Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627923
Jae Yong Lee, W. Lee, Y. Choz
This paper presents the design, fabrication, and characterization of new serial digital actuators, achieving the improvement of the range-to-precision and range-to-voltage performance. We propose a weight-balanced design for the serial actuators with serpentine springs with serial arrangement of digital actuators. We have measured the displacement range, precision, and drive voltage at unit and serial actuation of 1Hz. The serial digital actuators produce a full range displacement of 28.44± 0.02μm, accumulating the unit displacement of 2.8±0.5μm at the operating voltage of 4.47±0.07V. In addition, the serial digital actuators having the displacement precision of 37.94±6.26nm do not accumulate the precision of the unit actuators, 36.0±17.7nm. We experimentally verify that the serial digital actuators achieve the range-to-squared-voltage ratio of 1.423μm/V2and the range-to-precision ratio of 749.6.
{"title":"Serially-Connected Weight-Balanced Digital Actuators for Wide-Range, High-Precision, Low-Voltage Displacement Control","authors":"Jae Yong Lee, W. Lee, Y. Choz","doi":"10.1109/MEMSYS.2006.1627923","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627923","url":null,"abstract":"This paper presents the design, fabrication, and characterization of new serial digital actuators, achieving the improvement of the range-to-precision and range-to-voltage performance. We propose a weight-balanced design for the serial actuators with serpentine springs with serial arrangement of digital actuators. We have measured the displacement range, precision, and drive voltage at unit and serial actuation of 1Hz. The serial digital actuators produce a full range displacement of 28.44± 0.02μm, accumulating the unit displacement of 2.8±0.5μm at the operating voltage of 4.47±0.07V. In addition, the serial digital actuators having the displacement precision of 37.94±6.26nm do not accumulate the precision of the unit actuators, 36.0±17.7nm. We experimentally verify that the serial digital actuators achieve the range-to-squared-voltage ratio of 1.423μm/V2and the range-to-precision ratio of 749.6.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128733630","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627815
J. Wright, R.A. Miller, E. Nazarov
An atmospheric pressure microplasma ionization source operating in ambient air and nitrogen is presented. Utilizing planar dielectric barrier discharge configuration, low power operation (< 250 mW) and long continuous operating lifetime (> 5000 hours) is demonstrated. Fitting of nitrogen rotational spectroscopy measurements indicate the microplasma operates at ambient temperature. Ion intensity and signal-to-noise data generated by the microplasma are compared to those produced from a 5 mCi,63Ni foil, a radioactive source widely used in chemical detection equipment. End of life failure mode is discussed.
{"title":"Atmospheric Pressure Airmicroplasma Ionization Source for Chemical Analysis Applications","authors":"J. Wright, R.A. Miller, E. Nazarov","doi":"10.1109/MEMSYS.2006.1627815","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627815","url":null,"abstract":"An atmospheric pressure microplasma ionization source operating in ambient air and nitrogen is presented. Utilizing planar dielectric barrier discharge configuration, low power operation (< 250 mW) and long continuous operating lifetime (> 5000 hours) is demonstrated. Fitting of nitrogen rotational spectroscopy measurements indicate the microplasma operates at ambient temperature. Ion intensity and signal-to-noise data generated by the microplasma are compared to those produced from a 5 mCi,63Ni foil, a radioactive source widely used in chemical detection equipment. End of life failure mode is discussed.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129927245","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627756
C. Chiou, Yu-yen Huang, Meng-Han Chiang, Huei-Huang Lee, Gwo-Bin Lee
This study reports a new three-dimensional (3-D) micromachined magnetic tweezers, fabricated using MEMS (micro-electro-mechanical systems) technology, for manipulating a single 2-nm diameter DNA molecule. The new apparatus uses magnetic forces to exert over 20-pN, with less heating compared to other methods, allowing the extension of the DNA molecule over its whole contour length to investigate its entropic and elastic regions. The important elastic modulus of DNA has been explored to be 453 pN at a low ionic strength. The force-extension curve for DNA molecules is found to be consistent with theoretical models. In addition to a single DNA stretching, this study also successfully demonstrated the stretching of two parallel DNA molecules, which was never reported previously in the literature.
{"title":"3-D Magnetic Tweezers for Investigation of Mechanical Properties of Single DNA Molecules","authors":"C. Chiou, Yu-yen Huang, Meng-Han Chiang, Huei-Huang Lee, Gwo-Bin Lee","doi":"10.1109/MEMSYS.2006.1627756","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627756","url":null,"abstract":"This study reports a new three-dimensional (3-D) micromachined magnetic tweezers, fabricated using MEMS (micro-electro-mechanical systems) technology, for manipulating a single 2-nm diameter DNA molecule. The new apparatus uses magnetic forces to exert over 20-pN, with less heating compared to other methods, allowing the extension of the DNA molecule over its whole contour length to investigate its entropic and elastic regions. The important elastic modulus of DNA has been explored to be 453 pN at a low ionic strength. The force-extension curve for DNA molecules is found to be consistent with theoretical models. In addition to a single DNA stretching, this study also successfully demonstrated the stretching of two parallel DNA molecules, which was never reported previously in the literature.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130502654","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627926
T. Kan, K. Hoshino, K. Matsumoto, I. Shimoyama
We propose a light intensity measuring method applicable to near-field measurement as well as far-field measurement. We fabricated a scanning probe composed of a piezoresistive cantilever and a fluorescent bead. The fluorescent bead works as a probe for the light intensity. The bead was attached to the tip of the piezoresistive cantilever, which detected cantilever contact by monitoring strain of the cantilever. Scanning position determination was carried out with accuracy of 100 nm by detecting a contact between the bead and the substrate. The cantilever probe scanned a sub-micron sized aperture to measure intensity distribution in the vicinity of the aperture. This contact detection allowed the probe to scan in near-field region, where distance between the probe and the aperture was within a wavelength.
{"title":"Measurement of Light Intensity Field with a Fluorescent Bead Cantilever","authors":"T. Kan, K. Hoshino, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2006.1627926","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627926","url":null,"abstract":"We propose a light intensity measuring method applicable to near-field measurement as well as far-field measurement. We fabricated a scanning probe composed of a piezoresistive cantilever and a fluorescent bead. The fluorescent bead works as a probe for the light intensity. The bead was attached to the tip of the piezoresistive cantilever, which detected cantilever contact by monitoring strain of the cantilever. Scanning position determination was carried out with accuracy of 100 nm by detecting a contact between the bead and the substrate. The cantilever probe scanned a sub-micron sized aperture to measure intensity distribution in the vicinity of the aperture. This contact detection allowed the probe to scan in near-field region, where distance between the probe and the aperture was within a wavelength.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129106648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627955
C. Buie, Y. Banin, C. Tang, J. Santiago, F. Prinz, B. Pruitt
This paper reports a novel design, and subsequent performance results, for a direct methanol fuel cell (DMFC) with a planar silicon electroosmotic (EO) pump for methanol fuel delivery. EO pumps possess no moving parts, produce flow rates on the order of several ml/min, and can be microfabricated from silicon substrates. Maximum flow rates from the EO pumps ranged from 0.25 ml/min to 10 ml/min at applied voltages ranging from 40 V – 100 V with deionized water as the working fluid. The maximum power density of the DMFC is 17.8 mW/cm2at room temperature.
本文报道了一种具有平面硅电渗透(EO)泵的直接甲醇燃料电池(DMFC)的新设计和随后的性能结果。EO泵没有运动部件，产生几毫升/分钟的流量，并且可以从硅衬底微制造。以去离子水为工作流体，施加电压为40 V - 100 V时，EO泵的最大流量范围为0.25 ml/min至10 ml/min。室温下DMFC的最大功率密度为17.8 mW/cm2。
{"title":"A Microfabricated Direct Methanol Fuel Cell with Integrated Electroosmotic Pump","authors":"C. Buie, Y. Banin, C. Tang, J. Santiago, F. Prinz, B. Pruitt","doi":"10.1109/MEMSYS.2006.1627955","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627955","url":null,"abstract":"This paper reports a novel design, and subsequent performance results, for a direct methanol fuel cell (DMFC) with a planar silicon electroosmotic (EO) pump for methanol fuel delivery. EO pumps possess no moving parts, produce flow rates on the order of several ml/min, and can be microfabricated from silicon substrates. Maximum flow rates from the EO pumps ranged from 0.25 ml/min to 10 ml/min at applied voltages ranging from 40 V – 100 V with deionized water as the working fluid. The maximum power density of the DMFC is 17.8 mW/cm2at room temperature.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129216727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627753
G. J. Shah, P. Chiou, J. Gong, A. Ohta, J. B. Chou, Ming C. Wu, C. Kim
This paper presents the integration of two powerful technologies: manipulation of droplets (i.e., digital microfluidics) using electrowettingon-dielectric (EWOD) and manipulation of individual particle inside the droplets using optoelectronic tweezers (OET). A novel platform for maintaining a viable cell culture environment is proposed as an application example, in which EWOD operations bring droplets containing cells, medium and waste into and out of the cell environment and OET operations address and manipulate the individual cells in coordination with the fluidic operations. Functions of EWOD and OET required to realize the concept are demonstrated.
{"title":"Integrating Optoelectronic Tweezers for Individual Particle Manipulation with Digital Microfluidics Using Electrowetting-On-Dielectric (EWOD)","authors":"G. J. Shah, P. Chiou, J. Gong, A. Ohta, J. B. Chou, Ming C. Wu, C. Kim","doi":"10.1109/MEMSYS.2006.1627753","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627753","url":null,"abstract":"This paper presents the integration of two powerful technologies: manipulation of droplets (i.e., digital microfluidics) using electrowettingon-dielectric (EWOD) and manipulation of individual particle inside the droplets using optoelectronic tweezers (OET). A novel platform for maintaining a viable cell culture environment is proposed as an application example, in which EWOD operations bring droplets containing cells, medium and waste into and out of the cell environment and OET operations address and manipulate the individual cells in coordination with the fluidic operations. Functions of EWOD and OET required to realize the concept are demonstrated.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123979084","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627951
Young-Sik Kim, H. Nam, Seong-Soo Jang, C. S. Lee, W. Jin, Il-Joo Cho, J. Bu, Sun-Il Chang, E. Yoon
In this research, a wafer-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride (Si3N4) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric Si3N4cantilevers. The thermo-piezoelectric Si3N4cantilever arrays were fabricated with a conventional p-type silicon wafer instead of a SOI wafer. Furthermore, we have developed a wafer-level cantilever transfer process, which requires only one step of cantilever transfer process to integrate the CMOS circuit with the cantilevers. Using this process, we have fabricated a single thermo-piezoelectric Si3N4cantilever, and recorded 65nm data bits on a PMMA film. And we have successfully applied this method to transfer 34X34 thermo-piezoelectric Si3N4cantilever arrays on a CMOS wafer. Finally, We obtained reading signals from one of the cantilevers.
{"title":"Wafer-Level Transfer of Thermo-Piezoelectric Si3N4Cantilever Array on a CMOS Circuit for High Density Probe-Based Data Storage","authors":"Young-Sik Kim, H. Nam, Seong-Soo Jang, C. S. Lee, W. Jin, Il-Joo Cho, J. Bu, Sun-Il Chang, E. Yoon","doi":"10.1109/MEMSYS.2006.1627951","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627951","url":null,"abstract":"In this research, a wafer-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride (Si<inf>3</inf>N<inf>4</inf>) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric Si<inf>3</inf>N<inf>4</inf>cantilevers. The thermo-piezoelectric Si<inf>3</inf>N<inf>4</inf>cantilever arrays were fabricated with a conventional p-type silicon wafer instead of a SOI wafer. Furthermore, we have developed a wafer-level cantilever transfer process, which requires only one step of cantilever transfer process to integrate the CMOS circuit with the cantilevers. Using this process, we have fabricated a single thermo-piezoelectric Si<inf>3</inf>N<inf>4</inf>cantilever, and recorded 65nm data bits on a PMMA film. And we have successfully applied this method to transfer 34X34 thermo-piezoelectric Si<inf>3</inf>N<inf>4</inf>cantilever arrays on a CMOS wafer. Finally, We obtained reading signals from one of the cantilevers.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124023691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627754
Y. Yoshida, T. Shimozawa, T. Nishizaka, S. Ishiwata, S. Takeuchi
This paper describes a biohybrid nano transporting device using muscle proteins of actin and myosin. These proteins are patterned on a glass substrate by a Parylene lift off process. A nano fluorescent particle was attached onto an actin filament by biotin-avidin interactions. We found that the actin filament is sufficiently flexible, so it can turn back at the edge of the pattern and is confined moving upon the micro patterns. The velocity of the transportation was around 4 µ m/s, which was about 40 times faster than that of kinesin and microtubule we used in MEMS2005 [ 1a]. This technique is useful for high speed transportation or actuation of MEMS/NEMS devices.
{"title":"Muscle Proteins as High Speed Nano Transporters on Micro Patterns","authors":"Y. Yoshida, T. Shimozawa, T. Nishizaka, S. Ishiwata, S. Takeuchi","doi":"10.1109/MEMSYS.2006.1627754","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627754","url":null,"abstract":"This paper describes a biohybrid nano transporting device using muscle proteins of actin and myosin. These proteins are patterned on a glass substrate by a Parylene lift off process. A nano fluorescent particle was attached onto an actin filament by biotin-avidin interactions. We found that the actin filament is sufficiently flexible, so it can turn back at the edge of the pattern and is confined moving upon the micro patterns. The velocity of the transportation was around 4 µ m/s, which was about 40 times faster than that of kinesin and microtubule we used in MEMS2005 [ 1a]. This technique is useful for high speed transportation or actuation of MEMS/NEMS devices.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114342649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627833
S. Aoyagi, H. Izumi, Y. Isono, K. Makihira, M. Fukuda
This paper proposes a biodegradable polymer (Poly Lactic Acid, called as PLA) needle having a trench for collecting blood. A solid micro needle of polymer can be fabricated by micromolding method. However, a hollow needle is difficult to be fabricated by this method. It is also difficult to fabricate a long hole with ultra high aspect ratio along the centerline of a micromolded needle. On the other hand, it is comparatively easy to fabricate a trench on a needle surface. Blood runs up along this trench by capillary force, which realizes simple and easy blood collection without pumping mechanism. A needle with straight shank is fabricated by contriving wet etching method of a groove on a silicon die. A trench is fabricated on the top surface of the needle by laser micromachining. The performance of collecting blood of this needle is experimentally evaluated.
{"title":"Biodegradable Polymer Needle Having a Trench for Collecting Blood by Capillary Force","authors":"S. Aoyagi, H. Izumi, Y. Isono, K. Makihira, M. Fukuda","doi":"10.1109/MEMSYS.2006.1627833","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627833","url":null,"abstract":"This paper proposes a biodegradable polymer (Poly Lactic Acid, called as PLA) needle having a trench for collecting blood. A solid micro needle of polymer can be fabricated by micromolding method. However, a hollow needle is difficult to be fabricated by this method. It is also difficult to fabricate a long hole with ultra high aspect ratio along the centerline of a micromolded needle. On the other hand, it is comparatively easy to fabricate a trench on a needle surface. Blood runs up along this trench by capillary force, which realizes simple and easy blood collection without pumping mechanism. A needle with straight shank is fabricated by contriving wet etching method of a groove on a silicon die. A trench is fabricated on the top surface of the needle by laser micromachining. The performance of collecting blood of this needle is experimentally evaluated.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"236 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116329330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627850
K. Naka, T. Hashishin, J. Tamaki, S. Konishi
This paper deals with a pyrolyzed polymer as a kind of carbon materials obtained by pyrolysis of polymers. Through the combination of micromachining of polymers and following pyrolysis process, we can obtain pyrolyzed polymer MEMS structures for various applications. This work focuses on pyrolyzed polymer as an absorbent of nitrogen dioxide sensor. The resistance of the developed sensor was dramatically decreased when the sensor was exposed to the NO2mixture gas. Through evaluations of dependence on pyrolysis temperature and operating temperature, it is found that higher pyrolysis temperature and higher operating temperature contribute to higher sensitivity against gas mixture of NO2.
{"title":"Pyrolyzed Polymer as Absorbent of Nitrogen Dioxide Sensor","authors":"K. Naka, T. Hashishin, J. Tamaki, S. Konishi","doi":"10.1109/MEMSYS.2006.1627850","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627850","url":null,"abstract":"This paper deals with a pyrolyzed polymer as a kind of carbon materials obtained by pyrolysis of polymers. Through the combination of micromachining of polymers and following pyrolysis process, we can obtain pyrolyzed polymer MEMS structures for various applications. This work focuses on pyrolyzed polymer as an absorbent of nitrogen dioxide sensor. The resistance of the developed sensor was dramatically decreased when the sensor was exposed to the NO2mixture gas. Through evaluations of dependence on pyrolysis temperature and operating temperature, it is found that higher pyrolysis temperature and higher operating temperature contribute to higher sensitivity against gas mixture of NO2.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121493047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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