成功和AR的较低损伤表明,小吸收剂位于基材/涂层界面或基材的亚表面区域。我们还讨论了正在进行的实验,以寻找在长期暴露于调q 1064nm辐射和连续355nm辐射下,涉及薄膜材料光学参数变化的细微激光损伤形式。
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引用次数: 2
Photo-ionization of superlattices on dielectric surface by IR radiation 红外辐射下介电表面超晶格的光电离
Pub Date : 2007-10-10 DOI: 10.1117/12.754056
V. Gruzdev
In this paper we analyze the photo-excitation of electron sub-system of a periodic nano-structure by IR laser radiation. The nano-structure is a 1D super-lattice on surface of dielectric or semiconductor material transparent for the incident radiation. Theoretical description of the photo-excitation is based on the recent modification of the Keldysh theory adapted to the 1D case. We show that two specific regimes of the photo-excitation are possible in the super-lattices: photo-excitation suppression corresponding to decrease of the photo-excitation rate with increasing of laser intensity, and singularity regime corresponding to abrupt increase of the photo-ionization rate. Threshold of the singularity regime is calculated as function of laser wavelength and super-lattice period. The obtained results allow to propose a promising application of the super-lattices as intensity limiters for IR optical systems. In particular, we can calculate the period of the super-lattice to provide limiting of input laser intensity at required level due to multi-photon absorption by electrons of the lattice. Temperature of laser-induced heating resulted from total absorption of an incident laser pulse and diffraction distortions induced by the super-lattice are estimated to confirm possibility of utilizing the super-lattices as the intensity limiters.
本文分析了红外激光对周期纳米结构电子子系统的光激发作用。纳米结构是在介质或半导体材料表面形成的一维超晶格,对入射辐射透明。光激发的理论描述是基于最近对Keldysh理论的修正,以适应一维情况。结果表明,在超晶格中存在两种特定的光激发机制:光激发抑制机制对应于光激发速率随激光强度的增加而降低,以及奇异机制对应于光电离速率的突然增加。计算了奇异区阈值作为激光波长和超晶格周期的函数。所得结果表明,超晶格作为红外光学系统的强度限制器具有广阔的应用前景。特别是,我们可以计算出超晶格的周期,以提供输入激光强度在所需水平上的限制,这是由于晶格的电子的多光子吸收。估计了由入射激光脉冲的全吸收引起的激光诱导加热温度和由超晶格引起的衍射畸变,证实了利用超晶格作为强度限制器的可能性。
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引用次数: 0
Comparison between S/1 and R/1 tests and damage density vs. fluence (ρ(Φ)) results for unconditioned and sub-nanosecond laser-conditioned KD2PO4 crystals 非条件和亚纳秒激光条件下KD2PO4晶体S/1和R/1测试及损伤密度与通量(ρ(Φ))结果的比较
Pub Date : 2007-10-10 DOI: 10.1117/12.752961
J. Adams, J. Jarboe, M. Feit, R. Hackel
We present S/1 and R/1 test results on unconditioned and 355 nm (3ω), 500 ps laser conditioned DKDP. We find up to ~2.5X improvement in fluence in the S/1 performance after 3ω, 500 ps conditioning to 5 J/cm2. For the first time, we observe a shift to higher fluences in the R/1 results for DKDP at 3ω, 7 ns due to 500 ps laser conditioning. The S/1 results are compared to ρ(Φ) results previously measured on the same DKDP crystal [1]. A consistent behavior in fluence was found between the S/1 and ρ(Φ) results for unconditioned and 500 ps conditioned DKDP. We were successful at using Poisson statistics to derive a connection between the S/1 and ρ(Φ) results that could be tested with our data sets by trying to predict the shape of the ρ(Φ) curve. The value for the power dependence on fluence of ρ(Φ) derived from the S/1 data was ~11 ± 50%. The results presented and discussed here imply a strong correlation between the damage probability (S/1) test and ρ(Φ). We find a consistent description of the two test types in terms of a power law ρ(Φ) and that this basic shape held for all cases, i.e. the shape was invariant between unconditioned and conditioned results.
给出了非条件和355nm (3ω), 500ps激光条件下DKDP的S/1和R/1测试结果。我们发现,在3ω, 500 ps调节到5 J/cm2后,S/1性能的影响提高了2.5倍。我们首次观察到,在3ω, 7 ns时,由于500 ps激光调节,DKDP的R/1结果转向更高的影响。将S/1结果与先前在同一DKDP晶体上测量的ρ(Φ)结果进行比较[1]。非条件和500 ps条件DKDP的S/1和ρ(Φ)结果之间存在一致的影响行为。我们成功地使用泊松统计推导出S/1和ρ(Φ)结果之间的联系,可以通过尝试预测ρ(Φ)曲线的形状来用我们的数据集进行测试。从S/1数据得出的ρ(Φ)影响的功率依赖值为~11±50%。本文提出和讨论的结果表明,损伤概率(S/1)试验与ρ(Φ)之间存在很强的相关性。我们发现幂定律ρ(Φ)对两种测试类型的一致描述,并且这种基本形状适用于所有情况,即形状在非条件结果和条件结果之间是不变的。
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引用次数: 11
Optical damage observed in the LHMEL II output coupler 在LHMEL II输出耦合器中观察到光学损伤
Pub Date : 2007-10-10 DOI: 10.1117/12.758950
John J. Eric, John O. Bagford, C. Devlin, R. Hull, Daniel B. Seibert
During the annual NIST calibration testing done at the LHMEL facility in FY06 on its high energy Carbon-Dioxide lasers, the LHMEL II device suffered severe damage to the internal surface of its ZnSe output coupler optics. The damage occurred during a high power, short duration run and it was believed to have been the result of a significant amount of surface contaminants interacting with the LHMEL cavity beam. Initial theories as to the source of the contamination led to the inspection of the vacuum grease that seals the piping that supplies the source gases to the laser cavity. Other contamination sources were considered, and analysis was conducted in an effort to identify the material found at the damage sites on the optic, but the tests were mainly inconclusive. Some procedure changes were initiated to identify possible contamination before high energy laser operation in an attempt to mitigate and possibly prevent the continued occurrence of damage to the output coupler window. This paper is to illustrate the type and extent of the damage encountered, highlight some of the theories as to the contamination source, and serve as a notice as to the severity and consequences of damage that is possible even due to small amounts of foreign material in a high energy laser environment.
在2006财年在LHMEL设施对其高能二氧化碳激光器进行的年度NIST校准测试中,LHMEL II设备的ZnSe输出耦合器光学器件的内表面遭受了严重的损坏。损坏发生在高功率、短时间运行期间,据信是大量表面污染物与LHMEL腔束相互作用的结果。关于污染来源的初步理论导致了对密封管道的真空油脂的检查,该管道向激光腔提供源气体。还考虑了其他污染源,并进行了分析,以确定在光学器件损坏部位发现的材料,但测试基本上没有定论。为了在高能激光操作之前识别可能的污染,开始了一些程序更改,以减轻和可能防止继续发生对输出耦合器窗口的损坏。本文旨在说明所遇到的损伤的类型和程度,突出一些关于污染源的理论,并作为在高能激光环境中即使由于少量外来物质也可能造成损伤的严重性和后果的通知。
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引用次数: 0
A model of laser-induced damage of KDP based on the coupling of statistics and heat transfer 基于统计与传热耦合的激光损伤模型
Pub Date : 2007-10-10 DOI: 10.1117/12.752614
G. Duchateau, A. Dyan
By coupling statistics and heat transfer, we investigate numerically laser-induced KDP crystal damage by multi-gigawatt nanosecond pulses. Our model is based on the heating of nanometric absorbing defects that may cooperate when they are sufficiently aggregated. In such a case, they induce locally a strong increase of temperature that may lead to a subsequent damage. Statistics is used to evaluate the initial defect cluster size distribution. When the crystal is illuminated, by considering in addition heat transfer processes, this approach allows to predict damage probabilities and the evolution of the damaged sites density as a function of the laser fluence. We show that the scaling law exponent, linking the critical laser fluence to its pulse duration, takes a value close to 0.3 departing from the standard 0.5 value that is in a good agreement with recents experiments. Furthermore, these results indicate that absorbers involved in KDP damage may be associated with a collection of planar defects.
通过耦合统计和传热理论,研究了多吉瓦纳秒脉冲激光诱导的KDP晶体损伤。我们的模型是基于纳米吸收缺陷的加热,当它们充分聚集时,它们可能会合作。在这种情况下,它们引起局部温度的强烈升高,可能导致随后的损坏。统计用于评估初始缺陷簇大小分布。当晶体被照射时,通过考虑额外的传热过程,这种方法可以预测损伤概率和损伤部位密度的演变作为激光能量的函数。我们表明,将临界激光通量与其脉冲持续时间联系起来的标度律指数的值接近于0.3,而不是标准的0.5值,这与最近的实验结果很吻合。此外,这些结果表明,参与KDP损伤的吸收剂可能与平面缺陷的集合有关。
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引用次数: 1
Influence of process conditions on the optical properties HfO2/SiO2 thin films for high power laser coatings 工艺条件对高功率激光涂层HfO2/SiO2薄膜光学性能的影响
Pub Date : 2007-10-10 DOI: 10.1117/12.753027
B. Langdon, D. Patel, E. Krous, J. Rocca, C. Menoni, F. Tomasel, S. Kholi, P. Mccurdy, P. Langston, A. Ogloza
We investigate the variations that occur with changes in the number of layers and with the use of the assist beam main and assist beam energy on the morphology of HfO2/SiO2 quarter wave stacks deposited by dual ion beam sputtering. We show how the addition of sequential HfO2/SiO2 bilayers, up to eight, affects the surface roughness and micro-crystallinity of the top HfO2 layer. We also show that use of the assist source significantly smooths the surface while simultaneously reducing microcrystallinity. The HfO2/SiO2 structures are very robust and can withstand fluences in excess of 3 J/cm2 generated by 1ps pulses from a chirped amplified Ti:Sapphire laser.
本文研究了双离子束溅射沉积的HfO2/SiO2四分之一波堆的形貌随层数的变化以及辅助光束主能量和辅助光束能量的使用而发生的变化。我们展示了连续添加HfO2/SiO2双层(最多8层)如何影响顶部HfO2层的表面粗糙度和微结晶度。我们还表明,辅助源的使用显著平滑表面,同时降低微结晶度。HfO2/SiO2结构非常坚固,可以承受来自啁啾放大Ti:Sapphire激光的1ps脉冲产生的超过3 J/cm2的影响。
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引用次数: 16
Measurement of initial absorption of fused silica at 193nm using laser induced deflection technique (LID) 激光诱导偏转技术测量熔融二氧化硅在193nm处的初始吸收
Pub Date : 2007-10-10 DOI: 10.1117/12.753081
D. Schönfeld, U. Klett, C. Mühlig, S. Thomas
The ongoing development in microlithography towards further miniaturization of structures creates a strong demand for lens material with nearly ideal optical properties. Beside the highly demanding requirements on homogeneity and stress induced birefringence (SIB), low absorption is a key factor. Even a small absorption is associated with a temperature increase and results in thermally induced local variations of refractive index and SIB. This could affect the achievable resolution of the lithographic process. The total absorption of the material is composed of initial absorption and of absorption induced during irradiation. Thus, the optimization of both improves the lifetime of the material. In principal, it is possible to measure transmission and scattering with a suitable spectrometer assembly and calculate absorption from them. However, owing to the influence of sample surfaces and errors of measurement, these methods usually do not provide satisfactory results for highly light-transmissive fused silica. Therefore, it is most desirable to find a technique that is capable of directly measuring absorption coefficients in the range of (1...10)•10-4 cm-1 (base 10) directly. We report our first results for fused silica achieved with the LID technique. Besides a fused silica grade designed for 193 nm applications, grades with higher absorption at 193 nm were measured to test the LID technique. A special focus was set on the possibility of measuring initial absorption without the influence of degradation effects.
随着微光刻技术不断向结构小型化方向发展,对光学性能接近理想的透镜材料产生了强烈的需求。除了对均匀性和应力诱导双折射(SIB)有很高的要求外,低吸收是一个关键因素。即使很小的吸收也与温度升高有关,并导致热诱导的折射率和SIB的局部变化。这可能会影响光刻工艺的可实现分辨率。材料的总吸收由初始吸收和辐照过程中引起的吸收组成。因此,两者的优化提高了材料的使用寿命。原则上,用合适的光谱仪组件测量透射和散射并计算它们的吸收是可能的。然而,由于样品表面和测量误差的影响,这些方法通常不能提供令人满意的高透光性熔融二氧化硅的结果。因此,最理想的是找到一种能够直接测量(1…10)•10-4 cm-1(基底10)范围内吸收系数的技术。我们报告了用LID技术获得的熔融二氧化硅的第一个结果。除了为193nm应用设计的熔融硅级外,还测量了193nm吸收更高的等级来测试LID技术。特别关注在不受降解效应影响的情况下测量初始吸收的可能性。
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引用次数: 7
Scaling in damage of optical materials by intensive laser radiation 强激光对光学材料损伤的标度研究
Pub Date : 2007-10-10 DOI: 10.1117/12.753827
E. Maldutis
This is a short review of the main reasons of the laser induced damage space scaling, when damage is caused by the first laser shoot (1-on-1) and by the sequence of N laser pulses to one and the same place (N-on-1). It is shown that the laser pulse shape is important to laser damage and scaling in some cases. The accumulation of material property changes and LID threshold for N-on-1 process has strong dependence on the front and on the back pulse slopes: the material property remnant changes become les and eventually accumulative damage disappears when the pulse slopes are increased. When damage scaling is defined by competition of the self-focusing and SBS processes, the long front slope is favored to SBS. The theoretical model explains damage from the first laser shot (1-on-1), damage from sequence of laser pulses (N-on-1 LID), accumulation and damage scaling. The volume damage of transparent dielectrics by laser radiation, when photon energy is more then twice less material ionization (hν
本文简要回顾了激光诱导损伤空间尺度化的主要原因,当损伤是由第一次激光发射(1对1)和N次激光脉冲序列到同一位置(N对1)引起的。结果表明,在某些情况下,激光脉冲形状对激光损伤和标度有重要影响。N-on-1过程材料性能变化的累积和LID阈值与前后脉冲斜率有很强的依赖性,随着脉冲斜率的增加,材料性能残余变化变小,最终累积损伤消失。当损伤尺度由自聚焦过程和SBS过程的竞争来定义时,长前坡有利于SBS过程。该理论模型解释了第一次激光发射(1对1)、激光脉冲序列(n对1 LID)、累积和损伤缩放。当光子能量比物质电离(hν)低2倍以上时,激光辐射对透明介质的体积损伤
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引用次数: 2
Effect of laser pulse duration on damage to metal mirrors for laser IFE 激光脉冲时间对激光IFE金属镜损伤的影响
Pub Date : 2007-10-10 DOI: 10.1117/12.752940
J. Pulsifer, M. Tillack, S. S. Harilal
A Grazing Incidence Metal Mirror (GIMM) is a chief candidate for beam delivery for Inertial Fusion Energy (IFE). The goal for GIMM survival is greater than 3×108 laser pulses with 5 J/cm2 laser fluence normal to the incident beam. Laser-induced damage to metal mirrors is primarily a thermomechanical process. Long-term exposure leads to microstructural evolution analogous to fatigue. We have performed laser-induced damage experiments on high damage threshold aluminum mirrors using commercial KrF excimer (248 nm) lasers. We have studied mirror response to standard, 25 ns long-pulses as well as to IFE prototypic, 5 ns short-pulses achieved using a Pockels Cell. Short-pulse damage fluence was found to be better than predicted using simple thermal diffusion scaling from long-pulse results.
掠入射金属反射镜(GIMM)是惯性聚变能(IFE)光束输送的主要候选器件。GIMM存活的目标是大于3×108垂直于入射光束的5 J/cm2的激光脉冲。激光对金属反射镜的损伤主要是一个热机械过程。长期接触会导致类似疲劳的微观结构演变。利用商用KrF准分子(248 nm)激光对高损伤阈值铝镜进行了激光诱导损伤实验。我们研究了标准的25ns长脉冲和使用Pockels电池获得的5ns短脉冲的镜像响应。发现短脉冲损伤影响比用简单的热扩散标度从长脉冲结果预测的要好。
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引用次数: 1
Effect of electric field distribution on the laser damage probability curves of multilayer coatings 电场分布对多层涂层激光损伤概率曲线的影响
Pub Date : 2007-10-10 DOI: 10.1117/12.752820
H. Krol, C. Amra, C. Grèzes-besset, M. Commandré
The effect of electric field distribution on the laser damage probability curves of multilayer coatings is investigated. The interpretation of laser damage probability curves uses a statistical model, where shapes and slopes of the curves are related to the spot size and to the densities of nanodefects that are responsible for damage and where each kind of precursors is characterized by its damage threshold. This statistical model is improved by considering value and shape of electric field in each layer of the coating. Typical multilayer coating constituted by alternate materials of high and low index are considered. For each kind of nanoprecursors and for each fluence, the value of electric field which leads to damage is calculated. This relative threshold value permits to know with accuracy the ratio of the coating thickness where the irradiation fluence is greater than the nanoprecursor threshold and to finally estimate the appropriate laser damage probability curves.
研究了电场分布对多层涂层激光损伤概率曲线的影响。激光损伤概率曲线的解释使用一个统计模型,其中曲线的形状和斜率与光斑大小和导致损伤的纳米缺陷的密度有关,其中每种前体的特征是其损伤阈值。通过考虑涂层各层电场的大小和形状,对该统计模型进行了改进。考虑了由高低折射率交替材料构成的典型多层涂层。对于每一种纳米递质和每一种影响,计算了导致损伤的电场值。这个相对阈值可以准确地知道辐照量大于纳米递归阈值的涂层厚度的比例,并最终估计出合适的激光损伤概率曲线。
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引用次数: 2
期刊
SPIE Laser Damage
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