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2016 74th Annual Device Research Conference (DRC)最新文献

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A compact DC model for dual-independent-gate FinFETs 双独立栅极finfet的紧凑直流模型
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548453
M. Hasan, P. Gaillardon, B. Sensale‐Rodriguez
To: (i) reduce the power consumption in digital integrated circuits, (ii) increase the transistor trans-conductance generation efficiency in analog circuits, and (iii) attain a very sensitive nonlinear response to RF, transistors exhibiting very steep room-temperature subthreshold slope (SS) are required. The subthreshold slope of conventional MOSFETs is limited to >60mV/dec due to their current turn-on mechanism being thermionic emission. During the last decade, several emerging transistor concepts, based on alternative current transport mechanisms, have been proposed so to overcome this fundamental limitation. For instance, Tunnel FETs (TFETs) have emerged as one of the most attractive alternatives to traditional MOSFETs, with experimental demonstrations of SS below 30 mV/dec, due to the current turn-on mechanism in such devices being band-to-band tunneling. In this context, dual-independent-gate (DIG) FinFETs have been also demonstrated capable of achieving a very steep subthreshold slope [1, 2]. The reason behind this super steep slope is a positive feedback induced by weak impact ionization in the device. Experimental demonstrations of DIG FinFETs have shown SS of 3.4 mV/dec at room-temperature over 5 decades of current swing [1, 2]. In this paper, we discuss a simple, closed-form analytic model for the current-voltage characteristics of DIG FinFETs, which can be of interest for many applications including circuit-design and application oriented device performance evaluation.
为了:(i)降低数字集成电路的功耗,(ii)提高模拟电路中的晶体管跨导产生效率,以及(iii)获得对射频非常敏感的非线性响应,需要具有非常陡峭的室温亚阈值斜率(SS)的晶体管。由于传统mosfet的导通机制是热离子发射,其亚阈值斜率被限制在60mV/dec。在过去的十年中,几个新兴的晶体管概念,基于可选电流传输机制,已经提出,以克服这一基本限制。例如,隧道场效应管(tfet)已经成为传统mosfet最具吸引力的替代品之一,由于这种器件中的当前导通机制是带对带隧道,因此实验证明SS低于30 mV/dec。在这种情况下,双独立栅极(DIG) finfet也被证明能够实现非常陡峭的亚阈值斜率[1,2]。这个超级陡坡背后的原因是一个正反馈诱导弱冲击电离装置。DIG finfet的实验证明,在室温下,在50年的电流摆幅下,SS为3.4 mV/dec[1,2]。在本文中,我们讨论了一个简单的,封闭形式的分析模型,用于DIG finfet的电流-电压特性,它可以用于许多应用,包括电路设计和面向应用的器件性能评估。
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引用次数: 0
Ga2O3 field-plated schottky barrier diodes with a breakdown voltage of over 1 kV 击穿电压超过1kv的Ga2O3场镀肖特基势垒二极管
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7676205
K. Konishi, K. Goto, Q. Thieu, R. Togashi, H. Murakami, Y. Kumagai, B. Monemar, A. Kuramata, S. Yamakoshi, M. Higashiwaki
We succeeded in fabricating HVPE-grown Ga2O3 FP-SBDs with a record Vbr of over 1 kV. This is an important step in the research and development of Ga2O3 power devices toward practical applications and future commercialization. This work was partially supported by Council for Science, Technology, and Innovation (CSTI), Cross-ministerial Strategic Innovation Promotion Program (SIP), "Next-generation power electronics" (funding agency: NEDO).
我们成功地制造了hpe生长的Ga2O3 fp - sbd,其Vbr超过1 kV。这是研究和开发Ga2O3功率器件走向实际应用和未来商业化的重要一步。这项工作得到了科学、技术和创新委员会(CSTI)、跨部门战略创新促进计划(SIP)、“下一代电力电子”(资助机构:NEDO)的部分支持。
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引用次数: 2
Affordable dual-sensing proximity sensor for touchless interactive systems 可负担的双感应接近传感器,用于非接触式交互系统
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548448
J. M. Nassar, Marlon Diaz, M. Hussain
We report an ultra-low cost flexible proximity sensor using only off-the-shelf recyclable materials such as aluminum foil, napkin and double-sided tape. Unlike previous reports, our device structure exhibits two sensing capabilities in one platform, with outstanding long detection range of 20 cm and pressure sensitivity of 0.05 kPa-1. This is the first ever demonstration of a low-cost, accessible, and batch manufacturing process for pressure and proximity sensing on a singular platform. The mechanical flexibility of the sensor makes it possible to mount on various irregular platforms, which is vital in many areas, such as robotics, machine automation, vehicular technology and inspection tools.
我们报告了一种超低成本的柔性接近传感器,仅使用现成的可回收材料,如铝箔,餐巾纸和双面胶带。与以前的报道不同,我们的器件结构在一个平台上具有两种传感能力,具有20厘米的长检测范围和0.05 kPa-1的压力灵敏度。这是有史以来第一次在单一平台上演示低成本,易于使用和批量生产的压力和接近感测工艺。传感器的机械灵活性使其能够安装在各种不规则平台上,这在许多领域至关重要,例如机器人,机器自动化,车辆技术和检测工具。
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引用次数: 2
Phase transition oxide neuron for spiking neural networks 用于脉冲神经网络的氧化物相变神经元
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548503
M. Jerry, Wei-Yu Tsai, Baihua Xie, Xueqing Li, V. Narayanan, A. Raychowdhury, S. Datta
Spiking neural networks are expected to play a vital role in realizing ultra-low power hardware for computer vision applications [1]. While the algorithmic efficiency is promising, their solid-state implementation with traditional CMOS transistors lead to area expensive solutions. Transistors are typically designed and optimized to perform as switches and do not naturally exhibit the dynamical properties of neurons. In this work, we harness the abrupt insulator-to-metal transition (IMT) in a prototypical IMT material, vanadium dioxide (VO2) [2], to experimentally demonstrate a compact integrate and fire spiking neuron [3]. Further, we show multiple spiking dynamics of the neuron relevant to implementing `winner take all' max pooling layers employed in image processing pipelines.
脉冲神经网络有望在实现计算机视觉应用的超低功耗硬件方面发挥重要作用[1]。虽然算法效率很有希望,但传统CMOS晶体管的固态实现导致面积昂贵的解决方案。晶体管通常被设计和优化为充当开关,而不自然地表现出神经元的动态特性。在这项工作中,我们利用典型的绝缘体到金属的突然转变(IMT)材料,二氧化钒(VO2)[2],实验证明了一个紧凑的集成和火脉冲神经元[3]。此外,我们展示了与实现图像处理管道中使用的“赢家通吃”最大池化层相关的神经元的多个峰值动态。
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引用次数: 22
Challenges and breakthroughs in the development of AlGaN-based UVC lasers 基于algan的UVC激光器发展的挑战与突破
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548515
R. Kirste, B. Sarkar, F. Kaess, I. Bryan, Z. Bryan, J. Tweedie, R. Collazo, Z. Sitar
Despite the rapid progress in III-nitride-based laser diodes, sub-300 nm UV semiconductors lasers have not been realized yet, mainly due to technical and scientific barriers arising from the lack of proper crystalline substrates and poor understanding of defect control in the wide bandgap semiconductors. In addition to low dislocation density, reduction in non-radiative centers and compensating point defect is required to achieve high internal quantum efficiency (IQE). AlGaN-based technology developed on single crystalline AlN substrates offers a pathway to address these challenges [1, 2]. Recently, UV LEDs emitting at 265 nm with output powers exceeding 80 mW and high reliability [3], as well as low-threshold, optically pumped lasers emitting at wavelengths between 230-280 nm [4,5] have been demonstrated.
尽管iii -氮化物基激光二极管进展迅速,但由于缺乏合适的晶体衬底和对宽禁带半导体缺陷控制的认识不足,导致技术和科学上的障碍,300nm以下的紫外半导体激光器尚未实现。除了低位错密度外,还需要减少非辐射中心和补偿点缺陷来实现高内量子效率。在单晶AlN衬底上开发的基于algan的技术为解决这些挑战提供了一条途径[1,2]。最近,265 nm的紫外发光二极管输出功率超过80 mW,可靠性高[3],以及波长在230-280 nm之间的低阈值光泵浦激光器[4,5]已经得到证实。
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引用次数: 0
mm-Wave N-polar GaN MISHEMT with a self-aligned recessed gate exhibiting record 4.2 W/mm at 94 GHz on Sapphire 具有自对准嵌入式栅极的毫米波n极GaN MISHEMT在蓝宝石上在94 GHz下表现出创纪录的4.2 W/mm
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548464
B. Romanczyk, S. Wienecke, M. Guidry, Haoran Li, K. Hestroffer, E. Ahmadi, Xun Zheng, S. Keller, U. Mishra
GaN based high electron mobility transistors have emerged as a leading technology for mm-wave solid state power amplification at W-band. To date, reports on W-band GaN HEMTs and MMICs have primarily featured devices grown in the Ga-polar orientation [1, 2]. In this work, the advantages of the N-polar orientation are exploited to produce a MISHEMT exhibiting record high 4.2 W/mm peak output power (Pout) at 94 GHz. The key enabling advantage of N-polar GaN devices are their inverted polarization fields. These fields create a natural, charge-inducing back-barrier that decouples the tradeoff between aspect ratio and channel electron density. Further, the reversed field in an AlGaN cap above the GaN channel opposes gate leakage and improves breakdown voltage [3]. Additionally, to mitigate surface-state induced dispersion and enhance the conductivity of the access regions, a GaN cap layer is added in the access regions through which the gate is recessed [4]. The fabrication process reported in this paper extends that of [4, 5] to have the foot gate metal deposited in a self-aligned fashion to the GaN cap recess etch.
基于氮化镓的高电子迁移率晶体管已成为w波段毫米波固态功率放大的领先技术。迄今为止,关于w波段GaN hemt和mmic的报道主要以ga极性方向生长的器件为特征[1,2]。在这项工作中,利用n极取向的优势,生产出在94 GHz下具有创纪录的4.2 W/mm峰值输出功率(Pout)的MISHEMT。n极GaN器件的关键使能优势是其反向极化场。这些场创造了一个自然的、电荷诱导的后障,使纵横比和通道电子密度之间的权衡去耦。此外,GaN沟道上方的AlGaN帽中的反向场防止栅极泄漏并提高击穿电压[3]。此外,为了减轻表面态引起的色散并增强通路区域的导电性,在栅极嵌入的通路区域中添加了GaN帽层。本文报道的制造工艺扩展了[4,5]的制造工艺,使脚栅金属以自对准的方式沉积到GaN帽凹槽蚀刻上。
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引用次数: 9
DC and RF characterizations of AlGaN/GaN MOSHEMTs with deep sub-micron T-gates and atomic layer epitaxy MgCaO as gate dielectric 深亚微米t栅极和MgCaO原子层外延栅极介质的AlGaN/GaN MOSHEMTs的直流和射频特性
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548407
Hong Zhou, Karynn A. Sutherlin, X. Lou, Sang Bok Kim, K. Chabak, R. Gordon, P. Ye
High performance deep sub-micron T-gate AlGaN/GaN MOSHEMTs are demonstrated using lattice matched ALE MgCaO as gate dielectric. The 120 nm-Lg MOSHEMT has an IDMAX of 1.2 A/mm, Ron of 1.5 Ω·mm, a ft/fmax of 101/150 GHz, with negligible hysteresis and IG, showing the promise as a GaN MOS technology. The work at Purdue University is supported by AFOSR and the work at Harvard University is supported by ONR.
采用晶格匹配ALE MgCaO作为栅极电介质,展示了高性能深亚微米t栅AlGaN/GaN MOSHEMTs。120 nm-Lg MOSHEMT的IDMAX为1.2 A/mm, Ron为1.5 Ω·mm, ft/fmax为101/150 GHz,迟滞和IG可忽略不计,显示出作为GaN MOS技术的前景。普渡大学的工作由AFOSR支持,哈佛大学的工作由ONR支持。
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引用次数: 1
An AlN/Al0.85Ga0.15N high electron mobility transistor with a regrown ohmic contact 具有再生欧姆接触的AlN/Al0.85Ga0.15N高电子迁移率晶体管
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548395
A. Baca, A. Armstrong, A. Allerman, E. Douglas, C. Sanchez, M. King, M. Coltrin, C. Nordquist, T. Fortune, R. Kaplar
The performance and efficiency of power devices depends on both high breakdown voltage and low on-state resistance. For semiconductor devices, the critical electric field (EC) affecting breakdown scales approximately as Eg25 [1], making the wide bandgap semiconductor materials logical candidates for high voltage power electronics devices. In particular, AlGaN alloys approaching AlN with its 6.2 eV bandgap have an estimated EC approaching 5x that of GaN. This factor makes AlN/AlGaN high election mobility transistors (HEMTs) extremely interesting as candidate power electronic devices. Until now, such devices have been hampered, ostensibly due to the difficulty of making Ohmic contacts to AlGaN alloys with high Al composition. With the use of an AlN barrier etch and regrowth procedure for Ohmic contact formation, we are now able to report on an AlN/AlGaN HEMT with 85% Al.
功率器件的性能和效率取决于高击穿电压和低导通电阻。对于半导体器件,影响击穿的临界电场(EC)约为Eg25[1],使得宽禁带半导体材料成为高压电力电子器件的合理候选材料。特别是,AlGaN合金的带隙接近AlN,其带隙为6.2 eV,估计EC接近GaN的5倍。这一因素使得AlN/AlGaN高迁移率晶体管(hemt)作为候选电力电子器件非常有趣。到目前为止,这种装置一直受到阻碍,表面上是由于难以与高铝成分的AlGaN合金进行欧姆接触。通过使用AlN势垒蚀刻和欧姆接触形成的再生程序,我们现在能够报告含有85% Al的AlN/AlGaN HEMT。
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引用次数: 1
Drain-offset ZnO thin film transistors for high voltage operations 用于高压工作的漏极偏置ZnO薄膜晶体管
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548469
Y. Gong, T. Jackson
We report ZnO thin film transistors (TFTs) with offset drain for high voltage operation. Offset-drain FETs using Si, a-Si:H, and pentacene have been previously demonstrated [1,2,3]. The TFTs use a bottom gate structure with Al2O3 gate dielectric and ZnO active layers deposited by plasma enhanced atomic layer deposition (PEALD). As the drain offset is increased from 0 μm to 2 μm· the drain-to-source breakdown voltage increased from 33 V to 82 V, while the linear mobility decreased from 10 cm2/Vs to 4 cm2/Vs. Our process flow is simple and compatible with glass and polymeric substrates.
我们报道了具有偏置漏极的ZnO薄膜晶体管(TFTs)用于高压工作。使用Si、a-Si:H和并五苯的偏置漏极场效应管已经被证实[1,2,3]。TFTs采用底栅结构,采用等离子体增强原子层沉积法(PEALD)沉积Al2O3栅极介电层和ZnO活性层。当漏极偏置从0 μm增加到2 μm·时,漏源击穿电压从33 V增加到82 V,而线性迁移率从10 cm2/Vs降低到4 cm2/Vs。我们的工艺流程简单,与玻璃和聚合物基材兼容。
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引用次数: 1
Recycled carrier modulation using Fabry-Perot resonance 利用法布里-珀罗共振的再循环载波调制
Pub Date : 2016-06-19 DOI: 10.1109/DRC.2016.7548450
Christopher J. Cullen, J. Jerothe, J. Murakowski, M. Zablocki, A. Sharkawy, D. Prather
Up-converting RF information to optical signals has become an appealing alternative for communication, besides in the realm of telecommunication, due to inherent advantages in using fiber optics. Fibers have proven to have lower loss, better bandwidth, be lighter, and as robust as conventional copper cabling. This has led to applications in intelligent traffic systems, military uses (including integration into tanks and drones), and others not explicitly stated here. Central to these systems working well is the efficient, accurate up-converting of an RF signal; it is here that the roll of the electro-optic modulator is introduced into the system. The more efficient and linear these modulators can be, the more accurately the data can be up-converted, and the less power required perform the conversion. There have been efforts to increase efficiency by developing materials with higher intrinsic χ(2) nonlinearity [1], and developing structures to increase field interaction magnitude with the material [2]-[4], but not without limiting the bandwidth of the device. In this work, we explore a novel modulation scheme to up efficiency and linearity without sacrificing bandwidth.
由于使用光纤的固有优势,将射频信息上转换为光信号已成为除电信领域外的一种有吸引力的通信替代方案。光纤已被证明具有更低的损耗,更好的带宽,更轻,和传统的铜电缆一样坚固。这导致了智能交通系统的应用,军事用途(包括集成到坦克和无人机中),以及这里没有明确说明的其他用途。这些系统工作良好的核心是射频信号的高效,准确的上转换;在此,将电光调制器的滚转引入到系统中。这些调制器的效率和线性度越高,上转换的数据就越精确,转换所需的功率就越小。人们一直在努力通过开发具有更高特性χ(2)非线性的材料来提高效率[1],并开发结构来增加与材料的场相互作用幅度[2]-[4],但并非没有限制设备的带宽。在这项工作中,我们探索了一种新的调制方案,在不牺牲带宽的情况下提高效率和线性度。
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引用次数: 0
期刊
2016 74th Annual Device Research Conference (DRC)
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