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Research on automatic assembly method of dual manipulator for large-scale segmented optical components 大型分段光学元件双机械手自动装配方法研究
Pub Date : 2023-12-18 DOI: 10.1117/12.3005430
Pei Li, Jie Wu, Chong Lv, Yue Xiao, Chunrui Zhang
Aiming at the problems of poor safety, reliability and assembly consistency of manual assembly of large segmented optical components, a dual manipulator automatic assembly method is proposed. First of all, a modular automatic assembly system is built, and the interactive cooperation mode of dual robotic arms is adopted to realize the function exchange of the two robotic arms and meet the requirements of a wider and larger visual identification and assembly range. Then, the 3D spatial grasping and assembly relationship is established by the “point cloud stitching” technology based on marker points, and the system calibration is completed. Finally, a “step-by-step” point-by-point approximation assembly strategy is proposed, which corrects the error through binocular vision guidance to improve the final assembly accuracy, which meets the requirements of high assembly accuracy and strong consistency of large-scale segmented optical components.
针对大型分段光学元件手工装配安全性、可靠性和装配一致性差的问题,提出了一种双机械手自动装配方法。首先,构建模块化自动装配系统,采用双机械臂交互式协作模式,实现双机械臂功能互换,满足更宽更大的视觉识别和装配范围要求。然后,通过基于标记点的 "点云拼接 "技术建立三维空间抓取和装配关系,并完成系统标定。最后,提出了 "分步式 "逐点逼近装配策略,通过双目视觉引导修正误差,提高最终装配精度,满足了大规模分段光学元件装配精度高、一致性强的要求。
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引用次数: 0
Fabrication of millimeter-scale crystal whispering gallery mode resonators 制作毫米级晶体耳语画廊模式谐振器
Pub Date : 2023-12-18 DOI: 10.1117/12.3006429
Junhan Liu, Tianliang Qu, Changxin Xiong
The Whispering Gallery Modes Resonators(WGMR) are specific electromagnetic modes confined in circular resonators, where light beams are guided along the circumferences of the resonators with very small losses by total internal reflections. WGMR is the core component of optical filters, ultra-narrow linewidth laser, microwave photoelectric oscillator, optical frequency comb, rubidium atomic clock etc and high-precision sensors. Q factor is defined as the ratio of the total energy of photons in WGMR to the loss lost in one propagation cycle. The energy loss of WGMR is discussed. The cutting dynamics model diagram was established based the cutting force model for turning. The key technology affecting WGMR’s Q factor was the fabrication process. The manufacture of ultra-high Q factor WGMR are realized through rough machining, ultra-precision turning and precision polishing. The processing of ultra-precision turning and precision polishing is reported in the paper. The important fabrication processing of WGMR is ultra-precision turning. The test results show that the Q value of WGMR is 1.5×10 9@1550nm by Q value measurement system. The surface roughness and shape error of WGMR are 0.6nm (Ra value) and 5.3nm (PV value) respectively, measured by white light interferometer.
耳语廊模式谐振器(WGMR)是局限在圆形谐振器中的特定电磁模式,光束沿着谐振器的圆周被引导,内部全反射的损耗非常小。WGMR 是光学滤波器、超窄线宽激光器、微波光电振荡器、光学频率梳、铷原子钟等和高精度传感器的核心部件。Q 因子的定义是光子在 WGMR 中的总能量与在一个传播周期中损失的能量之比。本文讨论了 WGMR 的能量损耗。在车削切削力模型的基础上建立了切削动力学模型图。影响 WGMR Q 因子的关键技术是制造工艺。超高 Q 值 WGMR 的制造是通过粗加工、超精密车削和精密抛光实现的。本文报告了超精密车削和精密抛光的加工过程。超精密车削是 WGMR 的重要制造工艺。测试结果表明,通过 Q 值测量系统,WGMR 的 Q 值为 1.5×10 9@1550nm。通过白光干涉仪测量,WGMR 的表面粗糙度和形状误差分别为 0.6nm (Ra 值)和 5.3nm(PV 值)。
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引用次数: 0
Performance measurement of FlexRay pupil shaping module in lithography system 光刻系统中 FlexRay 光瞳整形模块的性能测量
Pub Date : 2023-12-18 DOI: 10.1117/12.3008032
Zenghui Yang, Fang Zhang, Jingpei Hu, Zhenxin Huang, Aijun Zeng, Huijie Huang
The Flexray illumination technology is a crucial resolution enhancement technique for immersion photolithography machines operating at nodes of 28nm and below. The Flexray pupil shaping Module is the key component of this pupil shaping technique. This module enables the generation of arbitrary illumination modes by adjusting the angular spectrum of the beam through a micro mirror array (MMA). To meet the requirements of optical characteristic detection, a multiparameter detection method has been proposed. The optical performance parameters, including polar non-balance, opening angle, azimuth angle, and ellipticity, are simultaneously obtained by imaging the intensity distribution on the pupil plane. Experimental measurements and analysis of illumination shapes using the Flexray Pupil Shaping Module have been conducted. The experimental results demonstrate that this measurement method can be applied to test the performance of the Flexray Pupil Shaping Module in lithography system.
Flexray 照明技术是一种关键的分辨率增强技术,适用于 28 纳米及以下节点的沉浸式光刻机。Flexray 光瞳整形模块是这种光瞳整形技术的关键组件。该模块可通过微镜阵列(MMA)调整光束的角光谱,从而产生任意的照明模式。为了满足光学特性检测的要求,我们提出了一种多参数检测方法。通过对瞳孔平面上的强度分布成像,可同时获得光学性能参数,包括极性不平衡、开口角、方位角和椭圆度。使用 Flexray 瞳孔整形模块对照明形状进行了实验测量和分析。实验结果表明,这种测量方法可用于测试光刻系统中 Flexray 瞳孔整形模块的性能。
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引用次数: 0
Ultra-low-phase-noise Ka band microwave optoelectronic oscillator and its application in frequency conversion 超低相噪 Ka 波段微波光电振荡器及其在频率转换中的应用
Pub Date : 2023-12-18 DOI: 10.1117/12.3007575
Hao Zhang, Caibin Yu, Pengfei Qu, Lijun Sun
In this paper, we develop and demonstrate a proof-of-principle OEO, which features ultra-low phase noise in a Ka frequency band. The prototype of the whole OEO is in a cylindrical form. The optical fibers are wound on the outside, while all the optoelectronic devices are in the center. The fiber transmission noise is suppressed via phase modulation for the power redistribution. The spur-level improvement and steady state operation is guaranteed by dual-loop structure with 8.7 km and 11.6 km fiber spools, respectively. The optical power loss is reduced by the dual-output electro-optical intensity modulator (DEOM) instead of another 50:50 optical coupler. The noise floor for the fiber link from laser intensity and phase noises is suppressed by the balanced photodetector (PD) with specialized working conditions. Performance is investigated in detail. The OEO operates at the frequency of 30 GHz with the spur suppression of 74.6 dBc. The phase noise of -130.7 dBc/Hz (-149.1 dBc/Hz) @1 kHz (10 kHz), respectively, are achieved. The spectral purity is much higher than the current commercial signal source and equipment. Further, the developed OEO is applied to the frequency conversion. The RF signal, to be converted with a frequency of 7 GHz, is coupled into the OEO. Each beat results with OEO are observed clearly. All these results show that OEO has broad prospects in high precision infrastructure and projects.
在本文中,我们开发并演示了一种原理验证型 OEO,它在 Ka 频段具有超低相位噪声。整个 OEO 的原型为圆柱形。光纤缠绕在外侧,而所有光电器件则位于中心。光纤传输噪声通过相位调制进行功率再分配而得到抑制。双回路结构分别使用 8.7 千米和 11.6 千米的光纤线轴,保证了杂散级的改善和稳态运行。双输出光电强度调制器(DEOM)取代了另一个 50:50 光耦合器,从而减少了光功率损耗。具有特殊工作条件的平衡光电探测器(PD)抑制了光纤链路由激光强度和相位噪声引起的本底噪声。对性能进行了详细研究。OEO 工作频率为 30 GHz,杂散抑制为 74.6 dBc。相位噪声分别为 -130.7 dBc/Hz(-149.1 dBc/Hz)@1 kHz(10 kHz)。其频谱纯度远高于目前的商用信号源和设备。此外,开发的 OEO 还可用于频率转换。将频率为 7 GHz 的射频信号耦合到 OEO。可以清楚地观察到 OEO 的每个节拍结果。所有这些结果表明,OEO 在高精度基础设施和项目中具有广阔的应用前景。
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引用次数: 0
Effect of trapped charges and ionic charges distribution on n+-on-p HgCdTe photodiode properties 捕获电荷和离子电荷分布对 n+-on-p HgCdTe 光电二极管性能的影响
Pub Date : 2023-12-18 DOI: 10.1117/12.3006193
Yuebo Liu, QiuLing Qiu, Wenyuan Liao, Hao Niu, Jiahui Yan, Zongbei Dai, Teng Ma, Shaohua Yang, C. Lai
The HgCdTe Photodiode is the most basic and important unit of HgCdTe IRFPA (Infra-red focal plane array) detectors, which have been widely used in the fields of security, fire protection, remote sensing and deep space detection. For HgCdTe IRFPA, the trapped charges of the HgCdTe material and the ionic charges introduced during the preparation process are the factors, other than environmental stress, that have the greatest impact on IRFPA performance. The trapped charges come from the trap energy level in the HgCdTe material, which exist during the crystal growth process and can be improved by adjusting the growth conditions, but it cannot be completely avoided. The ionic charges introduced during the process are generally concentrated at the interface and surface of the HgCdTe material, which can be reduced by process improvement, but cannot be completely avoided. In order to analyze the mechanism of multiple charges affecting the HgCdTe detector performance, a type of n+ -on-p HgCdTe Photodiode is selected as the object of this work, and the effects of the concentration and distribution of charges on the carrier distribution and energy band structure of the n+ -on-p HgCdTe are analyzed in detail. The introduction of additional net charge relative to an ideal n+ -on-p HgCdTe Photodiode leads to the aggregation or scavenging of local carriers and affects the energy band structure near the charge, creating additional potential barriers or potential wells, which is likely to cause device degradation. On this basis, the optoelectronic properties of the HgCdTe Photodiode have been investigated under infrared radiation at a wavelength of 9.5 μm, as the light I–V characteristics, the dynamic resistance–voltage characteristics, band structure and carrier density distribution. According to the results of this work, the quasi-fixed charges introduced by defects or contamination will directly affect the generation rate of photogenerated carriers and affect the I–V and R–V characteristics of the HgCdTe Photodiode, leading to phenomena such as rising dark currents, decreasing spectral response, and decreasing quantum efficiency.
碲化镉汞光电二极管是碲化镉汞 IRFPA(红外焦平面阵列)探测器最基本、最重要的单元,已广泛应用于安防、消防、遥感和深空探测等领域。对于 HgCdTe IRFPA 而言,除环境应力外,HgCdTe 材料的阱电荷和制备过程中引入的离子电荷是对 IRFPA 性能影响最大的因素。俘获电荷来自 HgCdTe 材料中的俘获能级,它存在于晶体生长过程中,可以通过调整生长条件来改善,但无法完全避免。过程中引入的离子电荷一般集中在碲化镉汞材料的界面和表面,可以通过改进工艺来减少,但无法完全避免。为了分析多重电荷对 HgCdTe 检测器性能的影响机理,本研究选择了一种 n+ -on-p HgCdTe 光电二极管作为研究对象,详细分析了电荷的浓度和分布对 n+ -on-p HgCdTe 载流子分布和能带结构的影响。相对于理想的 n+ -on-p HgCdTe 光电二极管,额外净电荷的引入会导致局部载流子的聚集或清除,并影响电荷附近的能带结构,产生额外的势垒或势阱,从而可能导致器件退化。在此基础上,研究了 HgCdTe 光电二极管在波长为 9.5 μm 的红外辐射下的光 I-V 特性、动态电阻电压特性、能带结构和载流子密度分布。研究结果表明,缺陷或污染引入的准固定电荷会直接影响光生载流子的产生率,并影响 HgCdTe 光电二极管的 I-V 和 R-V 特性,从而导致暗电流上升、光谱响应降低和量子效率下降等现象。
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引用次数: 0
Influence of laser phase noise on photonics-aided terahertz wireless communication system 激光相位噪声对光子辅助太赫兹无线通信系统的影响
Pub Date : 2023-12-18 DOI: 10.1117/12.3005414
Zhigang Xin, Jiao Zhang, Min Zhu
We studied the influence of frequency and phase noise of semiconductor laser on the performance of photonics assisted terahertz wave system. The laser spectrum is Lorentzian intrinsic shape when only Gaussian white noise exists. The phase noise of the laser increases with the increase of the Lorentzian spectral linewidth of the laser. When considering 1 f noise, the laser frequency will be superimposed with 1 f noise. The 1 f noise in the low-frequency band will make the reconstructed laser spectrum of the whole frequency noise tend to be non-Lorentzian shape, which has a serious impact on system performance. When the system is affected by the resonance frequency, the side lobes appearing on both sides of the main peak of the laser spectrum also have a certain impact on the system performance. We simulated dual-polarization (DP) 16-ary quadrature amplitude modulation (16QAM) signal transmission up to 60Gbaud on a 50km standard single mode fiber (SSMF) at 300GHz.
我们研究了半导体激光器的频率和相位噪声对光子辅助太赫兹波系统性能的影响。当只有高斯白噪声时,激光光谱呈洛伦兹本征形状。激光器的相位噪声随着激光器洛伦兹光谱线宽的增加而增加。当考虑 1 f 噪声时,激光频率将与 1 f 噪声叠加。低频段的 1 f 噪声会使重构后的激光光谱全频噪声趋向于非洛伦兹形状,从而对系统性能产生严重影响。当系统受到谐振频率的影响时,激光频谱主峰两侧出现的边叶也会对系统性能产生一定的影响。我们模拟了双偏振(DP)16-ary 正交调幅(16QAM)信号在 300GHz 的 50km 标准单模光纤(SSMF)上传输高达 60Gbaud 的情况。
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引用次数: 0
Water-cube-based metasurface for broadband and tunable microwave absorption 用于宽带可调微波吸收的水立方元表面
Pub Date : 2023-12-18 DOI: 10.1117/12.3007619
Jin Qin, Shaowei He, Wei Li, Zhiwei Cheng, Weiming Zhu
Water exhibits excellent dielectric constant dispersion and high loss capacity in the microwave frequency range, making it an ideal material for broadband microwave absorbers. In this paper, a broadband water-cube-based metasurface microwave absorber (WMMA) is proposed, which is capable of regulating microwave absorption. The WMMA is comprised of the top layer of water-cube-based metasurface, the middle water absorption medium, and the bottom PMMA substrate. The impedance of the WMMA is determined by the design of the water-cube structure, resulting in a broadband and tunable microwave absorption coefficient. In the Ku band, the absorption intensity of the WMMA can cover the range from 71% to 99% by regulating h and p of the water-cube unit structure with a constant absorption coefficient over a wide frequency band. The broadband and tunable WMMA has the advantages of easy fabrication and low cost, rendering it highly promising for vast applications in the fields of electromagnetic shielding, stealth, and wireless communications.
水在微波频率范围内具有优异的介电常数分散性和高损耗能力,是宽带微波吸收器的理想材料。本文提出了一种能调节微波吸收的宽带水立方元表面微波吸收器(WMMA)。WMMA 由顶层的水立方元表面、中间的水吸收介质和底层的 PMMA 基底组成。WMMA 的阻抗由水立方结构的设计决定,因此具有宽带和可调的微波吸收系数。在 Ku 波段,通过调节水立方单元结构的 h 和 p,WMMA 的吸收强度可覆盖 71% 到 99% 的范围,并且在宽频带内具有恒定的吸收系数。宽带可调 WMMA 具有易于制造和成本低廉的优点,因此在电磁屏蔽、隐身和无线通信领域具有广阔的应用前景。
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引用次数: 0
Spatial-temporal joint constraints based tracking method for infrared UAV 基于时空联合约束的红外无人机跟踪方法
Pub Date : 2023-12-18 DOI: 10.1117/12.3006233
Xueli Xie, Jianxiang Xi, Ruitao Lu, Xiaogang Yang, Wenxin Xia
The misuse of UAVs has spurred the development of Anti-UAV technology. Infrared detector-based UAV tracking technology has become a research hotspot in the field of the Anti-UAV technology, but still faces the problem of tracking failure caused by background interference. To improve the accuracy and stability of infrared UAV tracking in the complex environments, a spatial-temporal joint constraints based infrared UAV tracking algorithm is proposed. First, a feature pyramid-based Siamese backbone is constructed to enhance the capability of feature extraction for infrared UAVs through cross-scale feature fusion. Next, a region proposal network based on spatio-temporal joint constraints is proposed. Under the constraints of template appearance features and target motion information, the location probability distribution of the infrared UAV is predicted in the entire image, and the prior anchor box is guided to focus on the candidate regions, realizing a soft adaptive search region selection mechanism. By focusing the search area, the anti-background interference capability of the local search strategy and the recapture capability of global search strategy are fused, which effectively mitigates the negative sample interference brought by global search and further enhances the discriminability of target features. Finally, the proposed algorithm is evaluated on the Anti-UAV dataset, achieving precision, success rate, and average precision of 89.5%, 64.9%, and 65.6%, respectively, with a tracking speed of 18.5 FPS. Compared with other advanced tracking algorithms, the proposed algorithm obtains better tracking performance and superior tracking performance in complex scenarios such as fast motion, thermal crossover and distractors interference.
无人机的滥用促进了反无人机技术的发展。基于红外探测器的无人机跟踪技术已成为反无人机技术领域的研究热点,但仍面临背景干扰导致跟踪失败的问题。为了提高复杂环境下红外无人机跟踪的精度和稳定性,本文提出了一种基于时空联合约束的红外无人机跟踪算法。首先,构建了基于特征金字塔的连体骨架,通过跨尺度特征融合增强红外无人机的特征提取能力。其次,提出了基于时空联合约束的区域提议网络。在模板外观特征和目标运动信息的约束下,预测红外无人机在整个图像中的位置概率分布,并引导先验锚箱聚焦于候选区域,实现软自适应搜索区域选择机制。通过聚焦搜索区域,融合了局部搜索策略的抗背景干扰能力和全局搜索策略的再捕获能力,有效缓解了全局搜索带来的负样本干扰,进一步提高了目标特征的判别能力。最后,在反无人机数据集上对所提出的算法进行了评估,精度、成功率和平均精度分别达到 89.5%、64.9% 和 65.6%,跟踪速度为 18.5 FPS。与其他先进的跟踪算法相比,所提出的算法获得了更好的跟踪性能,在快速运动、热交叉和干扰源干扰等复杂场景下的跟踪性能更优越。
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引用次数: 0
Fast separation method of misalignment errors for cylindrical full-surface interferometry 圆柱形全表面干涉测量法的偏差快速分离法
Pub Date : 2023-12-18 DOI: 10.1117/12.3008115
Hui Zhang, Fang Ji, Qian Liu
Right-angle conical mirror is widely used for wavefront conversion, which can construct a null interferometric optical path to achieve interferometric measurement of the cylindrical full-surface topography. However, the effect of the misalignment error on measurements is very significant, due to the difficulty in adjusting the position and attitude of the right-angle conical mirror and the measured cylindrical surface to the ideal state. The pure tilt misalignment errors will lead to parallel interference fringes. Based on this important finding, we propose a fast separation method of translation and tilt misalignment errors. First, adjust the relative translation of the right-angle conical mirror and the cylinder to be measured until all interference fringes are parallel. Then, perform measurement and remove the regular primary tilt from the result to separate the misalignment error effectively, so that the cylindrical full-surface topography is obtained. Under various misalignment errors, the extreme difference of all the PV values of the cylindrical surfaces measured by our method is less than 0.07λ. Experiments indicate that the proposed method can obtain essentially consistent measurements under different misalignment errors. Furthermore, the method is simple to operate and requires no data processing, laying the foundation for the practical application of cylindrical full-surface interferometry measurement.
直角锥面镜被广泛用于波前转换,它可以构建空干涉光路,实现对圆柱全表面形貌的干涉测量。然而,由于直角锥面镜和被测圆柱面的位置和姿态很难调整到理想状态,因此对准误差对测量的影响非常大。纯粹的倾斜不对准误差会导致平行干涉条纹。基于这一重要发现,我们提出了一种快速分离平移和倾斜失准误差的方法。首先,调整直角锥镜和待测圆柱体的相对平移,直至所有干涉条纹平行。然后,进行测量,并从测量结果中去除规则的主倾斜,从而有效分离不对准误差,得到圆柱全表面形貌。在各种不对准误差条件下,我们的方法测量的圆柱表面所有 PV 值的极差均小于 0.07λ。实验表明,在不同的不对中误差下,所提出的方法可以获得基本一致的测量结果。此外,该方法操作简单,无需数据处理,为圆柱全表面干涉测量的实际应用奠定了基础。
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引用次数: 0
Design of MZI electro-optic modulator on lithium niobate heterogeneous integration platforms 在铌酸锂异质集成平台上设计 MZI 光电调制器
Pub Date : 2023-12-18 DOI: 10.1117/12.3007772
Zhuoyun Li, Yang Chen, Qing Wang, Mingbin Yu, Shuxiao Wang, Yan Cai
Applying various functional materials to silicon to enhance the functionality of silicon photonics is a potential solution for silicon photonics platform under the requirement of CMOS compatibility. In this paper, two LN heterogeneous integration platforms have been proposed. One is the integration of LN film with a 220 nm top silicon SOI platform, in which the simulated results demonstrate that the designed modulator has a low half wave-voltage length product of 2.27 V·cm. And the other is the integration of LN film with a 400 nm top silicon nitride on insulator platform, in which the the proposed device achieves a VpiL of 2.58 V·cm and a 3-dB bandwidth of ~130 GHz with 7-mm long modulation region is verified by simulation.
在 CMOS 兼容性要求下,将各种功能材料应用到硅上以增强硅光子学的功能是硅光子学平台的一种潜在解决方案。本文提出了两种 LN 异构集成平台。一种是将 LN 薄膜与 220 nm 顶部硅 SOI 平台集成,模拟结果表明所设计的调制器具有 2.27 V-cm 的低半波电压长度积。另一种是将 LN 薄膜与顶部为 400 nm 的绝缘体氮化硅平台相集成,通过仿真验证,所提出的器件实现了 2.58 V-cm 的 VpiL 和 ~130 GHz 的 3-dB 带宽以及 7 mm 长的调制区域。
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引用次数: 0
期刊
Applied Optics and Photonics China
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