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A developed method for surface testing based on the scattering interference effect 一种基于散射干扰效应的表面检测方法
Pub Date : 2015-09-24 DOI: 10.1117/12.2191034
Z. Tan, Yun Huang, Suyong Wu, Xiaobao Zhang, Yibo Zhang
Light scattering is an important and classical method for optical surface testing. Typical scheme of light scattering measurement often uses a single laser beam incidence, and then evaluates the surface quality via detecting and analyzing the scattering signal. In this work, a developed method for optical surface testing is proposed and demonstrated, and whose measuring principle is based on the scattering interference effect. In this approach, a single longitudinal mode laser beam is divided into two beams, when these beams irradiate the optical surface, their respective scattering fields would interfere with each other. If the phase between these incidence lights is scanned periodically, their scattering light interference signal would fluctuate simultaneously. Through analyzing this kind of scattering signal, our method can not only determine the scattering loss of optical surface, but also scale its inhomogeneity performance. A simply set of experimental apparatus is built up and used to demonstrated this method, which uses a single mode laser as the light source. Furthermore, to modulate the phase difference between two incidence beams, a piezoelectric ceramic is used. Some typical cases are then experimented and discussed, the results show that this method can be used to calibrate the quality of optical surface.
光散射是光学表面检测的一种重要而经典的方法。典型的光散射测量方案通常采用单光束入射,然后通过检测和分析散射信号来评估表面质量。本文提出并论证了一种基于散射干涉效应的光学表面检测方法。该方法将单纵模激光束分成两束,当两束光束照射到光学表面时,各自的散射场会相互干扰。如果周期性地扫描这些入射光之间的相位,它们的散射光干涉信号将同时波动。通过对这类散射信号的分析,我们的方法不仅可以确定光学表面的散射损失,而且可以衡量其非均匀性。建立了一套简单的实验装置,并使用单模激光作为光源来演示该方法。此外,为了调制两个入射光束之间的相位差,使用了压电陶瓷。对一些典型案例进行了实验和讨论,结果表明,该方法可用于光学表面质量的标定。
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引用次数: 0
Current developments on optical asphere and freeform metrology 光学非球面和自由曲面测量的最新进展
Pub Date : 2015-09-24 DOI: 10.1117/12.2191247
S. Mühlig, J. Siepmann, M. Lotz, A. Wiegmann, G. Blobel, S. Mika, A. Beutler, U. Nehse
Two techniques for the measurement of aspheres as well as freeforms are presented. The first method, the tilted wave interferometer, is a full aperture interferometric measurement method without any moving parts during the measurement. The second method applies an optical single point sensor in conjunction with two translational and one rotational axes. Both techniques are compared by measuring a selected asphere and a special freeform surface. Differences between both measurement principles are discussed.
介绍了两种测量球面和自由曲面的技术。第一种方法是倾斜波干涉仪,它是一种全孔径干涉测量方法,在测量过程中没有任何运动部件。第二种方法将光学单点传感器与两个平动轴和一个旋转轴结合使用。通过测量选定的非球面和特殊的自由曲面来比较这两种技术。讨论了两种测量原理之间的差异。
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引用次数: 4
Effective method for extracting aspheric parameters inherent in unknown aspheric surfaces 一种有效的非球面参数提取方法
Pub Date : 2015-09-24 DOI: 10.1117/12.2190503
Dong-Ik Kim, Ghiseok Kim, G. Kim
In this paper, we propose an effective method for extracting the important parameters like radius of curvature, conic constant, and deformation coefficients indwelling unknown aspheric surfaces. These parameters can be inversely found from measured data by using the method that is based on aspheric equations and conic surfaces. To demonstrate the precision of the method, it is compared with a higher-order polynomial curve fit, employing two different examples. In a theoretical case, each largest fitting error (or shape error) resulted from the two methods appears a significant difference in precision. Lastly, we apply the proposed method to a real example and show the results.
本文提出了一种提取未知非球面曲率半径、二次常数和变形系数等重要参数的有效方法。这些参数可以用基于非球面方程和二次曲面的方法从实测数据中反求出来。为了证明该方法的精度,将其与高阶多项式曲线拟合进行了比较,采用了两个不同的例子。在理论上,两种方法产生的最大拟合误差(或形状误差)在精度上表现出显著差异。最后,将该方法应用于一个实例,并给出了结果。
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引用次数: 1
3D printed freeform optical sensors for metrology application 用于计量应用的3D打印自由形状光学传感器
Pub Date : 2015-09-24 DOI: 10.1117/12.2191280
P. Maillard, A. Heinrich
3D printed freeform optical sensors are a different and new approach for optical metrology. Thereby the optical design is adapted to the fabrication characteristics of additive manufacturing. All needed optical elements like mirrors and lenses are reduced to one simple printed sample, which is capable to illuminate a complex shaped industrial part for shaped measurement based on light section technique. Additionally the laser line can be formed on the part in a way, so that no shadow appears–even in the case of kinks etc.. Due to the physical limitations of the printing process and different printing techniques each optical design would present some drawbacks that has to be considered prior a printing process in order to obtain the best results possible.
3D打印自由曲面光学传感器是一种不同的光学测量新方法。因此,光学设计适应于增材制造的制造特性。所有需要的光学元件,如反射镜和透镜被简化为一个简单的打印样品,能够照亮一个复杂形状的工业部件,用于基于光截面技术的形状测量。此外,激光线可以在零件上以某种方式形成,因此即使在扭结等情况下也不会出现阴影。由于印刷过程的物理限制和不同的印刷技术,每种光学设计都存在一些缺点,必须在印刷过程之前考虑这些缺点,以便获得尽可能好的结果。
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引用次数: 10
Results of a polishing study for SCHOTT XLD glasses 肖特XLD玻璃的抛光研究结果
Pub Date : 2015-09-24 DOI: 10.1117/12.2191036
R. Jedamzik, Harshwadhan Yadwad, V. Dietrich
Extremely low dispersion glasses (e.g. SCHOTT XLD glasses) play an essential role in the color correction of optical systems. Together with short flint glasses (KZFS Types) they can be used for apochromatic color correction in the visible spectrum or even for broadband color correction in combination with lanthanum crown glasses (LAK Types). Unfortunately the chemical composition of those glasses leads to a high coefficient of thermal expansion, low hardness and low resistance against chemical attacks. As a consequence these glasses tend to be difficult in processing. Therefore the glass engineer’s task is to improve processing characteristics while keeping their special optical properties. N-FK58 XLD is an example of a new generation of XLD glasses from SCHOTT with improved workability. In 2014 a processing study has been conducted to optimize the polishing of XLD glasses. This presentation will show the results of this study for N-FK58 XLD and the application to other fluorophosphates glasses.
极低色散眼镜(如肖特XLD眼镜)在光学系统的色彩校正中起着至关重要的作用。与短燧石玻璃(KZFS类型)一起,它们可以用于可见光谱中的消色差色校正,甚至可以与镧冠玻璃(LAK类型)组合用于宽带颜色校正。不幸的是,这些玻璃的化学成分导致热膨胀系数高,硬度低,抗化学侵蚀性低。因此,这些玻璃往往难以加工。因此,玻璃工程师的任务是在保持其特殊光学特性的同时改善加工特性。N-FK58 XLD是肖特新一代XLD玻璃的一个例子,具有更好的可加工性。2014年进行了一项工艺研究,以优化XLD玻璃的抛光。本报告将展示N-FK58 XLD的研究结果及其在其他氟磷酸盐玻璃中的应用。
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引用次数: 1
Analysis of factors important for measurements of focal length of optical systems 光学系统焦距测量的重要因素分析
Pub Date : 2015-09-24 DOI: 10.1117/12.2191401
P. Pokorný, J. Opat, A. Mikš, J. Novák, P. Novák
A focal length is a basic optical characteristic of an optical system. Thus, it is important to be able to measure this value for a given optical system very accurately in practice. At present there exist various physical principles of the focal length measurement which can achieve a different measurement accuracy. In our work we analyse several methods of measurement of the focal length with respect to factors, which are important for a measurement accuracy. The analysis is performed on examples.
焦距是光学系统的基本光学特性。因此,重要的是能够在实践中非常准确地测量给定光学系统的这个值。目前存在着各种焦距测量的物理原理,可以达到不同的测量精度。在我们的工作中,我们分析了几种测量焦距的方法,这些方法与测量精度有关。通过实例进行了分析。
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引用次数: 1
Facility for fast mapping of total scattering and transmission in the spectral range from DUV- NIR 用于在DUV- NIR光谱范围内快速映射总散射和透射的设备
Pub Date : 2015-09-24 DOI: 10.1117/12.2191311
P. Kadkhoda, L. Jensen, D. Ristau
A system for two dimensional mapping of Total Scattering (TS) and Transmission (T) of optical flat surfaces in the spectral range from deep UV to NIR will be introduced. The adaptation of the scatter detector concept for the special requirements of the DUV range will be discussed. Also, the specifications of the set-up such as working ambient, background level, and data calibration procedure demonstrate the performance of the system for the analytical tasks in industrial optics production. On the basis of the presented measurement facility, the essential properties of bare flat optics in respect of their polishing state, roughness level, state of cleaning and defect distribution can be investigated with the TS system in a nondestructive way. The homogeneity of the whole surface of an optical component can be tested with a defined lateral resolution. The knowledge of the inhomogeneity is an important indication for the quality evaluation of optical components. We present the TS result and the calculated defect density distributions of selected components, which are handled by different cleaning procedures. Also, additional effects in TS and T will be outlined and compared with spectral photometric measurement.
介绍了一种光学平面在深紫外至近红外光谱范围内的总散射(TS)和透射(T)二维映射系统。将讨论散射探测器的概念如何适应DUV范围的特殊要求。此外,设置规范,如工作环境、背景电平和数据校准程序,证明了系统在工业光学生产中的分析任务的性能。基于所提出的测量设备,可以用TS系统对裸平面光学器件的抛光状态、粗糙度水平、清洁状态和缺陷分布等基本特性进行无损检测。光学元件整个表面的均匀性可以用确定的横向分辨率进行测试。了解光学元件的非均匀性是评价光学元件质量的重要指标。我们给出了TS结果和所选部件的计算缺陷密度分布,这些缺陷密度分布由不同的清洗程序处理。此外,还将概述TS和T的附加效应,并与光谱光度测量进行比较。
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引用次数: 1
Flow-cytometric identification of vinegars using a multi-parameter analysis optical detection module 用多参数分析光学检测模块对食醋进行流式细胞术鉴定
Pub Date : 2015-09-24 DOI: 10.1117/12.2197474
T. Verschooten, H. Ottevaere, M. Vervaeke, J. Van Erps, M. Callewaert, W. De Malsche, H. Thienpont
We show a proof-of-concept demonstration of a multi-parameter analysis low-cost optical detection system for the flowcytometric identification of vinegars. This multi-parameter analysis system can simultaneously measure laser induced fluorescence, absorption and scattering excited by two time-multiplexed lasers of different wavelengths. To our knowledge no other polymer optofluidic chip based system offers more simultaneous measurements. The design of the optofluidic channels is aimed at countering the effects that viscous fingering, air bubbles, and emulsion samples can have on the correct operation of such a detection system. Unpredictable variations in viscosity and refractive index of the channel content can be turned into a source of information. The sample is excited by two laser diodes that are driven by custom made low-cost laser drivers. The optofluidic chip is built to be robust and easy to handle and is reproducible using hot embossing. We show a custom optomechanical holder for the optofluidic chip that ensures correct alignment and automatic connection to the external fluidic system. We show an experiment in which 92 samples of vinegar are measured. We are able to identify 9 different kinds of vinegar with an accuracy of 94%. Thus we show an alternative approach to the classic optical spectroscopy solution at a lowered. Furthermore, we have shown the possibility of predicting the viscosity and turbidity of vinegars with a goodness-of-fit R2 over 0.947.
我们展示了一种用于醋流式细胞术鉴定的多参数分析低成本光学检测系统的概念验证演示。该多参数分析系统可以同时测量两种不同波长的时间复用激光器激发的激光诱导荧光、吸收和散射。据我们所知,没有其他基于聚合物光流芯片的系统提供更多的同时测量。光流体通道的设计旨在抵消粘性指法、气泡和乳液样品对这种检测系统正确操作的影响。不可预测的粘度变化和折射率的通道内容可以变成一个信息来源。样品由定制的低成本激光驱动器驱动的两个激光二极管激发。该光流芯片坚固耐用,易于操作,并可使用热压印重现。我们展示了一种定制的光机械支架,用于光流体芯片,确保正确对准并自动连接到外部流体系统。我们展示了一个实验,其中测量了92个醋样品。我们能够识别9种不同的醋,准确率达到94%。因此,我们展示了一种替代传统光学光谱解决方案的方法。此外,我们已经证明了预测食醋粘度和浊度的可能性,拟合优度R2超过0.947。
{"title":"Flow-cytometric identification of vinegars using a multi-parameter analysis optical detection module","authors":"T. Verschooten, H. Ottevaere, M. Vervaeke, J. Van Erps, M. Callewaert, W. De Malsche, H. Thienpont","doi":"10.1117/12.2197474","DOIUrl":"https://doi.org/10.1117/12.2197474","url":null,"abstract":"We show a proof-of-concept demonstration of a multi-parameter analysis low-cost optical detection system for the flowcytometric identification of vinegars. This multi-parameter analysis system can simultaneously measure laser induced fluorescence, absorption and scattering excited by two time-multiplexed lasers of different wavelengths. To our knowledge no other polymer optofluidic chip based system offers more simultaneous measurements. The design of the optofluidic channels is aimed at countering the effects that viscous fingering, air bubbles, and emulsion samples can have on the correct operation of such a detection system. Unpredictable variations in viscosity and refractive index of the channel content can be turned into a source of information. The sample is excited by two laser diodes that are driven by custom made low-cost laser drivers. The optofluidic chip is built to be robust and easy to handle and is reproducible using hot embossing. We show a custom optomechanical holder for the optofluidic chip that ensures correct alignment and automatic connection to the external fluidic system. We show an experiment in which 92 samples of vinegar are measured. We are able to identify 9 different kinds of vinegar with an accuracy of 94%. Thus we show an alternative approach to the classic optical spectroscopy solution at a lowered. Furthermore, we have shown the possibility of predicting the viscosity and turbidity of vinegars with a goodness-of-fit R2 over 0.947.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117010723","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Improved cavity ring-down system for high precision measurement of the specific modes' loss in ring cavity 改进的环形腔衰荡系统,用于高精度测量环形腔中特定模态的损耗
Pub Date : 2015-09-24 DOI: 10.1117/12.2196394
Wen-fan Jiang, Meixiong Chen, W. Tian, Jiehong Yuan, Guangming Xu
An improved system for measuring the specific modes’ total loss in high quality ring cavity is presented. The experimental apparatus measuring cavity ring-down signals are described in detail. The specific modes in the passive ring cavity can be obtained by controlling the manually piezoelectric transducer which mounted on the laser cavity mirror. The image of the specific mode was shown on the CCD and its corresponding cavity ring-down signal is obtained when incident laser light was shut off by optical switch. The losses of three specific transverse modes, such as TEM00, TEM01 and TEM10, are measured. The improved system realizes the specific mode real-time monitoring and high precision loss measurement simultaneously when the ring cavity assembling and alignment.
提出了一种改进的高质量环形腔中特定模态总损耗测量系统。详细介绍了测量腔衰荡信号的实验装置。通过控制安装在激光腔镜上的手动压电换能器,可以获得被动环形腔内的特定模式。通过光开关关闭入射激光,在CCD上显示出特定模式的图像,并获得相应的腔衰荡信号。测量了三种特定横模TEM00、TEM01和TEM10的损耗。改进后的系统实现了环腔装配和对准时的模态实时监测和高精度损耗测量。
{"title":"Improved cavity ring-down system for high precision measurement of the specific modes' loss in ring cavity","authors":"Wen-fan Jiang, Meixiong Chen, W. Tian, Jiehong Yuan, Guangming Xu","doi":"10.1117/12.2196394","DOIUrl":"https://doi.org/10.1117/12.2196394","url":null,"abstract":"An improved system for measuring the specific modes’ total loss in high quality ring cavity is presented. The experimental apparatus measuring cavity ring-down signals are described in detail. The specific modes in the passive ring cavity can be obtained by controlling the manually piezoelectric transducer which mounted on the laser cavity mirror. The image of the specific mode was shown on the CCD and its corresponding cavity ring-down signal is obtained when incident laser light was shut off by optical switch. The losses of three specific transverse modes, such as TEM00, TEM01 and TEM10, are measured. The improved system realizes the specific mode real-time monitoring and high precision loss measurement simultaneously when the ring cavity assembling and alignment.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129745749","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optical design and laser ablation of surface textures: demonstrating total internal reflection 表面纹理的光学设计和激光烧蚀:展示全内反射
Pub Date : 2015-09-24 DOI: 10.1117/12.2192082
Hans Gommans, S. Booij, F. Pijlman, M. Krijn, S. D. de Zwart, R. Sepkhanov, Dave Beaumont, Hans van der Schaft, R. Sanders
In lighting applications key drivers for optical design of surface textures are integration of optical elements, the disentanglement of optical functionality and appearance and late stage configuration. We investigated excimer laser ablation as a mastering technology for micro textured surfaces, where we targeted an increase in correspondence between surface design and ablated surface for high aspect ratio structures. To achieve this we have improved the photo mask design using a heuristic algorithm that corrects for the angular dependence of the ablation process and the loss of image resolution at ablation depths that exceed the depth of field. Using this approach we have been able to demonstrate close correspondence between designed and ablated facet structures up to 75° inclination at 75 μm depth. These facet design parameters allow for total internal reflection (TIR) as a means of beam deflection which is demonstrated in a range of mono shaped cone arrays in hexagonal tessellation. BSDF analysis was used to characterize the narrow TIR deflection beams that matched the peak positions of the design down to 28° apex. In addition, a single surface TIR-Fresnel lens design with focal distance 5 mm has been manufactured using this photo mask design algorithm and beam collimation up to 12° beam angle and 32° field angle is shown. These outcomes demonstrate that the laser ablation process intrinsically yields sufficient small dispersion in structure and fillet radii for lighting applications.
在照明应用中,表面纹理光学设计的关键驱动因素是光学元件的集成、光学功能和外观的解纠缠以及后期配置。我们研究了准分子激光烧蚀作为微纹理表面的主要技术,我们的目标是增加高纵横比结构的表面设计和烧蚀表面之间的对应关系。为了实现这一目标,我们使用启发式算法改进了光掩模设计,该算法校正了烧蚀过程的角依赖性和烧蚀深度超过景深时图像分辨率的损失。利用这种方法,我们已经能够证明在75 μm深度下,设计和烧蚀的面结构之间的紧密对应,倾角可达75°。这些面设计参数允许全内反射(TIR)作为光束偏转的一种手段,这在六边形镶嵌的一系列单形锥形阵列中得到了证明。BSDF分析用于表征窄TIR偏转梁,该梁与设计的峰值位置匹配,直至28°顶点。此外,利用该光掩模设计算法制作了焦距为5mm的单表面tir -菲涅耳透镜,其光束准直角可达12°,视场角可达32°。这些结果表明,激光烧蚀过程本质上产生了足够小的结构色散和圆角半径,用于照明应用。
{"title":"Optical design and laser ablation of surface textures: demonstrating total internal reflection","authors":"Hans Gommans, S. Booij, F. Pijlman, M. Krijn, S. D. de Zwart, R. Sepkhanov, Dave Beaumont, Hans van der Schaft, R. Sanders","doi":"10.1117/12.2192082","DOIUrl":"https://doi.org/10.1117/12.2192082","url":null,"abstract":"In lighting applications key drivers for optical design of surface textures are integration of optical elements, the disentanglement of optical functionality and appearance and late stage configuration. We investigated excimer laser ablation as a mastering technology for micro textured surfaces, where we targeted an increase in correspondence between surface design and ablated surface for high aspect ratio structures. To achieve this we have improved the photo mask design using a heuristic algorithm that corrects for the angular dependence of the ablation process and the loss of image resolution at ablation depths that exceed the depth of field. Using this approach we have been able to demonstrate close correspondence between designed and ablated facet structures up to 75° inclination at 75 μm depth. These facet design parameters allow for total internal reflection (TIR) as a means of beam deflection which is demonstrated in a range of mono shaped cone arrays in hexagonal tessellation. BSDF analysis was used to characterize the narrow TIR deflection beams that matched the peak positions of the design down to 28° apex. In addition, a single surface TIR-Fresnel lens design with focal distance 5 mm has been manufactured using this photo mask design algorithm and beam collimation up to 12° beam angle and 32° field angle is shown. These outcomes demonstrate that the laser ablation process intrinsically yields sufficient small dispersion in structure and fillet radii for lighting applications.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"2012 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127393418","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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SPIE Optical Systems Design
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