Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472548
H. Jansen, M. D. de Boer, B. Otter, M. Elwenspoek
The recently developed black silicon method (BSM) is presented as a powerful tool in finding recipes for the fabrication of MEMS building blocks such as Ay-stages. scanning probe tips, inkjet filters, multi-electrodes for neuro-electronic interfaces, and mouldings Lor direct patterning into polymers. The fabrication of these blocks in silicon with high aspect ratios and smooth surface textures will be described and discussed by using the BSM and standard reactive ion etching (ME).
{"title":"The black silicon method. IV. The fabrication of three-dimensional structures in silicon with high apect ratios for scanning probe microscopy and other applications","authors":"H. Jansen, M. D. de Boer, B. Otter, M. Elwenspoek","doi":"10.1109/MEMSYS.1995.472548","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472548","url":null,"abstract":"The recently developed black silicon method (BSM) is presented as a powerful tool in finding recipes for the fabrication of MEMS building blocks such as Ay-stages. scanning probe tips, inkjet filters, multi-electrodes for neuro-electronic interfaces, and mouldings Lor direct patterning into polymers. The fabrication of these blocks in silicon with high aspect ratios and smooth surface textures will be described and discussed by using the BSM and standard reactive ion etching (ME).","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127235366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472550
L. Lin, S. S. Lee, Ming C. Wu, K. Pister
A novel surface micro-machined micro-optical bench (MOB) has been demonstrated. Free-space micro-optics such as micro-Fresnel lenses, rotatable mirrors, beam-splitters and gratings are implemented on a single Si chip using IC-like microfabrication processes. Self-aligned hybrid integration with semiconductor lasers are also demonstrated for the first time. The MOB technology realizes a microoptical system on a single Si chip and has significant impact on free-space integrated optics, optical switching, optical data storage, and optoelectronic packaging. free-space. Using this new technique, threedimensional micro-optical components can be fabricated integrally on a single Si chip. The Si substrate serves as a “micro-optical bench (MOB)” on which micro-lenses, mirrors, gratings and other optical components are pre-aligned in the mask layout stage using computer-aided design and then constructed by microfabrication. Additional fine adjustment can be achieved by the on-chip micro-actuators and micropositioners such as rotational and translational stages. With hybrid integration of active optical devices, a complete optical system can be constructed on the MOB, as illustrated in Fig. 1.
{"title":"Micromachined integrated optics for free-space interconnections","authors":"L. Lin, S. S. Lee, Ming C. Wu, K. Pister","doi":"10.1109/MEMSYS.1995.472550","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472550","url":null,"abstract":"A novel surface micro-machined micro-optical bench (MOB) has been demonstrated. Free-space micro-optics such as micro-Fresnel lenses, rotatable mirrors, beam-splitters and gratings are implemented on a single Si chip using IC-like microfabrication processes. Self-aligned hybrid integration with semiconductor lasers are also demonstrated for the first time. The MOB technology realizes a microoptical system on a single Si chip and has significant impact on free-space integrated optics, optical switching, optical data storage, and optoelectronic packaging. free-space. Using this new technique, threedimensional micro-optical components can be fabricated integrally on a single Si chip. The Si substrate serves as a “micro-optical bench (MOB)” on which micro-lenses, mirrors, gratings and other optical components are pre-aligned in the mask layout stage using computer-aided design and then constructed by microfabrication. Additional fine adjustment can be achieved by the on-chip micro-actuators and micropositioners such as rotational and translational stages. With hybrid integration of active optical devices, a complete optical system can be constructed on the MOB, as illustrated in Fig. 1.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"116 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126710258","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472566
T. Christenson, J. Klein, H. Guckel
Performance of a planar magnetic VR micromotor is evaluated using an electromagnetically controlled load and planar gear coupling. Fabrication is based on extended LIGA processing methods. A new coil construction technique is described which uses wound micro-coils on a LIGA defined pre-fonn. A maximum rotational speed of 17,500 rpm is achieved for a 1000 pm diameter rotor with a maximum estimated torque output of 300nN-m which is more than sufficient to drive several extemal gears.
{"title":"An electromagnetic micro dynamometer","authors":"T. Christenson, J. Klein, H. Guckel","doi":"10.1109/MEMSYS.1995.472566","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472566","url":null,"abstract":"Performance of a planar magnetic VR micromotor is evaluated using an electromagnetically controlled load and planar gear coupling. Fabrication is based on extended LIGA processing methods. A new coil construction technique is described which uses wound micro-coils on a LIGA defined pre-fonn. A maximum rotational speed of 17,500 rpm is achieved for a 1000 pm diameter rotor with a maximum estimated torque output of 300nN-m which is more than sufficient to drive several extemal gears.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129483474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472578
Jianqiang Liu, Y. Tai, C. M. Pong
The first ever experimental data on the pressure distribution of gaseous flows in micron-sized channels (microchannels) is successfully obtained. This is achieved by using our newly developed microflow MEMS systems that consist of both microchannels and distributed pressure sensors. Two type of microchannels are developed. One is a straight channel with a uniform cross section, and the other has a variable cross section with Venturi-meter-like transitions. It is discovered that gaseous pressure distributions in microchannels are not linear. Moreover, it is also discovered that transitions in microchannels can result in either pressure drops or rises depending on their geometry. The Navier-Stokes equation with slip boundary conditions has been solved to model the gas flow in microchannels with uniform cross-sectional area. It is found that the model (first used by Arkilic et al., 1994) can fit the experimental data. One interesting phenomenon found in both microflow systems is that the pressure gradients near the inlet and outlet are very small. Such a phenomenon, however, can not be explained by this slip flow model.
首次成功地获得了气体在微米尺度通道(微通道)内压力分布的实验数据。这是通过使用我们新开发的微流MEMS系统实现的，该系统由微通道和分布式压力传感器组成。开发了两种类型的微通道。一种是具有均匀截面的直通道，另一种是具有类似文丘里米跃迁的变截面通道。发现微通道内气体压力分布不是线性的。此外，还发现微通道中的过渡可能导致压力下降或上升，这取决于它们的几何形状。求解了具有滑移边界条件的Navier-Stokes方程，以模拟均匀横截面积微通道内的气体流动。发现该模型(Arkilic et al.， 1994)可以拟合实验数据。在这两种微流系统中都发现了一个有趣的现象，即入口和出口附近的压力梯度非常小。然而，这种现象不能用滑移流模型来解释。
{"title":"MEMS for pressure distribution studies of gaseous flows in microchannels","authors":"Jianqiang Liu, Y. Tai, C. M. Pong","doi":"10.1109/MEMSYS.1995.472578","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472578","url":null,"abstract":"The first ever experimental data on the pressure distribution of gaseous flows in micron-sized channels (microchannels) is successfully obtained. This is achieved by using our newly developed microflow MEMS systems that consist of both microchannels and distributed pressure sensors. Two type of microchannels are developed. One is a straight channel with a uniform cross section, and the other has a variable cross section with Venturi-meter-like transitions. It is discovered that gaseous pressure distributions in microchannels are not linear. Moreover, it is also discovered that transitions in microchannels can result in either pressure drops or rises depending on their geometry. The Navier-Stokes equation with slip boundary conditions has been solved to model the gas flow in microchannels with uniform cross-sectional area. It is found that the model (first used by Arkilic et al., 1994) can fit the experimental data. One interesting phenomenon found in both microflow systems is that the pressure gradients near the inlet and outlet are very small. Such a phenomenon, however, can not be explained by this slip flow model.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"147 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132231559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472599
M. Hornung, R. Frey, O. Brand, H. Baltes, C. Hafner
We report on a prototype of a miniaturized, short range ultrasound barrier for contactless object detection. Micromachined membrane resonators with electrothermal excitation and piezoresistive detection of vibrations act as transducer elements. The devices are fabricated with an industrial silicon process on (100) wafers compatible to bipolar IC technology. The 1 mm by 1 mm membrane resonators have been optimized with respect to their sound generation efficiency. Moreover, we investigate packaging techniques in order to protect the transducer elements without obstructing the ultrasound path.
{"title":"Ultrasound barrier based on packaged micromachined membrane resonators","authors":"M. Hornung, R. Frey, O. Brand, H. Baltes, C. Hafner","doi":"10.1109/MEMSYS.1995.472599","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472599","url":null,"abstract":"We report on a prototype of a miniaturized, short range ultrasound barrier for contactless object detection. Micromachined membrane resonators with electrothermal excitation and piezoresistive detection of vibrations act as transducer elements. The devices are fabricated with an industrial silicon process on (100) wafers compatible to bipolar IC technology. The 1 mm by 1 mm membrane resonators have been optimized with respect to their sound generation efficiency. Moreover, we investigate packaging techniques in order to protect the transducer elements without obstructing the ultrasound path.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126539489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472577
A. Johnson, E. Shahoian
We are developing the technology of heat actuated shape-memory alloy (SMA) thin film microdevices. Shape-memory alloys undergo a crystalline phase change when heated or cooled above ambient. This phase change is accompanied by a change in elastic modulus. The premier application of these microactuators lies in miniature valves, but other potential applications include miniature connectors, switches, and end effectors for microrobotic manipulators. The advantage of SMA film actuators is their ability to produce large forces and displacements within small spaces at voltages compatible with electronics.
{"title":"Recent progress in thin film shape memory microactuators","authors":"A. Johnson, E. Shahoian","doi":"10.1109/MEMSYS.1995.472577","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472577","url":null,"abstract":"We are developing the technology of heat actuated shape-memory alloy (SMA) thin film microdevices. Shape-memory alloys undergo a crystalline phase change when heated or cooled above ambient. This phase change is accompanied by a change in elastic modulus. The premier application of these microactuators lies in miniature valves, but other potential applications include miniature connectors, switches, and end effectors for microrobotic manipulators. The advantage of SMA film actuators is their ability to produce large forces and displacements within small spaces at voltages compatible with electronics.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125201654","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472595
Shuvo Roy, M. Mehregany
This paper reports preliminary results on the development of lateral-motion electrostatic nickel microrelays. The devices, up to 15 pm thick, were fabricated in a new surface micromachining process, using electroless plated nickel as the structural material, high-aspect-ratio positive resist lithography for the plating mold, and polysilicon as the sacrificial layer. Planar microrelays were fabricated and mechanically actuated to investigate electrical contact attributes. Initial experiments revealed contact resistances to be lower than 20R (even as low as 5R) and contact current loads up to 150mA without degradation. The Young’s modulus and residual stress of electroless nickel films, determined using mechanical test structures microfabricated alongside the microrelays, were found to be 154 GPa and 89 MPa, respectively.
{"title":"Fabrication of electrostatic nickel microrelays by nickel surface micromachining","authors":"Shuvo Roy, M. Mehregany","doi":"10.1109/MEMSYS.1995.472595","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472595","url":null,"abstract":"This paper reports preliminary results on the development of lateral-motion electrostatic nickel microrelays. The devices, up to 15 pm thick, were fabricated in a new surface micromachining process, using electroless plated nickel as the structural material, high-aspect-ratio positive resist lithography for the plating mold, and polysilicon as the sacrificial layer. Planar microrelays were fabricated and mechanically actuated to investigate electrical contact attributes. Initial experiments revealed contact resistances to be lower than 20R (even as low as 5R) and contact current loads up to 150mA without degradation. The Young’s modulus and residual stress of electroless nickel films, determined using mechanical test structures microfabricated alongside the microrelays, were found to be 154 GPa and 89 MPa, respectively.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133792387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472593
K. Nakamura, H. Ogura, S. Maeda, U. Sangawa, S. Aoki, T. Sato
We proposed a CB (concentric build-up) process to fabricate the electrostatic wobble motors in MEMS '94[ 11. This process features the concentric build-up of layers around a cylindrical substrate and produces three dimensional bulk structures using newly developed microfabrication technique. This time, we have successfully measured the wobbling motion and estimated key motor parameters such as rotation rate, rotor-stator gap, output torque and surface condition of stator and rotor. This method facilitated the evaluation of the motors and processes. And we have located the causes of torque deterioration.
{"title":"Evaluation of the micro wobble motor fabricated by concentric build-up process","authors":"K. Nakamura, H. Ogura, S. Maeda, U. Sangawa, S. Aoki, T. Sato","doi":"10.1109/MEMSYS.1995.472593","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472593","url":null,"abstract":"We proposed a CB (concentric build-up) process to fabricate the electrostatic wobble motors in MEMS '94[ 11. This process features the concentric build-up of layers around a cylindrical substrate and produces three dimensional bulk structures using newly developed microfabrication technique. This time, we have successfully measured the wobbling motion and estimated key motor parameters such as rotation rate, rotor-stator gap, output torque and surface condition of stator and rotor. This method facilitated the evaluation of the motors and processes. And we have located the causes of torque deterioration.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121326299","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472559
M. Kurosawa, Takayuki Watanabe, T. Higuchi
We propose a surface acoustic wave device for miniaturization of ultrasonic atomizers and for functional system construction. Actually, ultrasonic atomizers are rather smaller than other method, so that nebulizers which are handy to carry type use ultrasonic vibration. But they are to large for a pocket or an endoscope. We have obtained a fine mist with a first trial of surface acoustic wave atomizing device whose dimensions are pocketable size. This functional device is able to reduce the dimensions to mm-order as a system. The atomizer consists of a vibrator, a cover and a tube. The vibrator and cover material is 127.8" Y-cut LiNbO, to generate Rayleigh wave, a kind of surface acoustic wave. The Rayleigh wave is the driving force of pumping effect and atomizing effect. The pumping effect is caused by the wave motion of the elastic material and viscosity of the fluid like an ultrasonic motor. The atomizing rate varied according to the driving voltage. The maximum rate was about 0.1 ml per minute. The mean diameter was 19 ym.
{"title":"Surface acoustic wave atomizer with pumping effect","authors":"M. Kurosawa, Takayuki Watanabe, T. Higuchi","doi":"10.1109/MEMSYS.1995.472559","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472559","url":null,"abstract":"We propose a surface acoustic wave device for miniaturization of ultrasonic atomizers and for functional system construction. Actually, ultrasonic atomizers are rather smaller than other method, so that nebulizers which are handy to carry type use ultrasonic vibration. But they are to large for a pocket or an endoscope. We have obtained a fine mist with a first trial of surface acoustic wave atomizing device whose dimensions are pocketable size. This functional device is able to reduce the dimensions to mm-order as a system. The atomizer consists of a vibrator, a cover and a tube. The vibrator and cover material is 127.8\" Y-cut LiNbO, to generate Rayleigh wave, a kind of surface acoustic wave. The Rayleigh wave is the driving force of pumping effect and atomizing effect. The pumping effect is caused by the wave motion of the elastic material and viscosity of the fluid like an ultrasonic motor. The atomizing rate varied according to the driving voltage. The maximum rate was about 0.1 ml per minute. The mean diameter was 19 ym.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"161 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122295273","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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