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Temperature dependence of photoluminescence, Raman scattering, and transmittance spectra of anatase Ti1-xFexO2 nanocrystalline films 锐钛矿Ti1-xFexO2纳米晶薄膜的光致发光、拉曼散射和透射光谱的温度依赖性
Pub Date : 2010-10-11 DOI: 10.1117/12.888287
X. G. Chen, W. Li, Y. W. Li, J. Chu
Anatase Ti1-xFexO2 (x=0, 1%, 2%) nanocrystalline films were prepared on quartz substrates by a facile nonhydrolytic sol-gel route. The structure and optical properties have been studied by X-ray diffraction (XRD), Raman scattering, transmittance spectra and temperature dependent photoluminescence (PL). The B1g, Eg and (A1g+B1g) modes of anatase phase TiO2 can be observed in Raman spectra. Dielectric functions have been extracted by fitting the transmittance spectra in the photon energy range of 0.5-6.5 eV with Adachi's model. The pure TiO2 film displays a strong broadening visible luminescence band; however, Fe-doped samples exhibit a very weak luminescence due to the increase of oxygen vacancy concentration in TiO2. With the temperature increases, the PL intensity decreases monotonously and there are five emission peaks for the pure sample in low temperatures, which could be attributed to oxygen vacancies, surface states and F+ center.
采用非水解溶胶-凝胶法在石英衬底上制备锐钛矿Ti1-xFexO2 (x= 0,1%, 2%)纳米晶薄膜。通过x射线衍射(XRD)、拉曼散射(Raman)、透射光谱和温度相关光致发光(PL)研究了材料的结构和光学性能。锐钛矿相TiO2在拉曼光谱中具有B1g、Eg和(A1g+B1g)模式。利用Adachi模型拟合了0.5 ~ 6.5 eV光子能量范围内的透射光谱,提取了介电函数。纯TiO2薄膜的可见光发光带展宽明显;然而,由于TiO2中氧空位浓度的增加,fe掺杂的样品表现出非常微弱的发光。随着温度的升高,纯样品的发光强度单调降低,在低温下存在5个发射峰,这可能是由于氧空位、表面态和F+中心的作用。
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引用次数: 0
Position-controlled formation of Si nanopores by chemical vapor deposition of SiC/SOI(100) 化学气相沉积SiC/SOI的位置控制形成Si纳米孔(100)
Pub Date : 2010-10-11 DOI: 10.1117/12.888531
Y. Ikoma, H. Yahaya, H. Sakita, Yuta Nishino, T. Motooka
We investigated the position-controlled nanopore formation in the surface of thin Si layer of a Silicon on Insulator (SOI) substrate by utilizing chemical vapor deposition (CVD). The Si membrane was obtained by anisotropic etching of the handle wafer. The SiC film growth was carried out from the backside surface by utilizing CH3SiH3 pulse jet CVD at the substrate temperature of 900 °C. Square pits with the sizes of ≤0.5 μm were observed on the Si membrane while no pit was formed on the top Si layer. This result indicates that the position of the nanopores on the top Si layer can be controlled without using SiO2 masks on the front side surface.
利用化学气相沉积(CVD)技术研究了绝缘体上硅(SOI)衬底薄硅层表面位置控制纳米孔的形成。采用各向异性刻蚀的方法制备了硅膜。在衬底温度900℃下,利用CH3SiH3脉冲射流CVD从背面表面生长SiC薄膜。在硅膜上观察到尺寸≤0.5 μm的方形凹坑,而在硅顶层没有形成凹坑。这一结果表明,在不使用SiO2掩膜的情况下,可以控制顶部Si层纳米孔的位置。
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引用次数: 1
Preparation and characterizaion of CTAB-templated large pore silica nanocomposite films ctab模板大孔二氧化硅纳米复合膜的制备与表征
Pub Date : 2010-10-11 DOI: 10.1117/12.888306
Lanfang Yao, Linlin Tian, Shuo Wang, Lin Li, Ruiqing Xu, X. Fang
CTAB-templated large pore silica nano-composite films were prepared by means of a two-step acid-catalyzed and solgel process using tetraethoxysilane (TEOS) as the precursor, Surfactant cetyltrimethy- ammonium bromide (CTAB) as an organic template to generate the uniformity pore structure and 1,3,5-trimethyl benzene (TMB) as organic swelling agent. The obtained samples were characterized by XRD, Fourier-transform infrared (FTIR) and Atomic Force Microscopy (AFM). We found that the TMB/CTAB mol ratio must be controlled well for producing large pore materials.
以四乙氧基硅烷(TEOS)为前驱体,表面活性剂十六烷基三甲基溴化铵(CTAB)为有机模板剂,1,3,5-三甲基苯(TMB)为有机膨胀剂,采用酸催化-凝胶两步法制备了CTAB模板化的大孔二氧化硅纳米复合膜。采用XRD、FTIR和AFM对样品进行了表征。研究发现,制备大孔材料必须控制好TMB/CTAB的摩尔比。
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引用次数: 0
High precision deposition of single and multilayer x-ray optics and their application in x-ray analysis 单层和多层x射线光学元件的高精度沉积及其在x射线分析中的应用
Pub Date : 2010-10-11 DOI: 10.1117/12.888192
R. Dietsch, T. Holz, M. Krämer, D. Weissbach
The field of single and multilayer based optics has seen significant improvements and new applications in recent years. In this paper, we give an overview of the numerous types of single and multilayer optics that have been developed. The fabrication possibilities of well-known regular periodic multilayers have been driven close to the theoretical limit, providing high resolution or high flux optics for a wide range of photon energies. In addition to that, multilayers with a lateral gradient have been developed to be adapted to curved substrates (for example for focusing purposes) or varying incidence angles on long, flat substrates. Depth-graded multilayers with arbitrarily selectable layer thicknesses over the entire layer stack have been simulated and manufactured, mainly as broadband mirrors with immense bandwidths. Finally, new applications of high precision deposition are reference sample for XRF (having several elements in low concentrations of few ng/mm2) and TXRF (with mass deposition in the range of 1011 atoms/cm2) pay tribute to the low detection limits achievable in modern instruments for these techniques.
近年来,单层和多层光学领域有了显著的进步和新的应用。在本文中,我们给出了许多类型的单层和多层光学已经发展的概述。众所周知的规则周期多层膜的制造可能性已经接近理论极限,为大范围的光子能量提供高分辨率或高通量光学。除此之外,已开发出具有横向梯度的多层材料,以适应弯曲基板(例如用于聚焦目的)或在长而平坦的基板上变化入射角。在整个层堆上具有任意选择层厚度的深度梯度多层已经被模拟和制造出来,主要用作具有巨大带宽的宽带反射镜。最后,高精度沉积的新应用是XRF的参考样品(具有几ng/mm2的低浓度的几种元素)和TXRF(在1011个原子/cm2范围内的质量沉积),这是对这些技术的现代仪器可实现的低检测限的致敬。
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引用次数: 3
CdTe thin film solar cell on flexible metallic substrate 柔性金属基板上的碲化镉薄膜太阳能电池
Pub Date : 2010-10-11 DOI: 10.1117/12.888236
Q. Su, Dongming Li, W. Shi, Linjun Wang, Yiben Xia
In this paper lightweight and flexible CdS/CdTe thin film solar cells on metallic substrates have been developed using a close spaced sublimation process with a low deposition temperature. The analysis of basic properties of CdS and CdTe thin films was carried out by SEM and XRD characterization techniques. The thin film solar cell devices were characterized by current- voltage and photocurrent techniques. Open circuit voltage (Voc) of 710 mV, short-circuit current density (Jsc) of 20.55 mA/cm2 and conversion efficiency of 9.04% was obtained for the flexible CdTe/CdS thin film solar cell under AM1.5 illumination.
本文采用低沉积温度的紧密间隔升华工艺,在金属衬底上制备了轻质柔性CdS/CdTe薄膜太阳能电池。采用SEM和XRD表征技术对CdS和CdTe薄膜的基本性质进行了分析。采用电流电压和光电流技术对薄膜太阳能电池器件进行了表征。在AM1.5光照下,柔性CdTe/CdS薄膜太阳能电池的开路电压(Voc)为710 mV,短路电流密度(Jsc)为20.55 mA/cm2,转换效率为9.04%。
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引用次数: 2
Effect of different supermirrors on the performance of a hard x-ray telescope 不同超镜对硬x射线望远镜性能的影响
Pub Date : 2010-10-11 DOI: 10.1117/12.887369
Fangfang Wang, Jingtao Zhu, M. Tan, Li Jiang, Fengli Wang, B. Mu, Zhanshan Wang
We are developing a hard X-ray telescope utilizing multilayer supermirrors. This telescope is conical approximation of the Wolter-I configuration with tightly nested shells. Because of the fact that different nested shell corresponds to different grazing incident angle, so the optimum multilayer design depends on the grazing angle, and one would therefore, ideally design a different coating for each of the nested mirror shells. However, as a matter of practicality, we have to reduce the number of different designs for a reasonable compromise between the complexity of the calculation and optimal performance. In this paper, we investigate the effect of different angular classification on the effective area of the hard X-ray telescope. Many groups of hard X-ray supermirrors are optimized with different grazing incident angles using a numerical and analysis method. These supermirrors are divided into different number of groups, e.g. two, four, six, eight, ten, twelve, fourteen, and sixteen, respectively, and the corresponding effective areas are calculated. Results show that six groups of X-ray supermirrors are suitable for a reasonable compromise between optimal performance and the complexity of the calculation and fabrication.
我们正在开发一种利用多层超镜的硬x射线望远镜。这个望远镜是wolter - 1结构的锥形近似值,有紧密嵌套的外壳。由于不同的嵌套壳体对应不同的掠射入射角,因此最佳的多层设计取决于掠射角,因此,理想情况下,可以为每个嵌套壳体设计不同的涂层。然而,出于实用性的考虑,我们必须减少不同设计的数量,以在计算的复杂性和最佳性能之间做出合理的妥协。本文研究了不同角度分类对硬x射线望远镜有效面积的影响。采用数值分析方法对多组不同掠射入射角的硬x射线超镜进行了优化。将这些超镜分别分成2组、4组、6组、8组、10组、12组、14组和16组,并计算相应的有效面积。结果表明,六组x射线超镜在最佳性能和计算制造复杂性之间取得了合理的折衷。
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引用次数: 0
Contact resistance in organic transistors with different structures 不同结构有机晶体管的接触电阻
Pub Date : 2010-10-11 DOI: 10.1117/12.888227
Jiaxing Hu, L. Niu, Rong-hui Guo, B. Liu
It is an important way to improve carrier mobility by reducing the contact resistance in organic transistors. In this paper, two kinds of transistors were fabricated with copper phthalocyanine semiconductor. Then by experimental methods, we tested the devices with different structure and different channel length, and analyzed the effect of structure on contact resistance as well as output characteristic. The results demonstrate that gate voltage can effectively reduce the contact resistance in the top contact device.
降低有机晶体管的接触电阻是提高载流子迁移率的重要途径。本文采用酞菁铜半导体材料制备了两种晶体管。然后通过实验方法对不同结构和不同通道长度的器件进行了测试,分析了结构对接触电阻和输出特性的影响。结果表明,栅极电压可以有效地降低顶触点器件的接触电阻。
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引用次数: 0
A high spatial resolution CsI:Tl scintillation film based on net-like substrate 基于网状衬底的高空间分辨率CsI:Tl闪烁膜
Pub Date : 2010-10-11 DOI: 10.1117/12.888355
Wei Zhang, M. Gu, Dalin Yao, Xiaolin Liu, Shi-ming Huang, Bo Liu, Chen Ni
CsI:Tl scintillation films were prepared on the net-like patterning substrates. The pattern of the substrates as well as the morphology of the CsI:Tl films were measured by SEM. The results show that the size of each grid on substrate is 55μm which is formed by SU-8 photoresist with 5μm in both height and width, and the CsI:Tl films display quite a good columnar structure. The spatial resolutions of X-ray imaging were taken by MTF measurement. The spatial frequency of the CsI:Tl films on patterned substrates can reach up to 10 lp/mm at the 10% level of MTF, which is twice higher than that of the CsI:Tl film on the substrate without patterning.
在网状图案衬底上制备了CsI:Tl闪烁薄膜。用扫描电子显微镜(SEM)测量了衬底的图案和CsI:Tl薄膜的形貌。结果表明:采用高宽均为5μm的SU-8光刻胶在衬底上形成的网格尺寸为55μm, CsI:Tl薄膜呈现出良好的柱状结构;通过MTF测量获得x射线成像的空间分辨率。在10% MTF水平下,有图案化基底上的CsI:Tl薄膜的空间频率可达10 lp/mm,比无图案化基底上的CsI:Tl薄膜的空间频率高2倍。
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引用次数: 2
Design of the chirped multilayer mirrors in extreme ultraviolet region for ultrafast applications 超快应用于极紫外区啁啾多层反射镜的设计
Pub Date : 2010-10-11 DOI: 10.1117/12.888421
Fengli Wang, Lei Liu, Jingtao Zhu, Zhong Zhang, Lingyan Chen
Chirped Mo/Si multilayer mirrors used in 13-17nm region have been designed using analytical approach based on the combination of genetic algorithm and simplex algorithm. The Cauchy equation and the polynomial expression were used to fit the real part and the imaginary part of the optical constants of Mo and Si in the wavelength region of 12.8-17.2nm, respectively. The reflectivity, reflective phase, group delay and group delay dispersion of the multilayer were calculated based on the Fresnel iterative equations. The initial structure of the multilayer was obtained by using the genetic algorithm, and the final structure of the mirror was optimized by using the simplex algorithm. We got the different multilayer mirrors for the target GDD of -2800 as2, -3600 as2, and -6500 as2. For these three multilayer mirrors, the average reflectivities in the wavelength range of 13-17 nm are 7.00± 0.08 %, 5.99 ±0.05 %, and 6.00±0.05 %, respectively. And the average GDD in the same wavelength range are -2793.22±104.00 as2,-3597.44±79.06 as2, and - 6498.13±59.96 as2. In addition, the effects of the interface roughness on the reflectivity and the phase were discussed. It is found that the reflectivity is sensitive to the interface roughness, but the phase is insensitive.
采用遗传算法和单纯形算法相结合的解析方法,设计了13-17nm区域的Mo/Si啁啾多层反射镜。用柯西方程和多项式表达式分别拟合Mo和Si在12.8 ~ 17.2nm波长范围内的光学常数的实部和虚部。基于菲涅耳迭代方程计算了多层膜的反射率、反射相位、群延迟和群延迟色散。采用遗传算法得到多层镜的初始结构,采用单纯形算法对最终结构进行优化。我们得到了目标GDD为-2800 as2、-3600 as2和-6500 as2的不同多层反射镜。在13 ~ 17 nm波长范围内,三种多层反射镜的平均反射率分别为7.00±0.08%、5.99±0.05%和6.00±0.05%。同一波长范围内的平均GDD分别为-2793.22±104.00 as2、-3597.44±79.06 as2和- 6498.13±59.96 as2。此外,还讨论了界面粗糙度对反射率和相位的影响。发现反射率对界面粗糙度敏感,而相位不敏感。
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引用次数: 0
The annealing effects on the ZnO/diamond film heterojunction diode 退火对ZnO/金刚石薄膜异质结二极管的影响
Pub Date : 2010-10-11 DOI: 10.1117/12.888200
Jian Huang, Linjun Wang, K. Tang, Jijun Zhang, Wei-min Shi, Yiben Xia, Xionggang Lu
ZnO/diamond film heterojunction diodes were fabricated by depositing n-type ZnO films on p-type freestanding diamond (FSD) films using radio-frequency (RF) magnetron sputtering method. The effects of the annealing process on the properties of ZnO films were studied. The influence of the annealing process on the current-voltage (I-V) characteristics of the electrodes on ZnO and diamond films and the property of heterojunction diode was also examined. The results showed that the annealing treatment was helpful to improve the crystalline quality of the films and the performance of the diode.
采用射频磁控溅射的方法,在p型独立金刚石(FSD)薄膜上沉积n型ZnO薄膜,制备了ZnO/金刚石薄膜异质结二极管。研究了退火工艺对ZnO薄膜性能的影响。研究了退火工艺对ZnO和金刚石薄膜电极的电流-电压特性以及异质结二极管性能的影响。结果表明,退火处理有助于提高薄膜的结晶质量和二极管的性能。
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引用次数: 0
期刊
International Conference on Thin Film Physics and Applications
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