Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627816
A. Yamamoto, T. Nakajima, K. Kudoh, T. Higuchi
This paper reports on a droplet transportation technology in liquid nitrogen for cryopreserved biological cell processing. The technology can directly transport frozen droplets in liquid nitrogen by electrostatic force. Low-frequency voltage is utilized to realize synchronous transportation, and thus positioning control can be easily realized. Transportation characteristics were investigated using frozen droplets of 0.3 M mannitol solution, Fluorinert FC-77, and deionized water in liquid nitrogen. The detailed motion measurement using mannitol solution confirmed that a frozen droplet is positioned at a point where electrostatic field is strongest and that a droplet motion is synchronized with the movement of generated electrostatic field.
{"title":"Direct Electrostatic Transportation of Frozen Droplets in Liquid Nitrogen for Single Cryopreserved Cell Processing","authors":"A. Yamamoto, T. Nakajima, K. Kudoh, T. Higuchi","doi":"10.1109/MEMSYS.2006.1627816","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627816","url":null,"abstract":"This paper reports on a droplet transportation technology in liquid nitrogen for cryopreserved biological cell processing. The technology can directly transport frozen droplets in liquid nitrogen by electrostatic force. Low-frequency voltage is utilized to realize synchronous transportation, and thus positioning control can be easily realized. Transportation characteristics were investigated using frozen droplets of 0.3 M mannitol solution, Fluorinert FC-77, and deionized water in liquid nitrogen. The detailed motion measurement using mannitol solution confirmed that a frozen droplet is positioned at a point where electrostatic field is strongest and that a droplet motion is synchronized with the movement of generated electrostatic field.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114720552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627930
Y. Tung, K. Kurabayashi
This paper reports on a dynamic focus micro-lens capable of multiple degree-of-freedom motions. The whole device structure incorporates a SU-8 micro-lens, a three-dimensional (3-D) polydimethylsiloxane (PDMS) microstructure, and single-layer of silicon microactuators. The device fabrication is based on our previously developed fabrication method named “ Soft-Lithographic Lift-Off and Grafting (SLLOG).” The SLLOG process allows soft lithographically molded PDMS microstructures to be integrated together with silicon micromachined device patterns. The SU-8 photoresist is then formed in a lens shape on the top surface of PDMS microstructure by surface tension-driven self-formation. The developed PDMS/silicon hybrid device translates the in-plane motion of silicon comb drives into five-degree-of-freedom dynamic focus motion with fast response by taking advantage of the mechanical compliance of PDMS structures. The multiple degree-of-freedom and simple structure design may lead to high-yield high-performance dynamic focus micro-lens technology.
{"title":"A Single-Layer Multiple Degree-Of-Freedom PDMS-On-Silicon Dynamic Focus Micro-Lens","authors":"Y. Tung, K. Kurabayashi","doi":"10.1109/MEMSYS.2006.1627930","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627930","url":null,"abstract":"This paper reports on a dynamic focus micro-lens capable of multiple degree-of-freedom motions. The whole device structure incorporates a SU-8 micro-lens, a three-dimensional (3-D) polydimethylsiloxane (PDMS) microstructure, and single-layer of silicon microactuators. The device fabrication is based on our previously developed fabrication method named “ Soft-Lithographic Lift-Off and Grafting (SLLOG).” The SLLOG process allows soft lithographically molded PDMS microstructures to be integrated together with silicon micromachined device patterns. The SU-8 photoresist is then formed in a lens shape on the top surface of PDMS microstructure by surface tension-driven self-formation. The developed PDMS/silicon hybrid device translates the in-plane motion of silicon comb drives into five-degree-of-freedom dynamic focus motion with fast response by taking advantage of the mechanical compliance of PDMS structures. The multiple degree-of-freedom and simple structure design may lead to high-yield high-performance dynamic focus micro-lens technology.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"211 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127604539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627888
S. E. Alper, I. Ocak, T. Akin
This paper presents a 240 µ m-thick nickel microgyroscope with a lateral aspect ratio greater than 100, fabricated using the EFAB TM commercial multi-layer additive electroforming process. The fabricated gyroscope demonstrates a measured mechanical sensitivity of 65 µ V/(deg/sec) and a noise-equivalent rate of 0.086deg/sec at atmospheric pressure in a measurement bandwidth of 1Hz, using a capacitive interface circuit constructed from off-the-shelf components. The gyroscope’s measurement bandwidth approaches to 100Hz. The variation of the drive-mode resonance frequency is measured to be better than 0.1% within 40 hours period, demonstrating the reliability of the electroformed nickel of the EFAB TM process. The gyroscope is sensitive to rotations about an in-plane axis, and therefore, allows implementation of a two-axis rate sensor on the same substrate.
{"title":"Ultra-Thick and High-Aspect-Ratio Nickel Microgyroscope Using EFAB TM Multi-Layer Additive Electroforming","authors":"S. E. Alper, I. Ocak, T. Akin","doi":"10.1109/MEMSYS.2006.1627888","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627888","url":null,"abstract":"This paper presents a 240 µ m-thick nickel microgyroscope with a lateral aspect ratio greater than 100, fabricated using the EFAB TM commercial multi-layer additive electroforming process. The fabricated gyroscope demonstrates a measured mechanical sensitivity of 65 µ V/(deg/sec) and a noise-equivalent rate of 0.086deg/sec at atmospheric pressure in a measurement bandwidth of 1Hz, using a capacitive interface circuit constructed from off-the-shelf components. The gyroscope’s measurement bandwidth approaches to 100Hz. The variation of the drive-mode resonance frequency is measured to be better than 0.1% within 40 hours period, demonstrating the reliability of the electroformed nickel of the EFAB TM process. The gyroscope is sensitive to rotations about an in-plane axis, and therefore, allows implementation of a two-axis rate sensor on the same substrate.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127618472","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627771
Xuefeng Wang, L. Vincent, Chang Liu
This paper reports a new scanning nanolithography probe with spring-on-tip design. Conventional scanning probes consist of cantilevers with tips at distal ends. The cantilevers provide necessary spring softness for the tips. Unlike traditional pyramidal-shaped scanning tips with solid faces, the sidewalls of the new reported tips are modified to contain folded spring structures to reduce the overall force constants of the scanning probes. We used nano-resolution focused ion beam milling to modify micrometer-sized solid faces of traditional tips. This allows greater tip integration density while achieving low force constants. Designs are optimized using finite element simulation. We also demonstrated sub-100-nm scanning probe lithography using such nanolithography probes.
{"title":"Spring-On-Tip Nanolithography Probes","authors":"Xuefeng Wang, L. Vincent, Chang Liu","doi":"10.1109/MEMSYS.2006.1627771","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627771","url":null,"abstract":"This paper reports a new scanning nanolithography probe with spring-on-tip design. Conventional scanning probes consist of cantilevers with tips at distal ends. The cantilevers provide necessary spring softness for the tips. Unlike traditional pyramidal-shaped scanning tips with solid faces, the sidewalls of the new reported tips are modified to contain folded spring structures to reduce the overall force constants of the scanning probes. We used nano-resolution focused ion beam milling to modify micrometer-sized solid faces of traditional tips. This allows greater tip integration density while achieving low force constants. Designs are optimized using finite element simulation. We also demonstrated sub-100-nm scanning probe lithography using such nanolithography probes.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127694372","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627767
N. Matsuzuka, Y. Hirai, O. Tabata
This article describes an analytical method of predicting a processed structural shape by a double exposure technique in deep X-ray lithography (D2XRL). Firstly, the concept of calculating the processed shape efficiently by simple equations was considered. Secondly, important functions composing the simple equations, i.e., absorbed dose as a function of depth and dissolution rate as a function of absorbed dose, were experimentally determined with high accuracy by a newly proposed method. Lastly, the processed shape was predicted by the analytical method. By comparing the predicted result with the experimental one under the same condition, we confirmed that the processed shape was predicted with acceptable accuracy.
{"title":"Prediction Method of 3-D Shape Fabricated by Double Exposure Technique in Deep X-Ray Lithography (D2XRL)","authors":"N. Matsuzuka, Y. Hirai, O. Tabata","doi":"10.1109/MEMSYS.2006.1627767","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627767","url":null,"abstract":"This article describes an analytical method of predicting a processed structural shape by a double exposure technique in deep X-ray lithography (D2XRL). Firstly, the concept of calculating the processed shape efficiently by simple equations was considered. Secondly, important functions composing the simple equations, i.e., absorbed dose as a function of depth and dissolution rate as a function of absorbed dose, were experimentally determined with high accuracy by a newly proposed method. Lastly, the processed shape was predicted by the analytical method. By comparing the predicted result with the experimental one under the same condition, we confirmed that the processed shape was predicted with acceptable accuracy.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129976738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627832
L. Rowe, M. McClain, M. Almasri, K. Lee, A. B. Frazier
This paper presents a novel 3-D scaffold for culturing thick in vitro brain slices. The microscaffold consists of a 12x12 array of spiked SU-8 microtowers with integrated fluidic properties for nutrient delivery and electrodes for stimulation/recording to the thick in vitro brain slice cultured on the system. Design, fabrication, and packaging of the brain slice scaffold are presented. Additionally, increased cell viability data from thick (> 400pm) in vitro brain slices cultured on a PDMS and glass capillary microperfusion system is presented. The nutrient/fluid delivery properties of both the glass capillary microperfusion system and the presented brain slice scaffold allow for increased integrity and viability of thick brain slices.
{"title":"A 3-D Microfluidic/Electronic Scaffold for Increased Viability and Analysis of Thick in Vitro Brain Slices","authors":"L. Rowe, M. McClain, M. Almasri, K. Lee, A. B. Frazier","doi":"10.1109/MEMSYS.2006.1627832","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627832","url":null,"abstract":"This paper presents a novel 3-D scaffold for culturing thick in vitro brain slices. The microscaffold consists of a 12x12 array of spiked SU-8 microtowers with integrated fluidic properties for nutrient delivery and electrodes for stimulation/recording to the thick in vitro brain slice cultured on the system. Design, fabrication, and packaging of the brain slice scaffold are presented. Additionally, increased cell viability data from thick (> 400pm) in vitro brain slices cultured on a PDMS and glass capillary microperfusion system is presented. The nutrient/fluid delivery properties of both the glass capillary microperfusion system and the presented brain slice scaffold allow for increased integrity and viability of thick brain slices.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"128 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134518709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627804
W. Song, H. Kim, C. Son, B. Ziaie
In this paper, we report a new and simple fabrication method for 3-D polymeric microstructures using low viscosity mineral oil-based ferrofluids in combination with polydimethylsiloxane (PDMS) and UV curable epoxy. The diameter and height of ferrofluid spikes/domes which usually form upon the application of a magnetic field was controlled by a micromachined membrane having holes of various dimensions. Holes or various dimensions (60, 100, and 200 µ m) were fabricated in a thin silicon membrane covering a ferrofluid reservoir. The heights of fabricated polymeric microstructures corresponding to the above mentioned hole sizes were equal to the hole diameters, while their base diameters were reduced by 10-30%. This approach provides a new technique to easily fabricate various size 3-D micro-structures on the same plane by controlling the magnetic field strength, ferrofluid viscosity, and hole dimensions.
{"title":"Fabrication of Polymeric 3-D Micro-Structures Using Ferrofluid Molds","authors":"W. Song, H. Kim, C. Son, B. Ziaie","doi":"10.1109/MEMSYS.2006.1627804","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627804","url":null,"abstract":"In this paper, we report a new and simple fabrication method for 3-D polymeric microstructures using low viscosity mineral oil-based ferrofluids in combination with polydimethylsiloxane (PDMS) and UV curable epoxy. The diameter and height of ferrofluid spikes/domes which usually form upon the application of a magnetic field was controlled by a micromachined membrane having holes of various dimensions. Holes or various dimensions (60, 100, and 200 µ m) were fabricated in a thin silicon membrane covering a ferrofluid reservoir. The heights of fabricated polymeric microstructures corresponding to the above mentioned hole sizes were equal to the hole diameters, while their base diameters were reduced by 10-30%. This approach provides a new technique to easily fabricate various size 3-D micro-structures on the same plane by controlling the magnetic field strength, ferrofluid viscosity, and hole dimensions.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130770956","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627846
T. Leong, Hongke Ye, E. Call, B. Gimi, Z. Bhujwalla, D. Gracias
This paper reports a novel method for fabricating three dimensional (3D) metallic micropatterned boxes by self-assembly of two dimensional (2D) precursors. A 3D micropatterned device has several advantages over its two dimensional (2D) counterpart—a larger surface area to volume ratio, thereby maximizing interactions with the surrounding medium and providing space to mount different electromechanical modules, and a finite volume allowing encapsulation of functional elements. The microboxes can be constructed in different sizes with perforations on either one or on all faces. We demonstrate encapsulation of gels and polymers within the boxes, and release of chemicals by heating. We envision the use of these boxes in cellular encapsulation and remote release of drugs and biological media in-vitro and in-vivo.
{"title":"Microfabrication and Self-Assembly of 3D Microboxes for Biomedical Applications","authors":"T. Leong, Hongke Ye, E. Call, B. Gimi, Z. Bhujwalla, D. Gracias","doi":"10.1109/MEMSYS.2006.1627846","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627846","url":null,"abstract":"This paper reports a novel method for fabricating three dimensional (3D) metallic micropatterned boxes by self-assembly of two dimensional (2D) precursors. A 3D micropatterned device has several advantages over its two dimensional (2D) counterpart—a larger surface area to volume ratio, thereby maximizing interactions with the surrounding medium and providing space to mount different electromechanical modules, and a finite volume allowing encapsulation of functional elements. The microboxes can be constructed in different sizes with perforations on either one or on all faces. We demonstrate encapsulation of gels and polymers within the boxes, and release of chemicals by heating. We envision the use of these boxes in cellular encapsulation and remote release of drugs and biological media in-vitro and in-vivo.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131011728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627936
H. Ra, Y. Taguchi, D. Lee, W. Piyawattanametha, O. Solgaard
This paper presents a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. A gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The imaging capability of the MEMS mirror is successfully demonstrated in a breadboard setup. Reflectance images with a field of view (FOV) of 344 μm × 417 μm are achieved at 8 frames per second. The transverse resolution is 3.94 μm and 6.68 μm for the horizontal and vertical dimensions, respectively.
{"title":"Two-Dimensional MEMS Scanner for Dual-Axes Confocal in Vivo Microscopy","authors":"H. Ra, Y. Taguchi, D. Lee, W. Piyawattanametha, O. Solgaard","doi":"10.1109/MEMSYS.2006.1627936","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627936","url":null,"abstract":"This paper presents a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. A gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The imaging capability of the MEMS mirror is successfully demonstrated in a breadboard setup. Reflectance images with a field of view (FOV) of 344 μm × 417 μm are achieved at 8 frames per second. The transverse resolution is 3.94 μm and 6.68 μm for the horizontal and vertical dimensions, respectively.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"153 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131126525","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627917
A. Geipel, A. Doll, F. Goldschmidtboing, P. Jantscheff, N. Esser, U. Massing, P. Woias
We present - for the first time - a novel design of a micropump which enables a backpressure-independent flow rate up to 20 kPa within the low flow regime required for drug delivery systems. Our concept, based on two piezoelectrically actuated diaphragms, allows an accurate dosing in the range of 1 - 50 µ l/min with freely programmable release profiles and offers the potential to minimize chip size and power consumption in comparison to 3-actuator peristaltic micropumps. The stroke volume is adjustable between 50 - 200 nl by means of voltage control which enables a high resolution volumetric dosing. Within the relevant frequency range below 2 Hz the flow rate is proportional to the frequency. Our design also excels in its comparably simple and robust 2-layer fabrication process.
{"title":"Pressure-Independent Micropump with Piezoelectric Valves for Low Flow Drug Delivery Systems","authors":"A. Geipel, A. Doll, F. Goldschmidtboing, P. Jantscheff, N. Esser, U. Massing, P. Woias","doi":"10.1109/MEMSYS.2006.1627917","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627917","url":null,"abstract":"We present - for the first time - a novel design of a micropump which enables a backpressure-independent flow rate up to 20 kPa within the low flow regime required for drug delivery systems. Our concept, based on two piezoelectrically actuated diaphragms, allows an accurate dosing in the range of 1 - 50 µ l/min with freely programmable release profiles and offers the potential to minimize chip size and power consumption in comparison to 3-actuator peristaltic micropumps. The stroke volume is adjustable between 50 - 200 nl by means of voltage control which enables a high resolution volumetric dosing. Within the relevant frequency range below 2 Hz the flow rate is proportional to the frequency. Our design also excels in its comparably simple and robust 2-layer fabrication process.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133618606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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