Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300072
B. Lenaerts, F. Peeters, R. Puers
When a class E circuit is employed to drive an inductive link, very little tolerance is allowed on the inductance value of the transmitter coil. Deformable coils are thus not compatible with an open- loop class E design. By connecting a transductor in series with the transmitter inductance, it is possible to keep the total class E inductance constant, regardless of the transmitter coil deformation. This is achieved through a control loop that steers the transductor to the appropriate inductance value. For the realized closed-loop circuit, class E regime is maintained for inductance variations of the transmitter coil of up to 27 %. The principal advantage of transductor control compared to earlier reported techniques, is the fixed frequency of operation.
{"title":"Closed-Loop Transductor-Compensated Class E Driver for Inductive Links","authors":"B. Lenaerts, F. Peeters, R. Puers","doi":"10.1109/SENSOR.2007.4300072","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300072","url":null,"abstract":"When a class E circuit is employed to drive an inductive link, very little tolerance is allowed on the inductance value of the transmitter coil. Deformable coils are thus not compatible with an open- loop class E design. By connecting a transductor in series with the transmitter inductance, it is possible to keep the total class E inductance constant, regardless of the transmitter coil deformation. This is achieved through a control loop that steers the transductor to the appropriate inductance value. For the realized closed-loop circuit, class E regime is maintained for inductance variations of the transmitter coil of up to 27 %. The principal advantage of transductor control compared to earlier reported techniques, is the fixed frequency of operation.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81101340","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300216
Yanzhu Zhao, Y. Yoon, Xiaosong Wu, M. Allen
This paper reports a metal-transfer-micromolding (MTM) technique for simultaneous implementation of metallized high aspect ratio molded polymer RF passive components, as well as coplanar waveguide feeding structures, in a high performance and potentially cost-effective fashion. Applications of the MTM technique in air-lifted RF components such as Ka-band monopole antennas and evanescent mode cavity resonators have been demonstrated. A 21.5% 10 dB bandwidth for the monopole antenna, and an unloaded Q exceeding 500 for the resonators, are achieved from micromolded organic materials.
{"title":"Metal-Transfer-Micromolding of Air-Lifted RF Components","authors":"Yanzhu Zhao, Y. Yoon, Xiaosong Wu, M. Allen","doi":"10.1109/SENSOR.2007.4300216","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300216","url":null,"abstract":"This paper reports a metal-transfer-micromolding (MTM) technique for simultaneous implementation of metallized high aspect ratio molded polymer RF passive components, as well as coplanar waveguide feeding structures, in a high performance and potentially cost-effective fashion. Applications of the MTM technique in air-lifted RF components such as Ka-band monopole antennas and evanescent mode cavity resonators have been demonstrated. A 21.5% 10 dB bandwidth for the monopole antenna, and an unloaded Q exceeding 500 for the resonators, are achieved from micromolded organic materials.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85550192","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300517
A. Bhagat, S. Dasgupta, R. Banerjee, I. Papautsky
In this work we report on the numerical and experimental investigation of the effects of channel cross-section and applied electric field on electroosmotic flow (EOF) mobility in polydimethylsiloxane (PDMS)/glass hybrid microchannels. The experimental results are used to calibrate and validate the simulation model to solve the Navier-Stokes equation for fluid flow and Poisson equation to resolve the external electric field. According to the Helmholtz Smoluchowski equation the electroosmotic mobility (muEO) is independent of channel cross-section and applied electric field. Contrary to the above relationship, the results presented in this work indicate that muEO is not constant but changes with channel cross-section as well as the applied electric field. The results of this work will be useful in determining the optimum channel dimensions for a desired electroosmotic velocity at a given applied electric field.
{"title":"Effects of Microchannel Cross-Section and Applied Electric Field on Electroosmotic Mobility","authors":"A. Bhagat, S. Dasgupta, R. Banerjee, I. Papautsky","doi":"10.1109/SENSOR.2007.4300517","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300517","url":null,"abstract":"In this work we report on the numerical and experimental investigation of the effects of channel cross-section and applied electric field on electroosmotic flow (EOF) mobility in polydimethylsiloxane (PDMS)/glass hybrid microchannels. The experimental results are used to calibrate and validate the simulation model to solve the Navier-Stokes equation for fluid flow and Poisson equation to resolve the external electric field. According to the Helmholtz Smoluchowski equation the electroosmotic mobility (muEO) is independent of channel cross-section and applied electric field. Contrary to the above relationship, the results presented in this work indicate that muEO is not constant but changes with channel cross-section as well as the applied electric field. The results of this work will be useful in determining the optimum channel dimensions for a desired electroosmotic velocity at a given applied electric field.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85700712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300413
H. Cai, X.M. Zhang, J. Wu, D. Tang, Q. Zhang, A. Liu
This paper presents a MEMS tunable dual-wave length laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through the 0th order of the grating. Meanwhile, wavelength tuning is achieved by rotating one of the mirrors. As a result, a tunable spectral separation of dual-wave length output is obtained. The MEMS device is fabricated by DRIE on SOI wafer, with the size of 3 mm times 3 mm.
{"title":"MEMS Tunable Dual-Wavelength Laser with Large Tuning Range","authors":"H. Cai, X.M. Zhang, J. Wu, D. Tang, Q. Zhang, A. Liu","doi":"10.1109/SENSOR.2007.4300413","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300413","url":null,"abstract":"This paper presents a MEMS tunable dual-wave length laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through the 0th order of the grating. Meanwhile, wavelength tuning is achieved by rotating one of the mirrors. As a result, a tunable spectral separation of dual-wave length output is obtained. The MEMS device is fabricated by DRIE on SOI wafer, with the size of 3 mm times 3 mm.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84097932","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300440
B. Zeyen, K. Turner
We report on design, fabrication and initial testing of a new higher harmonic imaging atomic force microscopy (AFM) probe for the characterization of materials at the nanoscale. In contrast to previous designs, this probe employs a dedicated second cantilever not only to amplify the desired higher harmonic, but also to suppress the actuation movement. With these measures the amplitudes of the actuation and the higher harmonic are brought closer together on the second cantilever, which is very advantageous for single-channel readout applications.
{"title":"Design and Test of a Novel Higher Harmonic Imaging AFM Probe with a Dedicated Second Cantilever for Harmonic Amplification","authors":"B. Zeyen, K. Turner","doi":"10.1109/SENSOR.2007.4300440","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300440","url":null,"abstract":"We report on design, fabrication and initial testing of a new higher harmonic imaging atomic force microscopy (AFM) probe for the characterization of materials at the nanoscale. In contrast to previous designs, this probe employs a dedicated second cantilever not only to amplify the desired higher harmonic, but also to suppress the actuation movement. With these measures the amplitudes of the actuation and the higher harmonic are brought closer together on the second cantilever, which is very advantageous for single-channel readout applications.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78020350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300151
C. Yamahata, T. Takekawa, M. Kumemura, M. Hosogi, Gen Hashiguchi, Dominique Collard, Hiroyuki Fujita
This paper deals with the first simultaneous electrical and mechanical characterization of DNA bundles by a MEMS tool. The silicon-based device has an integrated actuator and a differential capacitive position sensor. Our experiments show that under constant humidity conditions, a rope of DNA has a nearly Ohmic conductivity and behaves as a viscoelastic material.
{"title":"Electrical and Mechanical Characteristics of DNA Bundles Revealed by Silicon Nanotweezers","authors":"C. Yamahata, T. Takekawa, M. Kumemura, M. Hosogi, Gen Hashiguchi, Dominique Collard, Hiroyuki Fujita","doi":"10.1109/SENSOR.2007.4300151","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300151","url":null,"abstract":"This paper deals with the first simultaneous electrical and mechanical characterization of DNA bundles by a MEMS tool. The silicon-based device has an integrated actuator and a differential capacitive position sensor. Our experiments show that under constant humidity conditions, a rope of DNA has a nearly Ohmic conductivity and behaves as a viscoelastic material.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72861794","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300338
S. Takagi, H. Sasaki, M. Shikida, K. Sato
We have previously proposed an arrayed vertical motion system based on a tulip-shaped electrostatic clutch for producing haptic displays. The system has an advantage in that it is able to individually operate arrayed end-effecter elements with high-power and large strokes (output: 600 mN and displacement: 60 mum). We added a new electrostatic latch mechanism to the system to individually control the projection state. We used MEMS technologies to fabricate a 4times4 array electrostatic latch mechanism. The total size of the mechanism was 6.0 times 6.0 times 0.5 mm. We evaluated the relationship between the applied voltage and a holding force of a few mN was obtained for the spring device.
{"title":"Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System","authors":"S. Takagi, H. Sasaki, M. Shikida, K. Sato","doi":"10.1109/SENSOR.2007.4300338","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300338","url":null,"abstract":"We have previously proposed an arrayed vertical motion system based on a tulip-shaped electrostatic clutch for producing haptic displays. The system has an advantage in that it is able to individually operate arrayed end-effecter elements with high-power and large strokes (output: 600 mN and displacement: 60 mum). We added a new electrostatic latch mechanism to the system to individually control the projection state. We used MEMS technologies to fabricate a 4times4 array electrostatic latch mechanism. The total size of the mechanism was 6.0 times 6.0 times 0.5 mm. We evaluated the relationship between the applied voltage and a holding force of a few mN was obtained for the spring device.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73281451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300256
V. Agache, F. Sauter, C. Pudda, R. Blanc, C. Chabrol, P. Caillat, T. Plénat, A. V. Agasøster, L. Ghenim, A. Fuchs
This paper relates to a new architecture of label-free Ion channel based biosensors. The biochips are composed of nanoaperture arrays etched in a free-standing silicon nitride (Si3N4) supporting membrane. These membranes should be covered lately by a lipid bilayer which hosts bioengineered protein receptors-gated ion channels. This protein complex is used to convert specific binding events with target molecules into an electrical signal. This paper is focusing on the fabrication and packaging of the device.
{"title":"Fabrication and Packaging of Nanoporous Membrane Chips for Label-Free Ion-Channel Transducer Based Biosensor","authors":"V. Agache, F. Sauter, C. Pudda, R. Blanc, C. Chabrol, P. Caillat, T. Plénat, A. V. Agasøster, L. Ghenim, A. Fuchs","doi":"10.1109/SENSOR.2007.4300256","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300256","url":null,"abstract":"This paper relates to a new architecture of label-free Ion channel based biosensors. The biochips are composed of nanoaperture arrays etched in a free-standing silicon nitride (Si3N4) supporting membrane. These membranes should be covered lately by a lipid bilayer which hosts bioengineered protein receptors-gated ion channels. This protein complex is used to convert specific binding events with target molecules into an electrical signal. This paper is focusing on the fabrication and packaging of the device.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73398056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300286
Y. Cho, S. Lee, B. Le Pioufle, N. Takama, S. Takeuchi, T. Fujii, B.J. Kim
We present details on fabrication of electroporation microchip, practical experiments of single-cell electroporation with our fabricated microchip. Also, the continuous electroporation for the continuous flow of cells is used for high-throughput electroporation. The delivery efficiency and cell viability tests are provided and the successful GFP transfection into cells is also evaluated with a fluorescent microscope after electroporation.
{"title":"High-Throughput Single-Cell Electroporation Microchip with Three Dimensional Si Microelectrodes for Gene Transfection","authors":"Y. Cho, S. Lee, B. Le Pioufle, N. Takama, S. Takeuchi, T. Fujii, B.J. Kim","doi":"10.1109/SENSOR.2007.4300286","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300286","url":null,"abstract":"We present details on fabrication of electroporation microchip, practical experiments of single-cell electroporation with our fabricated microchip. Also, the continuous electroporation for the continuous flow of cells is used for high-throughput electroporation. The delivery efficiency and cell viability tests are provided and the successful GFP transfection into cells is also evaluated with a fluorescent microscope after electroporation.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76697169","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-06-10DOI: 10.1109/SENSOR.2007.4300636
N. Gupta, N. Masters, W. Ye, Y. Gianchandani
This paper presents a comparative study of performance of various analytical and semi-analytical models used for the analysis of rarefied gas flow, which is responsible for the phenomenon of thermal transpiration. In particular, these are evaluated in the context of the scaling analysis of a Si-micromachined monolithic Knudsen pump. Results from these models are verified using available experimental data and are benchmarked against the simulation results from direct simulation Monte Carlo (DSMC) technique. Characterization of Sharipov's model against the DSMC technique with the help of specially designed test cases predicts that Sharipov's model is potentially the most representative model for DSMC in this context. Finally, Sharipov's model is used to evaluate the sensitivity analysis of structural and performance parameters relevant for thermal transpiration. The analysis shows that for a 200 mum long channel on a well-insulated glass substrate, with a channel height of 100 nm and 10 mum width, provides a mass flow rate of 1.5times10-6 sccm with a DeltaT of 300degC.
{"title":"Gas Flowin Nano-Channels: Thermal Transpirationmodelswith Application to a Si-Micromachinedknudsen Pump","authors":"N. Gupta, N. Masters, W. Ye, Y. Gianchandani","doi":"10.1109/SENSOR.2007.4300636","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300636","url":null,"abstract":"This paper presents a comparative study of performance of various analytical and semi-analytical models used for the analysis of rarefied gas flow, which is responsible for the phenomenon of thermal transpiration. In particular, these are evaluated in the context of the scaling analysis of a Si-micromachined monolithic Knudsen pump. Results from these models are verified using available experimental data and are benchmarked against the simulation results from direct simulation Monte Carlo (DSMC) technique. Characterization of Sharipov's model against the DSMC technique with the help of specially designed test cases predicts that Sharipov's model is potentially the most representative model for DSMC in this context. Finally, Sharipov's model is used to evaluate the sensitivity analysis of structural and performance parameters relevant for thermal transpiration. The analysis shows that for a 200 mum long channel on a well-insulated glass substrate, with a channel height of 100 nm and 10 mum width, provides a mass flow rate of 1.5times10-6 sccm with a DeltaT of 300degC.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76824305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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