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Fabrication and Simulation of Blazed Gratings with Inherent Antireflection Structured Surfaces 具有固有增透结构表面的燃烧光栅的制造与仿真
Pub Date : 1900-01-01 DOI: 10.1364/domo.1998.dtub.2
F. Nikolajeff, C. Heine
Subwavelength structured surfaces can be used as very efficient antireflection (AR) coatings, narrowband filters or polarizing elements [1]. In industry, AR coatings and filters are typically produced by using thin-film techniques. Sub wavelength structures can avoid many of the problems encountered in thin-film approaches, and be replicated at low cost. Subwavelength structures also have the potential to be combined with micro-optical elements such as lenses, gratings or kinoforms. However, previous studies have either been focused on the analysis of pure subwavelength gratings [2] or micro-optical elements coated with thin films [3].
亚波长结构表面可以用作非常有效的增透(AR)涂层、窄带滤光片或偏振元件[1]。在工业中,AR涂层和滤光片通常是通过使用薄膜技术生产的。亚波长结构可以避免薄膜方法中遇到的许多问题,并且可以以低成本复制。亚波长结构也有可能与微光学元件如透镜、光栅或感光型相结合。然而,以往的研究要么集中在分析纯亚波长光栅[2],要么集中在分析涂有薄膜的微光学元件[3]。
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引用次数: 0
Grating Coupler utilizing third-order Diffraction 利用三阶衍射的光栅耦合器
Pub Date : 1900-01-01 DOI: 10.1364/domo.1998.dmd.4d
S. Ura, Takayoshi Fujii, T. Suhara, H. Nishihara
A grating coupler [1,2] is useful for exciting a guided wave or taking out a guided wave into the air, and is one of the key components in constructing integrated optic devices [3]. A grating coupler utilizing higher-order diffraction has much longer grating period than that of a 1st-order grating coupler, and is attractive from a view point of fabrication and design flexibility especially for a case using a short wavelength or a high guided-mode index. However, a coupling efficiency of the usual higher-order diffraction is too low to be utilized in practical applications. We reported [4] a proposal and design consideration of a high-efficiency 3rd-order grating coupler for application to a GaAs/AlGaAs waveguide. In this report, an efficiency enhancement technique for 3rd-order grating coupler is demonstrated experimentally for the first time. Wavelength of 0.82μm and a glass waveguide are used for the demonstration.
光栅耦合器[1,2]用于激发导波或将导波带入空气中,是构建集成光学器件的关键部件之一[3]。利用高阶衍射的光栅耦合器比一阶光栅耦合器具有更长的光栅周期,并且从制造和设计灵活性的角度来看具有吸引力,特别是在使用短波长或高导模折射率的情况下。然而,通常的高阶衍射的耦合效率太低,无法在实际应用中得到充分利用。我们报道了[4]一种用于GaAs/AlGaAs波导的高效三阶光栅耦合器的建议和设计考虑。本文首次对三阶光栅耦合器的效率提高技术进行了实验验证。采用波长为0.82μm的玻璃波导进行演示。
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引用次数: 0
Submicron gratings with dielectric overcoat: performance and stability 具有介电涂层的亚微米光栅:性能和稳定性
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.dwc.5
C. Heine, R. Morf, M. T. Gale
Submicron gratings show increasing potential in applied optics, often presenting attractive alternatives to thin film technology solutions. Gratings on light-weight plastic materials can replace heavy and expensive glass devices. Embossing techniques can be used for cheap mass production. The coating of gratings with thin films leads to additional degrees of freedom for component design. For practical applications, it is important not only to investigate the possibilities of such structures, but also the limiting factors such as fabrication considerations and stability properties.
亚微米光栅在应用光学中显示出越来越大的潜力,通常是薄膜技术解决方案的有吸引力的替代品。在轻质塑料材料上的光栅可以取代笨重而昂贵的玻璃器件。压花技术可以用于廉价的批量生产。用薄膜涂覆光栅为元件设计提供了额外的自由度。在实际应用中,不仅要研究这种结构的可能性,而且要考虑制造考虑和稳定性等限制因素。
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引用次数: 0
Ion Exchange in Glass for the Fabrication of Continuous-Phase Diffractive Optical Elements 玻璃中的离子交换用于制造连续相位衍射光学元件
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.dmb.5
R. Salmio, J. Saarinen, H. Saarikoski, J. Turunen, A. Tervonen
Diffractive phase elements, which only modulate the phase of an incident wavefront, provide high diffraction efficiencies. Such elements can be fabricated in the form of surface-relief profiles by a variety of methods including selective etching or material deposition, and diamond turning. Binary surface-relief elements have diffraction efficiencies of the order of 30–75% depending on the symmetries of the signal, while efficiencies even in excess of 90% are only possible if one employs continuous surface profiles fabricated, e.g., by direct-write laser beam or electron-beam lithography. Then, however, accurate exposure control is needed. Continuous surface profiles can be approximated by multilevel profiles, which may be fabricated by successive lithography steps, where careful mask alignment is then required.
衍射相位元件,它只调制入射波前的相位,提供高衍射效率。这些元件可以通过各种方法,包括选择性蚀刻或材料沉积,以及金刚石车削,以表面浮雕轮廓的形式制造。根据信号的对称性,二元表面浮雕元件的衍射效率为30-75%,而效率甚至超过90%只有在使用连续表面轮廓时才有可能,例如,通过直接写入激光束或电子束光刻。然后,需要精确的曝光控制。连续的表面轮廓可以通过多层轮廓来近似,多层轮廓可以通过连续的光刻步骤来制造,然后需要仔细的掩模对准。
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引用次数: 1
Effective medium theory of symmetric two-dimensional subwavelength periodic structures 对称二维亚波长周期结构的有效介质理论
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.jtub.19
P. Lalanne
Recent experimental and theoretical investigations have shown that periodic subwavelength structured surfaces with periods small compared to the illumination wavelength behave as homogeneous medium, and have suggested interesting applications, such as fabrication of anti-reflection coatings1,2,3, quarter wave plates4, polarizers5, and graded-phase diffractive elements6. The replacement of the periodic structure by a homogeneous medium is often referred as homogenization or effective medium theory (EMT). EMT can be applied to a large variety of physical material properties, such as diffusion constant, magnetic permeability, thermal conductivity, etc. To facilitate the design and fabrication of artificial dielectric elements, one must be able to relate the effective index of the subwavelength structured surface in a simple way.
最近的实验和理论研究表明,周期小于照明波长的周期性亚波长结构表面表现为均匀介质,并提出了有趣的应用,如制造抗反射涂层1,2,3,四分之一波片4,偏振器5和渐变相位衍射元件6。用均匀介质代替周期性结构通常被称为均匀化或有效介质理论(EMT)。EMT可应用于材料的各种物理性质,如扩散常数、磁导率、导热系数等。为了方便人工介电元件的设计和制造,必须能够以一种简单的方式将亚波长结构表面的有效折射率联系起来。
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引用次数: 0
Off-axis Talbot effect and array generation in planar optics 平面光学中的离轴塔尔博特效应与阵列生成
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.jtub.2
M. Testorf, J. Jahns, N. Khilo, A. M. Goncharenko
Recently, planar optics was introduced as a concept for the micro integration of free space optics1. For the planar optics approach passive optical elements are arranged on the surface of a thick transparent substrate. The light signal travels within the substrate along a folded zigzag path, reflected at the surfaces of the substrate. Since planar optics was first proposed, various applications were successfully demonstrated, like integrated split and shift modules2 or integrated optical imaging systems3.
近年来,平面光学作为自由空间光学微集成的一个概念被引入。对于平面光学方法,将无源光学元件设置在厚透明衬底的表面上。光信号沿折叠之字形路径在衬底内传播,在衬底表面反射。自从平面光学首次被提出以来,各种应用都得到了成功的演示,如集成分裂和移位模块2或集成光学成像系统3。
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引用次数: 0
High Efficiency Dielectric Reflection Gratings 高效率介质反射光栅
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.jtub.10
B. Shore, M. Perry, J. Britten, R. Boyd, M. Feit, H. Nguyen, R. Chow, G. Loomis, Lifeng Li
We discuss examples of designs for all-dielectric high-efficiency reflection gratings that tolerate high intensity laser pulses and are, in theory, capable of placing 99% of the incident light into a single diffraction order. The designs are based on placing a dielectric transmission grating atop a high-reflectivity multilayer dielectric stack. We comment on the connection between transmission gratings and reflection gratings and note that many combinations of gratings and multilayer stacks offer high efficiency. Thus it is possible to attain secondary objectives in the design. We describe examples of such designs aimed toward improving fabrication and lowering the susceptibility to laser-induced damage.
我们讨论了全介质高效反射光栅的设计实例,该光栅能够承受高强度激光脉冲,并且在理论上能够将99%的入射光置于单一衍射阶。该设计基于在高反射率多层电介质堆叠上放置一个介电传输光栅。我们评论了透射光栅和反射光栅之间的连接,并注意到许多光栅和多层堆叠的组合提供了高效率。因此,在设计中有可能达到次要目标。我们描述了这种设计的例子,旨在改善制造和降低对激光诱导损伤的敏感性。
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引用次数: 1
Diffraction Efficiency of High-NA Continuous-Relief Diffractive Lenses 高na连续浮雕衍射透镜的衍射效率
Pub Date : 1900-01-01 DOI: 10.1364/domo.1996.dtud.3
M. Rossi, C. Blough, D. Raguin, E. Popov, D. Maystre
Diffractive lenses are key elements in a large variety of optical systems. In hybrid refractive/diffractive optical systems they are used as powerful elements for aberration correction. Other applications, such as fiber coupling and optoelectronic devices, benefit from the fact that diffractive structures are thin and lightweight, enabling very compact systems. In addition, low-cost replication processes with a high profile fidelity make the use of diffractive lenses in prototype systems as well as in volume production very attractive.
衍射透镜是各种光学系统中的关键元件。在混合折射/衍射光学系统中,它们被用作强大的像差校正元件。其他应用,如光纤耦合和光电子器件,受益于衍射结构薄而轻的事实,使非常紧凑的系统。此外,具有高保真度的低成本复制过程使得衍射透镜在原型系统以及批量生产中的使用非常有吸引力。
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引用次数: 0
Subwavelength Structured Narrow-band Integrated Optical Grating Filters 亚波长结构窄带集成光栅滤波器
Pub Date : 1900-01-01 DOI: 10.1364/domo.1998.dmb.5
E. Grann, D. Holcomb, R. Zuhr, M. Moharam
A unique type of narrow-band integrated optical filter is investigated based on embedding a subwavelength resonant grating structure within a planar waveguide. Current integrated narrow-band optical filters are limited by their size, density of devices that can be produced, overall performance, and ability to be actively altered for tuning and modulation purposes. In contrast, the integrated optical filters described in this work can have extremely narrow bandwidths - on the order of a few angstroms. Also, their compact size enables multiple filters to be integrated in a single high density device for signal routing or wavelength discrimination. Manipulating any of the resonant structure’s parameters will tune the output response of the filter, which can be used for modulation or switching applications.
研究了一种基于在平面波导中嵌入亚波长谐振光栅结构的窄带集成滤光片。目前集成的窄带滤光片受限于它们的尺寸、可生产的器件密度、总体性能以及主动改变调谐和调制目的的能力。相比之下,在这项工作中描述的集成光学滤光片可以具有极窄的带宽-在几埃的数量级上。此外,它们紧凑的尺寸使多个滤波器能够集成在一个单一的高密度器件中,用于信号路由或波长识别。操纵任何谐振结构的参数将调整滤波器的输出响应,这可以用于调制或开关应用。
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引用次数: 0
Rigorous coupled-wave diffraction analysis of stratified volume photopolymer holograms 层状体光聚合物全息图的严格耦合波衍射分析
Pub Date : 1900-01-01 DOI: 10.1364/domo.1998.dtud.5e
Y. Ishii, T. Kubota
Stratified volume holograms (SVHs) have been studied1,2 in the layered structures of holograms that are useful for several applications in optical communication such as an optical wavelength-selective filter. The hitherto investigation was performed by using the beam propagation method (BPM) to emulate the SVH with thin (Raman-Nath) gratings, taking into no account the reflection at the boundaries. Here we develop a rigorous coupled-wave model to analyze the TE-polarized diffraction properties of stratified volume photopolymer holograms. The numerical and experimental angular selectivities of stratified holograms are shown.
层状体全息图(SVHs)已被研究1,2,在全息图的层状结构中可用于光通信中的几种应用,如光学波长选择滤波器。在不考虑边界反射的情况下,采用波束传播法(BPM)模拟具有薄(Raman-Nath)光栅的SVH。本文建立了一个严格的耦合波模型来分析层状体光聚合物全息图的te偏振衍射特性。给出了分层全息图的数值和实验角度选择性。
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Diffractive Optics and Micro-Optics
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