Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472573
J. Elders, H. Jansen, M. Elwenspoek, W. Ehrfeld
The recent innovations in dry etching make it a promising technology for the fabrications of micromoulds. The high aspect ratios, directional freedom, low roughness, high etch rates and high selectivity with respect to the mask material allow a versatile fabrication process of micromoulds for subsequent electroplating and embossing, as is demonstrated with the DEEMO process. DEEMO is an English acronym and stands for Dry Etching, Electroplating and Moulding.
{"title":"DEEMO: a new technology for the fabrication of microstructures","authors":"J. Elders, H. Jansen, M. Elwenspoek, W. Ehrfeld","doi":"10.1109/MEMSYS.1995.472573","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472573","url":null,"abstract":"The recent innovations in dry etching make it a promising technology for the fabrications of micromoulds. The high aspect ratios, directional freedom, low roughness, high etch rates and high selectivity with respect to the mask material allow a versatile fabrication process of micromoulds for subsequent electroplating and embossing, as is demonstrated with the DEEMO process. DEEMO is an English acronym and stands for Dry Etching, Electroplating and Moulding.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115309622","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472586
J. Roeraade
Development of new and improved methods for chemical analysis is an issue of great importance. Analytical separation techniques such as chromatography and electrophoresis, combined with sensitive detectors have made it possible to characterize and quantify trace amounts of chemical compounds in complex matrices. Such techniques are indispensable in many areas, e.g. environmental chemistry, product control, in drug development etc.
{"title":"Chemical analysis in nanoscale needs, possibilities, techniques and outlooks","authors":"J. Roeraade","doi":"10.1109/MEMSYS.1995.472586","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472586","url":null,"abstract":"Development of new and improved methods for chemical analysis is an issue of great importance. Analytical separation techniques such as chromatography and electrophoresis, combined with sensitive detectors have made it possible to characterize and quantify trace amounts of chemical compounds in complex matrices. Such techniques are indispensable in many areas, e.g. environmental chemistry, product control, in drug development etc.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"108 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115741873","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472570
Hong Zhang, F. S. Kim
We present a novel idea of using domeshaped diaphragms for piezoelectric microphones, pressure sensors, and microspeakers. Dome-shaped diaphragm microtransducers are built on a thin, dome-shaped, silicon-nitride diaphragm (a few pm thick and a few mm in radius) with electrodes and piezoelectric ZnO film. Dome-shaped diaphragm transducers possess unique features, not shared by flat diaphragm transducers, due to their threedimensional nature in structure. For instance a dome-shaped diaphragm microphone is capable of detecting the magnitude and the direction of an incoming acoustic wave, like human ears. We present our theoretical study for such microphone. Three major equations are developed for signal readouts on three different positions over a hemispherical surface of a dome microphone. Also we describe our fabricated dome-shaped diaphragm of low-stress silicon nitride (0.3 km thick and 1 mm in radius). Additionally, since mechanical resonant frequency of a dome-shaped diaphragm depends on static differential pressure, we describe piezoelectric pressure sensors (to sense static pressure) made with a dome diaphragm. Finally, we show that a dome diaphragm is much more effective in producing acoustic waves along radial direction than a planar diaphragm.
{"title":"Dome-shaped diaphragm microtransducers","authors":"Hong Zhang, F. S. Kim","doi":"10.1109/MEMSYS.1995.472570","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472570","url":null,"abstract":"We present a novel idea of using domeshaped diaphragms for piezoelectric microphones, pressure sensors, and microspeakers. Dome-shaped diaphragm microtransducers are built on a thin, dome-shaped, silicon-nitride diaphragm (a few pm thick and a few mm in radius) with electrodes and piezoelectric ZnO film. Dome-shaped diaphragm transducers possess unique features, not shared by flat diaphragm transducers, due to their threedimensional nature in structure. For instance a dome-shaped diaphragm microphone is capable of detecting the magnitude and the direction of an incoming acoustic wave, like human ears. We present our theoretical study for such microphone. Three major equations are developed for signal readouts on three different positions over a hemispherical surface of a dome microphone. Also we describe our fabricated dome-shaped diaphragm of low-stress silicon nitride (0.3 km thick and 1 mm in radius). Additionally, since mechanical resonant frequency of a dome-shaped diaphragm depends on static differential pressure, we describe piezoelectric pressure sensors (to sense static pressure) made with a dome diaphragm. Finally, we show that a dome diaphragm is much more effective in producing acoustic waves along radial direction than a planar diaphragm.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"522 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123572518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472604
Y. Ohtuka, Hideaki Nishikawa, T. Koumura, T. Hattori
A two-dimensional optical scanner suitable for integration in a plane structure has been developed. To make it vibration robust, a torsional vibration system with two degrees of freedom is adopted for the resonator, and the vibration system axis is matched to the center of gravity. Bimorph cells are used as the actuator to excite the torsional vibration. This optical scanner is capable of optical scanning in two orthogonal directions independently or simultaneously at a scanning angle of +30 degrees or more. One-dimensional scanning is enabled by driving the bimorph cells with the resonance frequency of either of the two torsional vibrations. Two-dimensional scanning is achieved if the bimorph cells are operated by adding the resonance frequency signals of the two torsional vibrations.
{"title":"2-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom","authors":"Y. Ohtuka, Hideaki Nishikawa, T. Koumura, T. Hattori","doi":"10.1109/MEMSYS.1995.472604","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472604","url":null,"abstract":"A two-dimensional optical scanner suitable for integration in a plane structure has been developed. To make it vibration robust, a torsional vibration system with two degrees of freedom is adopted for the resonator, and the vibration system axis is matched to the center of gravity. Bimorph cells are used as the actuator to excite the torsional vibration. This optical scanner is capable of optical scanning in two orthogonal directions independently or simultaneously at a scanning angle of +30 degrees or more. One-dimensional scanning is enabled by driving the bimorph cells with the resonance frequency of either of the two torsional vibrations. Two-dimensional scanning is achieved if the bimorph cells are operated by adding the resonance frequency signals of the two torsional vibrations.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129621851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472574
Y. Hamasaki, T. Ide
Introduction To improve the reliability of gas supplying installations, the non-destructive inspection of gas pipes is required. For this purpose, eddy current sensors are usually used. Since the fabrication of small-scale sensors had not been achieved, the inspection of gas pipes of small diameter (less than 20 mm) was not possible. We report in the present work on the fabrication of the small-scale sensors using photolithography and electroplating techniques. The fabrication process of micro sensors of 3 mm x 3 mm x 80 pm in dimensions and composed of 4 layers of micro planar micro spiral coils of 10 x 10 pm2 copper line has been performed.
{"title":"Fabrication of multi-layer eddy current micro sensors for non-destructive inspection of small diameter pipes","authors":"Y. Hamasaki, T. Ide","doi":"10.1109/MEMSYS.1995.472574","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472574","url":null,"abstract":"Introduction To improve the reliability of gas supplying installations, the non-destructive inspection of gas pipes is required. For this purpose, eddy current sensors are usually used. Since the fabrication of small-scale sensors had not been achieved, the inspection of gas pipes of small diameter (less than 20 mm) was not possible. We report in the present work on the fabrication of the small-scale sensors using photolithography and electroplating techniques. The fabrication process of micro sensors of 3 mm x 3 mm x 80 pm in dimensions and composed of 4 layers of micro planar micro spiral coils of 10 x 10 pm2 copper line has been performed.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128147104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472598
R. Zengerle, M. Leitner, S. Kluge, A. Richter
Different methods for the complete priming of micro liquid systems with water were investigated. A new method was found using a carbon dioxide purge, which avoids the known problems with unremovable air bubble inclusions. Under the assumption that the surface tension of the liquid at the silicon interface is the main factor preventing priming, liquids with low surface tension and wetting angle are commonly used. In this work the solubility of the enclosed gas in the priming liquid is used in order to remove the bubbles. From that idea it becomes obvious first to prime the microfluid system with carbon dioxide CO, at room temperature and normal pressure, because the solubility of CO, in water is three decades larger than that for air (Ofl,) in water. With that procedure microfluidic systems with hydrophillic and hydrophobic surfaces (silicon, plastic) can be safely, fast and reproducibly primed with water.
{"title":"Carbon dioxide priming of micro liquid systems","authors":"R. Zengerle, M. Leitner, S. Kluge, A. Richter","doi":"10.1109/MEMSYS.1995.472598","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472598","url":null,"abstract":"Different methods for the complete priming of micro liquid systems with water were investigated. A new method was found using a carbon dioxide purge, which avoids the known problems with unremovable air bubble inclusions. Under the assumption that the surface tension of the liquid at the silicon interface is the main factor preventing priming, liquids with low surface tension and wetting angle are commonly used. In this work the solubility of the enclosed gas in the priming liquid is used in order to remove the bubbles. From that idea it becomes obvious first to prime the microfluid system with carbon dioxide CO, at room temperature and normal pressure, because the solubility of CO, in water is three decades larger than that for air (Ofl,) in water. With that procedure microfluidic systems with hydrophillic and hydrophobic surfaces (silicon, plastic) can be safely, fast and reproducibly primed with water.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125904572","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472544
W. Trimmer, P. Ling, C. Chin, P. Orton, R. Gaugler, S. Hashmi, G. Hashmi, B. Brunett, M. Reed
Silicon micromachining has been used to fabricate microprobes for injecting DNA into cells. Arrays of very sharp pyramidal points are etched on a silicon substrate. Pressing these points into a culture of cells, allows biologically active material to cross the cell wall barrier. Using the microprobes, DNA has been injected into plant (tobacco leaves) and animal (nematodes) cells.
{"title":"Injection of DNA into plant and animal tissues with micromechanical piercing structures","authors":"W. Trimmer, P. Ling, C. Chin, P. Orton, R. Gaugler, S. Hashmi, G. Hashmi, B. Brunett, M. Reed","doi":"10.1109/MEMSYS.1995.472544","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472544","url":null,"abstract":"Silicon micromachining has been used to fabricate microprobes for injecting DNA into cells. Arrays of very sharp pyramidal points are etched on a silicon substrate. Pressing these points into a culture of cells, allows biologically active material to cross the cell wall barrier. Using the microprobes, DNA has been injected into plant (tobacco leaves) and animal (nematodes) cells.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"107 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127325625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472561
T. Lammerink, N. Tas, J. Berenschot, M. Elwenspoek, J. Fluitman
The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.
{"title":"Micromachined hydraulic astable multivibrator","authors":"T. Lammerink, N. Tas, J. Berenschot, M. Elwenspoek, J. Fluitman","doi":"10.1109/MEMSYS.1995.472561","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472561","url":null,"abstract":"The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"243 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120971649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472588
Chengqun Gui, R. Legtenberg, A. Harrie, Tilmans, J. Fluitman, Miko Elwenspoek
The nonlinearity and hysteresis effects of the electrostatically activated voltage-driven resonant microbridges have been studied theoretically and experimentally. It is shown that in order to avoid vibration instability and hysteresis to occur, the choices of the ac and dc driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as the hysteresis-free design rules. Expressions for the maximum allowable quality factor and maximum attainable figure of merit are given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated low-pressure chemical-vapor deposition (LPCVD) polysilicon microbridges, are presented and show good agreement with the theory.
{"title":"Nonlinearity and hysteresis of resonant strain gauges","authors":"Chengqun Gui, R. Legtenberg, A. Harrie, Tilmans, J. Fluitman, Miko Elwenspoek","doi":"10.1109/MEMSYS.1995.472588","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472588","url":null,"abstract":"The nonlinearity and hysteresis effects of the electrostatically activated voltage-driven resonant microbridges have been studied theoretically and experimentally. It is shown that in order to avoid vibration instability and hysteresis to occur, the choices of the ac and dc driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as the hysteresis-free design rules. Expressions for the maximum allowable quality factor and maximum attainable figure of merit are given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated low-pressure chemical-vapor deposition (LPCVD) polysilicon microbridges, are presented and show good agreement with the theory.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127275658","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1995-01-29DOI: 10.1109/MEMSYS.1995.472602
T. Yoshida, T. Kudo, S. Kato, S. Miyazaki, S. Kiyono, K. Ikeda
The strain sensitive resonant gate transistor working as a strain gauge has been developed. This device is fabricated by using surface micro-machining techniques and CMOS technology. Poly-Si bridge is fixed to the FET structures and the bridge is encapsulated by a Poly-Si cell in order to keep it inside the vacuum. When the strain is applied to the bridge, the resonant frequency is changed. The shift of resonant frequency is converted to the frequency of alternating drain current. Some basically technological problems are in order to realize high sensitivity and reliability in this sensor. As a result, the strain sensitive sensor with the characterizations of high gage factor, high Q factor, no-sticking and wide-working-range is developed. Characterizations of this sensor have been demonstrated.
{"title":"Strain sensitive resonant gate transistor","authors":"T. Yoshida, T. Kudo, S. Kato, S. Miyazaki, S. Kiyono, K. Ikeda","doi":"10.1109/MEMSYS.1995.472602","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472602","url":null,"abstract":"The strain sensitive resonant gate transistor working as a strain gauge has been developed. This device is fabricated by using surface micro-machining techniques and CMOS technology. Poly-Si bridge is fixed to the FET structures and the bridge is encapsulated by a Poly-Si cell in order to keep it inside the vacuum. When the strain is applied to the bridge, the resonant frequency is changed. The shift of resonant frequency is converted to the frequency of alternating drain current. Some basically technological problems are in order to realize high sensitivity and reliability in this sensor. As a result, the strain sensitive sensor with the characterizations of high gage factor, high Q factor, no-sticking and wide-working-range is developed. Characterizations of this sensor have been demonstrated.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123057050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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