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Research on automatic assembly method of dual manipulator for large-scale segmented optical components 大型分段光学元件双机械手自动装配方法研究
Pub Date : 2023-12-18 DOI: 10.1117/12.3005430
Pei Li, Jie Wu, Chong Lv, Yue Xiao, Chunrui Zhang
Aiming at the problems of poor safety, reliability and assembly consistency of manual assembly of large segmented optical components, a dual manipulator automatic assembly method is proposed. First of all, a modular automatic assembly system is built, and the interactive cooperation mode of dual robotic arms is adopted to realize the function exchange of the two robotic arms and meet the requirements of a wider and larger visual identification and assembly range. Then, the 3D spatial grasping and assembly relationship is established by the “point cloud stitching” technology based on marker points, and the system calibration is completed. Finally, a “step-by-step” point-by-point approximation assembly strategy is proposed, which corrects the error through binocular vision guidance to improve the final assembly accuracy, which meets the requirements of high assembly accuracy and strong consistency of large-scale segmented optical components.
针对大型分段光学元件手工装配安全性、可靠性和装配一致性差的问题,提出了一种双机械手自动装配方法。首先,构建模块化自动装配系统,采用双机械臂交互式协作模式,实现双机械臂功能互换,满足更宽更大的视觉识别和装配范围要求。然后,通过基于标记点的 "点云拼接 "技术建立三维空间抓取和装配关系,并完成系统标定。最后,提出了 "分步式 "逐点逼近装配策略,通过双目视觉引导修正误差,提高最终装配精度,满足了大规模分段光学元件装配精度高、一致性强的要求。
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引用次数: 0
Fabrication of millimeter-scale crystal whispering gallery mode resonators 制作毫米级晶体耳语画廊模式谐振器
Pub Date : 2023-12-18 DOI: 10.1117/12.3006429
Junhan Liu, Tianliang Qu, Changxin Xiong
The Whispering Gallery Modes Resonators(WGMR) are specific electromagnetic modes confined in circular resonators, where light beams are guided along the circumferences of the resonators with very small losses by total internal reflections. WGMR is the core component of optical filters, ultra-narrow linewidth laser, microwave photoelectric oscillator, optical frequency comb, rubidium atomic clock etc and high-precision sensors. Q factor is defined as the ratio of the total energy of photons in WGMR to the loss lost in one propagation cycle. The energy loss of WGMR is discussed. The cutting dynamics model diagram was established based the cutting force model for turning. The key technology affecting WGMR’s Q factor was the fabrication process. The manufacture of ultra-high Q factor WGMR are realized through rough machining, ultra-precision turning and precision polishing. The processing of ultra-precision turning and precision polishing is reported in the paper. The important fabrication processing of WGMR is ultra-precision turning. The test results show that the Q value of WGMR is 1.5×10 9@1550nm by Q value measurement system. The surface roughness and shape error of WGMR are 0.6nm (Ra value) and 5.3nm (PV value) respectively, measured by white light interferometer.
耳语廊模式谐振器(WGMR)是局限在圆形谐振器中的特定电磁模式,光束沿着谐振器的圆周被引导,内部全反射的损耗非常小。WGMR 是光学滤波器、超窄线宽激光器、微波光电振荡器、光学频率梳、铷原子钟等和高精度传感器的核心部件。Q 因子的定义是光子在 WGMR 中的总能量与在一个传播周期中损失的能量之比。本文讨论了 WGMR 的能量损耗。在车削切削力模型的基础上建立了切削动力学模型图。影响 WGMR Q 因子的关键技术是制造工艺。超高 Q 值 WGMR 的制造是通过粗加工、超精密车削和精密抛光实现的。本文报告了超精密车削和精密抛光的加工过程。超精密车削是 WGMR 的重要制造工艺。测试结果表明,通过 Q 值测量系统,WGMR 的 Q 值为 1.5×10 9@1550nm。通过白光干涉仪测量,WGMR 的表面粗糙度和形状误差分别为 0.6nm (Ra 值)和 5.3nm(PV 值)。
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引用次数: 0
Performance measurement of FlexRay pupil shaping module in lithography system 光刻系统中 FlexRay 光瞳整形模块的性能测量
Pub Date : 2023-12-18 DOI: 10.1117/12.3008032
Zenghui Yang, Fang Zhang, Jingpei Hu, Zhenxin Huang, Aijun Zeng, Huijie Huang
The Flexray illumination technology is a crucial resolution enhancement technique for immersion photolithography machines operating at nodes of 28nm and below. The Flexray pupil shaping Module is the key component of this pupil shaping technique. This module enables the generation of arbitrary illumination modes by adjusting the angular spectrum of the beam through a micro mirror array (MMA). To meet the requirements of optical characteristic detection, a multiparameter detection method has been proposed. The optical performance parameters, including polar non-balance, opening angle, azimuth angle, and ellipticity, are simultaneously obtained by imaging the intensity distribution on the pupil plane. Experimental measurements and analysis of illumination shapes using the Flexray Pupil Shaping Module have been conducted. The experimental results demonstrate that this measurement method can be applied to test the performance of the Flexray Pupil Shaping Module in lithography system.
Flexray 照明技术是一种关键的分辨率增强技术,适用于 28 纳米及以下节点的沉浸式光刻机。Flexray 光瞳整形模块是这种光瞳整形技术的关键组件。该模块可通过微镜阵列(MMA)调整光束的角光谱,从而产生任意的照明模式。为了满足光学特性检测的要求,我们提出了一种多参数检测方法。通过对瞳孔平面上的强度分布成像,可同时获得光学性能参数,包括极性不平衡、开口角、方位角和椭圆度。使用 Flexray 瞳孔整形模块对照明形状进行了实验测量和分析。实验结果表明,这种测量方法可用于测试光刻系统中 Flexray 瞳孔整形模块的性能。
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引用次数: 0
Ultra-low-phase-noise Ka band microwave optoelectronic oscillator and its application in frequency conversion 超低相噪 Ka 波段微波光电振荡器及其在频率转换中的应用
Pub Date : 2023-12-18 DOI: 10.1117/12.3007575
Hao Zhang, Caibin Yu, Pengfei Qu, Lijun Sun
In this paper, we develop and demonstrate a proof-of-principle OEO, which features ultra-low phase noise in a Ka frequency band. The prototype of the whole OEO is in a cylindrical form. The optical fibers are wound on the outside, while all the optoelectronic devices are in the center. The fiber transmission noise is suppressed via phase modulation for the power redistribution. The spur-level improvement and steady state operation is guaranteed by dual-loop structure with 8.7 km and 11.6 km fiber spools, respectively. The optical power loss is reduced by the dual-output electro-optical intensity modulator (DEOM) instead of another 50:50 optical coupler. The noise floor for the fiber link from laser intensity and phase noises is suppressed by the balanced photodetector (PD) with specialized working conditions. Performance is investigated in detail. The OEO operates at the frequency of 30 GHz with the spur suppression of 74.6 dBc. The phase noise of -130.7 dBc/Hz (-149.1 dBc/Hz) @1 kHz (10 kHz), respectively, are achieved. The spectral purity is much higher than the current commercial signal source and equipment. Further, the developed OEO is applied to the frequency conversion. The RF signal, to be converted with a frequency of 7 GHz, is coupled into the OEO. Each beat results with OEO are observed clearly. All these results show that OEO has broad prospects in high precision infrastructure and projects.
在本文中,我们开发并演示了一种原理验证型 OEO,它在 Ka 频段具有超低相位噪声。整个 OEO 的原型为圆柱形。光纤缠绕在外侧,而所有光电器件则位于中心。光纤传输噪声通过相位调制进行功率再分配而得到抑制。双回路结构分别使用 8.7 千米和 11.6 千米的光纤线轴,保证了杂散级的改善和稳态运行。双输出光电强度调制器(DEOM)取代了另一个 50:50 光耦合器,从而减少了光功率损耗。具有特殊工作条件的平衡光电探测器(PD)抑制了光纤链路由激光强度和相位噪声引起的本底噪声。对性能进行了详细研究。OEO 工作频率为 30 GHz,杂散抑制为 74.6 dBc。相位噪声分别为 -130.7 dBc/Hz(-149.1 dBc/Hz)@1 kHz(10 kHz)。其频谱纯度远高于目前的商用信号源和设备。此外,开发的 OEO 还可用于频率转换。将频率为 7 GHz 的射频信号耦合到 OEO。可以清楚地观察到 OEO 的每个节拍结果。所有这些结果表明,OEO 在高精度基础设施和项目中具有广阔的应用前景。
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引用次数: 0
Fast separation method of misalignment errors for cylindrical full-surface interferometry 圆柱形全表面干涉测量法的偏差快速分离法
Pub Date : 2023-12-18 DOI: 10.1117/12.3008115
Hui Zhang, Fang Ji, Qian Liu
Right-angle conical mirror is widely used for wavefront conversion, which can construct a null interferometric optical path to achieve interferometric measurement of the cylindrical full-surface topography. However, the effect of the misalignment error on measurements is very significant, due to the difficulty in adjusting the position and attitude of the right-angle conical mirror and the measured cylindrical surface to the ideal state. The pure tilt misalignment errors will lead to parallel interference fringes. Based on this important finding, we propose a fast separation method of translation and tilt misalignment errors. First, adjust the relative translation of the right-angle conical mirror and the cylinder to be measured until all interference fringes are parallel. Then, perform measurement and remove the regular primary tilt from the result to separate the misalignment error effectively, so that the cylindrical full-surface topography is obtained. Under various misalignment errors, the extreme difference of all the PV values of the cylindrical surfaces measured by our method is less than 0.07λ. Experiments indicate that the proposed method can obtain essentially consistent measurements under different misalignment errors. Furthermore, the method is simple to operate and requires no data processing, laying the foundation for the practical application of cylindrical full-surface interferometry measurement.
直角锥面镜被广泛用于波前转换,它可以构建空干涉光路,实现对圆柱全表面形貌的干涉测量。然而,由于直角锥面镜和被测圆柱面的位置和姿态很难调整到理想状态,因此对准误差对测量的影响非常大。纯粹的倾斜不对准误差会导致平行干涉条纹。基于这一重要发现,我们提出了一种快速分离平移和倾斜失准误差的方法。首先,调整直角锥镜和待测圆柱体的相对平移,直至所有干涉条纹平行。然后,进行测量,并从测量结果中去除规则的主倾斜,从而有效分离不对准误差,得到圆柱全表面形貌。在各种不对准误差条件下,我们的方法测量的圆柱表面所有 PV 值的极差均小于 0.07λ。实验表明,在不同的不对中误差下,所提出的方法可以获得基本一致的测量结果。此外,该方法操作简单,无需数据处理,为圆柱全表面干涉测量的实际应用奠定了基础。
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引用次数: 0
Analysis and implementation of multi-cooperative target location algorithm based on distance measurement 基于距离测量的多合作目标定位算法的分析与实现
Pub Date : 2023-12-18 DOI: 10.1117/12.3006994
Shixiong Luo, Chuangang Xu, Jiangpeng Song
Aiming at the problem of reconnaissance and positioning of ground targets by airborne photoelectric detection equipment, this paper firstly studies the problem and model of multi-cooperative positioning based on distance measurement, and analyzes the factors affecting the positioning accuracy. Then, three solving methods of multicooperative target location based on distance measurement are proposed: least square algorithm, traditional particle swarm optimization algorithm and improved particle swarm optimization algorithm based on least square. The positioning accuracy and efficiency of the above three algorithms are simulated and compared in MATLAB, and the above algorithms are verified by flight test data. The experimental results show that the improved particle swarm optimization algorithm based on least squares has high computational accuracy and efficiency for solving the location equation of cooperative distance measurement.
针对机载光电探测设备对地面目标的侦察定位问题,本文首先研究了基于距离测量的多目标协同定位问题和模型,分析了影响定位精度的因素。然后,提出了基于距离测量的多目标协同定位的三种求解方法:最小平方算法、传统粒子群优化算法和基于最小平方的改进粒子群优化算法。在 MATLAB 中对上述三种算法的定位精度和效率进行了仿真和比较,并通过飞行测试数据对上述算法进行了验证。实验结果表明,基于最小二乘法的改进粒子群优化算法在求解协同测距的定位方程时具有较高的计算精度和效率。
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引用次数: 0
A new method of multi-target tracking in wide-area for dealing with the threat of small celestial bodies in space 应对空间小天体威胁的广域多目标跟踪新方法
Pub Date : 2023-12-18 DOI: 10.1117/12.3007852
Fei Yu, Shuai Hou, Dan Hou, Han Zhang, Nihui Xie, Liu Yang, ChunHui Liao
The field of view of optical imaging systems is limited, making it difficult to meet the needs of continuous tracking of multiple targets in different orientations in a wide spatial domain, even in the 4 π spatial domain. Therefore, based on the two-dimensional tracking rotating platform, an unscented Kalman motion estimation algorithm based on target motion characteristics and an optimization algorithm for multi-objective switching tracking based on motion target matching, tracking convergence, and platform rotation ability have been proposed. The ultimate goal is to achieve continuous tracking of multiple spatial targets over a wide area. The development of a light and small space two-dimensional rotating platform tracking system is completed. The target detection coverage achieved is better than ± 180° in both pitch and azimuth directions. Continuous observation and tracking of better than 8 targets has been achieved through target motion estimation and switching tracking methods.
光学成像系统的视场是有限的,因此难以满足在宽空间域,甚至是 4 π 空间域内对不同方位的多个目标进行连续跟踪的需求。因此,在二维跟踪旋转平台的基础上,提出了一种基于目标运动特征的无特征卡尔曼运动估计算法,以及一种基于运动目标匹配、跟踪收敛性和平台旋转能力的多目标切换跟踪优化算法。最终目标是实现大范围内多个空间目标的连续跟踪。完成了轻型小空间二维旋转平台跟踪系统的研制。所实现的目标探测覆盖范围在俯仰方向和方位角方向均优于 ± 180°。通过目标运动估计和切换跟踪方法,实现了对优于 8 个目标的连续观测和跟踪。
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引用次数: 0
Design of MZI electro-optic modulator on lithium niobate heterogeneous integration platforms 在铌酸锂异质集成平台上设计 MZI 光电调制器
Pub Date : 2023-12-18 DOI: 10.1117/12.3007772
Zhuoyun Li, Yang Chen, Qing Wang, Mingbin Yu, Shuxiao Wang, Yan Cai
Applying various functional materials to silicon to enhance the functionality of silicon photonics is a potential solution for silicon photonics platform under the requirement of CMOS compatibility. In this paper, two LN heterogeneous integration platforms have been proposed. One is the integration of LN film with a 220 nm top silicon SOI platform, in which the simulated results demonstrate that the designed modulator has a low half wave-voltage length product of 2.27 V·cm. And the other is the integration of LN film with a 400 nm top silicon nitride on insulator platform, in which the the proposed device achieves a VpiL of 2.58 V·cm and a 3-dB bandwidth of ~130 GHz with 7-mm long modulation region is verified by simulation.
在 CMOS 兼容性要求下,将各种功能材料应用到硅上以增强硅光子学的功能是硅光子学平台的一种潜在解决方案。本文提出了两种 LN 异构集成平台。一种是将 LN 薄膜与 220 nm 顶部硅 SOI 平台集成,模拟结果表明所设计的调制器具有 2.27 V-cm 的低半波电压长度积。另一种是将 LN 薄膜与顶部为 400 nm 的绝缘体氮化硅平台相集成,通过仿真验证,所提出的器件实现了 2.58 V-cm 的 VpiL 和 ~130 GHz 的 3-dB 带宽以及 7 mm 长的调制区域。
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引用次数: 0
Visual aiming and positioning system based on diffraction effect 基于衍射效应的视觉瞄准和定位系统
Pub Date : 2023-12-18 DOI: 10.1117/12.2692331
Fusheng Li, Zheng-mao Xie
In order to overcome the shortcomings of the aiming system in inertial confinement fusion device, such as small field of view, long preparation time and large manual interpretation error, a vision aiming system based on diffraction effect is designed. After the diffraction of the reflected light of the target, the starlight detection device is used to detect the center of the target automatically, which reduces the manual interpretation error. The system uses forward illumination to improve imaging integrity, uses quarter-wave plate and polarization splitter to improve system energy utilization, uses diffraction effect and starlight detector to improve aiming accuracy up to 9.52 μm, which reduces preparation time. The quality of illumination system and diffraction system is evaluated by using spot diagram in Zemax, and the simulation of the system is carried out. The results meet the engineering requirements.
为了克服惯性约束聚变装置中瞄准系统视场小、准备时间长、人工判读误差大等缺点,设计了一种基于衍射效应的视觉瞄准系统。目标反射光经过衍射后,利用星光检测装置自动检测目标中心,减少了人工判读误差。该系统采用正向照明提高成像完整性,采用四分之一波板和偏振分光器提高系统能量利用率,利用衍射效应和星光检测器提高瞄准精度达 9.52 μm,减少了准备时间。利用 Zemax 中的光斑图对照明系统和衍射系统的质量进行了评估,并对系统进行了仿真。结果符合工程要求。
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引用次数: 0
Diffusion of electron clouds in high-speed ultraviolet photonic imaging detectors 高速紫外线光子成像探测器中的电子云扩散
Pub Date : 2023-12-18 DOI: 10.1117/12.3007806
Jinyao Duan, Jinkun Zheng, Yang Yang, Yuchao Song, Anpeng Lai, Bo Wang, Weiwei Cao, Yonglin Bai
In this paper, we mainly study the problem of electron cloud diffusion in high-speed ultraviolet photonic imaging detectors. In this paper, the size of the electron cloud transmitted by the microchannel plate and the anode in the high-speed ultraviolet photon imaging detector is studied by simulation, including the bias angle, pore diameter, voltage (U) and distance between MCP and anode (l) on the electron cloud received by the anode. the diffusion radius of the electron cloud increases with the increase of the bias angle, and the voltage (U) and the distance (l) between the MCP and the anode on the electron cloud received by the anode. The research shows that the diffusion radius of the electron cloud increases with the increase of the bias angle, the diffusion radius of the electron cloud. When U is larger, the energy of electron cloud is also higher. When the voltage increases to 1900V, the electron movement speed increases linearly with the increase of U. Moreover, the diffusion distance of the electron cloud radius increases with the increase of the transmission distance l. When the distance is 2 mm, a maximum electron diffusion radius is obtained. When the bias angle is 10°, the pore diameter is 10um, the voltage is 2000V, and the distance l is 0.5mm, the diffusion ratio of the electron cloud is 5.5.
本文主要研究高速紫外光子成像探测器中的电子云扩散问题。本文通过仿真研究了高速紫外光子成像探测器中微通道板和阳极传输的电子云的大小,包括偏置角、孔径、电压(U)和 MCP 与阳极之间的距离(l)对阳极接收到的电子云的影响,电子云的扩散半径随偏置角的增大而增大,电压(U)和 MCP 与阳极之间的距离(l)对阳极接收到的电子云的影响。研究表明,电子云的扩散半径随偏压角的增大而增大,电子云的扩散半径随偏压角的增大而增大。当 U 越大时,电子云的能量也越高。此外,电子云半径的扩散距离随传输距离 l 的增加而增加。当传输距离为 2 mm 时,电子扩散半径最大。当偏置角为 10°、孔径为 10um、电压为 2000V、传输距离 l 为 0.5mm 时,电子云的扩散比为 5.5。
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引用次数: 0
期刊
Applied Optics and Photonics China
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