Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300197
C. Ravat, M. Woytasik, P. Joubert, Y. Le Bihan, C. Marchand, E. Dufour-Gergam, J. Moulin, E. Martincic
In this paper, an experimental study was carried out for the design of microsensor arrays dedicated to eddy current non destructive applications. A 3-microcoil 1-D array sensor was realized thanks to microtechnology. Since each coil can be used as a transmitter or a receiver, five different transmission- reception strategies were considered for the inspection of a nickel based alloy target, featuring several calibrated surface notches. While the most basic strategy did not detect the smallest notch (0.1 x 0.1 x 0.1 mm3), the best strategy detected it with a 20 dB signal to noise ratio. The detection performances were then analyzed versus frequency and versus notch size.
本文对涡流无损应用微传感器阵列的设计进行了实验研究。利用微技术实现了一种3微线圈一维阵列传感器。由于每个线圈可以用作发射器或接收器，因此考虑了五种不同的发射-接收策略来检查镍基合金目标，具有几个校准的表面缺口。虽然最基本的策略没有检测到最小的陷波(0.1 x 0.1 x 0.1 mm3)，但最佳策略以20 dB的信噪比检测到它。然后分析了检测性能随频率和陷波尺寸的变化。
{"title":"Study for the Design of Eddy Current Microsensor Arrays for Non Destructive Testing Applications","authors":"C. Ravat, M. Woytasik, P. Joubert, Y. Le Bihan, C. Marchand, E. Dufour-Gergam, J. Moulin, E. Martincic","doi":"10.1109/SENSOR.2007.4300197","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300197","url":null,"abstract":"In this paper, an experimental study was carried out for the design of microsensor arrays dedicated to eddy current non destructive applications. A 3-microcoil 1-D array sensor was realized thanks to microtechnology. Since each coil can be used as a transmitter or a receiver, five different transmission- reception strategies were considered for the inspection of a nickel based alloy target, featuring several calibrated surface notches. While the most basic strategy did not detect the smallest notch (0.1 x 0.1 x 0.1 mm3), the best strategy detected it with a 20 dB signal to noise ratio. The detection performances were then analyzed versus frequency and versus notch size.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"519 1","pages":"583-586"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77180890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300415
H. Cai, X.M. Zhang, Q. Zhang, A. Liu
This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 mum, which is ideal for the CCL to change the cavity length (i.e., phase condition) without deteriorating the optical coupling. Stable single-mode laser output over 6.5 nm is demonstrated. Compared with the traditional CCLs that have fixed air gap, this design offers an additional degree of freedom to adjust the CCL to its optimal tuning state.
{"title":"MEMS Tunable Coupled-Cavity Laser","authors":"H. Cai, X.M. Zhang, Q. Zhang, A. Liu","doi":"10.1109/SENSOR.2007.4300415","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300415","url":null,"abstract":"This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 mum, which is ideal for the CCL to change the cavity length (i.e., phase condition) without deteriorating the optical coupling. Stable single-mode laser output over 6.5 nm is demonstrated. Compared with the traditional CCLs that have fixed air gap, this design offers an additional degree of freedom to adjust the CCL to its optimal tuning state.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"36 1","pages":"1441-1444"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82203614","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300201
A. Shastry, S. Abbasi, A. Epilepsia, K. Bohringer
This paper presents the fabrication of rough super-hydrophobic surfaces, dynamic high-speed measurements of sliding angles of water droplets, and develops a mechanistic understanding of contact angle hysteresis - the major dissipative mechanism in droplet based microfluidic systems. We investigate texture-dependence of hysteresis, evaluate the current model, propose a modification, and observe that the two models - current and proposed - are useful bounds on hysteresis of the surface except in ultra- hydrophobic regime where observed hysteresis is significantly higher than predictions of either model.
{"title":"Contact Angle Hysteresis Characterization of Textured Super-Hydrophobic Surfaces","authors":"A. Shastry, S. Abbasi, A. Epilepsia, K. Bohringer","doi":"10.1109/SENSOR.2007.4300201","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300201","url":null,"abstract":"This paper presents the fabrication of rough super-hydrophobic surfaces, dynamic high-speed measurements of sliding angles of water droplets, and develops a mechanistic understanding of contact angle hysteresis - the major dissipative mechanism in droplet based microfluidic systems. We investigate texture-dependence of hysteresis, evaluate the current model, propose a modification, and observe that the two models - current and proposed - are useful bounds on hysteresis of the surface except in ultra- hydrophobic regime where observed hysteresis is significantly higher than predictions of either model.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"366 1","pages":"599-602"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82578367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300069
R. Abdolvand, H. Mirilavasani, F. Ayazi
We present a low-power 82 MHz reference oscillator that utilizes a temperature-stable thin- film piezoelectric-on-silicon resonator as the frequency-selective element. Low impedance micromachined resonators are designed and fabricated using an arraying technique. As a result, the transimpedance amplifier in the oscillator loop is reduced to a single active component (one transistor) and 3 resistors, which is very power-efficient (2.2 mW at 1.1 V supply). By employing the buried oxide layer of the SOI substrate as a part of the structural stack of the composite resonator, a very small (- 2 ppm/degC) temperature coefficient of frequency (TCF) is obtained for the oscillator.
{"title":"A Low-Voltage Temperature-Stable Micromechanical Piezoelectric Oscillator","authors":"R. Abdolvand, H. Mirilavasani, F. Ayazi","doi":"10.1109/SENSOR.2007.4300069","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300069","url":null,"abstract":"We present a low-power 82 MHz reference oscillator that utilizes a temperature-stable thin- film piezoelectric-on-silicon resonator as the frequency-selective element. Low impedance micromachined resonators are designed and fabricated using an arraying technique. As a result, the transimpedance amplifier in the oscillator loop is reduced to a single active component (one transistor) and 3 resistors, which is very power-efficient (2.2 mW at 1.1 V supply). By employing the buried oxide layer of the SOI substrate as a part of the structural stack of the composite resonator, a very small (- 2 ppm/degC) temperature coefficient of frequency (TCF) is obtained for the oscillator.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"8 1","pages":"53-56"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82079521","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300274
M. Renaud, T. Sterken, A. Schmitz, P. Fiorini, C. Hoof, R. Puers
Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 muW has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.
{"title":"Piezoelectric Harvesters and MEMS Technology: Fabrication, Modeling and Measurements","authors":"M. Renaud, T. Sterken, A. Schmitz, P. Fiorini, C. Hoof, R. Puers","doi":"10.1109/SENSOR.2007.4300274","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300274","url":null,"abstract":"Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 muW has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"18 10 1","pages":"891-894"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82094551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300425
H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata
This paper reports a differentially detecting capacitive three-axis SOI accelerometer using novel vertical comb electrodes. The accelerometer structure was fabricated by surface-micromachining technique and consists of only the device layer of a SOI wafer without lower or upper electrodes. The bottom faces of both movable and fixed electrodes are in the same plane at their initial positions but those heights are different. It is also an important feature that the device applies fully differential detections in all three-axis by using only two pairs of four type capacitors. As an initial result, the capacitance changes against three-axis acceleration were observed. The capacitance sensitivities to X and Z-axis acceleration against Y-axis rotation were 1.04 fF/G and 1.14 fF/G, respectively.
{"title":"A Differential Capacitive Three-Axis SOI Accelerometer using Vertical Comb Electrodes","authors":"H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata","doi":"10.1109/SENSOR.2007.4300425","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300425","url":null,"abstract":"This paper reports a differentially detecting capacitive three-axis SOI accelerometer using novel vertical comb electrodes. The accelerometer structure was fabricated by surface-micromachining technique and consists of only the device layer of a SOI wafer without lower or upper electrodes. The bottom faces of both movable and fixed electrodes are in the same plane at their initial positions but those heights are different. It is also an important feature that the device applies fully differential detections in all three-axis by using only two pairs of four type capacitors. As an initial result, the capacitance changes against three-axis acceleration were observed. The capacitance sensitivities to X and Z-axis acceleration against Y-axis rotation were 1.04 fF/G and 1.14 fF/G, respectively.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"321 1","pages":"1483-1486"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76357975","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300655
K. Abe, S. Yoshihara, J. Ohara, Y. Takeuchi, N. Kawahara
We report for the first time that an ultra-small laser scanning module of millimeter size has been realized. We have demonstrated electronic scanning by switching the current without any moving parts. Having no moving parts enables high reliability, and the system volume can be greatly reduced. This fabrication technology that we employed enables very precise mass production of micro-optical elements such as prisms, lenses and light waveguides, because all fabrication steps are carried out using the same semiconductor process. These micro-optical elements are formed on the substrate simultaneously using single etching mask.
{"title":"A New Fabrication Method of Ultra-Small Laser Scanning Module","authors":"K. Abe, S. Yoshihara, J. Ohara, Y. Takeuchi, N. Kawahara","doi":"10.1109/SENSOR.2007.4300655","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300655","url":null,"abstract":"We report for the first time that an ultra-small laser scanning module of millimeter size has been realized. We have demonstrated electronic scanning by switching the current without any moving parts. Having no moving parts enables high reliability, and the system volume can be greatly reduced. This fabrication technology that we employed enables very precise mass production of micro-optical elements such as prisms, lenses and light waveguides, because all fabrication steps are carried out using the same semiconductor process. These micro-optical elements are formed on the substrate simultaneously using single etching mask.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"60 1","pages":"2405-2408"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76203821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300112
J. Verd, A. Uranga, J. Teva, G. Abadal, F. Torres, J. Arcamone, J.L. Lopez, F. Pérez-Murano, J. Fraxedas, J. Esteve, N. Barniol
A monolithic mass sensor with attogram resolution in air conditions has been fabricated using a conventional 0.35-μm CMOS process. The mass sensor is based on an electrostatically excited resonating sub-micrometer scale cantilever integrated with full custom designed CMOS electronics for sensing purposes and to self-excite the cantilever allowing its use in system-on-chip applications. The devices have been calibrated obtaining an experimental sensitivity of around 6 × 10-11 g/cm2 Hz equivalent to 0.9 ag/Hz for locally deposited mass. The results reported in this paper represent an improvement from previous works in terms of sensitivity, resolution and fabrication process complexity.
{"title":"Monolithic 0.35-μm CMOS Cantilever for Mass Sensing in the Attogram Range with Self-Excitation","authors":"J. Verd, A. Uranga, J. Teva, G. Abadal, F. Torres, J. Arcamone, J.L. Lopez, F. Pérez-Murano, J. Fraxedas, J. Esteve, N. Barniol","doi":"10.1109/SENSOR.2007.4300112","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300112","url":null,"abstract":"A monolithic mass sensor with attogram resolution in air conditions has been fabricated using a conventional 0.35-μm CMOS process. The mass sensor is based on an electrostatically excited resonating sub-micrometer scale cantilever integrated with full custom designed CMOS electronics for sensing purposes and to self-excite the cantilever allowing its use in system-on-chip applications. The devices have been calibrated obtaining an experimental sensitivity of around 6 × 10-11 g/cm2 Hz equivalent to 0.9 ag/Hz for locally deposited mass. The results reported in this paper represent an improvement from previous works in terms of sensitivity, resolution and fabrication process complexity.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"13 1","pages":"233-236"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88448373","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300525
F. Lisdat, R. Dronov, D. Kurth, H. Mohwald, F. Scheller
In biological signal transfer redox proteins play a key role. Often in a biological system they are arranged in a productive orientation allowing charge transfer from one molecule to the other. The transfer reaction can occur via mediators or by a direct interaction of the partners. These natural systems can be considered as an example for the development of artificial, biomimetic systems. The construction of such protein assemblies on electrodes has a great potential for the development of sensors but also for the design of electrodes for bioenergetic application.
{"title":"Protein Assemblies on Gold using Polyelectrolytes for the Construction of Analytical Signal Chains","authors":"F. Lisdat, R. Dronov, D. Kurth, H. Mohwald, F. Scheller","doi":"10.1109/SENSOR.2007.4300525","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300525","url":null,"abstract":"In biological signal transfer redox proteins play a key role. Often in a biological system they are arranged in a productive orientation allowing charge transfer from one molecule to the other. The transfer reaction can occur via mediators or by a direct interaction of the partners. These natural systems can be considered as an example for the development of artificial, biomimetic systems. The construction of such protein assemblies on electrodes has a great potential for the development of sensors but also for the design of electrodes for bioenergetic application.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"1885-1886"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82858641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300268
T. Chung, Dong-Gun Lee, M. Ujihara, G. Carman
In this paper, we have described a vibration-based magnetic energy harvesting device (VMEHD). The VMEHD converts mechanical energy from the environment to electrical energy by using the piezoelectric effect and frequency rectification. Magnetic arrays are used to rectify the incoming frequency to a higher frequency using non-contact mechanisms. The finite element analysis is used to simulate the VMEHD. Testing results show that the output voltage is between 8 volts to 12 volts with input frequency of 10 Hz and a rectified frequency of 22 Hz. This provides large power densities to be obtained in a mechanical energy harvesting device.
{"title":"Design, Simulation, and Fabrication of a Novel Vibration-Based Magnetic Energy Harvesting Device","authors":"T. Chung, Dong-Gun Lee, M. Ujihara, G. Carman","doi":"10.1109/SENSOR.2007.4300268","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300268","url":null,"abstract":"In this paper, we have described a vibration-based magnetic energy harvesting device (VMEHD). The VMEHD converts mechanical energy from the environment to electrical energy by using the piezoelectric effect and frequency rectification. Magnetic arrays are used to rectify the incoming frequency to a higher frequency using non-contact mechanisms. The finite element analysis is used to simulate the VMEHD. Testing results show that the output voltage is between 8 volts to 12 volts with input frequency of 10 Hz and a rectified frequency of 22 Hz. This provides large power densities to be obtained in a mechanical energy harvesting device.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"867-870"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86766616","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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