Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472576
Torsten Gerlach, H. Wurmus
Dynamic micropumps employing pyramid-trunc shaped diffusers as dynamic passive valves have been developed, built and tested. They are particularly characterized by a very simple fabrication technology and good high frequency performance. A prototype being 5*5*lmm/sup 3/ in size reached with methanol a zero load pump rate of more than 300 /spl mu/l/min and a maximum pump pressure of about 7 kPa at 5 kHz working frequency. Dynamic micropumps can, therefore, compete with known solutions of similar or even bigger size. The direction-dependent behaviour of silicon microdiffusers have been experimentally investigated; the results are discussed. Based on the found characteristics, a static model for dynamic membrane pumps has been derived. The calculated parameters match quite well the real values of different tested micropumps. By the static model, pump layout adapted to the demanded application becomes easier.
{"title":"Working principle and performance of the dynamic micropump","authors":"Torsten Gerlach, H. Wurmus","doi":"10.1109/MEMSYS.1995.472576","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472576","url":null,"abstract":"Dynamic micropumps employing pyramid-trunc shaped diffusers as dynamic passive valves have been developed, built and tested. They are particularly characterized by a very simple fabrication technology and good high frequency performance. A prototype being 5*5*lmm/sup 3/ in size reached with methanol a zero load pump rate of more than 300 /spl mu/l/min and a maximum pump pressure of about 7 kPa at 5 kHz working frequency. Dynamic micropumps can, therefore, compete with known solutions of similar or even bigger size. The direction-dependent behaviour of silicon microdiffusers have been experimentally investigated; the results are discussed. Based on the found characteristics, a static model for dynamic membrane pumps has been derived. The calculated parameters match quite well the real values of different tested micropumps. By the static model, pump layout adapted to the demanded application becomes easier.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132212012","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472607
G. Burger, T. Lammerink, J. Fluitman, S. Imai, M. Tokuyama, S. Hirose
This paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly is flying above the rotating disk with a typical spacing of 100nm. Possible mechanical interactions between the slider and the disk are expected to produce impact forces in the order of 0.1N with a frequency range from 100kHz to 100MHz [1].
{"title":"Piezoelectric impact force sensor array for tribological research on rigid disk storage media","authors":"G. Burger, T. Lammerink, J. Fluitman, S. Imai, M. Tokuyama, S. Hirose","doi":"10.1109/MEMSYS.1995.472607","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472607","url":null,"abstract":"This paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly is flying above the rotating disk with a typical spacing of 100nm. Possible mechanical interactions between the slider and the disk are expected to produce impact forces in the order of 0.1N with a frequency range from 100kHz to 100MHz [1].","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129756399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472582
A. Both, W. Bacher, M. Heckele, K. Muller, R. Ruprecht, M. Strohrmann
{"title":"Molding process with high alignment precision for the LIGA technology","authors":"A. Both, W. Bacher, M. Heckele, K. Muller, R. Ruprecht, M. Strohrmann","doi":"10.1109/MEMSYS.1995.472582","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472582","url":null,"abstract":"","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128849985","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472552
F. M. Moesner, T. Higuchi
Devices for particle handling using an AC electric field are proposed and experimentally validated. With the application of balanced multi- phase high voltage in the 200Vptp to 2kVptp range to a series of encased parallel electrodes with a cen- ter-to-center pitch length of 400pm, particles on a thin protecting and insulating film become charged and are conveyed by the created traveling field. Devices with various novel transportation and ma- nipulation features, utilizing multi-phase AC electric fields that instantly generate particle driving forces, have been designed and produced. Their features include newly developed methods for particle con- veyance smoothing, grouping, and sorting, as well as two-dimensional handling. Particle conveyance char- aderistics have been studied under the influence of three different voltage profiles and in diverse envi- ronments. Various particle materials with a 5pm to 400pm diameter range have been examined in ex- periments; Fe, AZ, glass, and plastic spheres showed the best performances.
{"title":"Devices for particle handling by an AC electric field","authors":"F. M. Moesner, T. Higuchi","doi":"10.1109/MEMSYS.1995.472552","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472552","url":null,"abstract":"Devices for particle handling using an AC electric field are proposed and experimentally validated. With the application of balanced multi- phase high voltage in the 200Vptp to 2kVptp range to a series of encased parallel electrodes with a cen- ter-to-center pitch length of 400pm, particles on a thin protecting and insulating film become charged and are conveyed by the created traveling field. Devices with various novel transportation and ma- nipulation features, utilizing multi-phase AC electric fields that instantly generate particle driving forces, have been designed and produced. Their features include newly developed methods for particle con- veyance smoothing, grouping, and sorting, as well as two-dimensional handling. Particle conveyance char- aderistics have been studied under the influence of three different voltage profiles and in diverse envi- ronments. Various particle materials with a 5pm to 400pm diameter range have been examined in ex- periments; Fe, AZ, glass, and plastic spheres showed the best performances.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":" 743","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113946947","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1109/MEMSYS.1995.472562
Chang Liu, T. Tsao, Y. Tai, T. Leu, Chih-Ming Ho, Weilong Tang, D. Miu
INTRODUCTION The goal of this project is t o demonstrate that a collection of micro-machined actuators can control a macro object, provided that a proper controlling mechanism exists. In our case, we intend t o use a linear array of out-of-plane magnetic actuators t o crea te a rolling moment on a tail-less delta-wing model, utilizing a known mechanism in delta-wing theory that allows micro actuation to have an amplified, macro effect. A delta-wing is one of the fundamental configurations for generating lift forces and its aerodynamic control is of great importance t o the aeronautics society [1,2]. When laminar air flow hits the two leading edges of the wing at a certain angle-of-attack (30" in our case, Fig. la,b), two counter-rotating leading-edge vortices are separated from the laminar flow and propagate over the wing's top (Fig. IC). These two high-momentum, low-pressure vortices contribute identical vortex lifting forces on the two sides of the wing, the sum of these being -40 % of the total lifting forces. The strength and position of these two vortices are determined by the boundary layer conditions near their separation points. A boundary layer is roughly 1-2 mm thick at a windtunnel flow speed of less than 20 m/s; the thickness will decrease when the flow speed is increased. Two linear arrays of surface micro-machined out-ofplane actuators (micro-flaps) are placed along two leading edges at the bottom of the wing (Fig. Id) . When un-deflected, flap arrays remain a t the bottom of the boundary layer, having no effect on the flow and vortices; when one array is deflected downward, however, it interacts with the boundary layer and changes the separation point of the corresponding leading-edge vortex. The span-wise vortex structures over the top of the wing become unbalanced, and an overall rolling moment can be created. The delta-wing has a 38-cm span and a 67 O top angle; it is tested in a wind-tunnel with a top speed of 20 m/s. Silicon micro-machined actuators are chosen here because of their added advantages of light weight and potentially large bandwidth. To control this wing, micro-flaps are required to deflect 1-2 mm out-of-plane (or t o match the boundary-layer thickness), and withstand large aerodynamic loading on the order of several hundred pN. Magnetic actuation is used because it is known to generate stronger and longer-range forces [3, 4, 51 compared with most other driving methods. Several types of magnetic micro-actuators have been previously demonstrated, but none can readily fulfill the current system requirements. Beneck et . al. [6] performed post-processing manual attachments of permanent magnet pieces on micromachined plates and actuated the magnet with an external magnetic field generated by in-plane coils. The manual assembly is unsuitable for us because a large number of ac-
{"title":"Out-of-plane permalloy magnetic actuators for delta-wing control","authors":"Chang Liu, T. Tsao, Y. Tai, T. Leu, Chih-Ming Ho, Weilong Tang, D. Miu","doi":"10.1109/MEMSYS.1995.472562","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472562","url":null,"abstract":"INTRODUCTION The goal of this project is t o demonstrate that a collection of micro-machined actuators can control a macro object, provided that a proper controlling mechanism exists. In our case, we intend t o use a linear array of out-of-plane magnetic actuators t o crea te a rolling moment on a tail-less delta-wing model, utilizing a known mechanism in delta-wing theory that allows micro actuation to have an amplified, macro effect. A delta-wing is one of the fundamental configurations for generating lift forces and its aerodynamic control is of great importance t o the aeronautics society [1,2]. When laminar air flow hits the two leading edges of the wing at a certain angle-of-attack (30\" in our case, Fig. la,b), two counter-rotating leading-edge vortices are separated from the laminar flow and propagate over the wing's top (Fig. IC). These two high-momentum, low-pressure vortices contribute identical vortex lifting forces on the two sides of the wing, the sum of these being -40 % of the total lifting forces. The strength and position of these two vortices are determined by the boundary layer conditions near their separation points. A boundary layer is roughly 1-2 mm thick at a windtunnel flow speed of less than 20 m/s; the thickness will decrease when the flow speed is increased. Two linear arrays of surface micro-machined out-ofplane actuators (micro-flaps) are placed along two leading edges at the bottom of the wing (Fig. Id) . When un-deflected, flap arrays remain a t the bottom of the boundary layer, having no effect on the flow and vortices; when one array is deflected downward, however, it interacts with the boundary layer and changes the separation point of the corresponding leading-edge vortex. The span-wise vortex structures over the top of the wing become unbalanced, and an overall rolling moment can be created. The delta-wing has a 38-cm span and a 67 O top angle; it is tested in a wind-tunnel with a top speed of 20 m/s. Silicon micro-machined actuators are chosen here because of their added advantages of light weight and potentially large bandwidth. To control this wing, micro-flaps are required to deflect 1-2 mm out-of-plane (or t o match the boundary-layer thickness), and withstand large aerodynamic loading on the order of several hundred pN. Magnetic actuation is used because it is known to generate stronger and longer-range forces [3, 4, 51 compared with most other driving methods. Several types of magnetic micro-actuators have been previously demonstrated, but none can readily fulfill the current system requirements. Beneck et . al. [6] performed post-processing manual attachments of permanent magnet pieces on micromachined plates and actuated the magnet with an external magnetic field generated by in-plane coils. The manual assembly is unsuitable for us because a large number of ac-","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130843307","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1109/MEMSYS.1995.472567
Isao Shimoyama, Y. K. Fujisawa, Gregory D. Gekan, H. Miura, Musahito Shimaah, Yoichiro
On the other hand, little is known about low Re flow. Therefore, the aerodynamics of low Re flow must be investigated in order to estimate an aerodynamic force on a flying microrobot. Fluid dynamics in low Re flow has been examined experimentally in air and water, and these results are compared to a computer simulation in this paper. The results show that the thrust is sufficient for flight. Fig. 1. Photo of microplane.
{"title":"Fluid dynamics of microwing","authors":"Isao Shimoyama, Y. K. Fujisawa, Gregory D. Gekan, H. Miura, Musahito Shimaah, Yoichiro","doi":"10.1109/MEMSYS.1995.472567","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472567","url":null,"abstract":"On the other hand, little is known about low Re flow. Therefore, the aerodynamics of low Re flow must be investigated in order to estimate an aerodynamic force on a flying microrobot. Fluid dynamics in low Re flow has been examined experimentally in air and water, and these results are compared to a computer simulation in this paper. The results show that the thrust is sufficient for flight. Fig. 1. Photo of microplane.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115697913","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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