Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300507
Z. Ding, B. Ziaie
This paper reports on a new and simple way of uniform nanoliter droplet deposition by moving a microliter droplet through a vibrating ratcheted channel. Nanoliter droplets were deposited on Si and SU8 substrates/channels. A uniform array of 514 plusmn 62pL droplets was deposited on a SU8 channel by vibrating the substrate at a frequency and amplitude of 50 Hz and 3.5 mm (droplet speed ~ 60mm/s).
{"title":"Uniform Nanoliter-Sized Droplet Deposition using Fluid Motion in Ratcheted Micro-Channels","authors":"Z. Ding, B. Ziaie","doi":"10.1109/SENSOR.2007.4300507","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300507","url":null,"abstract":"This paper reports on a new and simple way of uniform nanoliter droplet deposition by moving a microliter droplet through a vibrating ratcheted channel. Nanoliter droplets were deposited on Si and SU8 substrates/channels. A uniform array of 514 plusmn 62pL droplets was deposited on a SU8 channel by vibrating the substrate at a frequency and amplitude of 50 Hz and 3.5 mm (droplet speed ~ 60mm/s).","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77810899","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300297
M. Stranzenbach, B. Saruhan
In this study, an innovative type of sensor configuration is used which contains an electrolyte constructed of quasi-single crystalline columns, a porous NiO sensing electrode (SE) and a conductive Pt reference electrode (RE) deposited on the backside. As electrolyte EB-PVD manufactured discs of FYSZ and PYSZ composition were used. Gas sensing characterization of the sensors was carried with typical flue-gas mixtures in various concentrations. Impedance and potential analysis were done at a frequency range of 100 kHz and 0.005 Hz. Sensors with FYSZ electrolyte could be operated at higher temperatures compared to those with PYSZ electrolytes. The highest achieved sensing temperature in this study was 600degC. NO was successfully detected under the presence of 5%vol. O2 at the maximum operating temperature.
{"title":"Planar, Impedance-Metric NOX Sensor with NiO Sensing Electrode for High Temperature Applications","authors":"M. Stranzenbach, B. Saruhan","doi":"10.1109/SENSOR.2007.4300297","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300297","url":null,"abstract":"In this study, an innovative type of sensor configuration is used which contains an electrolyte constructed of quasi-single crystalline columns, a porous NiO sensing electrode (SE) and a conductive Pt reference electrode (RE) deposited on the backside. As electrolyte EB-PVD manufactured discs of FYSZ and PYSZ composition were used. Gas sensing characterization of the sensors was carried with typical flue-gas mixtures in various concentrations. Impedance and potential analysis were done at a frequency range of 100 kHz and 0.005 Hz. Sensors with FYSZ electrolyte could be operated at higher temperatures compared to those with PYSZ electrolytes. The highest achieved sensing temperature in this study was 600degC. NO was successfully detected under the presence of 5%vol. O2 at the maximum operating temperature.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82526464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300246
F. Tatar, L. Zhang, J. Bastemeijer, J. Mollinger, A. Bossche
In the past times moving field in capillary electrophoresis (CE) have been introduced. However these attempts are unsuccessfully because the fluid column in the known electric field area introduces parabolic distortion of the osmotic flow profile, and in this way it introduces sever plug dispersions. This paper introduces a method to utilize the separation efficiency of moving field capillary electrophoresis, without the drawback of severe plug dispersion. Also the voltage is maintained on the low values and the speed of the sample is reduced and the efficiency of the separation is increased.
{"title":"Plug Dispersion Compensation in Moving Field Cappilary Electrophoresys Applications","authors":"F. Tatar, L. Zhang, J. Bastemeijer, J. Mollinger, A. Bossche","doi":"10.1109/SENSOR.2007.4300246","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300246","url":null,"abstract":"In the past times moving field in capillary electrophoresis (CE) have been introduced. However these attempts are unsuccessfully because the fluid column in the known electric field area introduces parabolic distortion of the osmotic flow profile, and in this way it introduces sever plug dispersions. This paper introduces a method to utilize the separation efficiency of moving field capillary electrophoresis, without the drawback of severe plug dispersion. Also the voltage is maintained on the low values and the speed of the sample is reduced and the efficiency of the separation is increased.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78839978","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300601
W. Jang, J. Lee, Jun‐Bo Yoon
A DRAM-like mechanical non-volatile memory (NVM) is newly proposed and fabricated using CMOS-compatible poly-Si surface micromachining. The key concept is developed that the proposed memory is non-volatile because the MEMS switch can clearly eliminate the leakage current when the device is off. The mechanical NVM shows excellent on-off characteristics (sub-threshold swing~4 mV/decade), high switching speed (~300 kHz) and non-volatility. This paper demonstrates the feasibility of the mechanical NVM as a new memory for ULSI applications.
{"title":"A Dram-Like Mechanical Non-Volatile Memory","authors":"W. Jang, J. Lee, Jun‐Bo Yoon","doi":"10.1109/SENSOR.2007.4300601","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300601","url":null,"abstract":"A DRAM-like mechanical non-volatile memory (NVM) is newly proposed and fabricated using CMOS-compatible poly-Si surface micromachining. The key concept is developed that the proposed memory is non-volatile because the MEMS switch can clearly eliminate the leakage current when the device is off. The mechanical NVM shows excellent on-off characteristics (sub-threshold swing~4 mV/decade), high switching speed (~300 kHz) and non-volatility. This paper demonstrates the feasibility of the mechanical NVM as a new memory for ULSI applications.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90474138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300273
M. Marzencki, Y. Ammar, S. Basrour
This paper presents a novel ambient energy scavenging system for powering wireless sensor nodes. It uses a MEMS generator and an ASIC power management circuit. The system is realised as a system on a package (SoP) with all components fabricated entirely using the microfabrication techniques. The electromechanical transduction is performed using the piezoelectric effect of aluminium nitride thin films. The reported experimental results prove the possibility of exploiting very low amplitude signals delivered by the generator for charging a storage capacitor. It is also shown that the proposed system of 5 mm3 can endlessly power a simple wireless sensor node; while a lithium-polymer thin film battery of the same volume can do so only for less than two months.
{"title":"Integrated Power Harvesting System Including a MEMS Generator and a Power Management Circuit","authors":"M. Marzencki, Y. Ammar, S. Basrour","doi":"10.1109/SENSOR.2007.4300273","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300273","url":null,"abstract":"This paper presents a novel ambient energy scavenging system for powering wireless sensor nodes. It uses a MEMS generator and an ASIC power management circuit. The system is realised as a system on a package (SoP) with all components fabricated entirely using the microfabrication techniques. The electromechanical transduction is performed using the piezoelectric effect of aluminium nitride thin films. The reported experimental results prove the possibility of exploiting very low amplitude signals delivered by the generator for charging a storage capacitor. It is also shown that the proposed system of 5 mm3 can endlessly power a simple wireless sensor node; while a lithium-polymer thin film battery of the same volume can do so only for less than two months.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89679119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300122
I. Sari, T. Balkan, H. Kulah
This paper presents a wideband electromagnetic (EM) vibration-to-electrical power generator which can efficiently scavenge energy and generate steady power over a predetermined frequency range. Power is generated by means of electromagnetic induction using a magnet and coils on top of resonating cantilever beams. The reported generator covers a wide band of external vibration frequency by implementing a number of serially connected cantilevers in different lengths. The device generates 0.5 muW continuous power with 20 mV voltage between 3.3 and 3.6 kHz of external vibration.
{"title":"A Wideband Electromagnetic Micro Power Generator for Wireless Microsystems","authors":"I. Sari, T. Balkan, H. Kulah","doi":"10.1109/SENSOR.2007.4300122","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300122","url":null,"abstract":"This paper presents a wideband electromagnetic (EM) vibration-to-electrical power generator which can efficiently scavenge energy and generate steady power over a predetermined frequency range. Power is generated by means of electromagnetic induction using a magnet and coils on top of resonating cantilever beams. The reported generator covers a wide band of external vibration frequency by implementing a number of serially connected cantilevers in different lengths. The device generates 0.5 muW continuous power with 20 mV voltage between 3.3 and 3.6 kHz of external vibration.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89294402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300260
M. Bennati, F. Lodesani, M. Crescentini, A. Mariani, M. Tartagni
Detection of target substances at very low concentration by using molecular stochastic sensing might open new directions for diagnostic tools. This paper presents a compact and low-cost electronic system to record events derived from ligand-gated ion channels embedded in an array of artificial lipid bilayer substrates. In our approach, a Surface Mount Technology electronic system has been designed to be interfaced with a 4x3 array of spots. The currents through each spot of one row are concurrently readout and digitized by three current-mode DeltaSigma (Delta Sigma) analog to digital converters. The output data streams are sent to a digital acquisition card for being recorded and post-processed by a PC.
{"title":"A Delta-Sigma Approach for Ion Channel Based Biosensor Arrays","authors":"M. Bennati, F. Lodesani, M. Crescentini, A. Mariani, M. Tartagni","doi":"10.1109/SENSOR.2007.4300260","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300260","url":null,"abstract":"Detection of target substances at very low concentration by using molecular stochastic sensing might open new directions for diagnostic tools. This paper presents a compact and low-cost electronic system to record events derived from ligand-gated ion channels embedded in an array of artificial lipid bilayer substrates. In our approach, a Surface Mount Technology electronic system has been designed to be interfaced with a 4x3 array of spots. The currents through each spot of one row are concurrently readout and digitized by three current-mode DeltaSigma (Delta Sigma) analog to digital converters. The output data streams are sent to a digital acquisition card for being recorded and post-processed by a PC.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89886338","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300653
D. Meier, J. Evju, K. Benkstein, B. Raman, Z. Boger, D. Lahr, S. Semancik
We describe the development of a conductometric gas microsensor technology that combines, in an optimized manner, nanostructured sensing films, MEMS microhotplate array platforms, and artificial neural networks signal processing. Individually addressable microelements, including varied semiconducting oxides, are temperature modulated to produce analytically rich data streams that allow recognition of low concentration target analytes in background mixtures. This brief report emphasizes: 1) recently developed selection and processing methods for incorporation of high performance sensing materials on the MEMS platforms, 2) special operational modes and data acquisition approaches for ensuring good signal quality while maximizing information content, and 3) signal analysis techniques that include preprocessing routines and advanced recognition algorithms.
{"title":"Enabling MEMS Chemical Microsensor Arrays for Trace Analyte Detection","authors":"D. Meier, J. Evju, K. Benkstein, B. Raman, Z. Boger, D. Lahr, S. Semancik","doi":"10.1109/SENSOR.2007.4300653","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300653","url":null,"abstract":"We describe the development of a conductometric gas microsensor technology that combines, in an optimized manner, nanostructured sensing films, MEMS microhotplate array platforms, and artificial neural networks signal processing. Individually addressable microelements, including varied semiconducting oxides, are temperature modulated to produce analytically rich data streams that allow recognition of low concentration target analytes in background mixtures. This brief report emphasizes: 1) recently developed selection and processing methods for incorporation of high performance sensing materials on the MEMS platforms, 2) special operational modes and data acquisition approaches for ensuring good signal quality while maximizing information content, and 3) signal analysis techniques that include preprocessing routines and advanced recognition algorithms.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89887882","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300672
J. Gardner, J.E. Taylor
As our understanding of the human olfactory system increases, so does our ability to design novel architectures in order to mimic the biological system. The concept of an artificial olfactory mucosa represents a new development in the field of biomimetics. Here we analyse the signals produced by such a biomimetic system that contain a spatio-temporal element not previously encountered within the field of machine olfaction or so-called electronic noses. This paper explores the use of convolution-based signal processing methodologies to exploit this richer data-set and ameliorate the well-known problems of sensor noise and drift. We show that, under certain conditions, an artificial mucosa combined with a convolution based classifier performs better than a conventional electronic nose.
{"title":"Novelconvolution Based Signal Processing Techniques for a Simplified Artificial Olfactory Mucosa","authors":"J. Gardner, J.E. Taylor","doi":"10.1109/SENSOR.2007.4300672","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300672","url":null,"abstract":"As our understanding of the human olfactory system increases, so does our ability to design novel architectures in order to mimic the biological system. The concept of an artificial olfactory mucosa represents a new development in the field of biomimetics. Here we analyse the signals produced by such a biomimetic system that contain a spatio-temporal element not previously encountered within the field of machine olfaction or so-called electronic noses. This paper explores the use of convolution-based signal processing methodologies to exploit this richer data-set and ameliorate the well-known problems of sensor noise and drift. We show that, under certain conditions, an artificial mucosa combined with a convolution based classifier performs better than a conventional electronic nose.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89896490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300568
D. Sameoto, S. Lee, M. Parameswaran
We present the first successful wirebonding on thick SU-8 actuators reported in the literature with a thorough investigation to determine the best processing conditions to produce reliable electrical connections to SU-8 MEMS structures. We measured the yield and mechanical strength of gold ball bonds for a variety of processing conditions on SU-8 structures up to 100 mum thick covered with a thin gold layer. Optimized processing conditions result in ball bonds with high adhesion strength and very low contact resistance. Multiple SU-8 based actuators have been electrically connected and operated demonstrating high reliability and yield.
{"title":"Wirebonding Characterization and Optimization on Thick Filmsu-8 MEMS Structures and Actuators","authors":"D. Sameoto, S. Lee, M. Parameswaran","doi":"10.1109/SENSOR.2007.4300568","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300568","url":null,"abstract":"We present the first successful wirebonding on thick SU-8 actuators reported in the literature with a thorough investigation to determine the best processing conditions to produce reliable electrical connections to SU-8 MEMS structures. We measured the yield and mechanical strength of gold ball bonds for a variety of processing conditions on SU-8 structures up to 100 mum thick covered with a thin gold layer. Optimized processing conditions result in ball bonds with high adhesion strength and very low contact resistance. Multiple SU-8 based actuators have been electrically connected and operated demonstrating high reliability and yield.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86528640","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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