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Study of high temperature piezoelectric scandium aluminum nitride thin films 高温压电氮化钪铝薄膜的研究
Pub Date : 2010-10-11 DOI: 10.1117/12.888228
Xiaolei Shi, Yigang Chen, W. Shi, Linjun Wang
AlN has weak piezoelectric property (piezoelectric coefficient d33=5.5pCN-1) and a high Curie temperature (>1150°C). By Sc-doping in AlN thin films, it is possible to synthesize ScxAl1-xN alloy with high piezoelectric coefficient and high temperature stability. In this study, c-axis oriented AlN thin films have been successfully grown on Si (100) substrates by DC magnetron reactive sputtering method. First-principles calculations are also performed to investigate the structure of ScxAl1-xN.
AlN具有弱压电特性(压电系数d33=5.5pCN-1)和高居里温度(>1150℃)。通过在AlN薄膜中掺杂sc,可以合成具有高压电系数和高温稳定性的ScxAl1-xN合金。在本研究中,采用直流磁控反应溅射法在Si(100)衬底上成功生长了c轴取向AlN薄膜。还进行了第一性原理计算来研究ScxAl1-xN的结构。
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引用次数: 1
Structural and electrical properties of PLZT (8/65/35) thin films prepared by MOD method MOD法制备PLZT(8/65/35)薄膜的结构与电学性能
Pub Date : 2010-10-11 DOI: 10.1117/12.888385
Jianqiang Luo, Weiguo Liu, Shun Zhou, Xiaotao Sun
Pyroelectric lead lanthanum zirconnate titanate (PbLa8Zr65Ti35) thin films were prepared by a metal-organic decomposition (MOD) method on Pt(111)/Ti/SiO2/Si(100) substrate. After annealing at different temperatures with the same annealing time, the amorphous films were transformed into polycrystalline PLZT films. The phase formation and surface microstructure were investigated by X-ray diffraction (XRD) and atom force microscopy (AFM). The XRD data showed the formation of pervoskite phase at 650°C and indicated suppression of pyrochlore phase as temperature increasing. The PLZT pyroelectric sensor was fabricated based on sensitive barrier layer instead of the other type barrier layer. Finally, dielectric and pyroelectric coefficients was also measured.
采用金属有机分解(MOD)法在Pt(111)/Ti/SiO2/Si(100)衬底上制备了热释电锆钛酸铅镧(PbLa8Zr65Ti35)薄膜。在不同的退火温度和相同的退火时间下,非晶薄膜转变为多晶PLZT薄膜。采用x射线衍射(XRD)和原子力显微镜(AFM)研究了材料的相形成和表面微观结构。XRD数据表明,在650℃时钙钛矿相形成,随着温度升高,焦绿石相抑制。利用敏感势垒层代替其他类型的势垒层制备了PLZT热释电传感器。最后,测量了介质系数和热释电系数。
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引用次数: 0
Introduction of Zr in Mg/Co nanometric periodic multilayers Mg/Co纳米周期多层膜中Zr的引入
Pub Date : 2010-10-11 DOI: 10.1117/12.888193
K. Le Guen, Min-Hui Hu, J. Andre, P. Jonnard, Sika Zhou, Haochuan Li, Jingtao Zhu, Zhanshan Wang, N. Mahne, A. Giglia, S. Nannarone, C. Meny
We study the introduction of Zr as a third material within a nanometric periodic Mg/Co structure designed to work as optical component in the EUV range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is reported to be 50% at 25.1 nm and 45° of grazing incidence. Nuclear Magnetic Resonance (NMR) measurements are performed to study the nearest neighbour local environment around the Co atoms.
我们研究了在纳米周期Mg/Co结构中引入Zr作为第三种材料,该结构设计用于在EUV范围内作为光学元件。设计了Mg/Co、Mg/Zr/Co、Mg/Co/Zr和Mg/Zr/Co/Zr多层膜,分别通过x射线和EUV反射测量对其结构质量和光学性能进行了表征。对于Mg/Co/Zr结构,在25.1 nm和45°掠入射处的反射率值为50%。采用核磁共振(NMR)测量方法研究了Co原子周围最近的局部环境。
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引用次数: 0
Optical and electrochemical properties of vanadium pentoxide porous film prepared by sol-gel technique 溶胶-凝胶法制备五氧化二钒多孔膜的光学和电化学性能
Pub Date : 2010-10-11 DOI: 10.1117/12.888456
Shixiong She, Guang-ming Wu, Huiyu Yang, Jun Shen, G. Gao
Thin films of V2O5, especially vanadium oxide films with nano- and micro-structures, perform well as cathode material for Li ion batteries and charge storage devices. Thin films of V2O5 with different porosity were obtained by dip-coating sol-gel technique. V2O5 sols were prepared by dissolution of V2O5 powder in benzyl alcohol and isopropyl alcohol in proper proportion. Optical property and porosity of films were characterized by FTIR and ellipsometer. Electrochemical characterization was recorded by chronopotentiometry(CP) and cyclic voltammetry(CV). Furthermore, the study shows that the porous structures of V2O5 films had an effect on the stability and reversibility of the films.
V2O5薄膜,特别是具有纳米和微结构的钒氧化物薄膜,是锂离子电池和电荷存储器件的良好正极材料。采用浸渍-溶胶-凝胶法制备了不同孔隙率的V2O5薄膜。将V2O5粉末按一定比例溶于苯甲醇和异丙醇,制备了V2O5溶胶。利用红外光谱和椭偏仪对薄膜的光学性能和孔隙率进行了表征。用时间电位法(CP)和循环伏安法(CV)记录了电化学表征。此外,研究表明,V2O5薄膜的多孔结构对薄膜的稳定性和可逆性有影响。
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引用次数: 0
Preparation and Faraday rotation of Nd2O3 doped Fe2O3-SiO2 nano-composite films Nd2O3掺杂Fe2O3-SiO2纳米复合膜的制备及法拉第旋转
Pub Date : 2010-10-11 DOI: 10.1117/12.888331
X. Fang, Lanfang Yao, Lin Li, Linlin Tian, Ruiqing Xu, Shuo Wang
Magneto-optic properties of magnetic materials have much influence on the performance of these current sensors. For practical using, it is generally demanded that the sensing materials had the good magneto-optic properties of large Faraday rotation. Among the most attractive properties of the transparent materials containing Fe2O3 are those related to the magneto-optical effects. The Sol-gel processes are extensively used for the preparation of optical or magneto-optical nano-composite materials though the incorporation of metal ions in the silica matrix. In this study, the Nd2O3 doped Fe2O3-SiO2 nano-composite films with different concentrations of Nd2O3, heated temperature and the number of layers were prepared by sol-gel method. The dependence of Faraday rotation angle of films is studied at room temperature. We find that appropriate concentrations of Nd2O3 (Nd/Si=0.011) doped has improved magneto-optic properties of higher Faraday rotation angle, the θF value increases with the decrease of the temperature below 500°C, the absolute value of Faraday rotation angle increases as the number of layers increases.
磁性材料的磁光特性对电流传感器的性能有很大的影响。在实际应用中,一般要求传感材料具有良好的大法拉第旋转的磁光特性。含Fe2O3的透明材料最吸引人的特性是与磁光效应有关的特性。溶胶-凝胶工艺通过将金属离子掺入二氧化硅基体中,广泛用于制备光学或磁光纳米复合材料。本研究采用溶胶-凝胶法制备了不同Nd2O3浓度、加热温度和层数的掺杂Fe2O3-SiO2纳米复合薄膜。在室温下,研究了薄膜的法拉第旋转角的依赖性。我们发现适当浓度的Nd2O3 (Nd/Si=0.011)掺杂改善了磁光性能,具有较高的法拉第旋转角,θF值在500℃以下随温度的降低而增大,法拉第旋转角绝对值随层数的增加而增大。
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引用次数: 0
Influence of MoO3 addition on the gasochromism of WO3 thin films 添加MoO3对WO3薄膜气相变色的影响
Pub Date : 2010-10-11 DOI: 10.1117/12.888320
Zenghai Zhang, Guang-ming Wu, G. Gao, Jiandong Wu, W. Feng
Pure tungsten oxide thin films apparently show gasochromic performance, based on PdCl2 catalyst. In this paper, adulteration of MoO3 into WO3 sol has been achieved via sol-gel method. FT-IR, Differential Scanning Calorimeter (DSC-TG) and Uv-visible Spectroscopy have been used to analysis the compound sols, films and optical properties for the use of this material as smart windows. FT-IR shows that for the compound, new characteristic absorption bands arise, which is different from pure WO3 or MoO3. DSC-TG shows the phase change during the temperature ascending from 50 to 800°C. The compound thin films performs relatively well in coloring response time, colored extent, coloring-bleaching recycling and gasochromic effect with non-unicity color.
以PdCl2为催化剂制备的纯氧化钨薄膜具有明显的气致变色性能。本文采用溶胶-凝胶法将MoO3掺杂到WO3溶胶中。利用FT-IR,差示扫描量热计(DSC-TG)和紫外可见光谱分析了该材料作为智能窗口的复合溶胶,薄膜和光学性质。FT-IR表明,该化合物出现了不同于纯WO3或MoO3的新的特征吸收带。DSC-TG显示了温度从50℃上升到800℃期间的相变。复合薄膜在着色响应时间、着色程度、着色漂白循环利用、非单色气致变色效果等方面均有较好的表现。
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引用次数: 2
Temperature dependence of photoluminescence, Raman scattering, and transmittance spectra of anatase Ti1-xFexO2 nanocrystalline films 锐钛矿Ti1-xFexO2纳米晶薄膜的光致发光、拉曼散射和透射光谱的温度依赖性
Pub Date : 2010-10-11 DOI: 10.1117/12.888287
X. G. Chen, W. Li, Y. W. Li, J. Chu
Anatase Ti1-xFexO2 (x=0, 1%, 2%) nanocrystalline films were prepared on quartz substrates by a facile nonhydrolytic sol-gel route. The structure and optical properties have been studied by X-ray diffraction (XRD), Raman scattering, transmittance spectra and temperature dependent photoluminescence (PL). The B1g, Eg and (A1g+B1g) modes of anatase phase TiO2 can be observed in Raman spectra. Dielectric functions have been extracted by fitting the transmittance spectra in the photon energy range of 0.5-6.5 eV with Adachi's model. The pure TiO2 film displays a strong broadening visible luminescence band; however, Fe-doped samples exhibit a very weak luminescence due to the increase of oxygen vacancy concentration in TiO2. With the temperature increases, the PL intensity decreases monotonously and there are five emission peaks for the pure sample in low temperatures, which could be attributed to oxygen vacancies, surface states and F+ center.
采用非水解溶胶-凝胶法在石英衬底上制备锐钛矿Ti1-xFexO2 (x= 0,1%, 2%)纳米晶薄膜。通过x射线衍射(XRD)、拉曼散射(Raman)、透射光谱和温度相关光致发光(PL)研究了材料的结构和光学性能。锐钛矿相TiO2在拉曼光谱中具有B1g、Eg和(A1g+B1g)模式。利用Adachi模型拟合了0.5 ~ 6.5 eV光子能量范围内的透射光谱,提取了介电函数。纯TiO2薄膜的可见光发光带展宽明显;然而,由于TiO2中氧空位浓度的增加,fe掺杂的样品表现出非常微弱的发光。随着温度的升高,纯样品的发光强度单调降低,在低温下存在5个发射峰,这可能是由于氧空位、表面态和F+中心的作用。
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引用次数: 0
Preparation and characterization of tungsten oxide thin films with high electrochromic performance 高电致变色性能氧化钨薄膜的制备与表征
Pub Date : 2010-10-11 DOI: 10.1117/12.887560
G. Lv, Yonggang Wu, Heyun Wu, Leijie Ling, Zihuan Xia
Tungsten oxide thin films were prepared by depositing WO3 onto glass substrates coated with ITO using reactive evaporation process at ambient temperature and 200°C respectively. The thin films were grown at different deposition rate. Chronoamperometry was carried out and spectral measurements were performed in situ. Results showed that the thin films prepared at low deposition rates possess higher coloration efficiency (CE), and the thin films grown at ambient temperature have high CE than those grown at 200°C. The origin of the differences in coloration efficiency of the thin films were analyzed and discussed based on the electrochromic mechanism of amorphous tungsten oxide films. The samples morphology was characterized by atom force microscopy (AFM).
采用反应蒸发法制备氧化钨薄膜,分别在常温和200℃条件下将WO3沉积在ITO涂层玻璃基板上。以不同的沉积速率生长薄膜。进行了计时电流测量,并在原位进行了光谱测量。结果表明,低沉积速率制备的薄膜具有较高的显色效率(CE),常温下生长的薄膜比200℃下生长的薄膜具有更高的显色效率(CE)。从非晶氧化钨薄膜的电致变色机理出发,分析和讨论了薄膜显色效率差异的原因。采用原子力显微镜(AFM)对样品进行形貌表征。
{"title":"Preparation and characterization of tungsten oxide thin films with high electrochromic performance","authors":"G. Lv, Yonggang Wu, Heyun Wu, Leijie Ling, Zihuan Xia","doi":"10.1117/12.887560","DOIUrl":"https://doi.org/10.1117/12.887560","url":null,"abstract":"Tungsten oxide thin films were prepared by depositing WO3 onto glass substrates coated with ITO using reactive evaporation process at ambient temperature and 200°C respectively. The thin films were grown at different deposition rate. Chronoamperometry was carried out and spectral measurements were performed in situ. Results showed that the thin films prepared at low deposition rates possess higher coloration efficiency (CE), and the thin films grown at ambient temperature have high CE than those grown at 200°C. The origin of the differences in coloration efficiency of the thin films were analyzed and discussed based on the electrochromic mechanism of amorphous tungsten oxide films. The samples morphology was characterized by atom force microscopy (AFM).","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121217904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Temperature dependence of optical properties in Sn0.925Mn0.075O2 film determined by transmittance spectra 用透射光谱测定Sn0.925Mn0.075O2薄膜光学性质的温度依赖性
Pub Date : 2010-10-11 DOI: 10.1117/12.888311
W. Zhang, W. L. Yu, K. Jiang, Z. Hu
Near-infrared-ultraviolet optical properties of Sn0.925Mn0.075O2 (SMO) film grown on c-plane sapphire substrate have been investigated by the transmittance spectra in the photon energy of 0.45-6.5 eV (190-2650 nm) from 5.3-300 K. The optical constants have been extracted by fitting the experimental data with the Adachi's model. The optical band gap of the film can be estimated from the relation (αE)2proportional to(hυ-Eg). It is found that the absorption edge shifts to a lower energy side with increasing the temperature and the band gap Eg decreases from 3.80 to 3.72 eV. The parameters αB and θB of the Bose-Einstein model are 45.4 meV and 221.8 K, respectively, which could be ascribed to the thermal expansion of crystal lattice and the carrier-phonon interaction. The band narrowing coefficient dEg/dT of the SMO film is estimated to be -3.92x10-4 eV/K at room temperature.
利用5.3 ~ 300 K光子能量为0.45 ~ 6.5 eV (190 ~ 2650 nm)时的透射光谱,研究了c-plane蓝宝石衬底上生长的Sn0.925Mn0.075O2 (SMO)薄膜的近红外紫外光学性能。利用Adachi模型拟合实验数据,得到了光学常数。薄膜的光学带隙可由(αE)2与(hous - eg)成正比的关系式估计。结果表明,随着温度的升高,吸收边向能量较低的一侧移动,带隙Eg从3.80 eV减小到3.72 eV。玻色-爱因斯坦模型的αB和θB分别为45.4 meV和221.8 K,这可归因于晶格的热膨胀和载流子-声子的相互作用。在室温下,SMO薄膜的能带变窄系数为-3.92x10-4 eV/K。
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引用次数: 1
Effect of different supermirrors on the performance of a hard x-ray telescope 不同超镜对硬x射线望远镜性能的影响
Pub Date : 2010-10-11 DOI: 10.1117/12.887369
Fangfang Wang, Jingtao Zhu, M. Tan, Li Jiang, Fengli Wang, B. Mu, Zhanshan Wang
We are developing a hard X-ray telescope utilizing multilayer supermirrors. This telescope is conical approximation of the Wolter-I configuration with tightly nested shells. Because of the fact that different nested shell corresponds to different grazing incident angle, so the optimum multilayer design depends on the grazing angle, and one would therefore, ideally design a different coating for each of the nested mirror shells. However, as a matter of practicality, we have to reduce the number of different designs for a reasonable compromise between the complexity of the calculation and optimal performance. In this paper, we investigate the effect of different angular classification on the effective area of the hard X-ray telescope. Many groups of hard X-ray supermirrors are optimized with different grazing incident angles using a numerical and analysis method. These supermirrors are divided into different number of groups, e.g. two, four, six, eight, ten, twelve, fourteen, and sixteen, respectively, and the corresponding effective areas are calculated. Results show that six groups of X-ray supermirrors are suitable for a reasonable compromise between optimal performance and the complexity of the calculation and fabrication.
我们正在开发一种利用多层超镜的硬x射线望远镜。这个望远镜是wolter - 1结构的锥形近似值,有紧密嵌套的外壳。由于不同的嵌套壳体对应不同的掠射入射角,因此最佳的多层设计取决于掠射角,因此,理想情况下,可以为每个嵌套壳体设计不同的涂层。然而,出于实用性的考虑,我们必须减少不同设计的数量,以在计算的复杂性和最佳性能之间做出合理的妥协。本文研究了不同角度分类对硬x射线望远镜有效面积的影响。采用数值分析方法对多组不同掠射入射角的硬x射线超镜进行了优化。将这些超镜分别分成2组、4组、6组、8组、10组、12组、14组和16组,并计算相应的有效面积。结果表明,六组x射线超镜在最佳性能和计算制造复杂性之间取得了合理的折衷。
{"title":"Effect of different supermirrors on the performance of a hard x-ray telescope","authors":"Fangfang Wang, Jingtao Zhu, M. Tan, Li Jiang, Fengli Wang, B. Mu, Zhanshan Wang","doi":"10.1117/12.887369","DOIUrl":"https://doi.org/10.1117/12.887369","url":null,"abstract":"We are developing a hard X-ray telescope utilizing multilayer supermirrors. This telescope is conical approximation of the Wolter-I configuration with tightly nested shells. Because of the fact that different nested shell corresponds to different grazing incident angle, so the optimum multilayer design depends on the grazing angle, and one would therefore, ideally design a different coating for each of the nested mirror shells. However, as a matter of practicality, we have to reduce the number of different designs for a reasonable compromise between the complexity of the calculation and optimal performance. In this paper, we investigate the effect of different angular classification on the effective area of the hard X-ray telescope. Many groups of hard X-ray supermirrors are optimized with different grazing incident angles using a numerical and analysis method. These supermirrors are divided into different number of groups, e.g. two, four, six, eight, ten, twelve, fourteen, and sixteen, respectively, and the corresponding effective areas are calculated. Results show that six groups of X-ray supermirrors are suitable for a reasonable compromise between optimal performance and the complexity of the calculation and fabrication.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124063191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
International Conference on Thin Film Physics and Applications
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