Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300199
E. Sarantopoulou, Z. Kollia, K. Manoli, M. Sanopoulou, D. Goustouridis, S. Chatzandroulis, I. Raptis
The use of patternable polymeric films and their subsequent VUV irradiation treatment to engineer individual sensitivities in chemical sensor arrays is proposed. The structural changes of irradiated areas involve scission of polymeric chains, cross-linking and formation of new bonds. In addition, 157 nm induces surface and volume morphological changes in the micro/nano domain with different shapes, depending on the irradiation conditions. The effect of VUV irradiation on the swelling properties of polymethylmethacrylate (PMMA) thin films in certain analytes is studied using white light reflectance spectroscopy. The relative expansion of the PMMA film was clearly found to depend on the irradiation conditions.
{"title":"Modification of Sensing Properties of Thin Polymer Films by VUV Irradiation","authors":"E. Sarantopoulou, Z. Kollia, K. Manoli, M. Sanopoulou, D. Goustouridis, S. Chatzandroulis, I. Raptis","doi":"10.1109/SENSOR.2007.4300199","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300199","url":null,"abstract":"The use of patternable polymeric films and their subsequent VUV irradiation treatment to engineer individual sensitivities in chemical sensor arrays is proposed. The structural changes of irradiated areas involve scission of polymeric chains, cross-linking and formation of new bonds. In addition, 157 nm induces surface and volume morphological changes in the micro/nano domain with different shapes, depending on the irradiation conditions. The effect of VUV irradiation on the swelling properties of polymethylmethacrylate (PMMA) thin films in certain analytes is studied using white light reflectance spectroscopy. The relative expansion of the PMMA film was clearly found to depend on the irradiation conditions.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77350909","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300175
N. Roxhed, P. Griss, G. Stemme
This work presents a method for etching tapered sidewalls in silicon using deep reactive ion etching. The method is based on consecutive switching between anisotropic etching using the Bosch process and isotropic dry etching. By controlling the etch depths of the anisotropic and isotropic etch sessions, the sidewall angle can be controlled over a relatively large range, from 0deg (straight vertical) to 36deg. Tapered sidewalls are useful in microfabrication processes such as metal coating of 3D-structures (e.g. for electrical connections or vias), mold tool fabrication or as a tool to compensate for reentrant etching. The process represents an easy method to tailor the sidewall angle in deep etching of silicon. The etch scheme is run in a single etch system and can be implemented in ICP-systems of most manufactures. The method can also be used in conjunction with the standard Bosch process as demonstrated herein, where the method was applied to compensate for reentrant etching of high out-of-plane mesa-structures.
{"title":"Tapered Deep Reactive Ion Etching: Method and Characterization","authors":"N. Roxhed, P. Griss, G. Stemme","doi":"10.1109/SENSOR.2007.4300175","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300175","url":null,"abstract":"This work presents a method for etching tapered sidewalls in silicon using deep reactive ion etching. The method is based on consecutive switching between anisotropic etching using the Bosch process and isotropic dry etching. By controlling the etch depths of the anisotropic and isotropic etch sessions, the sidewall angle can be controlled over a relatively large range, from 0deg (straight vertical) to 36deg. Tapered sidewalls are useful in microfabrication processes such as metal coating of 3D-structures (e.g. for electrical connections or vias), mold tool fabrication or as a tool to compensate for reentrant etching. The process represents an easy method to tailor the sidewall angle in deep etching of silicon. The etch scheme is run in a single etch system and can be implemented in ICP-systems of most manufactures. The method can also be used in conjunction with the standard Bosch process as demonstrated herein, where the method was applied to compensate for reentrant etching of high out-of-plane mesa-structures.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77486429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300217
Jung-Mu Kim, Nam-Gon Kim, Jaehyoung Park, C. Cheon, Y. Kwon, Yong-Kweon Kim
The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.
{"title":"Monolithic RF MEMS Probe Array System using RF MEMS SP3T Switches for Permittivity Measurement","authors":"Jung-Mu Kim, Nam-Gon Kim, Jaehyoung Park, C. Cheon, Y. Kwon, Yong-Kweon Kim","doi":"10.1109/SENSOR.2007.4300217","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300217","url":null,"abstract":"The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80214666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300223
T. Suzuki, H. Yamamoto, M. Ohoka, A. Okonogi, H. Kabata, I. Kanno, M. Washizu, H. Kotera
In this paper, we propose a multiple cell treatment array with high-density arrayed micro-orifice having an individually accessible microchannel and electrodes. More than 10000 micro-orifices with the diameter of 2 mum can be simultaneously fabricated by Single-Mask inclined UV photolithography for embedded network (SIMPLE) process with the oxygen plasma etching. More than 200 living cells immobilized at the arrayed micro-orifices were permeabilized by electroporation and allowed to uptake an foreign impermeant substance.
{"title":"High Throughput Cell Electroporation Array Fabricated by Single-Mask Inclined UV Lithography Exposure and Oxygen Plasma Etching","authors":"T. Suzuki, H. Yamamoto, M. Ohoka, A. Okonogi, H. Kabata, I. Kanno, M. Washizu, H. Kotera","doi":"10.1109/SENSOR.2007.4300223","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300223","url":null,"abstract":"In this paper, we propose a multiple cell treatment array with high-density arrayed micro-orifice having an individually accessible microchannel and electrodes. More than 10000 micro-orifices with the diameter of 2 mum can be simultaneously fabricated by Single-Mask inclined UV photolithography for embedded network (SIMPLE) process with the oxygen plasma etching. More than 200 living cells immobilized at the arrayed micro-orifices were permeabilized by electroporation and allowed to uptake an foreign impermeant substance.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79142002","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300140
Chen-Ta Ho, Ruei-Zeng Lin, Hwan-You Chang, Cheng-Hsien Liu
A lobule-mimetic cell-patterning technique for on-chip reconstructing centimeter-scale liver tissue of heterogeneous hepatic and endothelial cells via the enhanced field-induced dielectrophoresis (DEP) trap is demonstrated and reported. By mimicking the basic morphology of the liver tissue, the classic hepatic lobule, the lobule-mimetic-stellate-electrodes array is designed for cell patterning via DEP operation. Through the vertical positive DEP manipulation, well-defined and enhanced spatial electric field gradients are created for in-parallel manipulating of massive individual cells. Experiment results show that both hepatic and endothelial cells are orderly guided, snared, and aligned along the field-induced orientation to from the lobule-mimetic pattern containing of multiple radial hepatic cell-strings interlaced with radial endothelial cell-strings. About 95% cell viability of hepatic and endothelial cells is also observed after cell-patterning demonstration via the fluorescent assay technique.
{"title":"In-Vitro Rapid Centimeter-Scale Reconstruction of Lobule-Mimetic Liver Tissue Employing Dielectrophoresis-Based Cell Patterning","authors":"Chen-Ta Ho, Ruei-Zeng Lin, Hwan-You Chang, Cheng-Hsien Liu","doi":"10.1109/SENSOR.2007.4300140","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300140","url":null,"abstract":"A lobule-mimetic cell-patterning technique for on-chip reconstructing centimeter-scale liver tissue of heterogeneous hepatic and endothelial cells via the enhanced field-induced dielectrophoresis (DEP) trap is demonstrated and reported. By mimicking the basic morphology of the liver tissue, the classic hepatic lobule, the lobule-mimetic-stellate-electrodes array is designed for cell patterning via DEP operation. Through the vertical positive DEP manipulation, well-defined and enhanced spatial electric field gradients are created for in-parallel manipulating of massive individual cells. Experiment results show that both hepatic and endothelial cells are orderly guided, snared, and aligned along the field-induced orientation to from the lobule-mimetic pattern containing of multiple radial hepatic cell-strings interlaced with radial endothelial cell-strings. About 95% cell viability of hepatic and endothelial cells is also observed after cell-patterning demonstration via the fluorescent assay technique.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79331114","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300245
Tae Yoon Kim, Young‐Ho Cho
We present an electrical particle velocity profiler capable to detect in-channel clogging and flow pattern of the particles flowing in microfluidic devices. We measure both the particle position and velocity from the voltage signals generated by the particles passing across sensing electrodes, from which we finally obtain the velocity profile of the particles in channel flow. In the experimental study, the particle velocity profile is measured with the uncertainty of 5.44%, which is equivalent to the uncertainty of 5% in the previous optical method. We also experimentally verify the capability of the present method for the in-channel clogging detection. Compared to the previous optical methods, the present electrical particle velocity profiler offers the simpler structure, the cheaper cost, and the higher integrability to integrated bio fluidic systems.
{"title":"An Electrical Particle Velocity Profiler for In-Channel Clogging Detection and Flow Pattern Characterization","authors":"Tae Yoon Kim, Young‐Ho Cho","doi":"10.1109/SENSOR.2007.4300245","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300245","url":null,"abstract":"We present an electrical particle velocity profiler capable to detect in-channel clogging and flow pattern of the particles flowing in microfluidic devices. We measure both the particle position and velocity from the voltage signals generated by the particles passing across sensing electrodes, from which we finally obtain the velocity profile of the particles in channel flow. In the experimental study, the particle velocity profile is measured with the uncertainty of 5.44%, which is equivalent to the uncertainty of 5% in the previous optical method. We also experimentally verify the capability of the present method for the in-channel clogging detection. Compared to the previous optical methods, the present electrical particle velocity profiler offers the simpler structure, the cheaper cost, and the higher integrability to integrated bio fluidic systems.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81285616","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300468
T. Yamashita, T. Itoh, T. Suga
This article discusses anti-stiction coating for Microelectromechanical System (MEMS) switch using atomic force microscope (AFM). In the air, stiction occurs by the attractive force that arises from the capillary force generated from forming a liquid meniscus by water vapor across MEMS switch gap, and the switch does not function normally. We have measured adhesion force for Au and Pt surfaces between 10% and 85% relative humidity (RH), and compared it with that of SiO2, Si, and self-assembled monolayer (SAM) surfaces. Our measurements indicate that approximately 20 nm thick sputtered Au and Pt coatings are useful to prevent stiction of MEMS switch.
{"title":"Investigation of Anti-Stiction Coating for MEMS Switch using Atomic Force Microscope","authors":"T. Yamashita, T. Itoh, T. Suga","doi":"10.1109/SENSOR.2007.4300468","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300468","url":null,"abstract":"This article discusses anti-stiction coating for Microelectromechanical System (MEMS) switch using atomic force microscope (AFM). In the air, stiction occurs by the attractive force that arises from the capillary force generated from forming a liquid meniscus by water vapor across MEMS switch gap, and the switch does not function normally. We have measured adhesion force for Au and Pt surfaces between 10% and 85% relative humidity (RH), and compared it with that of SiO2, Si, and self-assembled monolayer (SAM) surfaces. Our measurements indicate that approximately 20 nm thick sputtered Au and Pt coatings are useful to prevent stiction of MEMS switch.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84291474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300294
I. Oh, Chelsea Monty, Mark A. Shannon, R. Masel
A novel type of gas chemical sensor is fabricated by combining microfabrication techniques and electrochemical transducer. The microchannel sensor we built is composed of liquid/gas microchannels separated by a nanoporous membrane. When oxime chemistry is adapted into the microchannel sensor, it gives response of hundreds of mV to trace vapor (10 ppb) of chemical warfare agent simulants within ~10 sec. Double microchannel design further reduces potential drift and simplifies the sensor setup.
{"title":"Microfabricated Electrochemical Sensor for Chemical Warfare Agents: Smaller is Better","authors":"I. Oh, Chelsea Monty, Mark A. Shannon, R. Masel","doi":"10.1109/SENSOR.2007.4300294","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300294","url":null,"abstract":"A novel type of gas chemical sensor is fabricated by combining microfabrication techniques and electrochemical transducer. The microchannel sensor we built is composed of liquid/gas microchannels separated by a nanoporous membrane. When oxime chemistry is adapted into the microchannel sensor, it gives response of hundreds of mV to trace vapor (10 ppb) of chemical warfare agent simulants within ~10 sec. Double microchannel design further reduces potential drift and simplifies the sensor setup.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76664072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300585
S. Kostner, M. Vellekoop
In this paper we present an optical detection system for single biological cells that utilizes a standard DVD pickup head. In a feasibility study we have shown the detection for different plain and silver coated polystyrene particles and cells (yeast) suspended on a platinum mirror. For these experiments the integrated magnetic actor of the pickup was used to simulate the particle movement and we found a remarkable sensitivity. Then a flow cell with integrated mirror has been designed to be able to measure particles in a cytometric setup. First measurement results are given that show the high sensitivity and a good repeatability for polystyrene beads.
{"title":"Detection of Single Biological Cells using a DVD Pickup Head","authors":"S. Kostner, M. Vellekoop","doi":"10.1109/SENSOR.2007.4300585","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300585","url":null,"abstract":"In this paper we present an optical detection system for single biological cells that utilizes a standard DVD pickup head. In a feasibility study we have shown the detection for different plain and silver coated polystyrene particles and cells (yeast) suspended on a platinum mirror. For these experiments the integrated magnetic actor of the pickup was used to simulate the particle movement and we found a remarkable sensitivity. Then a flow cell with integrated mirror has been designed to be able to measure particles in a cytometric setup. First measurement results are given that show the high sensitivity and a good repeatability for polystyrene beads.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76903334","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300334
C. Waits, Nicholas R. Jankowski, B. Geil, R. Ghodssi
The first silicon air-driven rotary actuation mechanism based on encapsulated ball bearings is reported. The method of integrating a silicon air turbine with a ball bearing support mechanism has been developed for silicon turbomachinery and tribological investigations. Rotational speeds up to 37,000 rpm and continuous operation longer than 24 hours were measured. Qualitative analysis is also presented, shedding light on silicon/ball wear and methods for increasing bearing lifetime and speeds.
{"title":"MEMS Rotary Actuator using an Integrated Ball Bearing and Air Turbine","authors":"C. Waits, Nicholas R. Jankowski, B. Geil, R. Ghodssi","doi":"10.1109/SENSOR.2007.4300334","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300334","url":null,"abstract":"The first silicon air-driven rotary actuation mechanism based on encapsulated ball bearings is reported. The method of integrating a silicon air turbine with a ball bearing support mechanism has been developed for silicon turbomachinery and tribological investigations. Rotational speeds up to 37,000 rpm and continuous operation longer than 24 hours were measured. Qualitative analysis is also presented, shedding light on silicon/ball wear and methods for increasing bearing lifetime and speeds.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77053186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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