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Structural and electrical properties of PLZT (8/65/35) thin films prepared by MOD method MOD法制备PLZT(8/65/35)薄膜的结构与电学性能
Pub Date : 2010-10-11 DOI: 10.1117/12.888385
Jianqiang Luo, Weiguo Liu, Shun Zhou, Xiaotao Sun
Pyroelectric lead lanthanum zirconnate titanate (PbLa8Zr65Ti35) thin films were prepared by a metal-organic decomposition (MOD) method on Pt(111)/Ti/SiO2/Si(100) substrate. After annealing at different temperatures with the same annealing time, the amorphous films were transformed into polycrystalline PLZT films. The phase formation and surface microstructure were investigated by X-ray diffraction (XRD) and atom force microscopy (AFM). The XRD data showed the formation of pervoskite phase at 650°C and indicated suppression of pyrochlore phase as temperature increasing. The PLZT pyroelectric sensor was fabricated based on sensitive barrier layer instead of the other type barrier layer. Finally, dielectric and pyroelectric coefficients was also measured.
采用金属有机分解(MOD)法在Pt(111)/Ti/SiO2/Si(100)衬底上制备了热释电锆钛酸铅镧(PbLa8Zr65Ti35)薄膜。在不同的退火温度和相同的退火时间下,非晶薄膜转变为多晶PLZT薄膜。采用x射线衍射(XRD)和原子力显微镜(AFM)研究了材料的相形成和表面微观结构。XRD数据表明,在650℃时钙钛矿相形成,随着温度升高,焦绿石相抑制。利用敏感势垒层代替其他类型的势垒层制备了PLZT热释电传感器。最后,测量了介质系数和热释电系数。
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引用次数: 0
Comparative investigation of infrared optical absorption properties of silicon oxide, oxynitride and nitride films 氧化硅、氮化氧和氮化膜红外光吸收性能的比较研究
Pub Date : 2010-10-11 DOI: 10.1117/12.888194
Shun Zhou, Weiguo Liu, Chang-long Cai, Huan Liu
Amorphous silicon oxide, silicon oxynitride and silicon nitride films were deposited in a PECVD reactor using silane (SiH4),ammonia (NH3) and nitrous oxide (N2O) as precursor gases. The N2O/NH3 flow ratio was varied in order to obtain different oxynitride compositions. The films were characterized by spectroscopic ellipsometry, XPS and FTIR spectroscopy. The compositions and infrared optical absorption properties of the three different types of films were investigated and compared. Special attention was paid to analyze the Si-O/Si-N bond stretching absorption including the absorption band intensity. It was found that the silicon oxynitride films show a dominant infrared stretching band due to the Si-O/Si-N bond , with the infrared absorption peak located between 860cm-1(11.6μm) for Si-N bond in silicon nitride and 1063cm-1(9.4μm) for Si-O bond in silicon oxide. The position of peak also shifts to a shorter wavelength when increasing the N2O/NH3 flow ratio. The infrared optical absorption properties of the silicon oxynitride films make them well suited for the absorber of uncooled microbolometer detectors
以硅烷(SiH4)、氨(NH3)和氧化亚氮(N2O)为前驱气体,在PECVD反应器中沉积非晶态氧化硅、氧化氮化硅和氮化硅薄膜。通过改变N2O/NH3的流量比,得到不同的氮氧化合物组成。利用椭偏光谱、XPS和FTIR光谱对膜进行了表征。研究并比较了三种不同类型薄膜的组成和红外吸收性能。重点分析了Si-O/Si-N键的拉伸吸收,包括吸收带强度。结果表明,由于Si-O/Si-N键的存在,氮化硅薄膜的红外吸收峰位于860cm-1(11.6μm)之间,氧化硅的Si-O键的红外吸收峰位于1063cm-1(9.4μm)之间。随着N2O/NH3流量比的增加,峰的位置也向更短的波长移动。氧化氮化硅薄膜的红外光学吸收特性使其非常适合用作非冷却型微辐射热计探测器的吸收剂
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引用次数: 3
Influence of MoO3 addition on the gasochromism of WO3 thin films 添加MoO3对WO3薄膜气相变色的影响
Pub Date : 2010-10-11 DOI: 10.1117/12.888320
Zenghai Zhang, Guang-ming Wu, G. Gao, Jiandong Wu, W. Feng
Pure tungsten oxide thin films apparently show gasochromic performance, based on PdCl2 catalyst. In this paper, adulteration of MoO3 into WO3 sol has been achieved via sol-gel method. FT-IR, Differential Scanning Calorimeter (DSC-TG) and Uv-visible Spectroscopy have been used to analysis the compound sols, films and optical properties for the use of this material as smart windows. FT-IR shows that for the compound, new characteristic absorption bands arise, which is different from pure WO3 or MoO3. DSC-TG shows the phase change during the temperature ascending from 50 to 800°C. The compound thin films performs relatively well in coloring response time, colored extent, coloring-bleaching recycling and gasochromic effect with non-unicity color.
以PdCl2为催化剂制备的纯氧化钨薄膜具有明显的气致变色性能。本文采用溶胶-凝胶法将MoO3掺杂到WO3溶胶中。利用FT-IR,差示扫描量热计(DSC-TG)和紫外可见光谱分析了该材料作为智能窗口的复合溶胶,薄膜和光学性质。FT-IR表明,该化合物出现了不同于纯WO3或MoO3的新的特征吸收带。DSC-TG显示了温度从50℃上升到800℃期间的相变。复合薄膜在着色响应时间、着色程度、着色漂白循环利用、非单色气致变色效果等方面均有较好的表现。
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引用次数: 2
Optical and electrochemical properties of vanadium pentoxide porous film prepared by sol-gel technique 溶胶-凝胶法制备五氧化二钒多孔膜的光学和电化学性能
Pub Date : 2010-10-11 DOI: 10.1117/12.888456
Shixiong She, Guang-ming Wu, Huiyu Yang, Jun Shen, G. Gao
Thin films of V2O5, especially vanadium oxide films with nano- and micro-structures, perform well as cathode material for Li ion batteries and charge storage devices. Thin films of V2O5 with different porosity were obtained by dip-coating sol-gel technique. V2O5 sols were prepared by dissolution of V2O5 powder in benzyl alcohol and isopropyl alcohol in proper proportion. Optical property and porosity of films were characterized by FTIR and ellipsometer. Electrochemical characterization was recorded by chronopotentiometry(CP) and cyclic voltammetry(CV). Furthermore, the study shows that the porous structures of V2O5 films had an effect on the stability and reversibility of the films.
V2O5薄膜,特别是具有纳米和微结构的钒氧化物薄膜,是锂离子电池和电荷存储器件的良好正极材料。采用浸渍-溶胶-凝胶法制备了不同孔隙率的V2O5薄膜。将V2O5粉末按一定比例溶于苯甲醇和异丙醇,制备了V2O5溶胶。利用红外光谱和椭偏仪对薄膜的光学性能和孔隙率进行了表征。用时间电位法(CP)和循环伏安法(CV)记录了电化学表征。此外,研究表明,V2O5薄膜的多孔结构对薄膜的稳定性和可逆性有影响。
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引用次数: 0
Preparation and Faraday rotation of Nd2O3 doped Fe2O3-SiO2 nano-composite films Nd2O3掺杂Fe2O3-SiO2纳米复合膜的制备及法拉第旋转
Pub Date : 2010-10-11 DOI: 10.1117/12.888331
X. Fang, Lanfang Yao, Lin Li, Linlin Tian, Ruiqing Xu, Shuo Wang
Magneto-optic properties of magnetic materials have much influence on the performance of these current sensors. For practical using, it is generally demanded that the sensing materials had the good magneto-optic properties of large Faraday rotation. Among the most attractive properties of the transparent materials containing Fe2O3 are those related to the magneto-optical effects. The Sol-gel processes are extensively used for the preparation of optical or magneto-optical nano-composite materials though the incorporation of metal ions in the silica matrix. In this study, the Nd2O3 doped Fe2O3-SiO2 nano-composite films with different concentrations of Nd2O3, heated temperature and the number of layers were prepared by sol-gel method. The dependence of Faraday rotation angle of films is studied at room temperature. We find that appropriate concentrations of Nd2O3 (Nd/Si=0.011) doped has improved magneto-optic properties of higher Faraday rotation angle, the θF value increases with the decrease of the temperature below 500°C, the absolute value of Faraday rotation angle increases as the number of layers increases.
磁性材料的磁光特性对电流传感器的性能有很大的影响。在实际应用中,一般要求传感材料具有良好的大法拉第旋转的磁光特性。含Fe2O3的透明材料最吸引人的特性是与磁光效应有关的特性。溶胶-凝胶工艺通过将金属离子掺入二氧化硅基体中,广泛用于制备光学或磁光纳米复合材料。本研究采用溶胶-凝胶法制备了不同Nd2O3浓度、加热温度和层数的掺杂Fe2O3-SiO2纳米复合薄膜。在室温下,研究了薄膜的法拉第旋转角的依赖性。我们发现适当浓度的Nd2O3 (Nd/Si=0.011)掺杂改善了磁光性能,具有较高的法拉第旋转角,θF值在500℃以下随温度的降低而增大,法拉第旋转角绝对值随层数的增加而增大。
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引用次数: 0
Introduction of Zr in Mg/Co nanometric periodic multilayers Mg/Co纳米周期多层膜中Zr的引入
Pub Date : 2010-10-11 DOI: 10.1117/12.888193
K. Le Guen, Min-Hui Hu, J. Andre, P. Jonnard, Sika Zhou, Haochuan Li, Jingtao Zhu, Zhanshan Wang, N. Mahne, A. Giglia, S. Nannarone, C. Meny
We study the introduction of Zr as a third material within a nanometric periodic Mg/Co structure designed to work as optical component in the EUV range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is reported to be 50% at 25.1 nm and 45° of grazing incidence. Nuclear Magnetic Resonance (NMR) measurements are performed to study the nearest neighbour local environment around the Co atoms.
我们研究了在纳米周期Mg/Co结构中引入Zr作为第三种材料,该结构设计用于在EUV范围内作为光学元件。设计了Mg/Co、Mg/Zr/Co、Mg/Co/Zr和Mg/Zr/Co/Zr多层膜,分别通过x射线和EUV反射测量对其结构质量和光学性能进行了表征。对于Mg/Co/Zr结构,在25.1 nm和45°掠入射处的反射率值为50%。采用核磁共振(NMR)测量方法研究了Co原子周围最近的局部环境。
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引用次数: 0
Preparation and characterization of tungsten oxide thin films with high electrochromic performance 高电致变色性能氧化钨薄膜的制备与表征
Pub Date : 2010-10-11 DOI: 10.1117/12.887560
G. Lv, Yonggang Wu, Heyun Wu, Leijie Ling, Zihuan Xia
Tungsten oxide thin films were prepared by depositing WO3 onto glass substrates coated with ITO using reactive evaporation process at ambient temperature and 200°C respectively. The thin films were grown at different deposition rate. Chronoamperometry was carried out and spectral measurements were performed in situ. Results showed that the thin films prepared at low deposition rates possess higher coloration efficiency (CE), and the thin films grown at ambient temperature have high CE than those grown at 200°C. The origin of the differences in coloration efficiency of the thin films were analyzed and discussed based on the electrochromic mechanism of amorphous tungsten oxide films. The samples morphology was characterized by atom force microscopy (AFM).
采用反应蒸发法制备氧化钨薄膜,分别在常温和200℃条件下将WO3沉积在ITO涂层玻璃基板上。以不同的沉积速率生长薄膜。进行了计时电流测量,并在原位进行了光谱测量。结果表明,低沉积速率制备的薄膜具有较高的显色效率(CE),常温下生长的薄膜比200℃下生长的薄膜具有更高的显色效率(CE)。从非晶氧化钨薄膜的电致变色机理出发,分析和讨论了薄膜显色效率差异的原因。采用原子力显微镜(AFM)对样品进行形貌表征。
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引用次数: 1
Temperature dependence of optical properties in Sn0.925Mn0.075O2 film determined by transmittance spectra 用透射光谱测定Sn0.925Mn0.075O2薄膜光学性质的温度依赖性
Pub Date : 2010-10-11 DOI: 10.1117/12.888311
W. Zhang, W. L. Yu, K. Jiang, Z. Hu
Near-infrared-ultraviolet optical properties of Sn0.925Mn0.075O2 (SMO) film grown on c-plane sapphire substrate have been investigated by the transmittance spectra in the photon energy of 0.45-6.5 eV (190-2650 nm) from 5.3-300 K. The optical constants have been extracted by fitting the experimental data with the Adachi's model. The optical band gap of the film can be estimated from the relation (αE)2proportional to(hυ-Eg). It is found that the absorption edge shifts to a lower energy side with increasing the temperature and the band gap Eg decreases from 3.80 to 3.72 eV. The parameters αB and θB of the Bose-Einstein model are 45.4 meV and 221.8 K, respectively, which could be ascribed to the thermal expansion of crystal lattice and the carrier-phonon interaction. The band narrowing coefficient dEg/dT of the SMO film is estimated to be -3.92x10-4 eV/K at room temperature.
利用5.3 ~ 300 K光子能量为0.45 ~ 6.5 eV (190 ~ 2650 nm)时的透射光谱,研究了c-plane蓝宝石衬底上生长的Sn0.925Mn0.075O2 (SMO)薄膜的近红外紫外光学性能。利用Adachi模型拟合实验数据,得到了光学常数。薄膜的光学带隙可由(αE)2与(hous - eg)成正比的关系式估计。结果表明,随着温度的升高,吸收边向能量较低的一侧移动,带隙Eg从3.80 eV减小到3.72 eV。玻色-爱因斯坦模型的αB和θB分别为45.4 meV和221.8 K,这可归因于晶格的热膨胀和载流子-声子的相互作用。在室温下,SMO薄膜的能带变窄系数为-3.92x10-4 eV/K。
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引用次数: 1
Influence of heat treatment on the microstruture of SnS/ZnS film prepared by vacuum evaporation 热处理对真空蒸发制备的SnS/ZnS薄膜显微组织的影响
Pub Date : 2010-10-11 DOI: 10.1117/12.888226
Wenjun Wu, Wei-min Shi, Zhe Hu, Sheng Liu, Weiguang Yang, Guang-pu Wei
In the heterojunction system, SnS was used as the absorption layer of solar cells. In this work, Cd-free ZnS material was selected as the window layer. SnS and ZnS were prepared by vacuum evaporation. Annealing plays a considerable role in the process which will affect the crystal structure and composition of the film. In this experiment, the films were annealed at temperature 300°C, 400°C and 500°C in N2 atmosphere. In XRD diagram, two strong diffraction peaks at 29.2° and 32.2° were observed, corresponding to β-ZnS (111) and SnS (111), respectively. SEM images show that average grain size of the film is about 50 nm. Noticeable increase of grain size and clear boundaries between grains were found after annealing. The electrical properties of the SnS thin films were changed through varying annealing processes. All the results indicate that ZnS/SnS structure is a good choice of SnS solar cells.
在异质结系统中,利用SnS作为太阳能电池的吸收层。在这项工作中,选择无cd的ZnS材料作为窗口层。采用真空蒸发法制备了SnS和ZnS。退火在这一过程中起着相当大的作用,它将影响薄膜的晶体结构和组成。在本实验中,薄膜分别在300℃、400℃和500℃的N2气氛中退火。XRD图中,在29.2°和32.2°处观察到两个强衍射峰,分别对应于β-ZnS(111)和SnS(111)。SEM图像显示,膜的平均晶粒尺寸约为50 nm。退火后晶粒尺寸明显增大,晶粒间边界清晰。通过不同的退火工艺改变了SnS薄膜的电学性能。结果表明,ZnS/SnS结构是制备SnS太阳能电池的良好选择。
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引用次数: 0
Optimization of triangle grating structures for light trapping in thin film silicon solar cells 薄膜硅太阳能电池捕光三角形光栅结构的优化
Pub Date : 2010-10-11 DOI: 10.1117/12.887556
Leijie Ling, Yonggang Wu, Zihuan Xia, N. Chen, Zhenhua Wang
The influence of different triangular grating shapes on the absorption performance of the thin-film silicon solar cell is discussed in this paper. A finite difference time domain method is used to make the numerical simulation. By studying the shape of the triangular grating, the designs of structure are optimized to achieve higher short circuit currents and quantum efficiencies. We find that the blaze grating structure is the ideal initial texture for thin-film solar cells. Compared with the triangular grating, the short circuit current of the blaze grating is improved by 7.09% for the entire spectrum. The short circuit current for the short wavelength is increased by 13.5% whereas the short circuit current in the red and infrared part of spectrum is increased by 86.5%.
本文讨论了不同三角形光栅形状对薄膜硅太阳电池吸收性能的影响。采用时域有限差分法进行了数值模拟。通过对三角光栅形状的研究,优化了结构设计,实现了更高的短路电流和量子效率。我们发现火焰光栅结构是薄膜太阳能电池理想的初始结构。与三角形光栅相比,火焰光栅在全光谱范围内的短路电流提高了7.09%。短波长的短路电流增加了13.5%,而光谱中红色和红外部分的短路电流增加了86.5%。
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引用次数: 0
期刊
International Conference on Thin Film Physics and Applications
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