Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472570
Hong Zhang, F. S. Kim
We present a novel idea of using domeshaped diaphragms for piezoelectric microphones, pressure sensors, and microspeakers. Dome-shaped diaphragm microtransducers are built on a thin, dome-shaped, silicon-nitride diaphragm (a few pm thick and a few mm in radius) with electrodes and piezoelectric ZnO film. Dome-shaped diaphragm transducers possess unique features, not shared by flat diaphragm transducers, due to their threedimensional nature in structure. For instance a dome-shaped diaphragm microphone is capable of detecting the magnitude and the direction of an incoming acoustic wave, like human ears. We present our theoretical study for such microphone. Three major equations are developed for signal readouts on three different positions over a hemispherical surface of a dome microphone. Also we describe our fabricated dome-shaped diaphragm of low-stress silicon nitride (0.3 km thick and 1 mm in radius). Additionally, since mechanical resonant frequency of a dome-shaped diaphragm depends on static differential pressure, we describe piezoelectric pressure sensors (to sense static pressure) made with a dome diaphragm. Finally, we show that a dome diaphragm is much more effective in producing acoustic waves along radial direction than a planar diaphragm.
{"title":"Dome-shaped diaphragm microtransducers","authors":"Hong Zhang, F. S. Kim","doi":"10.1109/MEMSYS.1995.472570","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472570","url":null,"abstract":"We present a novel idea of using domeshaped diaphragms for piezoelectric microphones, pressure sensors, and microspeakers. Dome-shaped diaphragm microtransducers are built on a thin, dome-shaped, silicon-nitride diaphragm (a few pm thick and a few mm in radius) with electrodes and piezoelectric ZnO film. Dome-shaped diaphragm transducers possess unique features, not shared by flat diaphragm transducers, due to their threedimensional nature in structure. For instance a dome-shaped diaphragm microphone is capable of detecting the magnitude and the direction of an incoming acoustic wave, like human ears. We present our theoretical study for such microphone. Three major equations are developed for signal readouts on three different positions over a hemispherical surface of a dome microphone. Also we describe our fabricated dome-shaped diaphragm of low-stress silicon nitride (0.3 km thick and 1 mm in radius). Additionally, since mechanical resonant frequency of a dome-shaped diaphragm depends on static differential pressure, we describe piezoelectric pressure sensors (to sense static pressure) made with a dome diaphragm. Finally, we show that a dome diaphragm is much more effective in producing acoustic waves along radial direction than a planar diaphragm.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"522 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123572518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472598
R. Zengerle, M. Leitner, S. Kluge, A. Richter
Different methods for the complete priming of micro liquid systems with water were investigated. A new method was found using a carbon dioxide purge, which avoids the known problems with unremovable air bubble inclusions. Under the assumption that the surface tension of the liquid at the silicon interface is the main factor preventing priming, liquids with low surface tension and wetting angle are commonly used. In this work the solubility of the enclosed gas in the priming liquid is used in order to remove the bubbles. From that idea it becomes obvious first to prime the microfluid system with carbon dioxide CO, at room temperature and normal pressure, because the solubility of CO, in water is three decades larger than that for air (Ofl,) in water. With that procedure microfluidic systems with hydrophillic and hydrophobic surfaces (silicon, plastic) can be safely, fast and reproducibly primed with water.
{"title":"Carbon dioxide priming of micro liquid systems","authors":"R. Zengerle, M. Leitner, S. Kluge, A. Richter","doi":"10.1109/MEMSYS.1995.472598","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472598","url":null,"abstract":"Different methods for the complete priming of micro liquid systems with water were investigated. A new method was found using a carbon dioxide purge, which avoids the known problems with unremovable air bubble inclusions. Under the assumption that the surface tension of the liquid at the silicon interface is the main factor preventing priming, liquids with low surface tension and wetting angle are commonly used. In this work the solubility of the enclosed gas in the priming liquid is used in order to remove the bubbles. From that idea it becomes obvious first to prime the microfluid system with carbon dioxide CO, at room temperature and normal pressure, because the solubility of CO, in water is three decades larger than that for air (Ofl,) in water. With that procedure microfluidic systems with hydrophillic and hydrophobic surfaces (silicon, plastic) can be safely, fast and reproducibly primed with water.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125904572","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472604
Y. Ohtuka, Hideaki Nishikawa, T. Koumura, T. Hattori
A two-dimensional optical scanner suitable for integration in a plane structure has been developed. To make it vibration robust, a torsional vibration system with two degrees of freedom is adopted for the resonator, and the vibration system axis is matched to the center of gravity. Bimorph cells are used as the actuator to excite the torsional vibration. This optical scanner is capable of optical scanning in two orthogonal directions independently or simultaneously at a scanning angle of +30 degrees or more. One-dimensional scanning is enabled by driving the bimorph cells with the resonance frequency of either of the two torsional vibrations. Two-dimensional scanning is achieved if the bimorph cells are operated by adding the resonance frequency signals of the two torsional vibrations.
{"title":"2-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom","authors":"Y. Ohtuka, Hideaki Nishikawa, T. Koumura, T. Hattori","doi":"10.1109/MEMSYS.1995.472604","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472604","url":null,"abstract":"A two-dimensional optical scanner suitable for integration in a plane structure has been developed. To make it vibration robust, a torsional vibration system with two degrees of freedom is adopted for the resonator, and the vibration system axis is matched to the center of gravity. Bimorph cells are used as the actuator to excite the torsional vibration. This optical scanner is capable of optical scanning in two orthogonal directions independently or simultaneously at a scanning angle of +30 degrees or more. One-dimensional scanning is enabled by driving the bimorph cells with the resonance frequency of either of the two torsional vibrations. Two-dimensional scanning is achieved if the bimorph cells are operated by adding the resonance frequency signals of the two torsional vibrations.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129621851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472561
T. Lammerink, N. Tas, J. Berenschot, M. Elwenspoek, J. Fluitman
The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.
{"title":"Micromachined hydraulic astable multivibrator","authors":"T. Lammerink, N. Tas, J. Berenschot, M. Elwenspoek, J. Fluitman","doi":"10.1109/MEMSYS.1995.472561","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472561","url":null,"abstract":"The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"243 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120971649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472544
W. Trimmer, P. Ling, C. Chin, P. Orton, R. Gaugler, S. Hashmi, G. Hashmi, B. Brunett, M. Reed
Silicon micromachining has been used to fabricate microprobes for injecting DNA into cells. Arrays of very sharp pyramidal points are etched on a silicon substrate. Pressing these points into a culture of cells, allows biologically active material to cross the cell wall barrier. Using the microprobes, DNA has been injected into plant (tobacco leaves) and animal (nematodes) cells.
{"title":"Injection of DNA into plant and animal tissues with micromechanical piercing structures","authors":"W. Trimmer, P. Ling, C. Chin, P. Orton, R. Gaugler, S. Hashmi, G. Hashmi, B. Brunett, M. Reed","doi":"10.1109/MEMSYS.1995.472544","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472544","url":null,"abstract":"Silicon micromachining has been used to fabricate microprobes for injecting DNA into cells. Arrays of very sharp pyramidal points are etched on a silicon substrate. Pressing these points into a culture of cells, allows biologically active material to cross the cell wall barrier. Using the microprobes, DNA has been injected into plant (tobacco leaves) and animal (nematodes) cells.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"107 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127325625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472580
H. Ota, T. Oda, M. Kobayashi
This paper presents a manufacturing process for forming the coil winding on a cylindrical core to make a stator for a micro-generator. A cylindrical stator 1 mm in diameter and 0.5 mm in length was fabricated. This stator consists of a cylindrical core made of permalloy and six coils of copper wire with a cross section of 7 M m X 15 ,U m which were wound 20 turns per coil and with 2 pm thick polyimide insulation layers. The stator was fabricated by securing the coil onto the core die, and electroplating the remaining area with permalloy. A micro-generator 1.2 mm in diameter was fabricated incorporating this stator, and the voltage induced by the generator was measured. The examination revealed that the newly developed process is applicable to the manufacture of electromagnetic microdevices.
{"title":"Development of coil winding process for radial gap type electromagnetic micro-rotating machine","authors":"H. Ota, T. Oda, M. Kobayashi","doi":"10.1109/MEMSYS.1995.472580","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472580","url":null,"abstract":"This paper presents a manufacturing process for forming the coil winding on a cylindrical core to make a stator for a micro-generator. A cylindrical stator 1 mm in diameter and 0.5 mm in length was fabricated. This stator consists of a cylindrical core made of permalloy and six coils of copper wire with a cross section of 7 M m X 15 ,U m which were wound 20 turns per coil and with 2 pm thick polyimide insulation layers. The stator was fabricated by securing the coil onto the core die, and electroplating the remaining area with permalloy. A micro-generator 1.2 mm in diameter was fabricated incorporating this stator, and the voltage induced by the generator was measured. The examination revealed that the newly developed process is applicable to the manufacture of electromagnetic microdevices.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133539620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472574
Y. Hamasaki, T. Ide
Introduction To improve the reliability of gas supplying installations, the non-destructive inspection of gas pipes is required. For this purpose, eddy current sensors are usually used. Since the fabrication of small-scale sensors had not been achieved, the inspection of gas pipes of small diameter (less than 20 mm) was not possible. We report in the present work on the fabrication of the small-scale sensors using photolithography and electroplating techniques. The fabrication process of micro sensors of 3 mm x 3 mm x 80 pm in dimensions and composed of 4 layers of micro planar micro spiral coils of 10 x 10 pm2 copper line has been performed.
{"title":"Fabrication of multi-layer eddy current micro sensors for non-destructive inspection of small diameter pipes","authors":"Y. Hamasaki, T. Ide","doi":"10.1109/MEMSYS.1995.472574","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472574","url":null,"abstract":"Introduction To improve the reliability of gas supplying installations, the non-destructive inspection of gas pipes is required. For this purpose, eddy current sensors are usually used. Since the fabrication of small-scale sensors had not been achieved, the inspection of gas pipes of small diameter (less than 20 mm) was not possible. We report in the present work on the fabrication of the small-scale sensors using photolithography and electroplating techniques. The fabrication process of micro sensors of 3 mm x 3 mm x 80 pm in dimensions and composed of 4 layers of micro planar micro spiral coils of 10 x 10 pm2 copper line has been performed.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128147104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472558
K. Ozaki
A new pumping mechanism using the large differences of thermal properties of a fluid between liquid and vapor phases has been developed. Altemate phase changes of a fluid cause variations of the saturation pressure and specific volume of the fluid. Also, they vary the viscous forces in flows in a narrow channel. Using these alternate phase changes of a fluid functionally, we can achieve pumping action on the fluid. This pumping mechanism has aptitudes for micro-pumping devices because the pumps based on this mechanism are simple in structure and they require no mechanical moving parts. Besides these advantages on manufacture, this mechanism is expected to operate more cleanly in smaller systems. This is because, the smaller systems have smaller thermal time constants, and the viscous forces have larger influence in the smaller flows. This pumping mechanism was proved experimentally with water in straight stainless steel capillaries.
{"title":"Pumping mechanism using periodic phase changes of a fluid","authors":"K. Ozaki","doi":"10.1109/MEMSYS.1995.472558","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472558","url":null,"abstract":"A new pumping mechanism using the large differences of thermal properties of a fluid between liquid and vapor phases has been developed. Altemate phase changes of a fluid cause variations of the saturation pressure and specific volume of the fluid. Also, they vary the viscous forces in flows in a narrow channel. Using these alternate phase changes of a fluid functionally, we can achieve pumping action on the fluid. This pumping mechanism has aptitudes for micro-pumping devices because the pumps based on this mechanism are simple in structure and they require no mechanical moving parts. Besides these advantages on manufacture, this mechanism is expected to operate more cleanly in smaller systems. This is because, the smaller systems have smaller thermal time constants, and the viscous forces have larger influence in the smaller flows. This pumping mechanism was proved experimentally with water in straight stainless steel capillaries.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134068469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472588
Chengqun Gui, R. Legtenberg, A. Harrie, Tilmans, J. Fluitman, Miko Elwenspoek
The nonlinearity and hysteresis effects of the electrostatically activated voltage-driven resonant microbridges have been studied theoretically and experimentally. It is shown that in order to avoid vibration instability and hysteresis to occur, the choices of the ac and dc driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as the hysteresis-free design rules. Expressions for the maximum allowable quality factor and maximum attainable figure of merit are given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated low-pressure chemical-vapor deposition (LPCVD) polysilicon microbridges, are presented and show good agreement with the theory.
{"title":"Nonlinearity and hysteresis of resonant strain gauges","authors":"Chengqun Gui, R. Legtenberg, A. Harrie, Tilmans, J. Fluitman, Miko Elwenspoek","doi":"10.1109/MEMSYS.1995.472588","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472588","url":null,"abstract":"The nonlinearity and hysteresis effects of the electrostatically activated voltage-driven resonant microbridges have been studied theoretically and experimentally. It is shown that in order to avoid vibration instability and hysteresis to occur, the choices of the ac and dc driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as the hysteresis-free design rules. Expressions for the maximum allowable quality factor and maximum attainable figure of merit are given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated low-pressure chemical-vapor deposition (LPCVD) polysilicon microbridges, are presented and show good agreement with the theory.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127275658","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472602
T. Yoshida, T. Kudo, S. Kato, S. Miyazaki, S. Kiyono, K. Ikeda
The strain sensitive resonant gate transistor working as a strain gauge has been developed. This device is fabricated by using surface micro-machining techniques and CMOS technology. Poly-Si bridge is fixed to the FET structures and the bridge is encapsulated by a Poly-Si cell in order to keep it inside the vacuum. When the strain is applied to the bridge, the resonant frequency is changed. The shift of resonant frequency is converted to the frequency of alternating drain current. Some basically technological problems are in order to realize high sensitivity and reliability in this sensor. As a result, the strain sensitive sensor with the characterizations of high gage factor, high Q factor, no-sticking and wide-working-range is developed. Characterizations of this sensor have been demonstrated.
{"title":"Strain sensitive resonant gate transistor","authors":"T. Yoshida, T. Kudo, S. Kato, S. Miyazaki, S. Kiyono, K. Ikeda","doi":"10.1109/MEMSYS.1995.472602","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472602","url":null,"abstract":"The strain sensitive resonant gate transistor working as a strain gauge has been developed. This device is fabricated by using surface micro-machining techniques and CMOS technology. Poly-Si bridge is fixed to the FET structures and the bridge is encapsulated by a Poly-Si cell in order to keep it inside the vacuum. When the strain is applied to the bridge, the resonant frequency is changed. The shift of resonant frequency is converted to the frequency of alternating drain current. Some basically technological problems are in order to realize high sensitivity and reliability in this sensor. As a result, the strain sensitive sensor with the characterizations of high gage factor, high Q factor, no-sticking and wide-working-range is developed. Characterizations of this sensor have been demonstrated.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123057050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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