Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688482
E. Mazzotta, C. Malitesta, S. Surdo, G. Barillaro
Light-activated electropolymerization on micromachined n-type silicon is here demonstrated to be a versatile route for microstructuring conducting polymers (CPs) and CP-based Molecularly Imprinted Polymers (MIPs). Several CPs - namely polypyrrole (PPy), poly(3,4-ethylendioxythiophene) (PEDOT), poly(3-methylthiophene) (P3MT), polythiophene (PT) - and a PPy-based MIP have been deposited on different microstructured n-type silicon templates featuring ordered-array of pores with variable aspect-ratio (AR) between 1 and 10. CP and MIP microtubes with size of a few micrometers, height from 5 up to 50 micrometers, and period of a few micrometers are successfully synthesized by replication of the silicon template features with submicrometer accuracy, as demonstrated by scanning electron microscopy (SEM). A significant electroactivity increase is observed for CP microtubes thanks to the augmented surface of microstructured films, as highlighted by cyclic voltammetry (CV), thus demonstrating that the entire microstructured polymer surface is effectively involved in electrochemical redox processes. PPy-based MIPs for the antibiotic sulfadimethoxine (SDM) exhibit good sensing properties in SDM electrochemical detection, with current responses notably higher than Not-Imprinted Polymers (NIPs). A significant current response increase on microstructured MIPs with respect to the flat ones is also verified.
{"title":"Microstructuring conducting polymers and molecularly imprinted polymers by light-activated electropolymerization on micromachined silicon. Applications in electrochemical sensing","authors":"E. Mazzotta, C. Malitesta, S. Surdo, G. Barillaro","doi":"10.1109/ICSENS.2013.6688482","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688482","url":null,"abstract":"Light-activated electropolymerization on micromachined n-type silicon is here demonstrated to be a versatile route for microstructuring conducting polymers (CPs) and CP-based Molecularly Imprinted Polymers (MIPs). Several CPs - namely polypyrrole (PPy), poly(3,4-ethylendioxythiophene) (PEDOT), poly(3-methylthiophene) (P3MT), polythiophene (PT) - and a PPy-based MIP have been deposited on different microstructured n-type silicon templates featuring ordered-array of pores with variable aspect-ratio (AR) between 1 and 10. CP and MIP microtubes with size of a few micrometers, height from 5 up to 50 micrometers, and period of a few micrometers are successfully synthesized by replication of the silicon template features with submicrometer accuracy, as demonstrated by scanning electron microscopy (SEM). A significant electroactivity increase is observed for CP microtubes thanks to the augmented surface of microstructured films, as highlighted by cyclic voltammetry (CV), thus demonstrating that the entire microstructured polymer surface is effectively involved in electrochemical redox processes. PPy-based MIPs for the antibiotic sulfadimethoxine (SDM) exhibit good sensing properties in SDM electrochemical detection, with current responses notably higher than Not-Imprinted Polymers (NIPs). A significant current response increase on microstructured MIPs with respect to the flat ones is also verified.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"2021 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128047062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688382
Weidong Zhang, E. Brown, L. Viveros
A terahertz (THz) conical horn waveguide coupler was designed, fabricated, and tested for analysis of THz (100-1700GHz) vibrational modes of chemical and biological materials with small mass (<;1mg) or small volume (<;0.1μL). The waveguide concentrates THz fields, which excite stronger interactions with the samples. As examples the spectra of lactose, thymine, Bacillus thuringiensis and E. coli are presented.
{"title":"Terahertz conical horn waveguide coupler for spectroscopic analysis of biomaterials","authors":"Weidong Zhang, E. Brown, L. Viveros","doi":"10.1109/ICSENS.2013.6688382","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688382","url":null,"abstract":"A terahertz (THz) conical horn waveguide coupler was designed, fabricated, and tested for analysis of THz (100-1700GHz) vibrational modes of chemical and biological materials with small mass (<;1mg) or small volume (<;0.1μL). The waveguide concentrates THz fields, which excite stronger interactions with the samples. As examples the spectra of lactose, thymine, Bacillus thuringiensis and E. coli are presented.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134295587","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688450
Amol Singh, Md. A. Uddin, T. Sudarshan, G. Koley
Graphene, a two-dimensional material with a very high charge carrier concentration, is ideal for sensing chemical species based upon charge exchange. The sensitivity of graphene is shown to improve many folds by using graphene/semiconductor heterostructure. A new amperometric chemical sensing paradigm based upon transport across graphene/p-Si Schottky diode under reverse bias is demonstrated in this work. The reported very high sensitivity of graphene/p-Si heterostructure is in direct agreement with small change in Schottky barrier height due to molecular adsorption on graphene causing large change in reverse saturation current due to exponential dependence of later on the former.
{"title":"Gas sensing by graphene/silicon hetrostructure","authors":"Amol Singh, Md. A. Uddin, T. Sudarshan, G. Koley","doi":"10.1109/ICSENS.2013.6688450","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688450","url":null,"abstract":"Graphene, a two-dimensional material with a very high charge carrier concentration, is ideal for sensing chemical species based upon charge exchange. The sensitivity of graphene is shown to improve many folds by using graphene/semiconductor heterostructure. A new amperometric chemical sensing paradigm based upon transport across graphene/p-Si Schottky diode under reverse bias is demonstrated in this work. The reported very high sensitivity of graphene/p-Si heterostructure is in direct agreement with small change in Schottky barrier height due to molecular adsorption on graphene causing large change in reverse saturation current due to exponential dependence of later on the former.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"29 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134260184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688536
S. Clara, H. Antlinger, W. Hilber, B. Jakoby
We present the operation of a previously introduced orbiting sphere viscometer in resonant mode at small amplitudes to demonstrate the feasibility of miniaturization. In chemical processes control, often comparability of novel viscosity measurement and sensing principles with well-established principles is essential since the measured viscosity crucially depends on the measurement parameters utilized (e.g., shear rate, oscillation frequency, etc.). The orbiting sphere viscometer on one hand mimics the falling ball principle and on the other hand extends its properties. It can be operated in an orbiting mode which, for large radii, reproduces the interaction of a linearly moving sphere with the surrounding liquid. For smaller amplitudes, the interaction is more comparable to other oscillating viscometer principles. In the present paper, we focus on this latter mode of operation, show its feasibility and present according sample results.
{"title":"Orbiting sphere viscometer operated in resonant orbiting mode","authors":"S. Clara, H. Antlinger, W. Hilber, B. Jakoby","doi":"10.1109/ICSENS.2013.6688536","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688536","url":null,"abstract":"We present the operation of a previously introduced orbiting sphere viscometer in resonant mode at small amplitudes to demonstrate the feasibility of miniaturization. In chemical processes control, often comparability of novel viscosity measurement and sensing principles with well-established principles is essential since the measured viscosity crucially depends on the measurement parameters utilized (e.g., shear rate, oscillation frequency, etc.). The orbiting sphere viscometer on one hand mimics the falling ball principle and on the other hand extends its properties. It can be operated in an orbiting mode which, for large radii, reproduces the interaction of a linearly moving sphere with the surrounding liquid. For smaller amplitudes, the interaction is more comparable to other oscillating viscometer principles. In the present paper, we focus on this latter mode of operation, show its feasibility and present according sample results.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"10 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134064658","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688426
A. Attar, Shantia Yarahmadian, S. Samavi
The issue of Coverage in visual sensor networks (VSNs) has attracted considerable attention due to sensors directional sensing characteristic. It answers the question that how well the target field is monitored by a network of sensors with video/image capturing capability. In floorplan scenario the network is to monitor a plane parallel to the sensors' deployment plane. For large scale applications in which the sensors' deployment is done by dropping sensors, random sensors' placement and orientation according to their respective distribution is a practical assumption. Although some studies exist on the coverage problem of floorplan VSNs, none of them has derived an analytical expression for stochastic coverage based on both the sensors and the network related parameters, which is the main contribution of this paper. We consider the heterogeneous sensing model, where sensors need not have an identical sensing capability. The proposed mathematical frame work is validated by simulation results.
{"title":"Coverage estimation in heterogenous floorplan visual sensor networks","authors":"A. Attar, Shantia Yarahmadian, S. Samavi","doi":"10.1109/ICSENS.2013.6688426","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688426","url":null,"abstract":"The issue of Coverage in visual sensor networks (VSNs) has attracted considerable attention due to sensors directional sensing characteristic. It answers the question that how well the target field is monitored by a network of sensors with video/image capturing capability. In floorplan scenario the network is to monitor a plane parallel to the sensors' deployment plane. For large scale applications in which the sensors' deployment is done by dropping sensors, random sensors' placement and orientation according to their respective distribution is a practical assumption. Although some studies exist on the coverage problem of floorplan VSNs, none of them has derived an analytical expression for stochastic coverage based on both the sensors and the network related parameters, which is the main contribution of this paper. We consider the heterogeneous sensing model, where sensors need not have an identical sensing capability. The proposed mathematical frame work is validated by simulation results.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114729465","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688367
Samuel MacNaughton, S. Sonkusale
We propose a “CMOS for nanoassembly” method to assemble carbon nanotubes and graphene on CMOS chip for gas sensing application. CNT's and graphene have been demonstrated as extremely sensitive chemiresistors for a wide range of analytes. The upper metal layers of the CMOS chip contain sixty electrodes of both planar and three-dimensional geometries. Each electrode is addressable through on chip circuitry. The electrodes are fully exposed by post-process dry etching. Chemiresistive assemblies of nanoscale single wall carbon nanotubes (SWNTs) and reduced graphene oxide (rGO) flakes are assembled onto the exposed electrodes by controlled dielectrophoresis (DEP), which is the motion of a polarizable particle in a dielectric medium. The utility of the platform is shown for gas sensing. To the best of our knowledge, this is the first time functional graphene and carbon nanotubes sensor elements have been integrated onto a single CMOS chip. Previous results indicate that the expansion of the chip to include other chemiresistive nanomaterials is entirely feasible.
{"title":"A CMOS platform for the integration of heterogeneous arrays of carbon nanotubes and graphene chemiresistors","authors":"Samuel MacNaughton, S. Sonkusale","doi":"10.1109/ICSENS.2013.6688367","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688367","url":null,"abstract":"We propose a “CMOS for nanoassembly” method to assemble carbon nanotubes and graphene on CMOS chip for gas sensing application. CNT's and graphene have been demonstrated as extremely sensitive chemiresistors for a wide range of analytes. The upper metal layers of the CMOS chip contain sixty electrodes of both planar and three-dimensional geometries. Each electrode is addressable through on chip circuitry. The electrodes are fully exposed by post-process dry etching. Chemiresistive assemblies of nanoscale single wall carbon nanotubes (SWNTs) and reduced graphene oxide (rGO) flakes are assembled onto the exposed electrodes by controlled dielectrophoresis (DEP), which is the motion of a polarizable particle in a dielectric medium. The utility of the platform is shown for gas sensing. To the best of our knowledge, this is the first time functional graphene and carbon nanotubes sensor elements have been integrated onto a single CMOS chip. Previous results indicate that the expansion of the chip to include other chemiresistive nanomaterials is entirely feasible.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117284412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688399
C. Je, Jaewoo Lee, Woo-Seok Yang, Jong-Kee Kwon
We present a new surface micromachined MEMS capacitive microphone with improved frequency response and high sensitivity. The proposed MEMS microphone has a top back-plate with a bottom sensing membrane and the back-plate is supported by supporting pillars which are anchored to the bottom of the deep back chamber. The back-plate supporting pillars increase the stiffness of the back-plate and prevent deformation. A present surface micromachined MEMS capacitive microphone is fabricated using fully CMOS compatible processes. It has a thin metal membrane of 500 μm diameter, a sensing air gap of 2.5 μm and seven back-plate supporting pillars. A 100 μm deep back chamber is formed by xenon difluoride dry etching of silicon substrate. As a result, the proposed microphone shows a flat frequency response and high open-circuit sensitivity. It shows a measured zero-bias capacitance of 1.0 pF and a pull-in voltage of 11.0 V, and an open-circuit sensitivity of 10.37 mV/Pa on a DC bias of 6.0 V.
{"title":"A surface micromachined MEMS capacitive microphone with back-plate supporting pillars","authors":"C. Je, Jaewoo Lee, Woo-Seok Yang, Jong-Kee Kwon","doi":"10.1109/ICSENS.2013.6688399","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688399","url":null,"abstract":"We present a new surface micromachined MEMS capacitive microphone with improved frequency response and high sensitivity. The proposed MEMS microphone has a top back-plate with a bottom sensing membrane and the back-plate is supported by supporting pillars which are anchored to the bottom of the deep back chamber. The back-plate supporting pillars increase the stiffness of the back-plate and prevent deformation. A present surface micromachined MEMS capacitive microphone is fabricated using fully CMOS compatible processes. It has a thin metal membrane of 500 μm diameter, a sensing air gap of 2.5 μm and seven back-plate supporting pillars. A 100 μm deep back chamber is formed by xenon difluoride dry etching of silicon substrate. As a result, the proposed microphone shows a flat frequency response and high open-circuit sensitivity. It shows a measured zero-bias capacitance of 1.0 pF and a pull-in voltage of 11.0 V, and an open-circuit sensitivity of 10.37 mV/Pa on a DC bias of 6.0 V.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115915495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688314
Tyler Shake, V. Srinivasaraghavan, P. Zellner, M. Agah
In this paper, we introduce a new embedded passivated-electrode insulator-based dielectrophoresis (EπDEP) device for cell manipulation. This device maximizes the electric field strength in the microfluidic channel by reducing the thickness of the passivation layer to 5μm. The devices are made by polymer molding using 3D glass molds fabricated by melting glass into features created by the RIE-lag technique on silicon. This paper demonstrates the trapping of MDA-MB-468 mammary cancer cells using EπDEP technology with very high efficiency (97%).
{"title":"Mammary cancer cell manipulation with embedded passivated-electrode insulator-based dielctrophoresis (EπDEP)","authors":"Tyler Shake, V. Srinivasaraghavan, P. Zellner, M. Agah","doi":"10.1109/ICSENS.2013.6688314","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688314","url":null,"abstract":"In this paper, we introduce a new embedded passivated-electrode insulator-based dielectrophoresis (EπDEP) device for cell manipulation. This device maximizes the electric field strength in the microfluidic channel by reducing the thickness of the passivation layer to 5μm. The devices are made by polymer molding using 3D glass molds fabricated by melting glass into features created by the RIE-lag technique on silicon. This paper demonstrates the trapping of MDA-MB-468 mammary cancer cells using EπDEP technology with very high efficiency (97%).","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124928734","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688203
A. C. Peixoto, S. B. Goncalves, A. F. Silva, N. Dias, J. Correia
This paper presents a simple and cost-effective fabrication method of invasive neural microelectrode arrays based on aluminum, which is a viable alternative to other state-of-the-art technologies that rely primarily on silicon. A 10 × 10 array with 3.0 mm deep reaching pillars were fabricated, each having a pyramidal tip profile. Each aluminum pillar is insulated with a biocompatible layer of aluminum oxide. The electrode tip was covered by an iridium oxide thin-film layer via pulsed sputtering, providing a stable and a reversible behavior for recording/stimulation purposes, each with a 145 Ohm impedance in a wide frequency range of interest (10 Hz-100 kHz). Each pillar is electrically individualized from the adjacent ones by an insulating layer of epoxy resin. High-aspect-ratio pillars (20:1) are achieved through a combination of dicing, thin-film deposition, anodizing and wet-etching. The described approach allows an array of deeper penetrating electrodes and a simpler fabrication procedure when compared to previous works.
{"title":"3 mm Deep microelectrode needle array based on aluminum for neural applications","authors":"A. C. Peixoto, S. B. Goncalves, A. F. Silva, N. Dias, J. Correia","doi":"10.1109/ICSENS.2013.6688203","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688203","url":null,"abstract":"This paper presents a simple and cost-effective fabrication method of invasive neural microelectrode arrays based on aluminum, which is a viable alternative to other state-of-the-art technologies that rely primarily on silicon. A 10 × 10 array with 3.0 mm deep reaching pillars were fabricated, each having a pyramidal tip profile. Each aluminum pillar is insulated with a biocompatible layer of aluminum oxide. The electrode tip was covered by an iridium oxide thin-film layer via pulsed sputtering, providing a stable and a reversible behavior for recording/stimulation purposes, each with a 145 Ohm impedance in a wide frequency range of interest (10 Hz-100 kHz). Each pillar is electrically individualized from the adjacent ones by an insulating layer of epoxy resin. High-aspect-ratio pillars (20:1) are achieved through a combination of dicing, thin-film deposition, anodizing and wet-etching. The described approach allows an array of deeper penetrating electrodes and a simpler fabrication procedure when compared to previous works.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123141101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688335
C. Carron, P. Getz, J.-J. Su, D. Gottfried, O. Brand, F. Josse, Stephen M. Heinrich
This work presents mass-sensitive hammerhead resonators with integrated recesses as a gas-phase chemical microsensor platform. Recesses are etched into the head region of the resonator to locally deposit chemically sensitive polymers by ink-jet printing. This permits the sensing films to be confined to areas that (a) are most effective in detecting mass loading and (b) are not strained during the in-plane vibrations of the resonator. As a result of the second point, even 5-μm thick polymer coatings on resonators with a 9-12 μm silicon thickness barely affect the Q-factor in air. This translates into higher frequency stability and ultimately higher sensor resolution compared to uniformly coated devices.
{"title":"Cantilever-based resonant gas sensors with integrated recesses for localized sensing layer deposition","authors":"C. Carron, P. Getz, J.-J. Su, D. Gottfried, O. Brand, F. Josse, Stephen M. Heinrich","doi":"10.1109/ICSENS.2013.6688335","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688335","url":null,"abstract":"This work presents mass-sensitive hammerhead resonators with integrated recesses as a gas-phase chemical microsensor platform. Recesses are etched into the head region of the resonator to locally deposit chemically sensitive polymers by ink-jet printing. This permits the sensing films to be confined to areas that (a) are most effective in detecting mass loading and (b) are not strained during the in-plane vibrations of the resonator. As a result of the second point, even 5-μm thick polymer coatings on resonators with a 9-12 μm silicon thickness barely affect the Q-factor in air. This translates into higher frequency stability and ultimately higher sensor resolution compared to uniformly coated devices.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"295 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123186571","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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