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2016 74th Annual Device Research Conference (DRC)最新文献

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GaSb-based photon counting gamma-ray detectors 基于gasb的光子计数伽马射线探测器
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548504
B. Juang, D. Prout, B. Liang, A. Chatziioannou, D. Huffaker
The gamma-ray spectral response of MBE-grown homoepitaxial GaSb p-i-n photodiode has been investigated. The GaSb device showed great linearity and promising energy resolution across a wide range of photon energies, confirming that GaSb can offer high stopping power, high carrier mobility and low PCE that would be advantageous for its use in gamma-ray detection.
研究了mbe生长的同外延GaSb p-i-n光电二极管的伽玛射线谱响应。GaSb器件在很宽的光子能量范围内显示出良好的线性和有希望的能量分辨率,证实GaSb可以提供高停止功率,高载流子迁移率和低PCE,这将有利于其在伽马射线探测中的应用。
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引用次数: 0
Electrically controlled switching of antiferromagnets via proximity interaction induced by topological insulator 拓扑绝缘体诱导近距离相互作用的反铁磁体电控开关
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548494
Xilai Li, Xiaopeng Duan, Y. Semenov, K. W. Kim
Here, we propose an electrical control of antiferromagnet (AFM) by utilizing the proximity interaction between a topological insulator (TI) and an AFM. Following the Bennett clocking scheme, this mechanism shows much faster switching speed and higher logic reliabilities compared to its ferromagnetic counterpart according to micro-magnetic simulations. Consequently, both switching period and power consumption are reduced by 2-3 orders of magnitude making the TI-AFM system a better candidate for spintronic applications.
在这里,我们提出了一种利用拓扑绝缘体(TI)和反铁磁体(AFM)之间的邻近相互作用的反铁磁体(AFM)的电气控制。根据微磁模拟,该机制与铁磁机制相比,在Bennett时钟方案下,显示出更快的开关速度和更高的逻辑可靠性。因此,开关周期和功耗都减少了2-3个数量级,使TI-AFM系统成为自旋电子应用的更好候选。
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引用次数: 0
Using Ar Ion beam exposure to improve contact resistance in MoS2 FETs 利用Ar离子束曝光改善MoS2场效应管的接触电阻
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548484
Zhihui Cheng, Jorge A. Cardenas, Felicia A. McGuire, A. Franklin
Contact resistance is a dominant factor in the performance of field-effect transistors (FETs) from two-dimensional MoS2. Several techniques have been shown to improve carrier transport at the metal-MoS2 interface, thus lowering the contact resistance. These approaches include the use of molecular doping, different contact materials, phase transformation of MoS2 [6], and adding an interfacial oxide at the contacts. The challenges for the most effective of these techniques are that they generally require additional processing, sometimes involving very high temperatures, or the addition of materials at the metal-MoS2 interface that may lower contact resistance but still yield relatively poor FET performance. In graphene, it has been demonstrated that intentionally damaging the crystal lattice in the contact region using O2 plasma can substantially reduce the contact resistance. In this work, we examine a related contact engineering approach for MoS2 FETs by using an in situ, broad-beam ion source to modify the MoS2 lattice immediately prior to contact metal deposition. The result is a substantial improvement in key performance metrics, including contact resistance and on-Contact resistance is a dominant factor in the performance of field-effect transistors (FETs) from two-dimensional MoS2. Several techniques have been shown to improve carrier transport at the metal-MoS2 interface, thus lowering the contact resistance. These approaches include the use of molecular doping, different contact materials, phase transformation of MoS2, and adding an interfacial oxide at the contacts. The challenges for the most effective of these techniques are that they generally require additional processing, sometimes involving very high temperatures, or the addition of materials at the metal-MoS2 interface that may lower contact resistance but still yield relatively poor FET performance. In graphene, it has been demonstrated that intentionally damaging the crystal lattice in the contact region using O2 plasma can substantially reduce the contact resistance. In this work, we examine a related contact engineering approach for MoS2 FETs by using an in situ, broad-beam ion source to modify the MoS2 lattice immediately prior to contact metal deposition. The result is a substantial improvement in key performance metrics, including contact resistance and on-current.current.
接触电阻是影响二维二硫化钼场效应晶体管性能的主要因素。已有几种技术被证明可以改善金属- mos2界面的载流子输运,从而降低接触电阻。这些方法包括使用分子掺杂、不同的触点材料、MoS2的相变[6]以及在触点处添加界面氧化物。这些技术中最有效的挑战是,它们通常需要额外的处理,有时涉及非常高的温度,或者在金属- mos2界面添加材料,这可能会降低接触电阻,但仍然产生相对较差的FET性能。在石墨烯中,已经证明使用O2等离子体故意破坏接触区域的晶格可以大大降低接触电阻。在这项工作中,我们研究了MoS2 fet的相关接触工程方法,通过使用原位宽束离子源在接触金属沉积之前立即修改MoS2晶格。结果是关键性能指标的实质性改进,包括接触电阻和接触电阻是二维MoS2场效应晶体管(fet)性能的主要因素。已有几种技术被证明可以改善金属- mos2界面的载流子输运,从而降低接触电阻。这些方法包括使用分子掺杂、不同的触点材料、二硫化钼的相变以及在触点处添加界面氧化物。这些技术中最有效的挑战是,它们通常需要额外的处理,有时涉及非常高的温度,或者在金属- mos2界面添加材料,这可能会降低接触电阻,但仍然产生相对较差的FET性能。在石墨烯中,已经证明使用O2等离子体故意破坏接触区域的晶格可以大大降低接触电阻。在这项工作中,我们研究了MoS2 fet的相关接触工程方法,通过使用原位宽束离子源在接触金属沉积之前立即修改MoS2晶格。结果是在关键性能指标上有了实质性的改进,包括接触电阻和通流。
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引用次数: 2
Demonstration of electric double layer p-i-n junction in WSe2 WSe2中双电层p-i-n结的演示
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548485
S. Fathipour, P. Paletti, S. Fullerton‐Shirey, A. Seabaugh
We demonstrate the first electric double layer p-i-n junction in the channel of a WSe2 field-effect transistor (FET). The measured current-voltage (I-V) characteristics have a nearly constant ideality factor over approximately three orders of magnitude in current. This is better than any prior report on WSe2. The formation technique has wide applicability across materials systems and is of particular interest for the formation of source-channel junctions in tunnel FETs in transition metal dichalcogenides (TMDs) [1]. The most ideal TMD p-n junctions formed to date have been achieved using buried gates under WSe2 by Ross [2], under MoS2 by Sutar [3], by charge transfer doping in MoS2 by Choi [4] and Li [5], and by EDL formation in MoTe2 by Xu [6]. The junction formation described in this paper does not require fabrication of additional field plates to position the ions.
我们展示了WSe2场效应晶体管(FET)沟道中的第一个双电层p-i-n结。测量的电流-电压(I-V)特性在电流中具有几乎恒定的理想因数,约为三个数量级。这比之前任何关于WSe2的报告都要好。这种形成技术在各种材料系统中具有广泛的适用性,尤其适用于过渡金属二硫化物(TMDs)中隧道场效应管的源沟道结的形成[1]。迄今为止,最理想的TMD p-n结是由Ross[2]、Sutar[3]、Choi[4]和Li[5]在MoS2中使用电荷转移掺杂,以及Xu[6]在MoTe2中使用EDL形成实现的。本文描述的结的形成不需要制造额外的场板来定位离子。
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引用次数: 8
First demonstration of strained AlN/GaN/AlN quantum well FETs on SiC SiC上应变AlN/GaN/AlN量子阱场效应管的首次演示
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548396
S. Islam, M. Qi, B. Song, K. Nomoto, V. Protasenko, Jingshan Wang, S. Rouvimov, P. Fay, H. Xing, D. Jena
This is the first demonstration of strained AlN/GaN/AlN quantum well FETs on SiC substrates. The device performance, though highly encouraging for the gate lengths used, can be significantly enhanced by scaling [4]. But significant improvements are expected by ensuring the absence of the 2D hole gas, and by exploring high temperature growth of thick AlN buffer layer on SiC. This can potentially reduce the generation of threading dislocations in the subsequent layers and enhance the FET performance, by improving the transport properties.
这是在SiC衬底上首次展示应变AlN/GaN/AlN量子阱场效应管。器件性能,虽然非常令人鼓舞的栅极长度使用,可以通过缩放显着提高[4]。但通过确保二维空穴气体的存在,以及探索碳化硅上厚AlN缓冲层的高温生长,有望取得重大进展。这可以潜在地减少后续层中螺纹位错的产生,并通过改善传输特性来提高FET的性能。
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引用次数: 3
Theoretical and experimental analysis of capacitance and mobility in InGaAs InGaAs中电容和迁移率的理论和实验分析
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548447
F. M. Bufler, M. Frey, A. Erlebach, V. Deshpande, L. Czornomaz, V. Djara, E. O'Connor, D. Caimi, J. Fompeyrine
InGaAs devices are candidates to replace Si devices in future technology nodes due to their promising transport properties. Recently, CMOS-compatiple replacement metal gate (RMG) InGaAs-on-insulator (InGaAs-OI) FinFETs with record performance have been reported [1]. Further optimization and identification of limiting factors by TCAD simulation requires calibration and validation of the underlying device models to measurements of fundamental quantities in devices which are fabricated under similar process conditions as applied in the target technology. Key quantities are trap profiles leading to Fermi-level pinning as well as bulk and long-channel effective mobility. While such investigations have already been done for sample devices [2, 3], we report in this work corresponding measurements for RMG InGaAs-OI technology, calibrate and validate device simulation to these measurements and compare the results with previous literature.
InGaAs器件由于具有良好的传输特性而成为未来技术节点中取代Si器件的候选器件。最近,cmos兼容替代金属栅极(RMG) InGaAs-on-insulator (InGaAs-OI) finfet具有创纪录的性能被报道[1]。通过TCAD模拟进一步优化和确定限制因素需要对基础设备模型进行校准和验证,以测量在目标技术中应用的类似工艺条件下制造的设备中的基本量。关键的数量是导致费米水平固定的陷阱轮廓,以及体积和长通道的有效迁移率。虽然已经对样品设备进行了此类调查[2,3],但我们在本工作中报告了RMG InGaAs-OI技术的相应测量,校准和验证了这些测量的设备模拟,并将结果与先前的文献进行了比较。
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引用次数: 1
Analytical modeling of metal gate granularity induced Vt variability in NWFETs nwfet中金属栅极粒度致Vt变异性的分析建模
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548446
P. Vardhan, S. Mittal, A. S. Shekhawat, S. Ganguly, U. Ganguly
Metal gate granularity (MGG) induced threshold voltage (Vt) variability is a critical process random variations for sub-20nm transistors [1]. It has been studied using either by stochastic TCAD simulations[2] or by analytical modeling of probability distribution[3]. This analytical modeling is based on the approach of finding an effective WF. This is a weighted average on the area of WFs of all the grains. The probability distribution of this effective WF is expected to be correlated with distribution of Vt. The problem with this approach is that positional randomness is ignored and the results depend only on the fraction of the area covered by a particular grain. Hence a physics based analytical model is attractive to address this issue. The electrostatics of NWFETs has been well explained and studied to model Vt and subthreshold slope (SS) are found [4] and [5]. The objective of this work is to develop an analytical model to estimate the metal gate granularity (MGG) induced Vt variability in Silicon nanowire FETs (NWFETs) using analytical solution of equilibrium electrostatics.
金属栅极粒度(MGG)诱导阈值电压(Vt)变化是亚20nm晶体管的关键工艺随机变化[1]。它已经通过随机TCAD模拟[2]或概率分布分析建模[3]进行了研究。这种分析建模是基于寻找有效WF的方法。这是所有谷物WFs面积的加权平均值。这种有效WF的概率分布预计与Vt的分布相关。这种方法的问题是忽略了位置随机性,结果仅取决于特定颗粒所覆盖的面积的比例。因此,基于物理的分析模型对解决这个问题很有吸引力。nwfet的静电已经得到了很好的解释和研究,并建立了Vt和阈下斜率(SS)模型[4]和[5]。本工作的目的是建立一个分析模型,利用平衡静电的解析解来估计硅纳米线场效应管(nwfet)中金属栅粒度(MGG)引起的Vt变化。
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引用次数: 2
Proposal of AlN-delta-GaN quantum well ultraviolet lasers AlN-delta-GaN量子阱紫外激光器的设计
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548445
Cheng Liu, Y. Ooi, Jing Zhang
The optical gain characteristics of AlN-delta-GaN quantum well are investigated for mid-ultraviolet (UV) lasers. The ultra-thin delta-GaN layer is inserted into AlN quantum well (QW) active region with AlN barrier layers. Large TE-polarized optical gain is achieved for AlN-delta-GaN QW structure at 253 nm. The peak emission wavelength can be adjusted by tuning the delta-GaN thickness while maintaining large optical gain for λ ~ 230-300 nm.
研究了中紫外激光器中AlN-delta-GaN量子阱的光学增益特性。将超薄δ - gan层插入到AlN量子阱(QW)有源区,并具有AlN势垒层。在253 nm处,AlN-delta-GaN QW结构实现了较大的te偏振光增益。在λ ~ 230 ~ 300 nm范围内,可以通过调整δ - gan厚度来调节峰值发射波长,同时保持较大的光学增益。
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引用次数: 0
Demonstration of thin-film GaN Schottky diodes fabricated with epitaxial lift-off 外延提升制薄膜GaN肖特基二极管的演示
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548468
J. Wang, C. Youtsey, R. McCarthy, R. Reddy, L. Guido, A. Xie, E. Beam, P. Fay
GaN-based devices are of increasing importance for a wide range of system applications, such as power conversion and control, displays, and sensing in harsh environments. While dramatic progress in material quality and device performance has been achieved, several key impediments to the widespread adoption of GaN remain, including the high cost of native GaN substrates (needed to achieve low dislocation densities) and limited thermal conductance for through-substrate heat removal. Use of epitaxial lift-off to form devices on thin GaN-based films is one approach to circumvent these limitations, by enabling substrate re-use and close coupling of heatsinks to the active devices, while retaining the advantages of conventional epitaxial techniques. We report the first demonstration of single-crystal thin-film GaN Schottky diodes fabricated using large-area epitaxial lift-off as a step towards economical deployment of GaN-based electronics.
基于gan的器件对于广泛的系统应用越来越重要,例如在恶劣环境中的功率转换和控制,显示和传感。虽然在材料质量和器件性能方面已经取得了巨大的进步,但广泛采用GaN的几个关键障碍仍然存在,包括原生GaN衬底的高成本(需要实现低位错密度)和通过衬底散热的有限导热性。利用外延提升在氮化镓薄膜上形成器件是规避这些限制的一种方法,通过实现衬底重用和散热器与有源器件的紧密耦合,同时保留了传统外延技术的优点。我们报告了单晶薄膜GaN肖特基二极管的首次演示,该二极管采用大面积外延提升制造,这是迈向GaN基电子产品经济部署的一步。
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引用次数: 1
Building quantum logic circuits using arrays of superconducting qubits 利用超导量子比特阵列构建量子逻辑电路
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548499
J. Hertzberg, A. Córcoles, M. Takita, N. Bronn, E. Magesan, M. Brink, S. Sheldon, J. Gambetta, J. Chow
Quantum computing holds the promise of a novel form of information processing in which data resides in quantum states. By exploiting superpositions and entanglement among these states, quantum logic operations are expected to far surpass conventional digital logic in certain classes of problems. To realize this prospect, we employ superconducting circuits at millikelvin temperatures. The nonlinearity of a Josephson tunnel junction enables a two-level quantum system, or qubit, with excitation energy in the microwave regime. Key recent advances in such devices are the demonstration of robust and simple multi-qubit gates, the integration of superconducting qubits into arrays of four or more, and gate fidelities reaching 99%. [1,2,3].
量子计算有望实现一种新的信息处理形式,其中数据驻留在量子态中。通过利用这些状态之间的叠加和纠缠,量子逻辑运算有望在某些类别的问题中远远超过传统的数字逻辑。为了实现这一前景,我们采用了毫开尔文温度下的超导电路。约瑟夫森隧道结的非线性特性使得两能级量子系统或量子位在微波状态下具有激发能。这类设备最近的关键进展是展示了强大而简单的多量子位门,将超导量子位集成到四个或更多的阵列中,以及门保真度达到99%。(1、2、3)。
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引用次数: 0
期刊
2016 74th Annual Device Research Conference (DRC)
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