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SU-8 On Pmma - A New Technology For Microfluidics 微流控新技术——Pmma的SU-8
Pub Date : 2003-09-01 DOI: 10.1142/S1465876303002003
T. Truong, N. Nguyen
Conventional SU-8 lithography process for fabricating microfluidic devices ofthe uses silicon or glass as wafer materials. Since silicon and glass are hard and brittle, drilling fluid access holes or dicing the wafers into individual devies are difficult. We investigated the use of polymethylmethacrylate (PMMA) as a new wafer material. PMMA, an amorphous thermoplastic, was chosen for being easy to drill or cut, biocompatible, transparent, and much cheaper than silicon or glass wafers. Moreover, is thermal expansion coefficient ideally matches that of SU-8. PMMA poorly resists solvents, and has low glass transition temperature (105°C). Thus, the conventional process needed to be modified. The wafer was only cleaned with isopropyl alcohol and deionized water. The baking temperature was lowered to 90°C. In addition, a "base layer" of SU-8, helping to achieve a high quality structural pattern, was coated before coating the actual structural SU-8 layer. A Tesla valve, a non-moving part microfluidic valve, was successfully fabricated in SU-8 using thr presented process,. However, the PMMA wafer bowed ue to the thermal residual during baking steps. Despite the bowing which can be solved by increasing wafer thickness, we conclude that PMMA is a promising wafer material for a SU-8 process.
传统的SU-8光刻工艺是用硅或玻璃作为晶圆材料来制造微流控器件的。由于硅和玻璃又硬又脆,钻井液进入孔或将晶圆切割成单独的器件是困难的。研究了聚甲基丙烯酸甲酯(PMMA)作为新型硅片材料的应用。PMMA是一种无定形热塑性塑料,选择它是因为它易于钻孔或切割,具有生物相容性,透明,而且比硅或玻璃晶圆便宜得多。其热膨胀系数与SU-8的热膨胀系数基本吻合。PMMA耐溶剂性差,玻璃化转变温度低(105°C)。因此,需要对传统工艺进行修改。晶圆片仅用异丙醇和去离子水清洗。烘烤温度降至90℃。此外,在涂覆实际的结构SU-8层之前,先涂覆SU-8的“基础层”,以帮助实现高质量的结构图案。采用该工艺,在SU-8上成功制备了非运动部件微流控阀Tesla阀。然而,在烘烤过程中,PMMA晶圆由于热残余而弯曲。尽管可以通过增加晶圆厚度来解决弯曲问题,但我们得出结论,PMMA是一种有前途的SU-8工艺晶圆材料。
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引用次数: 5
Voltage Controlled Oscillator Using Tunable Mems Resonator 使用可调谐Mems谐振器的电压控制振荡器
Pub Date : 2003-09-01 DOI: 10.1142/S1465876303002027
S. Pati, C. Venkatesh, N. Bhat, R. Pratap
In this work , a tunable resonator is designed. Using the voltage actuators, the fundamental resonance frequency of the resonator is varied. The voltage applied to the tuning combs results in change in the stiffness of the folded beam suspension, which in turn changes resonant frequency. The resonator is modeled in circuit simulator using voltage controlled current sources. The effect of change in stiffness (kc) is included to model tunable resonator. A voltage-controlled oscillator is designed using the tunable resonator.
在这项工作中,设计了一个可调谐谐振器。利用电压致动器改变谐振腔的基频。施加到调谐梳上的电压导致折叠梁悬架刚度的变化,从而改变谐振频率。利用压控电流源在电路模拟器中对谐振腔进行了建模。将刚度变化(kc)的影响纳入可调谐谐振器模型。利用可调谐谐振器设计了一个压控振荡器。
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引用次数: 2
Structural And Magnetic Property Of Aged Ni2mnal Heusler Alloys 时效ni2mn Heusler合金的组织和磁性能
Pub Date : 2003-09-01 DOI: 10.1142/S1465876303001988
V. Srivastava, R. Chatterjee, T. C. Goel
Ni2MnAl Heusler alloy is one of the promising materials for the shape memory effect. It has been reported in literature that the magnetic shape effect is observed only when this alloy is in L21phase. The appropriate processing parameters to achieve this phase in this alloy, is the subject of our study in this report. The results of our investigations of the structural and magnetic property changes at various stages of processing are reported here. Differential Scanning Calorimeter and dc magnetization measurements have been used to probe structural and magnetic phase transformation of the material after the heat treatment. The structural analysis has been carried out by X-ray diffraction mehod.
Ni2MnAl Heusler合金是一种很有前途的形状记忆材料。已有文献报道,只有当合金处于l21相时才会观察到磁形效应。适当的工艺参数在这种合金中实现这一相,是我们在本报告中研究的课题。本文报告了我们在不同加工阶段对结构和磁性能变化的研究结果。用差示扫描量热仪和直流磁化测量法对热处理后材料的结构和磁相变进行了探测。用x射线衍射法对其进行了结构分析。
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引用次数: 0
Characterization And Application Of Pag Diluted SU-8 Pag稀释SU-8的表征及应用
Pub Date : 2003-09-01 DOI: 10.1142/S146587630300168X
Z. Ling, K. Lian, Jian Zhang
The concentration of photoacidgenerator (PAG) in SU-8 determines the UV absorption and, therefore, is a limiting factor of the applicable SU-8 thickness. The motivation of this work is to improve SU-8 process control and expand the application scope of SU-8 by modifying its PAG concentration. In this paper we present the experimental results on lithographic properties of SU-8 as the function of PAG concentration (varying up to 2 orders of magnitude). It includes determining the minimum bottom dose and minimum effective energy density for x-ray and UV lithography of SU-8, respectively, and the UV absorption spectra of SU-8. It is fund that as the PAG concentration reduced, SU-8 has lower sensitivities in UV and x-ray lithography, and lower UV absorption coefficients. By using PAG diluted SU-8 taller microstructures with vertical sidewall can be obtained with UV lithography. Based on the large difference in lithographic sensitivities between normal and PAG diluted SU-8, we have developed a new process conce...
光酸发生器(PAG)在SU-8中的浓度决定了紫外吸收,因此是适用SU-8厚度的限制因素。本工作的动机是通过改变其PAG浓度来改善SU-8的过程控制,扩大SU-8的应用范围。本文给出了SU-8光刻性能随PAG浓度变化(变化可达2个数量级)的实验结果。包括确定SU-8的x射线和紫外光刻最小底剂量和最小有效能量密度,以及SU-8的紫外吸收光谱。结果表明,随着PAG浓度的降低,SU-8在紫外和x射线光刻中的灵敏度降低,紫外吸收系数降低。采用PAG稀释的SU-8,紫外光刻可获得具有垂直侧壁的较高微结构。针对普通和PAG稀释的SU-8光刻灵敏度存在较大差异的问题,我们开发了一种新的光刻工艺。
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引用次数: 3
The Goeppingen Genereactor For Dna-Analysis 用于dna分析的goepingen发生器
Pub Date : 2003-09-01 DOI: 10.1142/S1465876303001848
Mechtilde Schäfer, Matthias Walz, R. Stein, Lars Vollmer, Günther Schuster, A. Foitzik
So far the verification of specific bacteria is time consuming and costly. The reason is the neccessity for highly specialised laboratory equipment and the requirements regarding clean-room facilities ensuring environments free of any germs. Additionally growing bacteria in equivalent petri dishes may require quite some time until a reasonable number is grown sufficient for further evaluation. For many bacteria and even viruses alternative processes for multiplication have been developed, basically relying on the so called Polymerase Chain Reaction (PCR). We developed the Goeppingen GeneReactor, a microsized system (MEMS) for PCR as a low cost device, that can be used without any clean-room facilities, while additionally a device for electrophoresis is added as a tool for analysis. Thus this system can be used as a throw analysis tool, i.e. specimen containig the required bacteria or viruses could be preparated and investigated in every physician's pratice. It should be noted, that even tiny amounts of st...
到目前为止,对特定细菌的验证既耗时又昂贵。其原因是需要高度专业化的实验室设备和有关洁净室设施的要求,以确保没有任何细菌的环境。此外,在等效的培养皿中培养细菌可能需要相当长的时间,直到培养出足够的数量以进行进一步评估。对于许多细菌甚至病毒来说,已经开发出了增殖的替代过程,基本上依赖于所谓的聚合酶链式反应(PCR)。我们开发了Goeppingen GeneReactor,这是一种用于PCR的微尺寸系统(MEMS),作为一种低成本设备,可以在没有任何洁净室设施的情况下使用,同时还增加了一种电泳设备作为分析工具。因此,该系统可作为一种投掷分析工具,即在每个医生的实践中都可以制备和调查含有所需细菌或病毒的标本。应该指出的是,即使是少量的……
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引用次数: 0
Characterisation Of Electroplated Eutectic Sn-Ag Solder 电镀共晶Sn-Ag焊料的表征
Pub Date : 2003-09-01 DOI: 10.1142/S1465876303002167
Z. Zhong, K. Chan, Y. H. Chen
This paper discusses the effects of electro-deposition processing conditions on the film composition and surface morphology. The rate of Ag deposition onto the bump depends on various processing parameters like current density, agitation and temperature. Among these parameters, the Ag content in the bump was found to be most sesitive to current plating density. At various Ag content, the morphology of the deposited solder was found to be different. This is due to the different types of drain growth at different Ag content. A high content bump was found with a needle-like Ag3Sn structure. This strcuture is believed to be the cause for the reduction in shear strength.
讨论了电沉积工艺条件对薄膜组成和表面形貌的影响。银沉积在凸包上的速率取决于各种工艺参数,如电流密度、搅拌和温度。在这些参数中,凸包中的Ag含量对电流密度最敏感。在不同的银含量下,沉积焊料的形貌是不同的。这是由于在不同的银含量下,漏极生长的类型不同。发现一个高含量的凸起,呈针状Ag3Sn结构。这种结构被认为是导致抗剪强度降低的原因。
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引用次数: 2
Simulation And Characterization Of Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) Based On Pzt/Soi Membranes 基于Pzt/Soi膜的压电微机械超声换能器(pMUTs)的仿真与表征
Pub Date : 2003-09-01 DOI: 10.1142/S146587630300154X
J. Baborowski, N. Ledermann, P. Muralt, D. Schmitt
Piezoelectric micromachined ultrasonic transducers for airborne and immersed applications in the frequencies from 20 kHz in liquid up to 750kHz in air have been simulated by finite element approach, fabricated and investigated. The basic element consisted of a oxidized and platinized silicon membrane coated with a 2 μm thick (100)-textured Pb(Zr,Ti)O3 (PZT) thin film deposited by sol-gel techniques. SOI wafers have been applied to obtain a good definition of the silicon part of the membrane. The unclamping of the silicon membrane at the border increases drastically the coupling factor. For unclamped structures the membranes completely covered with top electrode show the highest coupling coefficient (k2 = 5.6%). Immersed (in FluorinertTM) membranes show 7 times smaller quality factor, while the coupling factor k2 remains the same. The obtained structures were enough sensitive to detect acoustic waves in air and in liquid emitted from the same type of elements at a distance of few centimeters. Good agreemen...
应用于机载和浸入式的压电微机械超声换能器,频率范围从液体中的20khz到空气中的750kHz,采用有限元方法进行了仿真、制作和研究。基本元素由氧化镀铂的硅膜组成,膜上涂有2 μm厚(100)织构的Pb(Zr,Ti)O3 (PZT)薄膜。应用SOI晶片可以很好地定义膜的硅部分。边界处硅膜的解夹大大增加了耦合系数。对于未夹紧结构,完全被顶部电极覆盖的膜显示出最高的耦合系数(k2 = 5.6%)。浸膜(FluorinertTM)的质量因子降低了7倍,而耦合因子k2保持不变。所获得的结构足够灵敏,可以在几厘米的距离内探测到空气和液体中同一类型元素发出的声波。良好的协议……
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引用次数: 17
Sub-Micron Patterning Titanium Nitride By Focused Ion-Beam Technique 聚焦离子束亚微米图像化氮化钛技术
Pub Date : 2003-09-01 DOI: 10.1142/S1465876303001617
Jianxia Gao, M. Chan-Park, D. Xie, B. Ngoi, C. Yue
Titanium nitride (TiN) thin films have low electrical resistivity, good chemical and metallurgical stability, and exceptional mechanical properties. As such, we are interested in exploring TiN for use as mold material for micro-and nano replication. Focused ion beam (FIB) technique was successfully used to fabricate sub-micron sized pattern on a TiN/Si(100) wafer. This mask-free fabrication technique takes advantage of the kinetic precision of FIB; the energy of ions used was 40 KeV. The width and depth of each trench in the TiN mold are 390 nm and 280 nm respectively.
氮化钛(TiN)薄膜具有低电阻率、良好的化学和冶金稳定性以及优异的机械性能。因此,我们有兴趣探索TiN作为微纳米复制的模具材料。利用聚焦离子束(FIB)技术成功地在TiN/Si(100)晶圆上制备了亚微米尺寸的图案。这种无掩模制造技术利用了FIB的运动精度;所用离子能量为40kev。TiN模具中每条沟槽的宽度和深度分别为390 nm和280 nm。
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引用次数: 0
Electrical Impedance And Energy Dissipation Analyses Of Quartz Crystal Microbalance For Polymer Coating 聚合物涂层用石英晶体微天平的电阻抗和能量耗散分析
Pub Date : 2003-09-01 DOI: 10.1142/S1465876303001952
A. Palaniappan, J. Zhang, X. Su, F. Tay
Electrical impedance analysis and energy dissipation methods are the two main methods to evaluate the damping behaviour of the quartz crystal. The motional resistance of the quartz crystal, which can reflect the quality factor (Q), is monitored in the electrical impedance analysis and the dissipation factor (D), which is inversely proportional to the Q, is measured in the energy dissipation methods. A comparison of the Q from electrical impedance analysis, termed as "electrical Q" and from the energy dissipation methods, termed as "mechanical Q" is presented in this work. The damping behavior of 5 MHz QCMs subjected to polymer caotings are studied by both methods. The resonant frequency, f, and Q before and after polymer coatings are measured using the network analyzer and a QCM-energy dissipation (QCM-D) instrument. The frequency shifts from both methods are quite comparable and the changes of the dissipation factor and the Q factor are also similar. Possible factors accounting for the Q change such as m...
电阻抗分析和能量耗散法是评价石英晶体阻尼特性的两种主要方法。在电阻抗分析中监测反映品质因子Q的石英晶体运动电阻,在能量耗散法中测量与Q成反比的耗散因子D。比较从电阻抗分析,称为“电Q”和从能量耗散方法,称为“机械Q”提出了这项工作。用这两种方法研究了5mhz qcm在聚合物涂层下的阻尼行为。使用网络分析仪和qcm -能量耗散(QCM-D)仪器测量聚合物涂层前后的谐振频率、f和Q。两种方法的频移具有相当的可比性,耗散因子和Q因子的变化也很相似。可能导致Q变化的因素,如m…
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引用次数: 0
Evaluation Of Resonating Channel Transistor In SOI Wafer SOI晶圆中谐振沟道晶体管的评价
Pub Date : 2003-09-01 DOI: 10.1142/S1465876303002118
S. Myllymaki, E. Ristolainen, P. Heino, A. Lehto, K. Varjonen
A new type of oscillating transistor structure has been developed in thin film SOI applications.The oscillator's mechanical resonator has circular shape and vertical vibration. By using conventional SOI chips with other electronics it possible to add this resonator in same structure without complex process steps. The oscillating transistor can be used primarily in low frequencies (MHz). The component has one electrostatically driven electrode and two electrodes for drain and source parts. By using this component, the transistor can be driven electrostatically. It can have higher voltage current aplification -ratio than conventional transistor because of mechanic impact. For filter solutions coupling rods are not needed. The structure have been measured Q-value of 700 at 3,3MHz in normal room conditions
一种新型的振荡晶体管结构在薄膜SOI中得到了应用。该振荡器的机械谐振器具有圆形和垂直振动。通过将传统的SOI芯片与其他电子器件一起使用,可以在相同的结构中添加该谐振器,而无需复杂的工艺步骤。振荡晶体管可主要用于低频(兆赫)。该组件具有一个静电驱动电极和两个用于漏极和源极部件的电极。通过使用这个元件,晶体管可以被静电驱动。由于机械冲击,它比传统晶体管具有更高的电压电流利用率。对于过滤溶液,不需要连接棒。在正常室内条件下,在3.3 mhz频率下测得该结构的q值为700
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引用次数: 1
期刊
Int. J. Comput. Eng. Sci.
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