Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627905
Bozhi Yang, Q. Lin
This paper presents a novel phase-change actuator that can be potentially used for microvalves in lab-on-a-chip systems where minimal energy consumption is required. The actuator exploits a low melting-point paraffin wax, whose solid-liquid phase changes allow the closing and opening of fluid flow through deformable microchannels. Flow switching is initiated by melting of paraffin using integrated heaters, with an additional pneumatic pressure used for flow switching from open to closed state. After paraffin solidifies the switched flow state is subsequently maintained without further energy consumption. The actuator can be fabricated from PDMS through the multilayer soft lithography technique. Experiments demonstrate that the actuators can switch the flow state within 4-8 seconds, which can be further sped up with improved heater designs.
{"title":"Compliance-Based Latchable Microfluidic Actuators Using a Paraffin Wax","authors":"Bozhi Yang, Q. Lin","doi":"10.1109/MEMSYS.2006.1627905","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627905","url":null,"abstract":"This paper presents a novel phase-change actuator that can be potentially used for microvalves in lab-on-a-chip systems where minimal energy consumption is required. The actuator exploits a low melting-point paraffin wax, whose solid-liquid phase changes allow the closing and opening of fluid flow through deformable microchannels. Flow switching is initiated by melting of paraffin using integrated heaters, with an additional pneumatic pressure used for flow switching from open to closed state. After paraffin solidifies the switched flow state is subsequently maintained without further energy consumption. The actuator can be fabricated from PDMS through the multilayer soft lithography technique. Experiments demonstrate that the actuators can switch the flow state within 4-8 seconds, which can be further sped up with improved heater designs.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115997607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627867
T. C. Duc, J. Creemer, P. Sarro
This paper describes a novel two dimensional piezoresistive cantilever force sensor that is used to evaluate the impact force between micro-handling tools and microparticles in the nano-Newton range. Piezoresistor sensors are made from 500 nm-thick p-doped epitaxial silicon on a single crystal silicon substrate. The silicon cantilever is fabricated using bulk micromachining. Switching from the lateral mode to the vertical mode to monitor the lateral and vertical applied force is easily done by using two electronic switches. Force sensitivity of the implemented sensors up to 135 and 310 V/N for lateral and vertical configurations, respectively, is measured. The force resolution is estimated at 5 nN.
{"title":"Piezoresistive Cantilever for Nano-Newton Sensing in Two Dimensions","authors":"T. C. Duc, J. Creemer, P. Sarro","doi":"10.1109/MEMSYS.2006.1627867","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627867","url":null,"abstract":"This paper describes a novel two dimensional piezoresistive cantilever force sensor that is used to evaluate the impact force between micro-handling tools and microparticles in the nano-Newton range. Piezoresistor sensors are made from 500 nm-thick p-doped epitaxial silicon on a single crystal silicon substrate. The silicon cantilever is fabricated using bulk micromachining. Switching from the lateral mode to the vertical mode to monitor the lateral and vertical applied force is easily done by using two electronic switches. Force sensitivity of the implemented sensors up to 135 and 310 V/N for lateral and vertical configurations, respectively, is measured. The force resolution is estimated at 5 nN.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128714485","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627902
R. Toda, E. Yang
This paper presents the successful demonstration of a latching-type, large-stroke, high-precision linear microactuator. The microactuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of PZT actuator for slider thrust and electrostatic comb drive for slider grip. Incremental step size is precisely adjustable to tens of nanometer level by controlling PZT actuator voltage. Large stroke is obtained by repeating the operation sequence numerous times. Large stroke exceeding 600μm has been demonstrated. There is no conceivable limit to the stroke except for the length of the slider and external load.
{"title":"Zero-Power Latching, Large-Stroke, High-Precision Linear Microactuator for Lightweight Structures in Space","authors":"R. Toda, E. Yang","doi":"10.1109/MEMSYS.2006.1627902","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627902","url":null,"abstract":"This paper presents the successful demonstration of a latching-type, large-stroke, high-precision linear microactuator. The microactuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of PZT actuator for slider thrust and electrostatic comb drive for slider grip. Incremental step size is precisely adjustable to tens of nanometer level by controlling PZT actuator voltage. Large stroke is obtained by repeating the operation sequence numerous times. Large stroke exceeding 600μm has been demonstrated. There is no conceivable limit to the stroke except for the length of the slider and external load.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128637573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627733
B. J. Feenstra, R. Hayes, R. van Dijk, R. G. H. Boom, M. Wagemans, I. G. J. Camps, A. Giraldo, B. Heijden
We present the use of electrowetting as a technology for very bright and energy-efficient displays. The intrinsic nature of the system as an optical switch provides an excellent starting point upon which a wide variety of display configurations can be based. Here we focus our discussion on reflective displays, in which the main advantages of the technology are best utilized. The properties of the reflective display will be discussed, illustrating the combination of a paper-like optical performance and video-speed switching.
{"title":"Electrowetting-Based Displays: Bringing Microfluidics Alive On-Screen","authors":"B. J. Feenstra, R. Hayes, R. van Dijk, R. G. H. Boom, M. Wagemans, I. G. J. Camps, A. Giraldo, B. Heijden","doi":"10.1109/MEMSYS.2006.1627733","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627733","url":null,"abstract":"We present the use of electrowetting as a technology for very bright and energy-efficient displays. The intrinsic nature of the system as an optical switch provides an excellent starting point upon which a wide variety of display configurations can be based. Here we focus our discussion on reflective displays, in which the main advantages of the technology are best utilized. The properties of the reflective display will be discussed, illustrating the combination of a paper-like optical performance and video-speed switching.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129317174","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627785
T. Itoh, K. Kataoka, T. Suga
We have developed a new fabrication technique that realizes 3-dimensional microspring probes made of conductive pastes. In the technique, ultra precise dispensing of low-temperature silver pastes on a heated substrate is continuously repeated. 50-µ m-diameter microcantilevers with an approximately 200-µ m-high post have been successfully structured on a 353 K heated substrate and their mechanical and electrical properties have been investigated. The probing resistance of as-structured cantilevers with a low contact force of 1 mN could be effectively lowered to less than 1 Ω by heat cure process with the temperature of 523 K and by fritting process with the application of 5 V -150 mA.
{"title":"Fabricaton of Microspring Probes Using Conductive Paste Dispensing","authors":"T. Itoh, K. Kataoka, T. Suga","doi":"10.1109/MEMSYS.2006.1627785","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627785","url":null,"abstract":"We have developed a new fabrication technique that realizes 3-dimensional microspring probes made of conductive pastes. In the technique, ultra precise dispensing of low-temperature silver pastes on a heated substrate is continuously repeated. 50-µ m-diameter microcantilevers with an approximately 200-µ m-high post have been successfully structured on a 353 K heated substrate and their mechanical and electrical properties have been investigated. The probing resistance of as-structured cantilevers with a low contact force of 1 mN could be effectively lowered to less than 1 Ω by heat cure process with the temperature of 523 K and by fritting process with the application of 5 V -150 mA.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129597611","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627847
T.-Show Chen, C.‐P. Chen, Y. Tsai, W. Shih, W-C. Lin
In this paper, we present a fabrication approach of three-dimensional filters self-assembled inside pre-fabricated microchannels with adjustable filter thickness and screening scales. Biocompatible materials such as polystyrene microspheres and gelatin are used, respectively, as the assembly material and the sacrificial layer. Both of the screening efficiency and scales can be fine-tuned by controlling the amount and the diameter of the microspheres. Serum is successfully separated from diluted human blood by the fabricated filter. The developed process can add separation function onto pre-existing lab-on-a-chip. The potential applications of the filtration matrix include microscale chromatic analysis, clinic diagnostics, and three-dimensional DNA separation.
{"title":"A 3D Biological Filtration Matrix Using Self-Assembled Microspheres Inside microchannels and Gelatin Sacrificial Layer","authors":"T.-Show Chen, C.‐P. Chen, Y. Tsai, W. Shih, W-C. Lin","doi":"10.1109/MEMSYS.2006.1627847","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627847","url":null,"abstract":"In this paper, we present a fabrication approach of three-dimensional filters self-assembled inside pre-fabricated microchannels with adjustable filter thickness and screening scales. Biocompatible materials such as polystyrene microspheres and gelatin are used, respectively, as the assembly material and the sacrificial layer. Both of the screening efficiency and scales can be fine-tuned by controlling the amount and the diameter of the microspheres. Serum is successfully separated from diluted human blood by the fabricated filter. The developed process can add separation function onto pre-existing lab-on-a-chip. The potential applications of the filtration matrix include microscale chromatic analysis, clinic diagnostics, and three-dimensional DNA separation.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127181089","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627940
R. Moseley, E. Yeatman, A. Holmes, R. Syms, A. Finlay, P. Boniface
The switch reported here for the first time was designed for an application in satellite based communications, where the requirements were for low actuation voltage, high isolation, good vibration and shock tolerance, and low power consumption. The functional requirement was for a single-pole, double throw (SPDT) switch. To satisfy the low voltage specification, thermal actuation was chosen, with mechanical latching to limit average power consumption. Thin-film microstrip transmission lines were fabricated on glass wafers for the signal path, while the actuators were fabricated in bonded silicon on insulator on a separate wafer, the final device being formed by bonding the two parts together. The SPDT functionality was achieved, the actuation voltage was 3V, and although insertion loss in these first prototypes was excessive, RF isolation was better than 50 dB across the 1 – 6 GHz range.
{"title":"Laterally Actuated, Low Voltage, 3-Port RF MEMS Switch","authors":"R. Moseley, E. Yeatman, A. Holmes, R. Syms, A. Finlay, P. Boniface","doi":"10.1109/MEMSYS.2006.1627940","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627940","url":null,"abstract":"The switch reported here for the first time was designed for an application in satellite based communications, where the requirements were for low actuation voltage, high isolation, good vibration and shock tolerance, and low power consumption. The functional requirement was for a single-pole, double throw (SPDT) switch. To satisfy the low voltage specification, thermal actuation was chosen, with mechanical latching to limit average power consumption. Thin-film microstrip transmission lines were fabricated on glass wafers for the signal path, while the actuators were fabricated in bonded silicon on insulator on a separate wafer, the final device being formed by bonding the two parts together. The SPDT functionality was achieved, the actuation voltage was 3V, and although insertion loss in these first prototypes was excessive, RF isolation was better than 50 dB across the 1 – 6 GHz range.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127182395","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627758
M. Doelle, J. Held, P. Ruther, O. Paul
This paper reports on the simultaneous and independent measurement of mechanical stress and temperature using a single field effect transistor with multiple source/drain contacts. A stress sensitivity of Sσ= -405 µ V/MPa V of the device originates from the shear piezoresistive effect, i.e. the pseudo-Hall effect. This sensitivity exhibits a very small temperature coefficient of only 914 ppm/K. Temperature values are acquired from the temperature dependence of the threshold voltage VTand extracted using a recently reported regularization method with a temperature sensitivity of SVT= -1.67 mV/K. We report VTto be stress independent in the measured range of 0 MPa to 15.6 MPa and in the temperature range of 25 ° C to 150 ° C.
{"title":"Simultaneous and Independent Measurement of Stress and Temperature Using a Single Field Effect Transistor Based Sensor","authors":"M. Doelle, J. Held, P. Ruther, O. Paul","doi":"10.1109/MEMSYS.2006.1627758","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627758","url":null,"abstract":"This paper reports on the simultaneous and independent measurement of mechanical stress and temperature using a single field effect transistor with multiple source/drain contacts. A stress sensitivity of Sσ= -405 µ V/MPa V of the device originates from the shear piezoresistive effect, i.e. the pseudo-Hall effect. This sensitivity exhibits a very small temperature coefficient of only 914 ppm/K. Temperature values are acquired from the temperature dependence of the threshold voltage VTand extracted using a recently reported regularization method with a temperature sensitivity of SVT= -1.67 mV/K. We report VTto be stress independent in the measured range of 0 MPa to 15.6 MPa and in the temperature range of 25 ° C to 150 ° C.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129047654","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627958
F. Chamran, Hong-seok Min, B. Dunn, C. Kim
A silicon-micromachined rechargeable nickel-zinc alkaline microbattery featuring out-of-plane interdigitated electrodes is reported. The three-dimensional (3-D) battery architecture offers a new approach in developing miniaturized power sources to provide enough power and energy density for autonomous MEMS devices and microelectronic circuits on their small foot print. The battery consists of nickel hydroxide cathode and zinc anode post electrodes which are densely packed in an interdigitated manner. The posts are 50 µ m in diameter and 400 µ m tall, with foot print area of 5x5 mm2. Initial prototypes demonstrated a functional battery for the first few cycles of operation.
{"title":"Three-Dimensional Nickel-Zinc Microbatteries","authors":"F. Chamran, Hong-seok Min, B. Dunn, C. Kim","doi":"10.1109/MEMSYS.2006.1627958","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627958","url":null,"abstract":"A silicon-micromachined rechargeable nickel-zinc alkaline microbattery featuring out-of-plane interdigitated electrodes is reported. The three-dimensional (3-D) battery architecture offers a new approach in developing miniaturized power sources to provide enough power and energy density for autonomous MEMS devices and microelectronic circuits on their small foot print. The battery consists of nickel hydroxide cathode and zinc anode post electrodes which are densely packed in an interdigitated manner. The posts are 50 µ m in diameter and 400 µ m tall, with foot print area of 5x5 mm2. Initial prototypes demonstrated a functional battery for the first few cycles of operation.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"7 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129094981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627803
N. Chen, J. Engel, S. Pandya, C. Liu
In this paper, we report the general design of a two-axis bendable flexible skin and its companion fabrication method. Conventional flexible skins can only bend along one axis. For example, they may be rolled onto a circular cylinder conformally but not onto a sphere. Our flexible skin features a novel interwoven structure inspired by cloth fabric. The horizontal and vertical threads of the skin are not connected; they are free to slide and rotate against each other, therefore enabling the skin to adjust its shape to conform to complex curvatures. To demonstrate the potential for future applications, we have embedded passive RF elements (planar coil inductors) inside the skin. The inductance value is experimentally determined to be 106 µ H.
{"title":"Flexible Skin with Two-Axis Bending Capability Made Using Weaving-By-Lithography Fabrication Method","authors":"N. Chen, J. Engel, S. Pandya, C. Liu","doi":"10.1109/MEMSYS.2006.1627803","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627803","url":null,"abstract":"In this paper, we report the general design of a two-axis bendable flexible skin and its companion fabrication method. Conventional flexible skins can only bend along one axis. For example, they may be rolled onto a circular cylinder conformally but not onto a sphere. Our flexible skin features a novel interwoven structure inspired by cloth fabric. The horizontal and vertical threads of the skin are not connected; they are free to slide and rotate against each other, therefore enabling the skin to adjust its shape to conform to complex curvatures. To demonstrate the potential for future applications, we have embedded passive RF elements (planar coil inductors) inside the skin. The inductance value is experimentally determined to be 106 µ H.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125400626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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