Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051115
Yanbiao Pan, Fangzhou Yu, Jaeseok Jeon Rutgers
A fully-polymeric nano-electro-mechanical (NEM) relay based on a conductive polymer, Poly(3,4-Ethylenedi oxythiophene):Polystyrene-Sulfonate (PEDOT:PSS) and dielectric polymers is proposed for the first time to enable flexible, transparent, ultralow-power electronics and sensors, and the first functional prototype fabricated using a five-mask low-thermal-budget process is demonstrated. The prototype shows zero off-state leakage current, abrupt on/off switching, complementary switching behavior, and relatively high on/off current ratio. Exploiting the water-absorption behavior of the polymers, the potential use of the relay as a biochemical sensor is also demonstrated.
{"title":"Fully-polymeric NEM relay for flexible, transparent, ultra-low power electronics and sensors","authors":"Yanbiao Pan, Fangzhou Yu, Jaeseok Jeon Rutgers","doi":"10.1109/MEMSYS.2015.7051115","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051115","url":null,"abstract":"A fully-polymeric nano-electro-mechanical (NEM) relay based on a conductive polymer, Poly(3,4-Ethylenedi oxythiophene):Polystyrene-Sulfonate (PEDOT:PSS) and dielectric polymers is proposed for the first time to enable flexible, transparent, ultralow-power electronics and sensors, and the first functional prototype fabricated using a five-mask low-thermal-budget process is demonstrated. The prototype shows zero off-state leakage current, abrupt on/off switching, complementary switching behavior, and relatively high on/off current ratio. Exploiting the water-absorption behavior of the polymers, the potential use of the relay as a biochemical sensor is also demonstrated.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"440 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127606184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050988
S. Subramaniyan, M. Tarhan, S. Karsten, H. Fujita, H. Shintaku, H. Kotera, R. Yokokawa
We report the successful demonstration of an on-chip tau detection system based on the difference in landing rate and binding density of microtubules (MTs) on a kinesin surface. Tau detection device comprises of a MT reservoir, channel and collector region with an overhang structure. We assayed MTs decorated with three tau types in the kinesin coated device. Since the increase in fluorescence intensity (FI) at the collector regions reflected the type of tau decorated on MTs, thus by measuring the FI we were able to distinguish wild 3R, 4R and P301L mutant tau.
{"title":"On-chip detection of wild 3R, 4R and mutant 4R tau through kinesin-microtubule binding","authors":"S. Subramaniyan, M. Tarhan, S. Karsten, H. Fujita, H. Shintaku, H. Kotera, R. Yokokawa","doi":"10.1109/MEMSYS.2015.7050988","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050988","url":null,"abstract":"We report the successful demonstration of an on-chip tau detection system based on the difference in landing rate and binding density of microtubules (MTs) on a kinesin surface. Tau detection device comprises of a MT reservoir, channel and collector region with an overhang structure. We assayed MTs decorated with three tau types in the kinesin coated device. Since the increase in fluorescence intensity (FI) at the collector regions reflected the type of tau decorated on MTs, thus by measuring the FI we were able to distinguish wild 3R, 4R and P301L mutant tau.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127652581","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050978
K. Hokazono, Y. Hirai, T. Tsuchiya, O. Tabata
This paper reports a new assembly process for isolated single-walled carbon nanotubes (SWCNTs) on MEMS structures utilizing single strand DNA (ssDNA) and the electrical properties of SWCNT field effect transistors (FETs). Mono-dispersed SWCNT solution was prepared by wrapping biotin modified ssDNA around SWCNT and the SWCNTs were assembled onto gold electrodes using biotin-avidin bindings. The isolated SWCNT bridges between electrode gaps of 100 to 300 nm wide were successfully demonstrated. To improve electrical contacts, electroless gold deposition was employed. The Id-Vg curves in back-gate FET configurations showed either metallic or semiconducting properties and we confirmed that the isolated SWCNTs were individually assembled between the electrodes.
{"title":"FET properties of single-walled carbon nanotubes individually assembled utilizing single strand DNA","authors":"K. Hokazono, Y. Hirai, T. Tsuchiya, O. Tabata","doi":"10.1109/MEMSYS.2015.7050978","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050978","url":null,"abstract":"This paper reports a new assembly process for isolated single-walled carbon nanotubes (SWCNTs) on MEMS structures utilizing single strand DNA (ssDNA) and the electrical properties of SWCNT field effect transistors (FETs). Mono-dispersed SWCNT solution was prepared by wrapping biotin modified ssDNA around SWCNT and the SWCNTs were assembled onto gold electrodes using biotin-avidin bindings. The isolated SWCNT bridges between electrode gaps of 100 to 300 nm wide were successfully demonstrated. To improve electrical contacts, electroless gold deposition was employed. The Id-Vg curves in back-gate FET configurations showed either metallic or semiconducting properties and we confirmed that the isolated SWCNTs were individually assembled between the electrodes.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115354887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051027
B. Zhang, T. Cui
The lung cancer sensor array (LCSA) based on layer-by-layer (LbL) self-assembled graphene presented in this paper is capable of detecting different lung cancer biomarkers selectively with advantages of high sensing performance and low cost due to graphene inherent properties and self assembly technique. According to the resistance change of graphene, the detection limit of LCSA is down to 0.1 pg/mL.
{"title":"High-performance and low-cost lung cancer sensor array based on self-assembled graphene","authors":"B. Zhang, T. Cui","doi":"10.1109/MEMSYS.2015.7051027","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051027","url":null,"abstract":"The lung cancer sensor array (LCSA) based on layer-by-layer (LbL) self-assembled graphene presented in this paper is capable of detecting different lung cancer biomarkers selectively with advantages of high sensing performance and low cost due to graphene inherent properties and self assembly technique. According to the resistance change of graphene, the detection limit of LCSA is down to 0.1 pg/mL.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115672838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051079
Haoshen Zhu, Joshua E-Y Lee
We report an approach to suppress anchor loss in thin-film piezoelectric-on-silicon (TPoS) micromechanical (MEMS) resonators by patterning 2D phononic crystals (PnCs) externally on the anchors. The PnCs serve as a frequency-selective reflector for outgoing acoustic waves through the tethers of the TPoS resonator. According to our experimental results, combining the PnCs with the conventional TPoS resonator significantly enhances the quality factor (Q) and correspondingly lowers the insertion loss (IL). The measured improvement is reproducible over multiple samples and consistent with the simulations by tuning the PnC bandgaps, suggesting significant reduction of acoustic leakage to the substrate by adopting the PnCs.
{"title":"AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors","authors":"Haoshen Zhu, Joshua E-Y Lee","doi":"10.1109/MEMSYS.2015.7051079","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051079","url":null,"abstract":"We report an approach to suppress anchor loss in thin-film piezoelectric-on-silicon (TPoS) micromechanical (MEMS) resonators by patterning 2D phononic crystals (PnCs) externally on the anchors. The PnCs serve as a frequency-selective reflector for outgoing acoustic waves through the tethers of the TPoS resonator. According to our experimental results, combining the PnCs with the conventional TPoS resonator significantly enhances the quality factor (Q) and correspondingly lowers the insertion loss (IL). The measured improvement is reproducible over multiple samples and consistent with the simulations by tuning the PnC bandgaps, suggesting significant reduction of acoustic leakage to the substrate by adopting the PnCs.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131529718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051064
Shi-Te Chuang, T. Chen, Yi-Cheng Chung, Rongshun Chen, C. Lo
This paper reports an up to 95.9% angle detection accuracy enhancement for capacitive tactile sensors, which entails asymmetric and intentionally shifted electrodes. The rotational shift between two electrodes of a capacitor that greatly contributed to angle detection errors was theoretically analyzed and examined by experiments with simulations. The asymmetric electrodes containing one fan- and one square-shape in capacitors reduced unexpected and rotational-shift induced errors, by keeping the same overlap area of the electrodes. The minimal angle detection resolution was improved from 5.8° to 0.3°, making the tactile sensor practical and reliable in artificial skins.
{"title":"Asymmetric fan-shape-electrode for high-angle-detection-accuracy tactile sensor","authors":"Shi-Te Chuang, T. Chen, Yi-Cheng Chung, Rongshun Chen, C. Lo","doi":"10.1109/MEMSYS.2015.7051064","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051064","url":null,"abstract":"This paper reports an up to 95.9% angle detection accuracy enhancement for capacitive tactile sensors, which entails asymmetric and intentionally shifted electrodes. The rotational shift between two electrodes of a capacitor that greatly contributed to angle detection errors was theoretically analyzed and examined by experiments with simulations. The asymmetric electrodes containing one fan- and one square-shape in capacitors reduced unexpected and rotational-shift induced errors, by keeping the same overlap area of the electrodes. The minimal angle detection resolution was improved from 5.8° to 0.3°, making the tactile sensor practical and reliable in artificial skins.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125303225","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051005
M. Chiang, San-Yuan Chen, S. Fan
We report an electromicrofluidic (EMF) platform for (1) encoding programmable microcomponents (building blocks) using the embedded colloidal particles or mammalian cells and (2) manipulating and assembling microcomponents in two or three dimensions (2D or 3D). This platform is not only accessible to encapsulated particles with various properties, e.g., conductive/dielectric or synthetic/biological, but also to multiple hydrogel materials synthesized differently for further assembly of 2D or 3D complex constructs.
{"title":"Encoding and manipulating microcomponent on electromicrofluidic platform","authors":"M. Chiang, San-Yuan Chen, S. Fan","doi":"10.1109/MEMSYS.2015.7051005","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051005","url":null,"abstract":"We report an electromicrofluidic (EMF) platform for (1) encoding programmable microcomponents (building blocks) using the embedded colloidal particles or mammalian cells and (2) manipulating and assembling microcomponents in two or three dimensions (2D or 3D). This platform is not only accessible to encapsulated particles with various properties, e.g., conductive/dielectric or synthetic/biological, but also to multiple hydrogel materials synthesized differently for further assembly of 2D or 3D complex constructs.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126516160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050955
F. Larramendy, D. Serien, S. Yoshida, L. Jalabert, S. Takeuchi, O. Paul
This paper introduces a new technique for patterning functionalization layers on substrates with high-topography. The method is based on a parylene-C template shaped by a structured, sacrificial photoresist layer and attached to the substrate where functionalization is not intended. After photoresist removal and surface functionalization, the parylene layer is peeled off, leaving all areas initially covered by the sacrificial polymer functionalized. The technique has several advantages: (i) In contrast to microcontact printing, it allows surfaces with complex topographies to be functionalized; (ii) complex functionalization patterns are possible; (iii) the parylene structure can be reutilized. We successfully demonstrate the technique with the guided growth of neuron-like PC12 cells on honeycomb-shaped protein patterns on micropillars and microwells. The range and limits of the technique are analyzed and discussed in detail.
{"title":"High-topography surface functionalization based on parylene-C peel-off for patterned cell growth","authors":"F. Larramendy, D. Serien, S. Yoshida, L. Jalabert, S. Takeuchi, O. Paul","doi":"10.1109/MEMSYS.2015.7050955","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050955","url":null,"abstract":"This paper introduces a new technique for patterning functionalization layers on substrates with high-topography. The method is based on a parylene-C template shaped by a structured, sacrificial photoresist layer and attached to the substrate where functionalization is not intended. After photoresist removal and surface functionalization, the parylene layer is peeled off, leaving all areas initially covered by the sacrificial polymer functionalized. The technique has several advantages: (i) In contrast to microcontact printing, it allows surfaces with complex topographies to be functionalized; (ii) complex functionalization patterns are possible; (iii) the parylene structure can be reutilized. We successfully demonstrate the technique with the guided growth of neuron-like PC12 cells on honeycomb-shaped protein patterns on micropillars and microwells. The range and limits of the technique are analyzed and discussed in detail.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"PP 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126535227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051071
V. P. Chung, Chao-Lin Cheng, M. Yip, W. Fang
This paper reports a high-sensitivity and high-speed capacitive humidity sensor. A novel capacitive vertical parallel-plate (VPP) array had been monolithically integrated with an on-chip ring oscillator (RO) using the standard TSMC 0.18μm CMOS process and subsequent in-house post-processes. Resorcinol-formaldehyde (RF) aerogel, a new kind of moisture-sensitive polymer, was deposited and defined in columns in the VPP array. Measurements show that the typical fabricated device has a sensitivity of 0.566% capacitance change per percent-relative-humidity (%RH) and a response time of 6s. The monolithic integration of the humidity sensor with RO is also demonstrated to provide a sensitivity of 3.8 kHz/%RH. Further improvement in sensitivity is required by varying the operating frequency of RO.
{"title":"A CMOS capacitive vertical-parallel-plate-array humidity sensor with RF-aerogel fill-in for sensitivity and response time improvement","authors":"V. P. Chung, Chao-Lin Cheng, M. Yip, W. Fang","doi":"10.1109/MEMSYS.2015.7051071","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051071","url":null,"abstract":"This paper reports a high-sensitivity and high-speed capacitive humidity sensor. A novel capacitive vertical parallel-plate (VPP) array had been monolithically integrated with an on-chip ring oscillator (RO) using the standard TSMC 0.18μm CMOS process and subsequent in-house post-processes. Resorcinol-formaldehyde (RF) aerogel, a new kind of moisture-sensitive polymer, was deposited and defined in columns in the VPP array. Measurements show that the typical fabricated device has a sensitivity of 0.566% capacitance change per percent-relative-humidity (%RH) and a response time of 6s. The monolithic integration of the humidity sensor with RO is also demonstrated to provide a sensitivity of 3.8 kHz/%RH. Further improvement in sensitivity is required by varying the operating frequency of RO.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124081929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050935
Cheng-Wen Ma, Ting-Hao Lin, Y. Yang
In this work, a highly-sensitive tactile sensor array using the tunneling piezoresistive effect is presented. The sensing element, which is made of multi-wall carbon nanotubes and polydimethylsiloxane (MWCNT and PDMS) conductive polymer, was patterned with microdome structures by a novel fabrication process on a membrane filter substrate. The fabricated sensing device features advantages such as ultra-high sensitivity, flexibility, and simple fabrication process. The tunneling piezoresistive effects of the interlocked microdome structures with different MWCNT concentrations are demonstrated. The resistance change of the sensor array due to different elbow-bending motion was measured. Force images were also obtained by using an 8×8 sensing array with different patterns.
{"title":"Tunneling piezoresistive tactile sensing array fabricated by a novel fabrication process with membrane filters","authors":"Cheng-Wen Ma, Ting-Hao Lin, Y. Yang","doi":"10.1109/MEMSYS.2015.7050935","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050935","url":null,"abstract":"In this work, a highly-sensitive tactile sensor array using the tunneling piezoresistive effect is presented. The sensing element, which is made of multi-wall carbon nanotubes and polydimethylsiloxane (MWCNT and PDMS) conductive polymer, was patterned with microdome structures by a novel fabrication process on a membrane filter substrate. The fabricated sensing device features advantages such as ultra-high sensitivity, flexibility, and simple fabrication process. The tunneling piezoresistive effects of the interlocked microdome structures with different MWCNT concentrations are demonstrated. The resistance change of the sensor array due to different elbow-bending motion was measured. Force images were also obtained by using an 8×8 sensing array with different patterns.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124204564","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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