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Experimental and numerical investigation of the Ti-Ni-Cu coating on AZ91D magnesium alloy by laser surface-modification: The microstructure, wear and corrosion behavior
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-30 DOI: 10.1016/j.triboint.2025.110565
Duncai Bao , Boxiang Hong , Chenfeng Yuan , Lipeng Jiang , Xun Zhang , Qian Li , Xiang Li , Zhaoxue Deng
Magnesium alloys are easily exposed to wear and corrosion during service life, hindering their applications. Herein, the Ti-Ni-Cu coatings were designed. Thermal-mechanical simulation of laser cladding on magnesium alloy surface was performed for exploring the optimal cladding parameters. Form the simulation results, laser power of 1200 W, scanning speed of 20 mm/s and spot diameter of 3 mm were applied. A series of characterizations were performed to study the microstructure, corrosion and wear properties of the coating. The results indicated Ni52.5Ti33.5Cu14 coating presented the comprehensively enhanced wear resistance than the substrate. Specifically, an increase in coatings’ microhardness by a factor of 6 over substrate was achieved. Besides, the Icorr was one order of magnitude lower than that of the substrate.
{"title":"Experimental and numerical investigation of the Ti-Ni-Cu coating on AZ91D magnesium alloy by laser surface-modification: The microstructure, wear and corrosion behavior","authors":"Duncai Bao ,&nbsp;Boxiang Hong ,&nbsp;Chenfeng Yuan ,&nbsp;Lipeng Jiang ,&nbsp;Xun Zhang ,&nbsp;Qian Li ,&nbsp;Xiang Li ,&nbsp;Zhaoxue Deng","doi":"10.1016/j.triboint.2025.110565","DOIUrl":"10.1016/j.triboint.2025.110565","url":null,"abstract":"<div><div>Magnesium alloys are easily exposed to wear and corrosion during service life, hindering their applications. Herein, the Ti-Ni-Cu coatings were designed. Thermal-mechanical simulation of laser cladding on magnesium alloy surface was performed for exploring the optimal cladding parameters. Form the simulation results, laser power of 1200 W, scanning speed of 20 mm/s and spot diameter of 3 mm were applied. A series of characterizations were performed to study the microstructure, corrosion and wear properties of the coating. The results indicated Ni<sub>52.5</sub>Ti<sub>33.5</sub>Cu<sub>14</sub> coating presented the comprehensively enhanced wear resistance than the substrate. Specifically, an increase in coatings’ microhardness by a factor of 6 over substrate was achieved. Besides, the <em>I</em><sub>corr</sub> was one order of magnitude lower than that of the substrate.</div></div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":"205 ","pages":"Article 110565"},"PeriodicalIF":6.1,"publicationDate":"2025-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143102803","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental and simulation study of bio-inspired adaptive transverse wave microgrooves for underwater drag reduction
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-28 DOI: 10.1016/j.triboint.2025.110564
Shan Lu , Jianbo Liu , Hang Li , Liguo Qin , Zheng Wang , Yuhao Wu , Zeyu Ma , Qiao Hu
Inspired by the flexible skin of dolphins and the hydrophobic effect of lotus leaves, this study developed an adaptive drag reduction surface using biomimetic structures. The design combines a transverse groove base with hydrophobic flexible materials, employing hydraulic actuation for active surface morphing. This approach effectively integrates non-smooth structures, flexible surfaces, and hydrophobic drag reduction technologies, achieving up to 28 % drag reduction at a flow velocity of 0.2 m/s. This adaptive technology offers a robust solution for drag reduction across varying flow velocities in complex underwater environments.
{"title":"Experimental and simulation study of bio-inspired adaptive transverse wave microgrooves for underwater drag reduction","authors":"Shan Lu ,&nbsp;Jianbo Liu ,&nbsp;Hang Li ,&nbsp;Liguo Qin ,&nbsp;Zheng Wang ,&nbsp;Yuhao Wu ,&nbsp;Zeyu Ma ,&nbsp;Qiao Hu","doi":"10.1016/j.triboint.2025.110564","DOIUrl":"10.1016/j.triboint.2025.110564","url":null,"abstract":"<div><div>Inspired by the flexible skin of dolphins and the hydrophobic effect of lotus leaves, this study developed an adaptive drag reduction surface using biomimetic structures. The design combines a transverse groove base with hydrophobic flexible materials, employing hydraulic actuation for active surface morphing. This approach effectively integrates non-smooth structures, flexible surfaces, and hydrophobic drag reduction technologies, achieving up to 28 % drag reduction at a flow velocity of 0.2 m/s. This adaptive technology offers a robust solution for drag reduction across varying flow velocities in complex underwater environments.</div></div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":"205 ","pages":"Article 110564"},"PeriodicalIF":6.1,"publicationDate":"2025-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143102802","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of water contamination of an environmentally acceptable lubricant based on synthetic esters on the wear and hydrodynamic properties of stern tube bearing
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-28 DOI: 10.1016/j.triboint.2025.110562
Michał Wodtke, Jacek Frost, Wojciech Litwin
The ecological aspects of the lubrication of bearings on ships represent a critical challenge today. Oil leakages are a typical issue, even for new systems, similarly to water ingress from the environment. One of the options for improving environmental protection is replacing mineral oil with an environmentally adaptable lubricant (EAL). This paper reports experimental investigations of the effect of water in the EAL lubricant on the performance of a hydrodynamic journal bearing. Bearings were tested on dedicated test stands in steady and transient states. The results revealed that a mixture of synthetic EAL esters with water, when used as a lubricant in a laboratory test of journal bearings, did not significantly alter the hydrodynamic and wear performance of the system.
{"title":"Effect of water contamination of an environmentally acceptable lubricant based on synthetic esters on the wear and hydrodynamic properties of stern tube bearing","authors":"Michał Wodtke,&nbsp;Jacek Frost,&nbsp;Wojciech Litwin","doi":"10.1016/j.triboint.2025.110562","DOIUrl":"10.1016/j.triboint.2025.110562","url":null,"abstract":"<div><div>The ecological aspects of the lubrication of bearings on ships represent a critical challenge today. Oil leakages are a typical issue, even for new systems, similarly to water ingress from the environment. One of the options for improving environmental protection is replacing mineral oil with an environmentally adaptable lubricant (EAL). This paper reports experimental investigations of the effect of water in the EAL lubricant on the performance of a hydrodynamic journal bearing. Bearings were tested on dedicated test stands in steady and transient states. The results revealed that a mixture of synthetic EAL esters with water, when used as a lubricant in a laboratory test of journal bearings, did not significantly alter the hydrodynamic and wear performance of the system.</div></div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":"205 ","pages":"Article 110562"},"PeriodicalIF":6.1,"publicationDate":"2025-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143093529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Improving tribological performance of electrified steel interfaces in e-mobility systems using ash-sulfur-less oil additives based on amine salts-phosphoric esters
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-28 DOI: 10.1016/j.triboint.2025.110561
Mohamed Kamal Ahmed Ali , Yuchen Sun , Chaoyang Zhang , Qiangliang Yu , Chen Zhao , Feng Zhou , Weimin Liu
This study introduces the formulation of an ash-sulfur-less lubricant that is designed to form an antiwear/insulating tribolayer on electrified steel surfaces. The proposed oil formulation utilizes amine salts of aliphatic phosphoric acid esters (AW-6110) in poly-α-olefin (PAO6) oil. The study aims to find a solution to address tribological issues resulting from electrification effects and the presence of sulfur in e-mobility oils. An SRV-IV tribometer evaluated the tribological performance under various conditions. Notably, the AW-6110-formulated oil (1.5-AW oil) exhibited superior performance under 9 A current, reducing the friction coefficient by 18 % and the disc wear volume by 90 % compared to the commercial oil used in electric vehicles. This enhancement is attributed to its exceptional ability to form a durable antiwear/insulating tribolayer.
{"title":"Improving tribological performance of electrified steel interfaces in e-mobility systems using ash-sulfur-less oil additives based on amine salts-phosphoric esters","authors":"Mohamed Kamal Ahmed Ali ,&nbsp;Yuchen Sun ,&nbsp;Chaoyang Zhang ,&nbsp;Qiangliang Yu ,&nbsp;Chen Zhao ,&nbsp;Feng Zhou ,&nbsp;Weimin Liu","doi":"10.1016/j.triboint.2025.110561","DOIUrl":"10.1016/j.triboint.2025.110561","url":null,"abstract":"<div><div>This study introduces the formulation of an ash-sulfur-less lubricant that is designed to form an antiwear/insulating tribolayer on electrified steel surfaces. The proposed oil formulation utilizes amine salts of aliphatic phosphoric acid esters (AW-6110) in poly-α-olefin (PAO6) oil. The study aims to find a solution to address tribological issues resulting from electrification effects and the presence of sulfur in e-mobility oils. An SRV-IV tribometer evaluated the tribological performance under various conditions. Notably, the AW-6110-formulated oil (1.5-AW oil) exhibited superior performance under 9 A current, reducing the friction coefficient by 18 % and the disc wear volume by 90 % compared to the commercial oil used in electric vehicles. This enhancement is attributed to its exceptional ability to form a durable antiwear/insulating tribolayer.</div></div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":"205 ","pages":"Article 110561"},"PeriodicalIF":6.1,"publicationDate":"2025-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143102804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Adhesion-grasping behavior of a mechanical gripper based on thermoresponsive smart wood
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-27 DOI: 10.1016/j.triboint.2025.110558
Xiaodong Wang , Yaodong Li , Rui Lei , Xiaolei Guo , Run Zhang
The challenge of grasping thin sheets, slender objects, and granular objects has hampered the development of mechanical grippers. In this investigation, thermoresponsive polymers and chemically treated wood were combined to develop a novel mechanical gripper with adjustable adhesion force. By switching between hot and cold water inside the mechanical gripper, the gripper could grasp and release a variety of objects. Further study revealed that the adhesion force of the mechanical gripper was related to temperature, contact area, and the material of the grasped object. Finally, the adhesion force equation was established to promote the application of the mechanical gripper.
{"title":"Adhesion-grasping behavior of a mechanical gripper based on thermoresponsive smart wood","authors":"Xiaodong Wang ,&nbsp;Yaodong Li ,&nbsp;Rui Lei ,&nbsp;Xiaolei Guo ,&nbsp;Run Zhang","doi":"10.1016/j.triboint.2025.110558","DOIUrl":"10.1016/j.triboint.2025.110558","url":null,"abstract":"<div><div>The challenge of grasping thin sheets, slender objects, and granular objects has hampered the development of mechanical grippers. In this investigation, thermoresponsive polymers and chemically treated wood were combined to develop a novel mechanical gripper with adjustable adhesion force. By switching between hot and cold water inside the mechanical gripper, the gripper could grasp and release a variety of objects. Further study revealed that the adhesion force of the mechanical gripper was related to temperature, contact area, and the material of the grasped object. Finally, the adhesion force equation was established to promote the application of the mechanical gripper.</div></div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":"205 ","pages":"Article 110558"},"PeriodicalIF":6.1,"publicationDate":"2025-01-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143093528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hybrid high-temperature wear mechanisms of additive manufactured Ti-6Al-4V alloy
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-27 DOI: 10.1016/j.triboint.2025.110559
Ruiwen Xu , Yi Zhu , Jianxiong Wu , Pengfei Huang , Ming Wu , Wujun Wang , Chao Zhang , Huayong Yang
This study investigates the high-temperature wear of additive-manufactured Ti6Al4V alloy against GH2132. The wear mechanism transitioned from abrasive and adhesive wear to oxidative wear with rising temperatures. The microstructure characteristics reveal the special hybrid high-temperature wear mechanisms: shear deformation-induced wear hardening and dynamic recrystallization-induced wear softening. At lower temperatures, the thinner oxide layer was easily removed and the worn surface in contact underwent work hardening, reducing the negative effects of thermal softening. At higher temperatures, the thicker oxide layer slightly reduced adhesive of the substrate but failed due to cracking and spalling. Combined with intensified thermal softening, recrystallization softening on the worn surface not only eliminated surface hardening but led to a sharp decline in wear resistance.
{"title":"Hybrid high-temperature wear mechanisms of additive manufactured Ti-6Al-4V alloy","authors":"Ruiwen Xu ,&nbsp;Yi Zhu ,&nbsp;Jianxiong Wu ,&nbsp;Pengfei Huang ,&nbsp;Ming Wu ,&nbsp;Wujun Wang ,&nbsp;Chao Zhang ,&nbsp;Huayong Yang","doi":"10.1016/j.triboint.2025.110559","DOIUrl":"10.1016/j.triboint.2025.110559","url":null,"abstract":"<div><div>This study investigates the high-temperature wear of additive-manufactured Ti6Al4V alloy against GH2132. The wear mechanism transitioned from abrasive and adhesive wear to oxidative wear with rising temperatures. The microstructure characteristics reveal the special hybrid high-temperature wear mechanisms: shear deformation-induced wear hardening and dynamic recrystallization-induced wear softening. At lower temperatures, the thinner oxide layer was easily removed and the worn surface in contact underwent work hardening, reducing the negative effects of thermal softening. At higher temperatures, the thicker oxide layer slightly reduced adhesive of the substrate but failed due to cracking and spalling. Combined with intensified thermal softening, recrystallization softening on the worn surface not only eliminated surface hardening but led to a sharp decline in wear resistance.</div></div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":"205 ","pages":"Article 110559"},"PeriodicalIF":6.1,"publicationDate":"2025-01-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143102805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
In-situ pressure and temperature measurements under mixed friction in rolling contacts and comparison with TEHD simulations
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-26 DOI: 10.1016/j.triboint.2025.110557
S. Emmrich , M. Plogmeyer , D. Bartel , L. Bobach , A. Schott , C. Herrmann
In-situ sensor systems can enable to measure the temperature and pressure of rolling contacts during mixed friction. A thin-film sensor is optimized with regard to its size and wear resistance. Traction tests are carried out with a two-disk test rig. The temperature and friction measurements are presented and compared with the results of a thermal elastohydrodynamic (TEHD) model. In a final step, the thin-film sensor is used in a cylindrical roller thrust bearing. Due to the detailed characterization the data are suitable for evaluating calculation methods. The comparison shows good agreement with the experimental data of a two-disk test rig. Further investigation is required in order to gain a deeper understanding of the processes that occur in real machine elements.
{"title":"In-situ pressure and temperature measurements under mixed friction in rolling contacts and comparison with TEHD simulations","authors":"S. Emmrich ,&nbsp;M. Plogmeyer ,&nbsp;D. Bartel ,&nbsp;L. Bobach ,&nbsp;A. Schott ,&nbsp;C. Herrmann","doi":"10.1016/j.triboint.2025.110557","DOIUrl":"10.1016/j.triboint.2025.110557","url":null,"abstract":"<div><div>In-situ sensor systems can enable to measure the temperature and pressure of rolling contacts during mixed friction. A thin-film sensor is optimized with regard to its size and wear resistance. Traction tests are carried out with a two-disk test rig. The temperature and friction measurements are presented and compared with the results of a thermal elastohydrodynamic (TEHD) model. In a final step, the thin-film sensor is used in a cylindrical roller thrust bearing. Due to the detailed characterization the data are suitable for evaluating calculation methods. The comparison shows good agreement with the experimental data of a two-disk test rig. Further investigation is required in order to gain a deeper understanding of the processes that occur in real machine elements.</div></div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":"207 ","pages":"Article 110557"},"PeriodicalIF":6.1,"publicationDate":"2025-01-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143578398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preparation of near superlubric polysiloxane/Ti3C2Tx nanocomposite coating by incorporating polyalphaolefin oil microcapsules
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-24 DOI: 10.1016/j.triboint.2025.110555
Qiang Ma , Xin Xu , Meilin Lu , Tao He , Xiaolin Li , Ke Hua , Haifeng Wang
Superlubricity, characterized by nearly vanished friction, has the great potential to significantly enhance the lubrication capabilities of self-lubricating coatings and their operational lifespan. In this work, commercial polyalphaolefin oil has been encapsulated within polystyrene shell for microcapsules synthesize, which have been further introduced into a specially designed “soft” and “hard” polysiloxane/Ti3C2Tx nanocomposite coating. The tribological test results show that the prepared composite coating displays a remarkable synergistic lubrication effect, achieving nearly superlow friction of 0.016 and an ultralow wear rate of 1.9 × 10−8 mm3/N·m simultaneously. The comprehensive mechanism analysis indicates that the extraordinary superlubrication effect is derived from the desirable mechanical properties of the polysiloxane/Ti3C2Tx nanocomposite coating and the favorable liquid lubrication effect of embedded oil microcapsules, wherein the former could enhance the conformity of surface morphology when the mating surfaces are in contact, thereby facilitating the formation of numerous microchannels; in the meanwhile, the latter could be friction-induced ruptured and then release oil molecules at the friction interface, adsorbing to the coating surface and forming an effective boundary-lubricating oil film. As a result, a remarkable synergistic lubrication effect could be created to significantly enhance the lubrication effect. It could be anticipated that this finding could expedite a broader utilization of self-lubricating coatings and superlubricity technology in the practical industrial sectors.
{"title":"Preparation of near superlubric polysiloxane/Ti3C2Tx nanocomposite coating by incorporating polyalphaolefin oil microcapsules","authors":"Qiang Ma ,&nbsp;Xin Xu ,&nbsp;Meilin Lu ,&nbsp;Tao He ,&nbsp;Xiaolin Li ,&nbsp;Ke Hua ,&nbsp;Haifeng Wang","doi":"10.1016/j.triboint.2025.110555","DOIUrl":"10.1016/j.triboint.2025.110555","url":null,"abstract":"<div><div>Superlubricity, characterized by nearly vanished friction, has the great potential to significantly enhance the lubrication capabilities of self-lubricating coatings and their operational lifespan. In this work, commercial polyalphaolefin oil has been encapsulated within polystyrene shell for microcapsules synthesize, which have been further introduced into a specially designed “soft” and “hard” polysiloxane/Ti<sub>3</sub>C<sub>2</sub>T<sub>x</sub> nanocomposite coating. The tribological test results show that the prepared composite coating displays a remarkable synergistic lubrication effect, achieving nearly superlow friction of 0.016 and an ultralow wear rate of 1.9 × 10<sup>−8</sup> mm<sup>3</sup>/N·m simultaneously. The comprehensive mechanism analysis indicates that the extraordinary superlubrication effect is derived from the desirable mechanical properties of the polysiloxane/Ti<sub>3</sub>C<sub>2</sub>T<sub>x</sub> nanocomposite coating and the favorable liquid lubrication effect of embedded oil microcapsules, wherein the former could enhance the conformity of surface morphology when the mating surfaces are in contact, thereby facilitating the formation of numerous microchannels; in the meanwhile, the latter could be friction-induced ruptured and then release oil molecules at the friction interface, adsorbing to the coating surface and forming an effective boundary-lubricating oil film. As a result, a remarkable synergistic lubrication effect could be created to significantly enhance the lubrication effect. It could be anticipated that this finding could expedite a broader utilization of self-lubricating coatings and superlubricity technology in the practical industrial sectors.</div></div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":"205 ","pages":"Article 110555"},"PeriodicalIF":6.1,"publicationDate":"2025-01-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143093531","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study on the microscopic removal mechanism of interconnect metal Co using AFM with Si, SiO2, and diamond probes
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-22 DOI: 10.1016/j.triboint.2025.110553
Fangjin Xie, Min Zhong, Xiaobing Li, Meirong Yi, Jianfeng Chen, Wenhu Xu
Cobalt is a promising alternative to copper as interconnect metal when semiconductor technology advances to 5 nm nodes and below. Co needs to be polished but the polishing mechanism is not clear enough. This study employs AFM to investigate the microscopic removal mechanism of Co CMP in an air environment, using Si, SiO2, and diamond probes as abrasives. The microstructure and chemical state of the scribed Co surface were analyzed using Hertz contact theory, AFM, SEM, XPS, EDS, and HRTEM. The results demonstrate that the probe material and applied load significantly affect the wear depth and width. The depth obtained by SiO2, Si, and diamond probes is about 1, 7, and 70 nm, respectively, under the same load. The Si and diamond probes primarily remove material through mechanical plowing, whereas the SiO2 probe combines mechanical plowing with chemical reactions. XPS analyses revealed that the SiO2 probe facilitated the formation of more Co3O4 on the Co surface. HRTEM results showed a Co oxide film (∼1.5 nm thickness) and an amorphous Co layer (∼15 nm thickness) in the scribed region. The oxide film enhanced adhesion, forming a protective layer that hindered further material removal and reduced friction. This study provides theoretical support for optimizing Co CMP processes, which is crucial to next-generation integrated circuits.
{"title":"Study on the microscopic removal mechanism of interconnect metal Co using AFM with Si, SiO2, and diamond probes","authors":"Fangjin Xie,&nbsp;Min Zhong,&nbsp;Xiaobing Li,&nbsp;Meirong Yi,&nbsp;Jianfeng Chen,&nbsp;Wenhu Xu","doi":"10.1016/j.triboint.2025.110553","DOIUrl":"10.1016/j.triboint.2025.110553","url":null,"abstract":"<div><div>Cobalt is a promising alternative to copper as interconnect metal when semiconductor technology advances to 5 nm nodes and below. Co needs to be polished but the polishing mechanism is not clear enough. This study employs AFM to investigate the microscopic removal mechanism of Co CMP in an air environment, using Si, SiO<sub>2</sub>, and diamond probes as abrasives. The microstructure and chemical state of the scribed Co surface were analyzed using Hertz contact theory, AFM, SEM, XPS, EDS, and HRTEM. The results demonstrate that the probe material and applied load significantly affect the wear depth and width. The depth obtained by SiO<sub>2</sub>, Si, and diamond probes is about 1, 7, and 70 nm, respectively, under the same load. The Si and diamond probes primarily remove material through mechanical plowing, whereas the SiO<sub>2</sub> probe combines mechanical plowing with chemical reactions. XPS analyses revealed that the SiO<sub>2</sub> probe facilitated the formation of more Co<sub>3</sub>O<sub>4</sub> on the Co surface. HRTEM results showed a Co oxide film (∼1.5 nm thickness) and an amorphous Co layer (∼15 nm thickness) in the scribed region. The oxide film enhanced adhesion, forming a protective layer that hindered further material removal and reduced friction. This study provides theoretical support for optimizing Co CMP processes, which is crucial to next-generation integrated circuits.</div></div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":"205 ","pages":"Article 110553"},"PeriodicalIF":6.1,"publicationDate":"2025-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143093535","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Synergistic enhancement of wear resistance via CrN coating and layered double hydroxides systems
IF 6.1 1区 工程技术 Q1 ENGINEERING, MECHANICAL Pub Date : 2025-01-22 DOI: 10.1016/j.triboint.2025.110540
Xionggang Chen , Zhiwei Chen , Tianqi Wei , Danyan Zhan , JinXia Huang , Zhiguang Guo
The long-term operational reliability of mechanical equipment is significantly influenced by friction and wear. In this study, we developed a synergistic protection system by incorporating CrN coating and ZnAl layered double hydroxides (ZnAl LDH). The CrN coating was deposited using magnetron sputtering, and ZnAl LDH was synthesized via the hydrothermal method. To enhance the dispersion and tribological properties of ZnAl LDH in base oil, surface modification with stearic acid (SA) was performed through dehydration condensation bonding between the -OH groups on the ZnAl LDH surface and the -COOH groups on SA. Tribological tests were carried out to evaluate the lubrication properties of the two different LDHs when used as additives at varying concentrations in PAO-10 oil. The results demonstrate that adding 2.5 wt% SA-ZnAl LDH significantly improved the anti-wear performance of CrN-coated surfaces. This improvement is primarily attributed to the adsorption of LDH onto the CrN coating surface, which promote tribo-film formation. Overall, by benefiting from the synergistic effect between the LDH with superior lubricating properties and the CrN coating's excellent mechanical characteristics, a low-wear synergistic protection system was established, effectively protecting the steel substrate from severe wear.
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Tribology International
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