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Diffractive Optics and Micro-Optics最新文献

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Fabrication of continuous-relief micro-optics: progress in laser writing and replication technology 连续浮雕微光学的制作:激光书写和复制技术的进展
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.dtha.2
M. T. Gale, T. Hessler, R. Kunz, H. Teichmann
Laser writing technology for the fabrication of continuous-relief micro-optical elements is being developed at a number of institutes worldwide [1,2]. It represents a very powerful and flexible fabrication technique and fits well to replication technology in which the resist surface-relief microstructure can be electroformed and replicated into plastic material. Fig. 1 illustrates the essential production steps involved.
激光书写技术用于制造连续浮雕微光学元件在世界范围内的一些研究机构正在开发[1,2]。它代表了一种非常强大和灵活的制造技术,非常适合于复制技术,其中电阻表面浮雕微观结构可以电铸并复制到塑料材料中。图1说明了所涉及的基本生产步骤。
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引用次数: 3
Novel Polarizers Using 2D Photonic Band Gap Structures 利用二维光子带隙结构的新型偏振器
Pub Date : 1900-01-01 DOI: 10.1364/domo.1998.dtud.10
T. Hamano, M. Izutsu
Photonic band gap (PBG) structures have been studied due to interests in the control of spontaneous emission as well as due to their applications in optical devices. Some applications of PBG structures have been proposed, such as reflectors [1], cavities [2], waveguides [3] etc. In order to utilize them in these applications, 2-dimensional (2D) PBG structures are required to producing ‘complete’ band gaps. Thus, their necessary band gaps must be wide in any direction on plane and must operate in two orthogonal polarization states which are parallel and perpendicular to the pillars (or holes) of the structures.
光子带隙(PBG)结构由于其在光学器件中的应用以及对自发发射控制的兴趣而受到研究。提出了PBG结构的一些应用,如反射器[1]、空腔[2]、波导[3]等。为了在这些应用中利用它们,需要二维(2D) PBG结构来产生“完整”的带隙。因此,它们的必要带隙必须在平面上的任何方向上都很宽,并且必须在平行和垂直于结构柱(或孔)的两个正交偏振态下工作。
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引用次数: 0
Flattop Beam Generation Using An Iteratively-Designed Binary Phase Grating 采用迭代设计的二元相位光栅产生平顶波束
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.jtub.12
J. Amako, T. Sonehara
Various approaches for flattop beam generation have been reported.1-4) Here we focus on a grating approach in which a phase grating is used to modulate a beam wavefront and shape its Fourier spectrum. We designed a grating-type beam shaper in an iterative manner, where an optimal grating phase is sought under the constraints of amplitude and phase both in the grating and Fourier planes.
平顶波束产生的各种方法已经被报道过。1-4)在这里,我们关注的是一种光栅方法,在这种方法中,相位光栅被用来调制波束波前并形成其傅立叶谱。本文采用迭代的方法设计了一种光栅型光束整形器,在光栅和傅里叶平面的振幅和相位约束下寻求光栅的最佳相位。
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引用次数: 0
Applications of Guided-mode resonant filters to VCSELs 导模谐振滤波器在vcsel中的应用
Pub Date : 1900-01-01 DOI: 10.1364/domo.1998.dmb.1
R. Morgan, J. Cox, Robert Wilke, C. Ford
Within the last 2 years Vertical Cavity Surface Emitting Lasers (VCSELs) have emerged from the research laboratory into the commercial marketplace as the component of choice for numerous applications, supplanting both LED and edge-emitting sources. The enormous success of VCSELs is attributed, in part, to their premium performance, producibility, and packaging perks. Namely, significantly lower operating currents and power dissipation at Gb/s data rates; wafer-level batch fabrication, testing, and utilization of the existing LED and III-V manufacturing infrastructure; more efficient coupling into fibers and simplified drive electronics.1 These attributes result directly from the laser’s inherent vertical geometry. This vertical cavity is essentially a zero-order thin-film Fabiy-Perot transmission filter, utilizing integral quarter-wave high-reflectance (> 99%) interference stacks referred to as distributed Bragg reflectors (DBRs). On a parallel front, it has recently been suggested that high reflectivity possible from guided-mode grating resonant filters (GMGRFs)2–4 may likewise serve to construct the high-Finesse vertical cavity, requiring minimal layers. These "resonant reflectors" may be designed to provide ultra-narrow bandwidth filters for a selected center wavelength and polarization with ≅100% in-band reflectance and ~30dB sideband suppression. These are very attractive properties for VCSELs and offer the potential as an enabling tool for modal engineering.
在过去的两年里,垂直腔面发射激光器(VCSELs)已经从研究实验室进入商业市场,成为众多应用的首选组件,取代了LED和边缘发射源。vcsel的巨大成功部分归功于其卓越的性能、可生产性和包装优势。即在Gb/s数据速率下显著降低工作电流和功耗;晶圆级批量制造,测试和利用现有的LED和III-V制造基础设施;更有效地耦合到光纤和简化驱动电子这些属性直接来自激光固有的垂直几何形状。这个垂直腔本质上是一个零阶薄膜法比-珀罗传输滤波器,利用被称为分布式布拉格反射器(DBRs)的积分四分之一波高反射(> 99%)干涉堆叠。在平行前沿,最近有人提出,导模光栅谐振滤波器(GMGRFs)可能具有高反射率2-4,同样可以用于构建高精细度的垂直腔,所需的层数最少。这些“谐振反射器”可被设计为为选定的中心波长和偏振提供超窄带宽滤波器,带内反射率为100%,边带抑制为~30dB。对于vcsel来说,这些都是非常有吸引力的特性,并提供了作为模态工程启用工具的潜力。
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引用次数: 2
Ion Exchange in Glass for the Fabrication of Continuous-Phase Diffractive Optical Elements 玻璃中的离子交换用于制造连续相位衍射光学元件
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.dmb.5
R. Salmio, J. Saarinen, H. Saarikoski, J. Turunen, A. Tervonen
Diffractive phase elements, which only modulate the phase of an incident wavefront, provide high diffraction efficiencies. Such elements can be fabricated in the form of surface-relief profiles by a variety of methods including selective etching or material deposition, and diamond turning. Binary surface-relief elements have diffraction efficiencies of the order of 30–75% depending on the symmetries of the signal, while efficiencies even in excess of 90% are only possible if one employs continuous surface profiles fabricated, e.g., by direct-write laser beam or electron-beam lithography. Then, however, accurate exposure control is needed. Continuous surface profiles can be approximated by multilevel profiles, which may be fabricated by successive lithography steps, where careful mask alignment is then required.
衍射相位元件,它只调制入射波前的相位,提供高衍射效率。这些元件可以通过各种方法,包括选择性蚀刻或材料沉积,以及金刚石车削,以表面浮雕轮廓的形式制造。根据信号的对称性,二元表面浮雕元件的衍射效率为30-75%,而效率甚至超过90%只有在使用连续表面轮廓时才有可能,例如,通过直接写入激光束或电子束光刻。然后,需要精确的曝光控制。连续的表面轮廓可以通过多层轮廓来近似,多层轮廓可以通过连续的光刻步骤来制造,然后需要仔细的掩模对准。
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引用次数: 1
One-Step fabrication of a high-efficiency flat-top beam shaper 高效平顶梁成型机的一步制造
Pub Date : 1900-01-01 DOI: 10.1364/domo.1998.dthc.4
X. Huang, Michael R. Wang
A compact beam shaper is required to efficiently convert coherent Gaussian beam into a flat-top beam for applications such as optical processing, laser radar, laser microfabrication, and laser scanning. A number of techniques for laser beam shaping have been developed so far [1-3]. Directly truncating the Gaussian beam with an aperture and weighting the Gaussian beam with a neutral density filter of proper amplitude transmittance profile have very poor energy efficiency. Binary shaper based on interlaced diffraction gratings suffers from its limited diffraction efficiency. Diffractive optics beam shaper fabricated by computer-generated hologram technique, by only changing the propagation phase patterns prior to diffraction focusing, is an effective beam shaper method.
在光学加工、激光雷达、激光微加工和激光扫描等应用中,需要一种紧凑的光束整形器来有效地将相干高斯光束转换为平顶光束。到目前为止,已经开发了许多激光光束整形技术[1-3]。直接用孔径截断高斯光束,用适当幅度透射率分布的中性密度滤波器对高斯光束进行加权,其能量效率很差。基于交错衍射光栅的二元成形器存在衍射效率有限的问题。利用计算机生成全息技术制造的衍射光学光束整形器是一种有效的光束整形方法,它在衍射聚焦之前只改变传播相图。
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引用次数: 0
Submicron gratings with dielectric overcoat: performance and stability 具有介电涂层的亚微米光栅:性能和稳定性
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.dwc.5
C. Heine, R. Morf, M. T. Gale
Submicron gratings show increasing potential in applied optics, often presenting attractive alternatives to thin film technology solutions. Gratings on light-weight plastic materials can replace heavy and expensive glass devices. Embossing techniques can be used for cheap mass production. The coating of gratings with thin films leads to additional degrees of freedom for component design. For practical applications, it is important not only to investigate the possibilities of such structures, but also the limiting factors such as fabrication considerations and stability properties.
亚微米光栅在应用光学中显示出越来越大的潜力,通常是薄膜技术解决方案的有吸引力的替代品。在轻质塑料材料上的光栅可以取代笨重而昂贵的玻璃器件。压花技术可以用于廉价的批量生产。用薄膜涂覆光栅为元件设计提供了额外的自由度。在实际应用中,不仅要研究这种结构的可能性,而且要考虑制造考虑和稳定性等限制因素。
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引用次数: 0
Effective medium theory of symmetric two-dimensional subwavelength periodic structures 对称二维亚波长周期结构的有效介质理论
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.jtub.19
P. Lalanne
Recent experimental and theoretical investigations have shown that periodic subwavelength structured surfaces with periods small compared to the illumination wavelength behave as homogeneous medium, and have suggested interesting applications, such as fabrication of anti-reflection coatings1,2,3, quarter wave plates4, polarizers5, and graded-phase diffractive elements6. The replacement of the periodic structure by a homogeneous medium is often referred as homogenization or effective medium theory (EMT). EMT can be applied to a large variety of physical material properties, such as diffusion constant, magnetic permeability, thermal conductivity, etc. To facilitate the design and fabrication of artificial dielectric elements, one must be able to relate the effective index of the subwavelength structured surface in a simple way.
最近的实验和理论研究表明,周期小于照明波长的周期性亚波长结构表面表现为均匀介质,并提出了有趣的应用,如制造抗反射涂层1,2,3,四分之一波片4,偏振器5和渐变相位衍射元件6。用均匀介质代替周期性结构通常被称为均匀化或有效介质理论(EMT)。EMT可应用于材料的各种物理性质,如扩散常数、磁导率、导热系数等。为了方便人工介电元件的设计和制造,必须能够以一种简单的方式将亚波长结构表面的有效折射率联系起来。
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引用次数: 0
Subwavelength Structured Narrow-band Integrated Optical Grating Filters 亚波长结构窄带集成光栅滤波器
Pub Date : 1900-01-01 DOI: 10.1364/domo.1998.dmb.5
E. Grann, D. Holcomb, R. Zuhr, M. Moharam
A unique type of narrow-band integrated optical filter is investigated based on embedding a subwavelength resonant grating structure within a planar waveguide. Current integrated narrow-band optical filters are limited by their size, density of devices that can be produced, overall performance, and ability to be actively altered for tuning and modulation purposes. In contrast, the integrated optical filters described in this work can have extremely narrow bandwidths - on the order of a few angstroms. Also, their compact size enables multiple filters to be integrated in a single high density device for signal routing or wavelength discrimination. Manipulating any of the resonant structure’s parameters will tune the output response of the filter, which can be used for modulation or switching applications.
研究了一种基于在平面波导中嵌入亚波长谐振光栅结构的窄带集成滤光片。目前集成的窄带滤光片受限于它们的尺寸、可生产的器件密度、总体性能以及主动改变调谐和调制目的的能力。相比之下,在这项工作中描述的集成光学滤光片可以具有极窄的带宽-在几埃的数量级上。此外,它们紧凑的尺寸使多个滤波器能够集成在一个单一的高密度器件中,用于信号路由或波长识别。操纵任何谐振结构的参数将调整滤波器的输出响应,这可以用于调制或开关应用。
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引用次数: 0
Diffraction Efficiency of High-NA Continuous-Relief Diffractive Lenses 高na连续浮雕衍射透镜的衍射效率
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.dtud.3
M. Rossi, C. Blough, D. Raguin, E. Popov, D. Maystre
Diffractive lenses are key elements in a large variety of optical systems. In hybrid refractive/diffractive optical systems they are used as powerful elements for aberration correction. Other applications, such as fiber coupling and optoelectronic devices, benefit from the fact that diffractive structures are thin and lightweight, enabling very compact systems. In addition, low-cost replication processes with a high profile fidelity make the use of diffractive lenses in prototype systems as well as in volume production very attractive.
衍射透镜是各种光学系统中的关键元件。在混合折射/衍射光学系统中,它们被用作强大的像差校正元件。其他应用,如光纤耦合和光电子器件,受益于衍射结构薄而轻的事实,使非常紧凑的系统。此外,具有高保真度的低成本复制过程使得衍射透镜在原型系统以及批量生产中的使用非常有吸引力。
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引用次数: 0
期刊
Diffractive Optics and Micro-Optics
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