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2016 74th Annual Device Research Conference (DRC)最新文献

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A compact DC model for dual-independent-gate FinFETs 双独立栅极finfet的紧凑直流模型
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548453
M. Hasan, P. Gaillardon, B. Sensale‐Rodriguez
To: (i) reduce the power consumption in digital integrated circuits, (ii) increase the transistor trans-conductance generation efficiency in analog circuits, and (iii) attain a very sensitive nonlinear response to RF, transistors exhibiting very steep room-temperature subthreshold slope (SS) are required. The subthreshold slope of conventional MOSFETs is limited to >60mV/dec due to their current turn-on mechanism being thermionic emission. During the last decade, several emerging transistor concepts, based on alternative current transport mechanisms, have been proposed so to overcome this fundamental limitation. For instance, Tunnel FETs (TFETs) have emerged as one of the most attractive alternatives to traditional MOSFETs, with experimental demonstrations of SS below 30 mV/dec, due to the current turn-on mechanism in such devices being band-to-band tunneling. In this context, dual-independent-gate (DIG) FinFETs have been also demonstrated capable of achieving a very steep subthreshold slope [1, 2]. The reason behind this super steep slope is a positive feedback induced by weak impact ionization in the device. Experimental demonstrations of DIG FinFETs have shown SS of 3.4 mV/dec at room-temperature over 5 decades of current swing [1, 2]. In this paper, we discuss a simple, closed-form analytic model for the current-voltage characteristics of DIG FinFETs, which can be of interest for many applications including circuit-design and application oriented device performance evaluation.
为了:(i)降低数字集成电路的功耗,(ii)提高模拟电路中的晶体管跨导产生效率,以及(iii)获得对射频非常敏感的非线性响应,需要具有非常陡峭的室温亚阈值斜率(SS)的晶体管。由于传统mosfet的导通机制是热离子发射,其亚阈值斜率被限制在60mV/dec。在过去的十年中,几个新兴的晶体管概念,基于可选电流传输机制,已经提出,以克服这一基本限制。例如,隧道场效应管(tfet)已经成为传统mosfet最具吸引力的替代品之一,由于这种器件中的当前导通机制是带对带隧道,因此实验证明SS低于30 mV/dec。在这种情况下,双独立栅极(DIG) finfet也被证明能够实现非常陡峭的亚阈值斜率[1,2]。这个超级陡坡背后的原因是一个正反馈诱导弱冲击电离装置。DIG finfet的实验证明,在室温下,在50年的电流摆幅下,SS为3.4 mV/dec[1,2]。在本文中,我们讨论了一个简单的,封闭形式的分析模型,用于DIG finfet的电流-电压特性,它可以用于许多应用,包括电路设计和面向应用的器件性能评估。
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引用次数: 0
Ga2O3 field-plated schottky barrier diodes with a breakdown voltage of over 1 kV 击穿电压超过1kv的Ga2O3场镀肖特基势垒二极管
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7676205
K. Konishi, K. Goto, Q. Thieu, R. Togashi, H. Murakami, Y. Kumagai, B. Monemar, A. Kuramata, S. Yamakoshi, M. Higashiwaki
We succeeded in fabricating HVPE-grown Ga2O3 FP-SBDs with a record Vbr of over 1 kV. This is an important step in the research and development of Ga2O3 power devices toward practical applications and future commercialization. This work was partially supported by Council for Science, Technology, and Innovation (CSTI), Cross-ministerial Strategic Innovation Promotion Program (SIP), "Next-generation power electronics" (funding agency: NEDO).
我们成功地制造了hpe生长的Ga2O3 fp - sbd,其Vbr超过1 kV。这是研究和开发Ga2O3功率器件走向实际应用和未来商业化的重要一步。这项工作得到了科学、技术和创新委员会(CSTI)、跨部门战略创新促进计划(SIP)、“下一代电力电子”(资助机构:NEDO)的部分支持。
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引用次数: 2
DC and RF characterizations of AlGaN/GaN MOSHEMTs with deep sub-micron T-gates and atomic layer epitaxy MgCaO as gate dielectric 深亚微米t栅极和MgCaO原子层外延栅极介质的AlGaN/GaN MOSHEMTs的直流和射频特性
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548407
Hong Zhou, Karynn A. Sutherlin, X. Lou, Sang Bok Kim, K. Chabak, R. Gordon, P. Ye
High performance deep sub-micron T-gate AlGaN/GaN MOSHEMTs are demonstrated using lattice matched ALE MgCaO as gate dielectric. The 120 nm-Lg MOSHEMT has an IDMAX of 1.2 A/mm, Ron of 1.5 Ω·mm, a ft/fmax of 101/150 GHz, with negligible hysteresis and IG, showing the promise as a GaN MOS technology. The work at Purdue University is supported by AFOSR and the work at Harvard University is supported by ONR.
采用晶格匹配ALE MgCaO作为栅极电介质,展示了高性能深亚微米t栅AlGaN/GaN MOSHEMTs。120 nm-Lg MOSHEMT的IDMAX为1.2 A/mm, Ron为1.5 Ω·mm, ft/fmax为101/150 GHz,迟滞和IG可忽略不计,显示出作为GaN MOS技术的前景。普渡大学的工作由AFOSR支持,哈佛大学的工作由ONR支持。
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引用次数: 1
Ultra-wide bandgap AlGaN channel MISFET with polarization engineered ohmics 具有极化工程欧姆的超宽带隙AlGaN通道MISFET
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548394
S. Bajaj, F. Akyol, S. Krishnamoorthy, Yuewei Zhang, A. Armstrong, A. Allerman, S. Rajan
We report on the first ultra-wide bandgap Al0.75Ga0.25N channel metal-insulator-semiconductor field-effect transistor (MISFET) with heterostructure engineered ohmic contacts. The large breakdown field of AlN (12 MV/cm) and the superior device figures of merit make wider bandgap AlGaN attractive for the next-generation RF power amplifiers and switches [1]. However, a critical challenge preventing advancement in high composition AlGaN-based devices is the high resistance of ohmic contacts, due to the large ionization energy of dopants and the low electron affinity of AlN, both of which increase tunneling barrier for electrons. In this work, we use reverse polarization-graded n++ AlGaN contact layers to achieve a record low contact resistance (Rc) of 0.3 Ω.mm to 75 nm thick n-Al0.75Ga0.25N channel, translating in a specific contact resistance (ρsp) of 1.9×10-6 Ω.cm2. We then demonstrate the first ultra-wide bandgap Al0.75Ga0.25N channel MISFET with gate-recessed structure, employing polarization-graded contacts and Atomic Layer Deposited Al2O3 as the gate-dielectric.
本文报道了第一种具有异质结构工程欧姆触点的超宽带隙Al0.75Ga0.25N沟道金属-绝缘体-半导体场效应晶体管(MISFET)。AlN的大击穿场(12 MV/cm)和优越的器件性能使得更宽带隙的AlGaN对下一代射频功率放大器和开关[1]具有吸引力。然而,阻碍高成分AlN基器件发展的关键挑战是欧姆接触的高电阻,这是由于掺杂剂的大电离能和AlN的低电子亲和力,两者都会增加电子的隧穿势垒。在这项工作中,我们使用反向极化梯度的n++ AlGaN接触层,实现了创纪录的低接触电阻(Rc) 0.3 Ω。mm至75nm厚的n-Al0.75Ga0.25N通道,转换成的比接触电阻(ρsp)为1.9×10-6 Ω.cm2。然后,我们展示了第一个具有栅极凹槽结构的超宽带隙Al0.75Ga0.25N沟道MISFET,采用极化渐变触点和原子层沉积Al2O3作为栅极电介质。
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引用次数: 1
Numerical Fokker-Planck simulation of stochastic write error in spin torque switching with thermal noise 考虑热噪声的自旋转矩开关随机写入误差的Fokker-Planck数值模拟
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548462
Yunkun Xie, B. Behin-Aein, Avik W. Ghosh
Emerging spintronics and nanomagnetic devices have attracted a lot of attention due to their versatility, scalability and energy efficiency. Most spintronics applications require manipulation of nano-magnet in a fast and efficient way. Spin transfer torque (STT) effect[1] is so far the most studied and well demonstrated means to switch a nano-size magnetic. Compared to traditional switching scheme by magnetic field, STT provides a scalable solution to manipulate the magnetization of a nano-sized magnet. STT based memory spin transfer torque magnetic random access memory (STT-MRAM) and spin torque oscillator (STO) have been proposed and experimentally demonstrated[2, 3]. One issue accompanies magnetic switching is the thermal noise. Under room temperature the magnetic switching under STT is susceptible to thermal fluctuation and often results in a distribution in switching current/delay. In applications like STT based memory, its stochastic nature can cause read/write error. In the case of write operation, increasing applied current or switching time can effectively reduce write error but both quantities are limited by other considerations such as energy dissipation, junction breakdown and etc. This kind of trade-off is essential in device and application design. The aim of the work is to promote numerical Fokker-Planck based framework to study thermal effect in STT switching. The comparison between numerical Fokker-Planck approach and other methods are summarized. We have also investigated write error rate (WER) in STT switching with a focus on its `slope' which is related to the write margin but not so often discussed in literature.
新兴的自旋电子学和纳米磁性器件因其通用性、可扩展性和高能效而备受关注。大多数自旋电子学应用都需要快速有效地操纵纳米磁体。自旋传递转矩(STT)效应[1]是迄今为止研究最多、证明最充分的一种切换纳米级磁性材料的方法。与传统的磁场开关方案相比,STT提供了一种可扩展的解决方案来控制纳米级磁铁的磁化强度。基于STT的记忆自旋传递转矩磁随机存取存储器(STT- mram)和自旋转矩振荡器(STO)已经被提出并实验证明[2,3]。伴随磁开关的一个问题是热噪声。室温下,STT下的磁开关易受热波动影响,导致开关电流/延迟分布。在像基于STT的内存这样的应用程序中,其随机性会导致读/写错误。在写操作的情况下,增加施加的电流或开关时间可以有效地减少写错误,但这两个量都受到其他因素的限制,如能量消耗、结击穿等。这种权衡在设备和应用程序设计中是必不可少的。本工作的目的是推广基于Fokker-Planck的数值框架来研究STT开关中的热效应。总结了数值Fokker-Planck方法与其他方法的比较。我们还研究了STT切换中的写入错误率(WER),重点关注其“斜率”,这与写入余量有关,但在文献中不常讨论。
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引用次数: 5
Affordable dual-sensing proximity sensor for touchless interactive systems 可负担的双感应接近传感器,用于非接触式交互系统
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548448
J. M. Nassar, Marlon Diaz, M. Hussain
We report an ultra-low cost flexible proximity sensor using only off-the-shelf recyclable materials such as aluminum foil, napkin and double-sided tape. Unlike previous reports, our device structure exhibits two sensing capabilities in one platform, with outstanding long detection range of 20 cm and pressure sensitivity of 0.05 kPa-1. This is the first ever demonstration of a low-cost, accessible, and batch manufacturing process for pressure and proximity sensing on a singular platform. The mechanical flexibility of the sensor makes it possible to mount on various irregular platforms, which is vital in many areas, such as robotics, machine automation, vehicular technology and inspection tools.
我们报告了一种超低成本的柔性接近传感器,仅使用现成的可回收材料,如铝箔,餐巾纸和双面胶带。与以前的报道不同,我们的器件结构在一个平台上具有两种传感能力,具有20厘米的长检测范围和0.05 kPa-1的压力灵敏度。这是有史以来第一次在单一平台上演示低成本,易于使用和批量生产的压力和接近感测工艺。传感器的机械灵活性使其能够安装在各种不规则平台上,这在许多领域至关重要,例如机器人,机器自动化,车辆技术和检测工具。
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引用次数: 2
A new approach for energy band engineering in flexible GaAs devices 柔性砷化镓器件能带工程的新方法
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548451
A. Alharbi, D. Shahrjerdi
Flexible electronics based on rigid conventional crystalline semiconductors such as silicon and compound semiconductors is emerging as a new class of technology. At present, the existing approaches for realizing flexible electronics from those materials have focused on maintaining the performance of the original device. Here, we demonstrate a new approach for tailoring the electronic and optoelectronic properties of high-performance flexible devices through strain engineering. In this work, we use flexible gallium arsenide (GaAs) devices as a model system. We show that layer transfer through substrate cracking with a pre-tensioned nickel film can be utilized for engineering the electronic band structure of flexible GaAs devices. We empirically and theoretically quantify the effect of the `engineered' residual strain on the electronic band structure in these flexible GaAs devices. Photoluminescence (PL) and quantum efficiency (QE) measurements indicate the widening of the GaAs energy bandgap due to the residual compressive strain. More importantly, our strain engineering method is universal and can be readily extended to other flexible material systems such as gallium nitride.
基于硅和化合物半导体等刚性传统晶体半导体的柔性电子技术正在成为一种新技术。目前,利用这些材料实现柔性电子器件的现有方法主要集中在保持原始器件的性能上。在这里,我们展示了一种通过应变工程来定制高性能柔性器件的电子和光电子特性的新方法。在这项工作中,我们使用柔性砷化镓(GaAs)器件作为模型系统。研究表明,利用预张紧镍薄膜通过衬底开裂进行层转移可用于柔性砷化镓器件的电子带结构工程。我们从经验和理论上量化了“工程”残余应变对这些柔性GaAs器件中电子能带结构的影响。光致发光(PL)和量子效率(QE)测量表明,由于残余压缩应变,砷化镓能带隙变宽。更重要的是,我们的应变工程方法是通用的,可以很容易地扩展到其他柔性材料系统,如氮化镓。
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引用次数: 0
Phase transition oxide neuron for spiking neural networks 用于脉冲神经网络的氧化物相变神经元
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548503
M. Jerry, Wei-Yu Tsai, Baihua Xie, Xueqing Li, V. Narayanan, A. Raychowdhury, S. Datta
Spiking neural networks are expected to play a vital role in realizing ultra-low power hardware for computer vision applications [1]. While the algorithmic efficiency is promising, their solid-state implementation with traditional CMOS transistors lead to area expensive solutions. Transistors are typically designed and optimized to perform as switches and do not naturally exhibit the dynamical properties of neurons. In this work, we harness the abrupt insulator-to-metal transition (IMT) in a prototypical IMT material, vanadium dioxide (VO2) [2], to experimentally demonstrate a compact integrate and fire spiking neuron [3]. Further, we show multiple spiking dynamics of the neuron relevant to implementing `winner take all' max pooling layers employed in image processing pipelines.
脉冲神经网络有望在实现计算机视觉应用的超低功耗硬件方面发挥重要作用[1]。虽然算法效率很有希望,但传统CMOS晶体管的固态实现导致面积昂贵的解决方案。晶体管通常被设计和优化为充当开关,而不自然地表现出神经元的动态特性。在这项工作中,我们利用典型的绝缘体到金属的突然转变(IMT)材料,二氧化钒(VO2)[2],实验证明了一个紧凑的集成和火脉冲神经元[3]。此外,我们展示了与实现图像处理管道中使用的“赢家通吃”最大池化层相关的神经元的多个峰值动态。
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引用次数: 22
Challenges and breakthroughs in the development of AlGaN-based UVC lasers 基于algan的UVC激光器发展的挑战与突破
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548515
R. Kirste, B. Sarkar, F. Kaess, I. Bryan, Z. Bryan, J. Tweedie, R. Collazo, Z. Sitar
Despite the rapid progress in III-nitride-based laser diodes, sub-300 nm UV semiconductors lasers have not been realized yet, mainly due to technical and scientific barriers arising from the lack of proper crystalline substrates and poor understanding of defect control in the wide bandgap semiconductors. In addition to low dislocation density, reduction in non-radiative centers and compensating point defect is required to achieve high internal quantum efficiency (IQE). AlGaN-based technology developed on single crystalline AlN substrates offers a pathway to address these challenges [1, 2]. Recently, UV LEDs emitting at 265 nm with output powers exceeding 80 mW and high reliability [3], as well as low-threshold, optically pumped lasers emitting at wavelengths between 230-280 nm [4,5] have been demonstrated.
尽管iii -氮化物基激光二极管进展迅速,但由于缺乏合适的晶体衬底和对宽禁带半导体缺陷控制的认识不足,导致技术和科学上的障碍,300nm以下的紫外半导体激光器尚未实现。除了低位错密度外,还需要减少非辐射中心和补偿点缺陷来实现高内量子效率。在单晶AlN衬底上开发的基于algan的技术为解决这些挑战提供了一条途径[1,2]。最近,265 nm的紫外发光二极管输出功率超过80 mW,可靠性高[3],以及波长在230-280 nm之间的低阈值光泵浦激光器[4,5]已经得到证实。
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引用次数: 0
Drain-offset ZnO thin film transistors for high voltage operations 用于高压工作的漏极偏置ZnO薄膜晶体管
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548469
Y. Gong, T. Jackson
We report ZnO thin film transistors (TFTs) with offset drain for high voltage operation. Offset-drain FETs using Si, a-Si:H, and pentacene have been previously demonstrated [1,2,3]. The TFTs use a bottom gate structure with Al2O3 gate dielectric and ZnO active layers deposited by plasma enhanced atomic layer deposition (PEALD). As the drain offset is increased from 0 μm to 2 μm· the drain-to-source breakdown voltage increased from 33 V to 82 V, while the linear mobility decreased from 10 cm2/Vs to 4 cm2/Vs. Our process flow is simple and compatible with glass and polymeric substrates.
我们报道了具有偏置漏极的ZnO薄膜晶体管(TFTs)用于高压工作。使用Si、a-Si:H和并五苯的偏置漏极场效应管已经被证实[1,2,3]。TFTs采用底栅结构,采用等离子体增强原子层沉积法(PEALD)沉积Al2O3栅极介电层和ZnO活性层。当漏极偏置从0 μm增加到2 μm·时,漏源击穿电压从33 V增加到82 V,而线性迁移率从10 cm2/Vs降低到4 cm2/Vs。我们的工艺流程简单,与玻璃和聚合物基材兼容。
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引用次数: 1
期刊
2016 74th Annual Device Research Conference (DRC)
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