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An automated calibration system that combines fringe projection and 2D digital image correlation 一种结合条纹投影和二维数字图像相关的自动校准系统
Pub Date : 2015-09-24 DOI: 10.1117/12.2191110
P. Siegmann, L. Felipe-Sesé, F. D. Díaz Garrido, J. Pineiro-Ave
An optical non-contact and full-field system that allows large displacement measurements in x-, y- and z-direction is presented. The system combines 2-dimentional digital image correlation (for in-plane measurements) and fringe projection (for out-of-plane displacements) and uses only one camera. The in- and out-of-plane displacements are obtained at the same instant allowing real-time measurements thanks to a color encoding filtering procedure. The out-of-plane measurement allows the correction of the in-plane measurements and the system has to be precisely aligned by following an established alignment procedure. Furthermore, a calibration has to be done to obtain a fringe parameter k for each pixel of the specimen surface image necessary to relate the shifted phase with the out-of-plane displacements. The presented system obtains different values of k for each pixel because of the divergent and non-normal incidence of the fringe beam onto the sample surface (non zero incidence angle). The calibration is performed automatically and only has to be done once for each configuration of the system. The system is portable and can be easily adapted to measure large displacements and wide areas (using small incidence angle) or smaller distances but with higher resolutions (when increasing the incidence angle).
提出了一种可实现x、y、z方向大位移测量的光学非接触全场系统。该系统结合了二维数字图像相关(用于面内测量)和条纹投影(用于面外位移),并且仅使用一台相机。平面内和平面外的位移是在同一时刻获得的,允许实时测量,这要归功于颜色编码滤波过程。面外测量允许对面内测量进行校正,并且系统必须按照既定的校准程序进行精确校准。此外,必须进行校准以获得样品表面图像的每个像素的条纹参数k,这是将移相与面外位移联系起来所必需的。由于条纹光束发散和非正射向样品表面(非零入射角),该系统得到了不同像素的k值。校准是自动执行的,只需要对系统的每个配置进行一次校准。该系统是便携式的,可以很容易地适应于测量大位移和宽区域(使用小入射角)或更小的距离,但具有更高的分辨率(当增加入射角时)。
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引用次数: 1
Fabrication and testing of STREEGO: a compact optical payload for earth observation on small satellites STREEGO:用于小卫星地球观测的紧凑型光学有效载荷的制造和测试
Pub Date : 2015-09-24 DOI: 10.1117/12.2191285
M. Rossi, I. Ferrario, R. Ghislanzoni, P. Holbrouck, A. Ritucci, M. Taccola, M. Terraneo, F. Zocchi
In the framework of an European Space Agency contract, Media Lario Technologies is developing an optical payload for Earth Observation targeted to small satellites. In this paper we present a detailed description of the imager which, by leveraging on aspheric surfaces, bonnet polishing, lightweight materials, an off-the-shelf large format CMOS detector and multispectral filters integrated in the FPA, achieves remarkable image quality with compact volume claim and mass of only 15 kg. The instrument is based on a three mirror anastigmat (TMA) design with an aperture of 200 mm and an F/number of 6. The payload is designed to provide a ground sampling distance (GSD) of 2.75 m for the panchromatic channel at a reference altitude of 600 km, a field of view of 1° and a nominal MTF greater than 60% at Nyquist frequency with a Signal to Noise Ratio (SNR) greater than 100.
在欧洲空间局合同的框架内,Media Lario技术公司正在开发一种针对小卫星的地球观测光学有效载荷。在本文中,我们详细介绍了该成像仪,该成像仪利用非球面、阀盖抛光、轻质材料、现成的大幅面CMOS探测器和集成在FPA中的多光谱滤波器,以紧凑的体积和仅15公斤的质量实现了卓越的图像质量。该仪器基于三镜消像差(TMA)设计,孔径为200mm, F/数为6。有效载荷的设计目标是在600公里的参考高度为全色信道提供2.75米的地面采样距离(GSD),视场为1°,在奈奎斯特频率下的标称MTF大于60%,信噪比(SNR)大于100。
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引用次数: 3
Manufacturing and testing large SiC mirrors in an efficient way 高效制造和测试大型碳化硅反射镜
Pub Date : 2015-09-24 DOI: 10.1117/12.2189751
Xuejun Zhang, Xuefeng Zeng, Haixiang Hu, Xiao Luo
SiC mirrors are of excellent mechanical and thermal properties compared to their glass opponents. Efficient fabrication and testing of SiC mirrors, particularly the large freeform surfaces are very challenging. In this paper, direct CNC generation, deterministic polishing techniques including CCOS, MRF, and IBF were addressed in detail. Since testing is critical to make high accuracy freeform surfaces, the paper focused on Computer Generated Hologram (CGH) design and implement to measure large mirrors. In particular, detector to mirror mapping distortion was discussed in detail. Finally, some results for SiC mirrors were presented.
SiC反射镜与玻璃反射镜相比,具有优异的机械性能和热性能。碳化硅反射镜的高效制造和测试,特别是大型自由曲面的制造和测试是非常具有挑战性的。本文对直接数控生成、确定性抛光技术(包括CCOS、MRF和IBF)进行了详细讨论。由于测试是高精度自由曲面的关键,本文重点研究了计算机生成全息图(CGH)的设计与实现。详细讨论了探测器对镜面的映射畸变。最后给出了SiC反射镜的一些结果。
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引用次数: 2
Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films 成像光谱反射法在薄膜光学表征中的可能性和局限性
Pub Date : 2015-09-24 DOI: 10.1117/12.2191052
M. Ohlídal, I. Ohlídal, D. Nečas, J. Vodák, D. Franta, P. Nádaský, František Vižd'a
It is possible to encounter thin films exhibiting various defects in practice. One of these defects is area non-uniformity in optical parameters (e.g. in thickness). Therefore it is necessary to have methods for an optical characterization of nonuniform thin films. Imaging spectroscopic reflectometry provides methods enabling us to perform an efficient optical characterization of such films. It gives a possibility to determine spectral dependencies of a local reflectance at normal incidence of light belonging to small areas (37 μm × 37 μm in our case) on these non-uniform films. The local reflectance is measured by individual pixels of a CCD camera serving as a detector of an imaging spectroscopic reflectometer. It is mostly possible to express the local reflectance using formulas corresponding to a uniform thin film. It allows a relatively simple treatment of the experimental data obtained by imaging spectroscopic reflectometry. There are three methods for treating these experimental data in the special case of thickness non-uniformity, i.e. in the case of the same optical constants within a certain area of the film - single pixel imaging spectroscopic reflectometry method, combination of single-pixel imaging spectroscopic reflectometry method and conventional methods (conventional single spot spectroscopic ellipsometry and spectrophotometry), and multi-pixel imaging spectroscopic reflectometry method. These methods are discussed and examples of the optical characterization of thin films non-uniform in thickness corresponding to these methods are presented in this contribution.
在实际应用中,有可能遇到表现出各种缺陷的薄膜。其中一个缺陷是光学参数(如厚度)的面积不均匀性。因此,有必要有非均匀薄膜的光学表征方法。成像光谱反射法提供了使我们能够对这种薄膜进行有效光学表征的方法。它提供了一种可能性,以确定在这些非均匀薄膜上属于小区域(在我们的情况下为37 μm × 37 μm)的正入射光的局部反射率的光谱依赖关系。局部反射率由CCD相机的单个像素测量,作为成像光谱反射计的探测器。用与均匀薄膜相对应的公式来表示局部反射率是很可能的。它允许相对简单地处理由成像光谱反射法获得的实验数据。在厚度不均匀的特殊情况下,处理这些实验数据的方法有三种,即在薄膜的一定区域内光学常数相同的情况下——单像元成像光谱反射法、单像元成像光谱反射法与常规方法(常规单点光谱椭偏法和分光光度法)相结合的方法、多像元成像光谱反射法。本文讨论了这些方法,并给出了与这些方法相对应的厚度不均匀薄膜的光学表征的例子。
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引用次数: 4
Surface assessment and mitigation of DUV optics DUV光学的表面评估和减缓
Pub Date : 2015-09-24 DOI: 10.1117/12.2190684
Jue Wang
CaF2 is one of the foremost optical materials used in ArF excimer laser optics. Surface quality of optically finished CaF2 plays an important role in the component’s lifetime. Several techniques were employed to assess surface quality of optically finished CaF2 in terms of top surface and subsurface damage, resulting in subsurface-damagefree CaF2. UV light and plasma interaction with CaF2 surfaces were investigated. The results were discussed in terms of surface roughness and cleanness associated with surface finishing and optical coatings.
CaF2是ArF准分子激光光学中应用最广泛的光学材料之一。光学加工的CaF2表面质量对元件的使用寿命起着重要的作用。采用了几种技术来评估光学处理的CaF2的表面质量,包括表面和亚表面损伤,从而获得了无亚表面损伤的CaF2。研究了紫外光和等离子体与CaF2表面的相互作用。结果讨论了表面粗糙度和清洁度与表面处理和光学涂层的关系。
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引用次数: 7
Reducing the cycle time of cementing processes for high quality doublets 减少高质量双晶胶凝工艺周期
Pub Date : 2015-09-24 DOI: 10.1117/12.2196876
C. Wilde, F. Hahne, P. Langehanenberg, J. Heinisch
For the manufacturing of high performance optical systems, centered alignment of the optical surfaces within the assembly is becoming increasingly important. In this contribution, we will present a system for the automated alignment of optical surfaces for the high-throughput manufacturing of cemented doublets (and triplets) with optimized imaging performance. First of all, different concepts for the alignment of doublets etc. are discussed. Standard methods for cementing evaluate mechanical features, such as the outer barrel of one element as reference axis. Using this procedure the optical performance of the assembly that can be achieved is limited by imperfections in the collinearity of the element’s barrel axis and its optical axis. Instead, using the optical axis of the bottom element as target axis opens up perspectives for the production of multiplets with perfect symmetric imaging performance. For this concept, all three center of curvature positions of the optical surfaces are measured. Then, the top surface is aligned to the bottom element's optical axis using high-precision actuators. In order to increase the throughput of this procedure, the system is equipped with a novel measurement head that acquires autocollimation images of all three surfaces of a doublet at the same time. Thus, the positions of all surfaces are measured simultaneously during just a single rotation, avoiding both additional rotations and focus movements. Using this approach, cycle times can significantly be reduced from an average of 1 min to less than 10 seconds (w/o curing time). The system is reconfigurable in order to support a wide range of sample designs and enables cementing of high quality optics with centering errors below 2 μm.
对于高性能光学系统的制造,光学表面在组装中的中心对准变得越来越重要。在这篇文章中,我们将介绍一种用于高通量制造胶结双晶(和三晶)的光学表面自动对准系统,该系统具有优化的成像性能。首先,讨论了双偶排列等不同概念。胶结的标准方法评价机械特性,如一个元件的外筒作为参考轴。使用这个程序,可以实现的组件的光学性能是有限的缺陷,在元件的桶轴和它的光轴的共线性。相反,使用底部元件的光轴作为目标轴,为具有完美对称成像性能的多胞胎的生产开辟了视角。对于这个概念,测量了光学表面的所有三个曲率中心位置。然后,使用高精度致动器将顶部表面对准底部元件的光轴。为了提高这一过程的吞吐量,该系统配备了一个新颖的测量头,可以同时获取双透镜所有三个表面的自动准直图像。因此,在一次旋转中同时测量所有表面的位置,避免了额外的旋转和焦点移动。使用这种方法,循环时间可以显著减少,从平均1分钟到不到10秒(w/o固化时间)。该系统可重新配置,以支持广泛的样品设计,并实现高质量光学固井,定心误差低于2 μm。
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引用次数: 2
Multilevel micro-structuring of glassy carbon molds for precision glass molding 精密玻璃成型用玻碳模具的多级微结构
Pub Date : 2015-09-24 DOI: 10.1117/12.2191661
K. Prater, J. Dukwen, T. Scharf, H. Herzig, S. Plöger, A. Hermerschmidt
Replication techniques for diffractive optical elements (DOEs) in soft materials such as plastic injection molding are state of the art. For precision glass molding in glasses with high transition temperatures, molds with extreme thermal resistivity, low chemical reactivity and high mechanical strength are needed. Glassy Carbon can be operated up to 2000°C making it possible to mold almost all glasses including Fused Silica with a transition temperatures above 1060°C. For the structuring of Glassy Carbon wafers photolithography and a RIE process is used. We have developed a process using Si as a hard mask material. If the flow rates of the etching gases O2 and SF6 are chosen properly, high selectivity of GC to Si 19:1 can be achieved, which provides excellent conditions to realize high resolution elements with feature size down to 1 micron and fulfills requirements for optical applications. We fabricated several multilevel GC molds with 8 levels of structuring. Two different optical functionalities were implemented: 6x6 array beamsplitter and 1x4 linear beamsplitter. The molds were applied for precision glass molding of a low Tg glass L-BAL 42 (from Ohara) with a transition temperature of 565°C. Their optical performance was measured. A more detailed analysis of the impact of mold fabrication defects on optical performance is done. Rigorous coupled wave analysis simulations are performed, where we included fabrication constrains such as duty cycle, edge depth errors, wall verticality and misalignment errors. We will compare the results with the design specifications and discuss the influence of fabrication errors introduced during the different process steps.
衍射光学元件(do)在软材料(如塑料注射成型)中的复制技术是最先进的。在高转变温度的玻璃中进行精密玻璃成型,需要极热阻、低化学反应性和高机械强度的模具。玻碳可以在2000°C的温度下工作,使得几乎所有的玻璃都可以成型,包括熔融二氧化硅,过渡温度高于1060°C。对于玻璃碳晶圆的结构,采用光刻和RIE工艺。我们已经开发了一种使用Si作为硬掩模材料的工艺。如果选择合适的蚀刻气体O2和SF6的流速,可以实现GC对Si 19:1的高选择性,这为实现特征尺寸小至1微米的高分辨率元件提供了良好的条件,满足了光学应用的要求。我们制作了多个8层结构的多层GC模具。实现了两种不同的光学功能:6x6阵列分光器和1x4线性分光器。将该模具应用于低Tg l - bal42玻璃(来自Ohara)的精密玻璃成型,过渡温度为565℃。测量了它们的光学性能。对模具制造缺陷对光学性能的影响进行了较为详细的分析。进行了严格的耦合波分析模拟,其中我们包括制造约束,如占空比,边缘深度误差,壁垂直度和不对中误差。我们将结果与设计规范进行比较,并讨论在不同工艺步骤中引入的制造误差的影响。
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引用次数: 0
Handheld probes and galvanometer scanning for optical coherence tomography 光学相干断层扫描的手持探头和振镜扫描
Pub Date : 2015-09-24 DOI: 10.1117/12.2191130
V. Duma, G. Dobre, D. Demian, R. Cernat, C. Sinescu, F. Topala, M. Negruțiu, Gheorghe Huţiu, A. Bradu, J. Rolland, A. Podoleanu
As part of the ongoing effort of the biomedical imaging community to move Optical Coherence Tomography (OCT) systems from the lab to the clinical environment and produce OCT systems appropriate for multiple types of investigations in a medical department, handheld probes equipped with different types of scanners need to be developed. These allow different areas of a patient’s body to be investigated using OCT with the same system and even without changing the patient’s position. This paper reviews first the state of the art regarding OCT handheld probes. Novel probes with a uni-dimensional (1D) galvanometer-based scanner (GS) developed in our groups are presented. Their advantages and limitations are discussed. Aspects regarding the use of galvoscanners with regard to Micro-Electro- Mechanical Systems (MEMS) are pointed out, in relationship with our studies on optimal scanning functions of galvanometer devices in OCT. These scanning functions are briefly discussed with regard to their main parameters: profile, theoretical duty cycle, scan frequency, and scan amplitude. The optical design of the galvoscanner and refractive optics combination in the probe head, optimized for various applications, is considered. Perspectives of the field are pointed out in the final part of the paper.
作为生物医学成像社区将光学相干断层扫描(OCT)系统从实验室转移到临床环境并生产适合医疗部门多种类型调查的OCT系统的持续努力的一部分,需要开发配备不同类型扫描仪的手持探针。这允许使用相同系统的OCT对患者身体的不同区域进行调查,甚至不改变患者的位置。本文首先综述了OCT手持式探头的研究现状。介绍了我们小组开发的具有一维(1D)基于振镜扫描仪(GS)的新型探针。讨论了它们的优点和局限性。结合我们在微机电系统(MEMS)中对振镜器件最佳扫描功能的研究,指出了电振扫描仪在微机电系统(MEMS)中使用的一些方面。本文简要讨论了扫描功能的主要参数:轮廓、理论占空比、扫描频率和扫描幅度。考虑了探头中galvoscanner和折射光学组合的光学设计,并针对各种应用进行了优化。最后,对该领域的研究前景进行了展望。
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引用次数: 2
Measuring and quantifying scatter from a variety of sample types 测量和量化来自各种样品类型的散射
Pub Date : 2015-09-24 DOI: 10.1117/12.2190986
J. Stover
When using the BRDF to learn about surface statistics or to estimate hemispherical scatter from in-plane measurements the assumption is usually made that the surface is isotropic. Unfortunately, this is often not the case; for example a diamond turned mirror is not isotropic. Other common examples are rolled surfaces and situations where scatter is mostly caused by small discrete surface features such as scratches, pits or particles. Another example is scatter from an extended edge that is much longer than the illuminated spot. In these situations the measurements may be made differently and quantified in different units (such as area/sr or 1/deg instead of the common 1/sr associated with BRDF) in order to have a result that can reliably characterize the scatter source. The situation is further complicated by the fact that the popular stray radiation codes accept scatter data only in the standardized BRDF format with units of 1/sr. This paper reviews these situations for both measurement and analysis issues.
当使用BRDF来了解表面统计信息或从面内测量中估计半球散射时,通常假设表面是各向同性的。不幸的是,情况往往并非如此;例如,钻石镜不是各向同性的。其他常见的例子是轧制表面和散射主要由小的离散表面特征(如划痕、凹坑或颗粒)引起的情况。另一个例子是从比被照亮点长得多的延伸边缘散射。在这些情况下,测量可以以不同的方式进行,并以不同的单位(如面积/sr或1/度,而不是与BRDF相关的常见1/sr)进行量化,以便获得能够可靠地表征散射源的结果。流行的杂散辐射码只接受单位为1/sr的标准化BRDF格式的散射数据,这使情况进一步复杂化。本文从测量和分析两个方面综述了这些情况。
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引用次数: 1
Advances in corneal topography measurements with conical null-screens 锥形零屏测量角膜地形图的研究进展
Pub Date : 2015-09-24 DOI: 10.1117/12.2192137
M. Campos-García, Cesar Cossio-Guerrero, O. Huerta-Carranza, V. Moreno-Oliva
In this work we report the design of a null-screen for corneal topography. To avoid the difficulties in the alignment of the test system due to the face contour (eyebrows, nose, or eyelids), we design a conical null-screen with a novel radial points distribution drawn on it in such a way that its image, which is formed by reflection on the test surface, becomes an exact array of circular spots if the surface is perfect. Additionally, an algorithm to compute the sagittal and meridional radii of curvature for the corneal surface is presented. The sagittal radius is obtained from the surface normal, and the meridional radius is calculated from a function fitted to the derivative of the sagittal curvature by using the surfacenormals raw data. Experimental results for the testing a calibration spherical surface are shown. Also, we perform some corneal topography measurements.
在这项工作中,我们报告了一种用于角膜地形图的零屏的设计。为了避免由于面部轮廓(眉毛,鼻子或眼睑)而导致测试系统对齐困难,我们设计了一个锥形零屏,并在其上绘制了新颖的径向点分布,这样,如果表面是完美的,则其通过反射在测试表面上形成的图像将成为一个精确的圆形点阵列。此外,还提出了一种计算角膜表面矢状和子午曲率半径的算法。矢状面半径由曲面法线得到,子午面半径由曲面巨量原始数据拟合矢状曲率导数的函数计算得到。给出了标定球面测试的实验结果。此外,我们还进行了一些角膜地形图测量。
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引用次数: 5
期刊
SPIE Optical Systems Design
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