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Enhancement of RIE: etched Diffractive Optical Elements surfaces by using Ion Beam Etching 离子束刻蚀法增强衍射光学元件表面刻蚀性能
Pub Date : 2015-09-24 DOI: 10.1117/12.2191053
J. Schmitt, C. Bischoff, U. Rädel, M. Grau, U. Wallrabe, F. Völklein
Shaping of laser light intensities by using Diffractive Optical Elements allows the adaption of the incident light to its application. Fused silica is used where for example UV-light or high temperatures are mandatory. For high diffraction efficiency the quality of the etched surface areas is important. The investigation of different process parameters for Ion Beam and Reactive Ion Etching reveals that only Ion Beam Etching provides surfaces with optical quality. Measurements of the influence of the surface quality on the diffraction efficiencies prove that the surfaces generated by Reactive Ion Etching are not suitable. Due to the high selectivity of the process Reactive Ion Etching is nevertheless a reasonable choice for the fabrication of Diffractive Optical Elements. To improve the quality of the etched surfaces a post processing with Ion Beam Etching is developed. Simulations in MATLAB display that the angle dependent removal of the surface during the Ion Beam Etching causes a smoothing of the surface roughness. The positive influence of a post processing on the diffraction efficiency is outlined by measurements. The ion beam post processing leads to an increase of the etching depth. For the fabrication of high efficient Diffractive Optical Elements this has to be taken into account. The relation is investigated and transferred to the fabrication of four-level gratings. Diffraction efficiencies up to 78 % instead of the ideal 81 % underline the practicability of the developed post processing.
通过使用衍射光学元件来塑造激光光强度,可以使入射光适应其应用。熔融二氧化硅用于强制要求紫外线或高温的地方。为了提高衍射效率,蚀刻表面积的质量是非常重要的。对离子束和反应离子刻蚀不同工艺参数的研究表明,只有离子束刻蚀才能提供具有光学质量的表面。通过测量表面质量对衍射效率的影响,证明了反应离子刻蚀法生成的表面是不合适的。由于反应离子蚀刻工艺的高选择性,仍然是衍射光学元件制造的合理选择。为了提高刻蚀表面的质量,提出了一种离子束刻蚀后处理方法。MATLAB仿真结果表明,离子束刻蚀过程中与角度相关的表面去除会使表面粗糙度变得平滑。通过测量概述了后处理对衍射效率的积极影响。离子束后处理导致了刻蚀深度的增加。为了制造高效的衍射光学元件,必须考虑到这一点。研究了这种关系,并将其应用于四能级光栅的制作。衍射效率高达78%,而不是理想的81%,强调了开发后处理的实用性。
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引用次数: 3
Design and development of a profilometer for the fast and accurate characterization of optical surfaces 一种快速准确表征光学表面的轮廓仪的设计与开发
Pub Date : 2015-09-24 DOI: 10.1117/12.2191058
J. Gómez-Pedrero, Diego Rodríguez-Ibáñez, J. Alonso, Juan A. Quirgoa
With the advent of techniques devised for the mass production of optical components made with surfaces of arbitrary form (also known as free form surfaces) in the last years, a parallel development of measuring systems adapted for these new kind of surfaces constitutes a real necessity for the industry. Profilometry is one of the preferred methods for the assessment of the quality of a surface, and is widely employed in the optical fabrication industry for the quality control of its products. In this work, we present the design, development and assembly of a new profilometer with five axis of movement, specifically suited to the measurement of medium size (up to 150 mm of diameter) "free-form" optical surfaces with sub-micrometer accuracy and low measuring times. The apparatus is formed by three X, Y, Z linear motorized positioners plus and additional angular and a tilt positioner employed to locate accurately the surface to be measured and the probe which can be a mechanical or an optical one, being optical one a confocal sensor based on chromatic aberration. Both optical and mechanical probes guarantee an accuracy lower than the micrometer in the determination of the surface height, thus ensuring an accuracy in the surface curvatures of the order of 0.01 D or better. An original calibration procedure based on the measurement of a precision sphere has been developed in order to correct the perpendicularity error between the axes of the linear positioners. To reduce the measuring time of the profilometer, a custom electronics, based on an Arduino™ controller, have been designed and produced in order to synchronize the five motorized positioners and the optical and mechanical probes so that a medium size surface (around 10 cm of diameter) with a dynamic range in curvatures of around 10 D, can be measured in less than 300 seconds (using three axes) keeping the resolution in height and curvature in the figures mentioned above.
随着近年来为任意形状表面(也称为自由形状表面)制造的光学元件的大规模生产而设计的技术的出现,适用于这些新型表面的测量系统的平行发展构成了该行业的真正必要性。轮廓测量法是评估表面质量的首选方法之一,在光学制造行业中被广泛应用于产品的质量控制。在这项工作中,我们介绍了一种具有五轴运动的新型轮廓仪的设计,开发和组装,特别适合于测量中等尺寸(直径高达150毫米)。具有亚微米精度和低测量时间的“自由形状”光学表面。该装置由三个X, Y, Z直线电动定位器和附加的角度定位器和倾斜定位器组成,用于精确定位待测表面,探头可以是机械探头或光学探头,光学探头是基于色差的共聚焦传感器。光学和机械探头在确定表面高度时保证精度低于微米,从而确保表面曲率精度为0.01 D或更好。为了校正直线定位机轴线之间的垂直度误差,提出了一种基于精密球体测量的原始校准方法。为了减少轮廓仪的测量时间,基于Arduino™控制器的定制电子设备已经设计和生产,以便同步五个电动定位器和光学和机械探头,以便在不到300秒的时间内测量一个中等尺寸的表面(直径约10厘米),动态范围在10 D左右(使用三个轴),保持高度和曲率的分辨率在上面提到的数字。
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引用次数: 2
Wide spectral range characterization of antireflective coatings and their optimization 增透涂层的宽光谱表征及其优化
Pub Date : 2015-09-24 DOI: 10.1117/12.2190109
D. Franta, D. Nečas, I. Ohlídal, J. Jankuj
Development of antireflective coatings realized by thin film systems requires their characterization and optimization of their properties. Functional properties of such interference devices are determined by optical constants and thicknesses of the individual films and various defects taking place in these systems. In optics industry the characterization of the films is mostly performed in a relatively narrow spectral range using simple dispersion models and, moreover, the defects are not taken into account at all. This manner of characterization fails if applied to real-world non-ideal thin film systems because the measured data do not contain sufficient information about all the parameters describing the system including imperfections. Reliable characterization requires the following changes: extension of spectral range of measurements, combination of spectrophotometry and ellipsometry, utilization of physically correct dispersion models (Kramers-Kronig consistency, sum rules), inclusion of structural defects instrument imperfection into the models and simultaneous processing of all experimental data. This enables us to remove or reduce a correlation among the parameters searched so that correct and sufficiently precise determination of parameter values is achieved. Since the presence and properties of the defects are difficult to control independently by tuning of the deposition conditions, the optimization does not in general involve the elimination of defects. Instead they are taken into account in the design of the film systems. The outlined approach is demonstrated on the characterization and optimization of ultraviolet antireflective coating formed by double layer of Al2O3 and MgF2 deposited on fused silica.
利用薄膜系统实现增透涂层的发展需要对其性能进行表征和优化。这种干涉装置的功能特性是由光学常数和单个薄膜的厚度以及这些系统中发生的各种缺陷决定的。在光学工业中,薄膜的表征大多是使用简单的色散模型在相对较窄的光谱范围内进行的,而且根本没有考虑到缺陷。如果应用于现实世界的非理想薄膜系统,这种表征方式就会失败,因为测量数据不包含描述系统的所有参数(包括缺陷)的足够信息。可靠的表征需要以下改变:扩展测量光谱范围,结合分光光度法和椭偏法,使用物理正确的色散模型(Kramers-Kronig一致性,求和规则),将结构缺陷和仪器缺陷纳入模型,并同时处理所有实验数据。这使我们能够消除或减少所搜索参数之间的相关性,从而实现对参数值的正确和足够精确的确定。由于缺陷的存在和性质很难通过调整沉积条件来独立控制,因此优化通常不涉及消除缺陷。相反,它们被考虑在薄膜系统的设计中。在熔融二氧化硅上沉积双层Al2O3和MgF2形成的紫外减反射涂层的表征和优化中,证明了概述的方法。
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引用次数: 2
Use of a NOM profilometer to measure large aspheric surfaces 使用NOM轮廓仪测量大型非球面
Pub Date : 2015-09-24 DOI: 10.1117/12.2191322
J. L. Pearson, Gareth W. Roberts, P. Rees, S. Thompson
The use of autocollimator-based profilometers of the Nanometer Optical measuring Machine (NOM) design has been reported for the evaluation of X-ray optics for some time. We report a related development in the use of a non-contact NOM profilometer for the in situ measurement of base radius of curvature and conic constant for E-ELT primary mirror segments during fabrication. The instrument is unusual in NOM design in that it is deployable onto a CNC polishing machine in an industrial fabrication environment. Whilst the measurement of radius of curvature of spherical surfaces over a single scan has been reported previously, here we report on the use of this instrument to measure optical surfaces with an aspheric departure of 180 micrometers using a grid of multiple scans and bespoke surface fitting software. The repeatability of the measurement has been found to be approximately 1 mm in a measured radius of curvature of approximately 90 m. The absolute accuracy is limited by the accuracy of the calibration of the autocollimator and the in situ calibration of the instrument during operation.
使用基于自准直仪的纳米光学测量机(NOM)设计的轮廓仪来评估x射线光学已有一段时间的报道。我们报告了在制造过程中使用非接触式NOM轮廓仪原位测量E-ELT主镜段的基本曲率半径和圆锥常数的相关发展。该仪器在NOM设计中是不寻常的,因为它可以在工业制造环境中部署到CNC抛光机上。虽然以前曾报道过单次扫描测量球面曲率半径的方法,但在这里,我们报告了使用该仪器测量光学表面的非球面偏差为180微米,使用多次扫描网格和定制的表面拟合软件。在测量的曲率半径约为90米时,发现测量的重复性约为1毫米。绝对精度受自准直仪校准精度和仪器在运行过程中的原位校准精度的限制。
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引用次数: 2
Recent developments in the design and verification of crystalline polarization scramblers for space applications 用于空间应用的晶体偏振扰频器的设计和验证的最新进展
Pub Date : 2015-09-23 DOI: 10.1117/12.2191226
G. Dubroca, M. Richert, Didier Loiseaux, J. Caron, J. Bézy
To increase the accuracy of earth-observation spectro-imagers, it is necessary to achieve high levels of depolarization of the incoming beam. The preferred device in space instrument is the so-called polarization scrambler. It is made of birefringent crystal wedges arranged in a single or dual Babinet. Today, with required radiometric accuracies of the order of 0.1%, it is necessary to develop tools to find optimal and low sensitivity solutions quickly and to measure the performances with a high level of accuracy.
为了提高地球观测光谱成像仪的精度,有必要实现入射光束的高水平去极化。空间仪器中首选的器件是所谓的极化扰频器。它是由双折射的晶体楔形排列在一个或两个Babinet。今天,由于要求的辐射测量精度为0.1%,因此有必要开发工具来快速找到最佳和低灵敏度的解决方案,并以高精度测量性能。
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引用次数: 0
Research of aberration properties and passive athermalization of optical systems for infrared region 红外光学系统的像差特性及被动热化研究
Pub Date : 2015-09-23 DOI: 10.1117/12.2191119
G. Romanova, Grzegorz Pyś
Infrared optical systems are widely used for surveillance, military and many other purposes. Image quality of such systems should be stable over wide working temperature range from – 40 up to +60°C. Due to temperature dependence of properties of optical materials and mechanical parts it is a difficult task to achieve the required stability. Passive and active methods exist to compensate the most significant aberration – so called thermal defocus. Passive compensation ways are the most attractive because complicated mechanical parts or devices are not required. The work is aimed at developing and improving of the IR system design methods. The analysis of thermoaberrations starts with analysis of possibilities of chromatic and thermal defocus correction in two and three component systems. Based on these results the development and improvement of the design method which was proposed earlier was implemented. Examples of designed systems are given. Results of the work may be helpful for designers to find optimal material combination for further designing of thermostabilized systems working in IR region.
红外光学系统广泛用于监视、军事和许多其他用途。这种系统的图像质量应该在- 40到+60°C的宽工作温度范围内保持稳定。由于光学材料和机械部件的性能对温度的依赖性,实现所需的稳定性是一项困难的任务。存在被动和主动方法来补偿最显著的像差-即所谓的热离焦。无源补偿方法是最有吸引力的,因为它不需要复杂的机械部件或装置。本工作旨在发展和改进红外系统的设计方法。热像差的分析从分析二组分和三组分系统中色散和热离焦校正的可能性开始。在此基础上,对先前提出的设计方法进行了发展和改进。给出了设计系统的实例。研究结果可为红外热稳定系统的优化设计提供参考。
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引用次数: 1
Heat generation and thermo-mechanical effect modeling in longitudinally diode-pumped solid state lasers 纵向二极管泵浦固体激光器中的热产生和热机械效应建模
Pub Date : 2015-09-23 DOI: 10.1117/12.2191158
F. Lakhdari, Ismahen Osmani, S. Tabet
Thermal management in solid state laser is a challenge to the high power laser industry’s ability to provide continued improvements in device and system performance. In this work an investigation of heat generation and thermo-mechanical effect in a high-power Nd:YAG and Yb:YAG cylindrical-type solid state laser pumped longitudinally with different power by fibre coupled laser diode is carried out by numerical simulation based on the finite element method (FEM). Impact of the dopant concentration on the power conversion efficiency is included in the simulation. The distribution of the temperature inside the lasing material is resolute according to the thermal conductivity. The thermo-mechanical effect is explored as a function of pump power in order to determine the maximum pumping power allowed to prevent the crystal’s fracture. The presented simulations are in broad agreement with analytical solutions; provided that the boundary condition of the pump induced heat generation is accurately modelled.
固态激光器的热管理对高功率激光器行业提供持续改进器件和系统性能的能力是一个挑战。本文采用有限元数值模拟的方法,研究了光纤耦合激光二极管纵向泵浦不同功率Nd:YAG和Yb:YAG圆柱型固体激光器的产热和热机械效应。模拟中考虑了掺杂剂浓度对功率转换效率的影响。激光材料内部的温度分布是由热导率决定的。为了确定防止晶体断裂所允许的最大泵送功率,研究了泵送功率对热机械效应的影响。所提出的模拟与解析解基本一致;假设水泵产生热量的边界条件得到了准确的模拟。
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引用次数: 0
Design and analysis of an active optics system for a 4-m telescope mirror combining hydraulic and pneumatic supports 液压与气动相结合的4米望远镜反射镜主动光学系统设计与分析
Pub Date : 2015-09-23 DOI: 10.1117/12.2191272
G. Lousberg, V. Moreau, J. Schumacher, M. Piérard, Aude Somja, P. Gloesener, C. Flebus
AMOS has developed a hybrid active optics system that combines hydraulic and pneumatic properties of actuators to support a 4-m primary mirror. The mirror is intended to be used in the Daniel K. Inouye Solar Telescope (DKIST, formerly the Advanced Technology Solar Telescope) that will be installed by the National Solar Observatory (NSO) atop the Haleakala volcano in Hawaii. The mirror support design is driven by the needs of (1) minimizing the support-induced mirror distortions under telescope operating conditions, (2) shaping the mirror surface to the desired profile, and (3) providing a high stiffness against wind loads. In order to fulfill these requirements, AMOS proposes an innovative support design that consist of 118 axial actuators and 24 lateral actuators. The axial support is based on coupled hydraulic and pneumatic actuators. The hydraulic part is a passive system whose main function is to support the mirror weight with a high stiffness. The pneumatic part is actively controlled so as to compensate for low-order wavefront aberrations that are generated by the mirror support itself or by any other elements in the telescope optical chain. The performances of the support and its adequacy with the requirements are assessed with the help of a comprehensive analysis loop involving finite-element, thermal and optical modellings.
AMOS开发了一种混合主动光学系统,该系统结合了执行器的液压和气动特性来支持一个4米的主镜。该镜面将用于Daniel K. Inouye太阳望远镜(DKIST,前身为先进技术太阳望远镜),该望远镜将由美国国家太阳天文台(NSO)安装在夏威夷的哈雷阿卡拉火山上。镜面支撑设计是由以下需求驱动的:(1)在望远镜运行条件下,最大限度地减少支撑引起的镜面变形;(2)将镜面塑造成所需的轮廓;(3)提供抗风荷载的高刚度。为了满足这些要求,AMOS提出了一种创新的支撑设计,由118个轴向致动器和24个横向致动器组成。轴向支撑是基于耦合的液压和气动执行器。液压部分是一个被动系统,其主要功能是支撑具有高刚度的镜面重量。气动部分是主动控制的,以补偿由反射镜支架本身或望远镜光学链中的任何其他元件产生的低阶波前像差。在包括有限元、热学和光学模型在内的综合分析循环的帮助下,对支架的性能及其是否满足要求进行了评估。
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引用次数: 4
Array projector design for projection on arbitrarily curved surfaces 阵列投影仪设计投影在任意曲面
Pub Date : 2015-09-23 DOI: 10.1117/12.2191333
S. Fischer, P. Schreiber, A. Riedel, M. Sieler
The micro-optical array projector is a new and innovative possibility to project patterns onto arbitrary shaped surfaces1 . In contrast to single-aperture systems the illuminance of the projected image is raised by only increasing the lateral extent of the projector while keeping the length constant. Thanks to the setup - analogous to a fly’s eye condenser – we obtain a very compact design with homogenization of illumination. The images to be projected are presented as arbitrarily curved CAD-objects. Because of its complexity, the first attempt was a chief-ray backtrace implemented into a CAD-program, with the individual projectorlets modelled as pinhole cameras. With this principle one can trace the slides for several applications like the projection on perpendicular, as well as tilted and curved surfaces. Since aberrations cannot be considered with the simple CAD backtrace described above, we used the commercially available raytracer Zemax®, controlled by a macro, working in conjunction with a CADprogram for improved slide mask generation. Despite both methods, depending on the complexity of the optical system, are generating the fundamental mask data, the paper will show that there is a tradeoff between calculation time and accuracy. Based on this evaluation we will discuss further development as well as the possibility of improvement concerning the calculation methods. The different methods were investigated to determine their advantages and disadvantages. This provides the basis for the scope of application. Further we will demonstrate simulations as well as results obtained with built demonstrators.
微光学阵列投影仪是将图案投射到任意形状表面上的一种新的创新可能性。与单孔径系统相比,投影图像的照度仅通过增加投影仪的横向范围而提高,同时保持长度不变。由于设置-类似于苍蝇的眼睛聚光镜-我们获得了一个非常紧凑的设计与均匀的照明。要投影的图像以任意弯曲的cad对象的形式呈现。由于它的复杂性,第一次尝试是在cad程序中实现主射线回溯,将单个投影片建模为针孔相机。利用这一原理,我们可以在许多应用中跟踪幻灯片,比如在垂直、倾斜和弯曲表面上的投影。由于上述简单的CAD回溯无法考虑像差,因此我们使用了市售的射线追踪器Zemax®,由宏控制,与CAD程序一起工作,以改进幻灯片掩模生成。尽管这两种方法都是根据光学系统的复杂性生成基本掩模数据,但本文将表明在计算时间和精度之间存在权衡。在此评估的基础上,我们将讨论进一步的发展以及改进计算方法的可能性。对不同的方法进行了研究,确定了它们的优缺点。这为适用范围提供了依据。此外,我们将演示模拟以及与构建的演示获得的结果。
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引用次数: 3
Diffractive optics with high Bragg selectivity: volume holographic optical elements in Bayfol® HX photopolymer film 具有高布拉格选择性的衍射光学:Bayfol®HX光聚合物薄膜中的体积全息光学元件
Pub Date : 2015-09-23 DOI: 10.1117/12.2191587
F. Bruder, T. Fäcke, R. Hagen, Dennis Hönel, E. Orselli, C. Rewitz, T. Rölle, G. Walze
For a long time volume Holographic Optical Elements (vHOE) have been discussed as an alternative, but were hampered by a lack of suitable materials. They provide several benefits over surface corrugated diffractive optical element like high diffraction efficiency due to their ability to reconstruct a single diffraction order, freedom of optical design by freely setting the replay angles and adjusting their bandwidth by a selection of the vHOE’s thickness. Additional interesting features are related to their high Bragg selectivity providing transparent films for off-Bragg illumination. In this paper we report on our newly developed photopolymer film technology (Bayfol® HX) that uniquely requires no post processing after holographic exposure. We explain the governing non-local polymerization driven diffusion process leading to an active mass transport triggered by constructive interference. Key aspects of the recording process and their impact on index modulation formation is discussed. The influence on photopolymer film thickness on the bandwidth is shown. A comparison between coupled wave theory (CWT) simulation and experimental results is given. There are two basic recording geometries: reflection and transmission vHOEs. We explain consequences of how to record them properly and discuss in more detail the special challenges in transmission hologram recording. Here beam ratio and customization of photopolymer film properties can be applied most beneficially to achieve highest diffraction efficiency.
长期以来,体积全息光学元件(vHOE)作为一种替代方案被讨论,但由于缺乏合适的材料而受到阻碍。与表面瓦楞衍射光学元件相比,它们具有几个优点,例如由于能够重建单个衍射顺序而具有高衍射效率,通过自由设置重放角度和通过选择vHOE厚度来调整带宽而具有光学设计的自由度。其他有趣的特点是与它们的高布拉格选择性有关,为非布拉格照明提供透明薄膜。在本文中,我们报告了我们新开发的光聚合物薄膜技术(Bayfol®HX),该技术在全息曝光后不需要后处理。我们解释了非局部聚合驱动的扩散过程,导致由建设性干涉触发的主动质量输运。讨论了记录过程的关键方面及其对折射率调制形成的影响。给出了光聚合物薄膜厚度对带宽的影响。给出了耦合波理论(CWT)模拟与实验结果的比较。有两种基本的记录几何形状:反射式和透射式vhoe。我们解释了如何正确记录它们的后果,并更详细地讨论了传输全息图记录中的特殊挑战。在这里,光束比和光聚合物薄膜特性的定制可以最有利地应用于实现最高的衍射效率。
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引用次数: 17
期刊
SPIE Optical Systems Design
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