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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference最新文献

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The Influence of Physical Cell Parameters on Projection Cytometer Measurements 物理细胞参数对投影细胞仪测量结果的影响
S. Kostner, M. Vellekoop
In this paper the influence of optical absorption on projection cytometer measurements is discussed. Projection cytometry is an optical method for measuring physical parameters of biological cells in the optical near field. For reliable results, it is crucial to keep the projection distance constant for consecutive measurements which is achieved by applying a non-coaxial sheath flow. Simulations have been performed to predict the sensor signal for different absorption coefficients inside a cell. The interesting result is that with changing absorption coefficient only a part of the signal shape changes which indicates the ability to extract this parameter from the shape of the signal.
本文讨论了光学吸收对投影细胞仪测量结果的影响。投影细胞术是一种在光学近场测量生物细胞物理参数的光学方法。为了获得可靠的结果,通过施加非同轴鞘层流来实现连续测量,保持投影距离恒定是至关重要的。对不同吸收系数下的传感器信号进行了模拟预测。有趣的结果是,随着吸收系数的变化,只有一部分信号形状发生变化,这表明能够从信号形状中提取该参数。
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引用次数: 0
Reinforced Pressure Sensor for Marine Environment 海洋环境用加强型压力传感器
S. Aravamudhan, S. Bhansali
Pressure measurements in marine environment are of utmost importance to better understand the ocean processes, for maritime security and even for tsunami wave detection. In this work, a MEMS reinforced piezoresistive pressure sensor with packaging and protective coatings was tested to achieve both higher sensitivity and larger full scale span compared to conventional single diaphragm. By eliminating large deflections and non-linearities, the reinforced design showed about 15% higher sensitivity and twice the operating range. Further, reliability of protective coatings was evaluated in real ocean conditions.
海洋环境中的压力测量对于更好地了解海洋过程,海事安全甚至海啸波探测都至关重要。在这项工作中,测试了带有封装和保护涂层的MEMS增强压阻压力传感器,与传统的单膜片相比,它具有更高的灵敏度和更大的满量程跨度。通过消除大挠度和非线性,增强设计的灵敏度提高了约15%,工作范围提高了一倍。此外,在实际海洋条件下评估了防护涂层的可靠性。
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引用次数: 1
Photosensitive Poly(Dimethylsiloxane) (Photopdms) for Rapid and Simple Polymer Fabrication 用于快速和简单聚合物制备的光敏聚二甲基硅氧烷(Photopdms)
A. Bhagat, P. Jothimuthu, I. Papautsky
In this paper, we report a new and simple method of patterning polydimethylsiloxane (PDMS) directly under normal ambient light for rapid prototyping of disposable microfluidic lab-on-a-chips (LOCs). The photodefinable PDMS (photoPDMS) is positive-acting and only sensitive to light below 365 nm, which permits processing outside a gold room. A parametric study was conducted to optimize this novel fabrication technique. Features as small as 100 mum were successfully fabricated using photoPDMS. To further demonstrate the potential of this novel technique, thin (< 30 mum) free-standing patterned PDMS films. Successful demonstration of this novel process presents a feasibly simpler alternative approach for rapid prototyping of disposable microfluidic biochips for lab-on-a-chip applications.
在本文中,我们报告了一种在正常环境光下直接对聚二甲基硅氧烷(PDMS)进行图像化的新方法,用于一次性微流控芯片实验室(loc)的快速成型。可光定义的PDMS (photoPDMS)是正作用的,只对365纳米以下的光敏感,这允许在黄金房间外进行处理。通过参数化研究优化了这种新型制造工艺。使用photoPDMS成功地制造了小到100微米的特征。为了进一步证明这种新技术的潜力,薄的(< 30微米)独立的PDMS薄膜。这种新工艺的成功演示为一次性微流体生物芯片的快速原型设计提供了一种可行的更简单的替代方法,用于芯片上的实验室应用。
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引用次数: 4
A Low-Loss Single-Pole-Double-Throw (SPDT) Switch Circuit 一种低损耗单极双掷开关电路
M. Tang, A. Liu, A. Agarwal
A low-loss single-pole-double-throw (SPDT) switch circuit using lateral RF MEMS switches has been developed on glass to operate from DC to 20 GHz. High compactness and low loss can be obtained by use of the lateral switches and coplanar waveguide (CPW) configuration. The circuit provides > 24-dB isolation and < 0.9-dB insertion loss up to 20 GHz. The pull-in voltage of the switch is only 12.4 V, with a switching-on time of 35 mus and a switching-off time of 36 mus. A single-mask silicon-on-glass (SiOG) fabrication process has been developed to fabricate the SPDT switch circuit on glass, which has the advantages of low loss and high yield. The whole circuit has a size of 1.64 mm times 1.3 mm.
在玻璃上开发了一种低损耗单极双掷(SPDT)开关电路,该电路使用横向RF MEMS开关,工作范围为直流至20 GHz。采用横向开关和共面波导(CPW)结构可以获得高紧凑性和低损耗。该电路提供> 24 db的隔离和< 0.9 db的插入损耗,最高可达20 GHz。开关的拉入电压仅为12.4 V,接通时间为35 μ s,断开时间为36 μ s。提出了一种单掩模玻璃上硅(SiOG)制造工艺,该工艺具有低损耗、高成品率的优点。整个电路的尺寸为1.64 mm × 1.3 mm。
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引用次数: 6
A Microfluidic Oxygenator for Biological Cell Culture 生物细胞培养用微流控充氧器
R. Lam, Min-Cheol Kim, T. Thorsen
In this paper, we report on the development of a microfluidic platform in which dissolved oxygen (DO) concentrations can be dynamically adjusted for cell culture applications. The DO concentration in culture media flowing through enclosed microchannels is regulated by the diffusion through an elastromeric interface from an overhead gas channel, using an oxygen-sensitive dye embedded in the fluid channel as a sensor. Using a microchannel network functioning as an oxygen/nitrogen mixer, the growth characteristics of murine fibroblast cells (3T3) were analyzed as a function of eight discrete DO concentrations in culture media within a single device, ranging from anaerobic (0 ppm) to fully saturated (42 ppm).
在本文中,我们报告了一个微流控平台的发展,其中溶解氧(DO)浓度可以动态调整细胞培养应用。通过封闭微通道流动的培养基中的DO浓度是通过顶部气体通道通过弹性界面的扩散来调节的,使用嵌入在流体通道中的氧敏感染料作为传感器。利用作为氧/氮混合器的微通道网络,研究人员分析了小鼠成纤维细胞(3T3)的生长特性,并将其作为单个设备中培养基中8种离散DO浓度的函数,范围从厌氧(0 ppm)到完全饱和(42 ppm)。
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引用次数: 2
Effect of Electrode Configuration on the Frequency and Quality Factor Repeatability of RF Micromechanical Disk Resonators 电极结构对射频微机械圆盘谐振器频率和质量因数重复性的影响
Yang Lin, Jing Wang, S. Pietrangelo, Z. Ren, Clark T.-C. Nguyen
A statistical evaluation of the standard deviations of the resonance frequencies and quality factors of polysilicon surface-micromachined micromechanical disk resonators with fully-surrounding and split electrode configurations has been conducted by fabricating and measuring a large quantity (>400) of devices. Through this analysis, respective single-wafer resonance frequency standard deviations as low as 642 ppm for fully-surrounding electrode devices; and 984 ppm for two-port split electrode devices; have been measured. Respective average quality factor standard deviations for fully surrounding electrode devices of 5.6% in vacuum; and 3.9% in air; have also been obtained. The standard deviations for both frequency and Q of each resonator type are well within values needed to achieve the -3% percent bandwidth requirements for filters presently used in the RF front-ends of wireless communication devices without trimming.
通过制造和测量大量(>400)器件,对具有全环绕和分裂电极结构的多晶硅表面微机械圆盘谐振器的谐振频率和质量因子的标准差进行了统计评估。通过分析,对于全环绕电极器件,各自的单晶圆谐振频率标准差低至642 ppm;双端口分离电极器件为984 PPM;已经测量过了。真空条件下全环绕电极装置的平均质量因子标准差为5.6%;空气中占3.9%;也得到了。每种谐振器类型的频率和Q的标准偏差都在达到目前用于无线通信设备RF前端的-3%带宽要求所需的值之内,而无需修整。
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引用次数: 5
Performances of a Newly High Sensitive Trilayer F/CU/F GMI Sensor 一种新型高灵敏度三层F/CU/F GMI传感器的性能
F. Alves, B. Kaviraj, L. A. Rached, J. Moutoussamy, C. Coillot
We have selected stress-annealed nanocrystalline Fe-based ribbons for magnetic/copper/magnetic sensors exhibiting high magneto-impedance ratio. Longitudinal magneto-impedance DeltaZ/Zsat reaches 400% at 60 kHz and longitudinal magneto-resistance DeltaR/Rsat increases up to 1100% around 300 kHz.
我们选择了应力退火的纳米晶铁基带用于具有高磁阻抗比的磁/铜/磁传感器。纵向磁阻DeltaZ/Zsat在60 kHz时达到400%,纵向磁阻DeltaZ/ Rsat在300 kHz左右增加到1100%。
{"title":"Performances of a Newly High Sensitive Trilayer F/CU/F GMI Sensor","authors":"F. Alves, B. Kaviraj, L. A. Rached, J. Moutoussamy, C. Coillot","doi":"10.1109/SENSOR.2007.4300699","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300699","url":null,"abstract":"We have selected stress-annealed nanocrystalline Fe-based ribbons for magnetic/copper/magnetic sensors exhibiting high magneto-impedance ratio. Longitudinal magneto-impedance DeltaZ/Zsat reaches 400% at 60 kHz and longitudinal magneto-resistance DeltaR/Rsat increases up to 1100% around 300 kHz.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"29 1","pages":"2581-2584"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88552311","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Micro-Ablation of Skin by Arc-Discharge Jet Ejection for Transdermal Drug Delivery 经皮给药用电弧喷射微消融皮肤
P. Gadiraju, Jung-Hwan Park, Jeong Woo Lee, M. Prausnitz, M. Allen
This paper presents the design, fabrication and characterization of a jet ejection device that operates on the actuation principle of arc discharge for the purpose of generating micron-scale pores in skin. This thermo-mechanical micro-ablation technique increases skin permeability to drugs, while expected to maintain the patient friendliness of conventional transdermal patches. Laser micromachining and lamination techniques were utilized in fabricating these arc-discharge jet ejection devices. The released jet from the device is characterized in terms of its force, velocity and temperature and is used in skin ablation experiments. The skin is exposed to the jet and the permeability effects are characterized. Skin permeability was increased by approximately three orders of magnitude after jet exposure when compared to non-exposed controls, which is a significant advance for transdermal drug delivery.
本文介绍了一种基于电弧放电驱动原理的喷射装置的设计、制造和性能表征,该装置的目的是在皮肤上产生微米级毛孔。这种热机械微消融技术增加了皮肤对药物的渗透性,同时有望保持传统透皮贴片对患者的友好性。利用激光微加工技术和层压技术制备了这些电弧放电喷射装置。该装置释放的射流在力、速度和温度方面具有特征,并用于皮肤烧蚀实验。将皮肤暴露在射流中,并对其渗透性效应进行表征。与未暴露的对照组相比,喷流暴露后皮肤渗透性增加了大约三个数量级,这是经皮给药的重大进步。
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引用次数: 3
Temperature and Trapping Characterization of an Acoustic Lateral Trap for μ TAS μ TAS声学侧阱的温度和俘获特性
L. Johansson, M. Evander, T. Lilliehorn, M. Almqvist, J. Nilsson, T. Laurell, S. Johansson
An acoustic lateral trap for application in non-contact trapping of cells or particles in a microfluidic channel in a μTAS (micro total analysis system) is characterized by temperature and trapping efficiency measurements. Temperature is measured by fluorescent response of Rhodamine B in the microchannel. Trapping efficiency is measured as the projected area of a trapped particle cluster counter-balanced by hydrodynamic force. One of the main objectives is to obtain quantitative values of the temperature in the fluidic channel to ensure safe handling of cells and proteins. Other objectives are to evaluate optimal drive parameters. The optimal frequency, when temperature and trapping is considered, was found to be the parallel resonance frequency.
通过对μTAS(微全量分析系统)微流控通道中细胞或粒子的非接触捕获,对声学侧阱进行了温度和捕获效率测量。通过微通道中罗丹明B的荧光响应来测量温度。捕获效率是用被水动力平衡的捕获粒子簇的投影面积来衡量的。主要目标之一是获得流体通道中温度的定量值,以确保细胞和蛋白质的安全处理。其他目标是评估最佳驱动参数。在考虑温度和俘获的情况下,最优频率为平行共振频率。
{"title":"Temperature and Trapping Characterization of an Acoustic Lateral Trap for μ TAS","authors":"L. Johansson, M. Evander, T. Lilliehorn, M. Almqvist, J. Nilsson, T. Laurell, S. Johansson","doi":"10.1109/SENSOR.2007.4300236","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300236","url":null,"abstract":"An acoustic lateral trap for application in non-contact trapping of cells or particles in a microfluidic channel in a μTAS (micro total analysis system) is characterized by temperature and trapping efficiency measurements. Temperature is measured by fluorescent response of Rhodamine B in the microchannel. Trapping efficiency is measured as the projected area of a trapped particle cluster counter-balanced by hydrodynamic force. One of the main objectives is to obtain quantitative values of the temperature in the fluidic channel to ensure safe handling of cells and proteins. Other objectives are to evaluate optimal drive parameters. The optimal frequency, when temperature and trapping is considered, was found to be the parallel resonance frequency.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"37 1","pages":"739-742"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87266355","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
6-Stage Cascade Mode Magnetophoretic Microseparator for Human Blood Cells 6级级联式人血细胞磁泳微分离器
Youngdo Jung, Yoonsu Choi, Ki-Ho Han, A. B. Frazier
This paper is focused on the development of a 6-stage cascade paramagnetic mode magnetophoretic separation (PMMS) system. The design and fabrication of a 6-stage cascade mode magnetophoretic microseparator are presented along with the experimental characterization of the separation system using human whole blood as the case study. In this example, the PMMS system is used to separate blood cells from human whole blood based on their native magnetic properties using the magnetic force produced from a high magnetic field gradient. The most significant advancement of the PMMS system over our previously reported microseparators is the ability to obtain similar blood cell separation efficiencies while significantly increasing the volumetric flow rate through the separator. Experimental results show a separation efficiency of 89.5plusmn0.20 % for red blood cells at a volumetric flow rate of 28.8 muL / hr, resulting in a separation time of 10.4 minutes for a 5.0 muL blood sample.
研究了一种6级级顺磁模式磁泳分离系统。介绍了6级级联模式磁泳微分离器的设计与制造,并以人体全血为例对该分离系统进行了实验表征。在本例中,PMMS系统利用高磁场梯度产生的磁力,根据血细胞的天然磁性,从人体全血中分离血细胞。与我们之前报道的微分离器相比,PMMS系统最显著的进步是能够获得相似的血细胞分离效率,同时显著提高通过分离器的体积流量。实验结果表明,在28.8毫升/小时的体积流速下,红细胞的分离效率为89.5±0.20%,对于5.0毫升的血液样品,分离时间为10.4分钟。
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引用次数: 1
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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
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