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High uniformity HgI2 thick film prepared by ultrasonic wave-assisted physical vapor deposition 超声辅助物理气相沉积制备高均匀性HgI2厚膜
Pub Date : 2010-10-11 DOI: 10.1117/12.888221
L. Nie, Wei-min Shi, Weigang Yang, Lei Ma, Liangliang Chen, Guang-pu Wei
Poly-HgI2 films with an average small grain size of about 50μm were obtained on ITO substrates by ultrasonic wave-assisted vapor deposition method whose deposition temperature can be as low as 40 degree celsius. X-ray diffraction (XRD), scan electron microscopes (SEM) and Raman spectrum characterization suggested that the film grew along the (001) crystal plane with uniform grain size. Dark current of the film and its response to X-ray had also been investigated with Au as pixel electrodes, the response uniformity on all 16 pixels is within 10%.
采用超声辅助气相沉积法在ITO衬底上制备了平均晶粒尺寸约为50μm的Poly-HgI2薄膜,沉积温度可低至40℃。x射线衍射(XRD)、扫描电镜(SEM)和拉曼光谱表征表明,薄膜沿(001)晶面生长,晶粒尺寸均匀。以Au为像元电极,研究了薄膜的暗电流及其对x射线的响应,16个像元的响应均匀度均在10%以内。
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引用次数: 0
Analysis on the surface uniformity and edge recombination of single-crystalline silicon solar cells on electrical parameters 单晶硅太阳电池表面均匀性和边缘复合对电学参数的影响分析
Pub Date : 2010-10-11 DOI: 10.1117/12.888223
Lu Huang, Jing Jin, Wei-min Shi, Fanfeng Yu, Jie Sun, Haokun Hu, Zechun Cao, Guang-pu Wei
A model using Ansys software was established to simulate electrical parameters of solar cell when incident sunlight radiated on its surface. In the model, solar cell electrical parameters were experimentally characterized as the solar cell was exposed through hollow out mask. The experimental and numerical photovoltaic performances were completely matched. The results showed that the central field of solar cell had higher efficiency than the edge field of which on the same area exposed to sunlight. The results also showed that surface uniformity and edge recombination were two important loss mechanisms, which decreased solar cell efficiency.
利用Ansys软件建立了太阳电池在入射太阳光照射下的电学参数模拟模型。在该模型中,太阳电池通过中空掩膜暴露时,实验表征了太阳电池的电学参数。实验结果与数值结果完全吻合。结果表明,在相同的暴露面积上,太阳能电池的中心场比边缘场具有更高的效率。结果还表明,表面均匀性和边缘复合是降低太阳能电池效率的两个重要损失机制。
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引用次数: 0
Crystallization of amorphous silicon films by a Nd:YAG laser and correlated surface morphology Nd:YAG激光对非晶硅薄膜的结晶及相关表面形貌的影响
Pub Date : 2010-10-11 DOI: 10.1117/12.888222
Jing Jin, Lu Huang, Zhijun Yuan, Wei-min Shi, Zechun Cao, Junming Zhou
The phosphorous (P)-doped hydrogenated amorphous silicon (a-Si:H) thin films were crystallized by a frequency-doubled (λ=532 nm) Nd:YAG pulsed nanosecond laser with laser beam shaping system introduced by a fly-eye lens array. The correlations among crystallization, stress and microstructures with surface morphology during crystallization process can be determined. The increased crystalline fraction (XC) is realized by a considerable stress release. It is observed that the periodic two dimensional grid patterns with the period of about 15 μm are formed at laser energy density (EL) of 740 mJ/cm2 and are very sensitive to the energy density. Further increasing laser energy density to laser ablation can give rise to the irradiation damage on the film with poor crystalline quality and high surface roughness.
采用双倍频(λ=532 nm) Nd:YAG脉冲纳秒激光器,采用飞眼透镜阵列引入的激光束整形系统,制备了磷(P)掺杂氢化非晶硅(a- si:H)薄膜。可以确定结晶过程中结晶、应力和微观结构与表面形貌的关系。晶体分数(XC)的增加是通过相当大的应力释放来实现的。结果表明,在激光能量密度为740 mJ/cm2时,形成了周期约为15 μm的二维网格,并且对能量密度非常敏感。进一步增大激光能量密度会对晶体质量差、表面粗糙度高的薄膜造成辐照损伤。
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引用次数: 0
Extreme ultraviolet reflective multilayers at 30.4nm 30.4nm的极紫外反射多层膜
Pub Date : 2010-10-11 DOI: 10.1117/12.888159
Wenjuan Wu, Jingtao Zhu, Fengli Wang, Zhong Zhang, Hongchang Wang, Shumin Zhang, Zhanshan Wang, Lingyan Chen, Hongjun Zhou, T. Huo
Mutilayers are important optical elements and widely used for extreme ultraviolet astronomical observation. For selecting the emission line multilayers should have high reflectivity and narrow spectral bandwidth. In this paper, six different multilayers including Si/C, Si/B4C, Si/Mo/B4C, Si/SiC, Mg/SiC and Mo/Si were designed for normal incidence angle of 5° at He-IIemission line(λ=30.4 nm). These multilayers have been fabricated using a direct current magnetron sputtering system. The period of multilayers were measured by X-ray diffractometer(XRD) and the reflectivities were measured on National Synchrotron Radiation Facility in Hefei, China. Then the reflectivities and the spectral bandwidth of these multilayers were compared respectively. It shows that the spectral bandwidth of multilayers of low Z materials is narrower than that of the normal Mo/Si multiayer, the reflectivity of Si/Mo/B4C multilayer is higher than that of Si-based multilayers of two kinds of materials. And Mg/SiC multilayer has the highest reflectivity of 43.81% and the narrowest spectral bandwidth of 1.44nm, which proves that Mg/SiC multilayer is more potential for selecting the emission line in extreme ultraviolet solar physics.
多层膜是重要的光学元件,广泛应用于极紫外天文观测。为了选择发射线,多层材料应具有高反射率和窄光谱带宽。本文设计了Si/C、Si/B4C、Si/Mo/B4C、Si/SiC、Mg/SiC和Mo/Si 6种不同的多层膜,在he - iii发射线(λ=30.4 nm)处的法向入射角为5°。这些多层材料是用直流磁控溅射系统制备的。利用x射线衍射仪(XRD)测量了多层膜的周期,并在合肥国家同步辐射设施上测量了反射率。然后分别比较了这些多层膜的反射率和光谱带宽。结果表明,低Z材料多层膜的光谱带宽比普通Mo/Si多层膜窄,Si/Mo/B4C多层膜的反射率高于两种材料的Si基多层膜。Mg/SiC多层材料的反射率最高,为43.81%,光谱带宽最窄,为1.44nm,证明了Mg/SiC多层材料在极紫外太阳物理中更有选择发射谱线的潜力。
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引用次数: 0
Red electroluminescence of diamond thin films 金刚石薄膜的红色电致发光
Pub Date : 2010-10-11 DOI: 10.1117/12.888163
Xiaoping Wang, Yu Zhu, Xin-Xin Liu
A diamond/SiO2/ indium-tin oxide (ITO) thin film multilayer structure of electroluminescent devices was reported. Effects of process parameters on morphologies and structures of the thin films were detected and analyzed by scanning electron microscopy, X-ray diffraction (XRD) spectrometer and X-ray photoelectron spectrometer (XPS). Finally a strong monochromatic red light emission was observed from this multilayer structure device, the electroluminescence spectrum at room temperature shows that the only illumination peak locates at 742nm, which is attributed to silicon atoms within the diamond film impurity center.
报道了一种金刚石/SiO2/氧化铟锡(ITO)薄膜多层结构的电致发光器件。采用扫描电镜、x射线衍射仪(XRD)和x射线光电子能谱仪(XPS)检测和分析了工艺参数对薄膜形貌和结构的影响。最后在该多层结构器件中观察到强烈的单色红光发射,室温下的电致发光光谱显示,唯一的发光峰位于742nm处,这归因于金刚石薄膜杂质中心内的硅原子。
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引用次数: 2
Air-annealing effects on SiO2/ITO coating 空气退火对SiO2/ITO涂层的影响
Pub Date : 2010-10-11 DOI: 10.1117/12.888408
Yi-qin Ji, Deying Chen, Weihao Li, Bingjun Wu, J. Zong, Dan-dan Liu, Yanmin Zhang
Indium tin oxide (ITO) thin film with SiO2 protective upper layer prepared by electron beam evaporation was annealed in air up to 300°C. Evolution of transmittance, resistance and surface morphology of this SiO2/ITO coating was studied. Transmittance in visible and near-infrared range both increased while absorption edge exhibited red shift after annealing. Resistance increased monotonously with rising annealing temperature, yet increments became smaller at temperatures above 270°C. Micron-defects were observed on the surface of SiO2/ITO coating after annealing. Enhancement of crystallinity of ITO layer at high temperatures was thought to be responsible for these morphology and resistance evolutions.
采用电子束蒸发法制备了具有SiO2保护层的氧化铟锡(ITO)薄膜,并将其在300℃的空气中退火。研究了该SiO2/ITO涂层的透光率、电阻和表面形貌的演变。退火后,可见光和近红外透光率均增加,吸收边出现红移。电阻随退火温度的升高而单调增加,但当温度高于270℃时,电阻增量变小。退火后的SiO2/ITO涂层表面出现微米级缺陷。ITO层在高温下结晶度的增强被认为是这些形貌和电阻演变的原因。
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引用次数: 0
Ellipsometric study of ferroelectric Ba0.4Sr0.6-xMnxTiO3 ceramics from 0.7 to 4.7 eV 0.7 ~ 4.7 eV铁电Ba0.4Sr0.6-xMnxTiO3陶瓷的椭偏研究
Pub Date : 2010-10-11 DOI: 10.1117/12.888289
K. Jiang, J. Z. Zhang, Z. Hu
Spectroscopic ellipsometry was used to extract the optical properties of Ba0.4Sr0.6-xMnxTiO3 (BSMT) (x from 1% to 20%) ceramics in the 0.7-4.7 eV (260-1700 nm) photon energy range at room temperature. X-ray diffraction analysis showed that BSMT ceramics are polycrystalline and lattice constants with different Mn composition present a slight variation. By reproducing the experimental ellipsometric spectra (Ψ and Δ), the optical constants and optical band gap energy have been obtained. It was found that the refractive index n increases first and then decreases as the photon energy increases from 0.7 to 4.7 eV for all the samples. The extinction coefficient k increases with increasing photon energy. On the other hand, both n and k decrease with increasing doping level of Mn (x ≤ 5%). Direct optical band gap energy is estimated to be 3.45-3.71 eV owing to different Mn doping. The difference of the optical properties can be ascribed to structure distortion with different Mn composition. The present results could be useful for future application of (Ba,Sr)TiO3-based optoelectronic devices.
利用椭圆偏振光谱法在室温下提取了Ba0.4Sr0.6-xMnxTiO3 (BSMT) (x为1% ~ 20%)陶瓷在0.7 ~ 4.7 eV (260 ~ 1700 nm)光子能量范围内的光学性质。x射线衍射分析表明,BSMT陶瓷是多晶的,不同Mn成分的晶格常数略有变化。通过再现实验椭偏光谱(Ψ和Δ),得到了光学常数和光带隙能。结果表明,当光子能量从0.7 eV增加到4.7 eV时,所有样品的折射率均呈现先增大后减小的趋势。消光系数k随光子能量的增加而增大。另一方面,n和k随Mn掺杂量的增加而降低(x≤5%)。Mn掺杂不同,直接光学带隙能估计为3.45 ~ 3.71 eV。光学性能的差异可归因于不同Mn组成的结构畸变。本研究结果可用于(Ba,Sr) tio3基光电器件的未来应用。
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引用次数: 0
Some techniques to characterize multilayers and their interfaces 表征多层及其接口的一些技术
Pub Date : 2010-10-11 DOI: 10.1117/12.888172
P. Jonnard
We describe some destructive and non-destructive techniques that can be useful to examine multilayers and particularly their interfaces. The presented non-destructive techniques allow obtaining the electron structure of the sample and then determine the chemical states of the elements in the multilayer from the analysis of the occupied (x-ray emission and photoemission spectroscopies) or unoccupied (x-ray absorption or electron energy loss spectroscopies) states. Among the destructive techniques we introduce secondary ion mass spectrometry and transmission electron microscopy that bring some information about the structural quality of the samples.
我们描述了一些破坏性和非破坏性的技术,可以用来检查多层,特别是他们的界面。所提出的非破坏性技术允许获得样品的电子结构,然后通过分析占据(x射线发射和光电发射光谱)或未占据(x射线吸收或电子能量损失光谱)的状态来确定多层材料中元素的化学状态。在破坏性的技术中,我们介绍了二次离子质谱法和透射电子显微镜,这些技术可以提供一些关于样品结构质量的信息。
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引用次数: 1
Broad flattop transparent photonic band in truncated photonic crystals composed of the symmetric unit cell 对称单晶组成的截断光子晶体中的宽平顶透明光子带
Pub Date : 2010-10-11 DOI: 10.1117/12.888196
G. Du, Lixin Li, Haitao Jiang, Yunhui Li, Liwei Zhang, Junfang Zhao, Tianlin Yang, Zhongchen Wu, Shumei Song, Yanhui Li, M. Lv
We theoretically show that a one-dimensional finite all-dielectric periodic structure composed of symmetric unit cells can possess a broad flattop transparent photonic band. In contrast to the conventional viewpoint that the thickness of the truncated photonic crystals affects the transmission within the pass band, the transparent photonic band is insensitive to the change of the periodic number since the equivalent refractive indices of our structures can be nearly equal to that of the background in a wide frequency range. With easy fabrication, this broad flattop transparent photonic band will play an important role in the broadband filtering.
我们从理论上证明了由对称单晶组成的一维有限全介电周期结构可以具有宽的平顶透明光子带。与截断光子晶体厚度影响通带内透射的传统观点相反,透明光子带对周期数的变化不敏感,因为我们的结构的等效折射率在很宽的频率范围内几乎等于背景的折射率。这种宽平顶透明光子带易于制作,将在宽带滤波中发挥重要作用。
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引用次数: 1
Molecular beam epitaxial growth of CdTe and related II-VI materials on Si for the fabrication of infrared detectors and solar cells CdTe及相关II-VI材料在Si上的分子束外延生长,用于制造红外探测器和太阳能电池
Pub Date : 2010-10-11 DOI: 10.1117/12.888643
S. Sivananthan, M. Carmody, C. Gilmore, J. Garland
CdTe/Si substrates with etch-pit densities ~5 x 104 - 2 x105 cm-2 and x-ray diffraction full-width at half-maximum <60 arcsec over >60% of a 3" substrate and ≤85 arcsec over the entire area are now available. Midwave and shortwave HgCdTe infrared detectors fabricated on these substrates have device characteristics as good as those of detectors fabricated on lattice-matched CdZnTe substrates. Also, minority carrier lifetimes of 100s of nanoseconds are measured for CdTe/Si and CdZnTe/Si, and both can be p-doped 1017 cm-3 and n-doped >1020 cm-3. Calculations suggest that the use of these materials should yield multijunction solar cells with efficiencies higher than those of the corresponding III-V multijunction cells at much lower cost, using rugged, large-area, inexpensive active Si substrates. The first CdZnTe/Si single-junction solar cells fabricated by EPIR displayed an electronic-charge times open-circuit voltage, qVoc, within ~0.45 eV of the CdZnTe bandgap Eg, as good a result as that for the best III-V alloy single-junction cells, and confirmed the suitability of single-crystal CdZnTe/Si for the manufacture of high-efficiency solar cells.
CdTe/Si衬底的蚀刻坑密度为5 × 104 -2 × 105 cm-2, x射线衍射全宽为3"衬底的一半-最大60%,整个面积≤85弧秒。在这些衬底上制作的中波和短波HgCdTe红外探测器具有与在晶格匹配的CdZnTe衬底上制作的探测器相同的器件特性。此外,CdTe/Si和CdZnTe/Si的少数载流子寿命为100纳秒,两者都可以p掺杂1017 cm-3和n掺杂>1020 cm-3。计算表明,使用这些材料应该产生比相应的III-V多结电池效率更高的多结太阳能电池,成本更低,使用坚固,大面积,廉价的活性Si衬底。用EPIR法制备的首个CdZnTe/Si单结太阳能电池,在CdZnTe带隙Eg的~0.45 eV范围内,显示出与最佳III-V合金单结电池相同的电子电荷倍开路电压qVoc,证实了单晶CdZnTe/Si单晶用于制造高效太阳能电池的适宜性。
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引用次数: 0
期刊
International Conference on Thin Film Physics and Applications
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