Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050991
Eunryel Nam, Won Chul Lee, S. Takeuchi
This paper presents a new method to fabricate 2-dimensional collagen sheets whose internal molecular structures form highly-aligned nanofibers in one direction. In this work, collagen nanofibers are self-aligned in fully 2-dimensional substrates by applying cyclic stretch during the gelation process of collagen solution, and the fabricated collagen sheets induce the alignment of cells without any mechanical force within the cultivation period.
{"title":"Alignment of collagen nanofibers in 2D substrates using cyclic stretch","authors":"Eunryel Nam, Won Chul Lee, S. Takeuchi","doi":"10.1109/MEMSYS.2015.7050991","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050991","url":null,"abstract":"This paper presents a new method to fabricate 2-dimensional collagen sheets whose internal molecular structures form highly-aligned nanofibers in one direction. In this work, collagen nanofibers are self-aligned in fully 2-dimensional substrates by applying cyclic stretch during the gelation process of collagen solution, and the fabricated collagen sheets induce the alignment of cells without any mechanical force within the cultivation period.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121886327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Hongbae S. Park, R. Hoskinson, H. Abdollahi, B. Stoeber
This paper reports a new approach to making a very compact near-eye display (NED) using only two layers of microlens arrays (MLA) working in conjunction as a magnifying lens (MLA magnifier). The purpose of the MLA magnifier is to generate a virtual image of a display, positioned within several centimeters from the eye, at optical infinity to minimize the optical disparity between the surrounding scenery and the image on the display. Our MLA magnifier is about 2 mm thick with a system focal length of 5 mm and a total thickness of around 7 mm (excluding the thickness of the display) in non-folded optics configuration, which is much more compact in comparison to other popular NEDs such as Google Glass or Recon Instrument's Snow goggles having folded optics.
{"title":"Compact near-eye display system using a superlens-based microlens array magnifier","authors":"Hongbae S. Park, R. Hoskinson, H. Abdollahi, B. Stoeber","doi":"10.1364/OE.23.030618","DOIUrl":"https://doi.org/10.1364/OE.23.030618","url":null,"abstract":"This paper reports a new approach to making a very compact near-eye display (NED) using only two layers of microlens arrays (MLA) working in conjunction as a magnifying lens (MLA magnifier). The purpose of the MLA magnifier is to generate a virtual image of a display, positioned within several centimeters from the eye, at optical infinity to minimize the optical disparity between the surrounding scenery and the image on the display. Our MLA magnifier is about 2 mm thick with a system focal length of 5 mm and a total thickness of around 7 mm (excluding the thickness of the display) in non-folded optics configuration, which is much more compact in comparison to other popular NEDs such as Google Glass or Recon Instrument's Snow goggles having folded optics.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122123660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050984
Y. Okada, M. Tsugane, H. Suzuki
We developed the microwell device for measurement of membrane transport of single adherent cells. As the cells in a population (e.g., tumor) is inevitably heterogeneous, a technique to measure the transport activities at a single-cell level is needed. When adherent cells were cultured on the microwells with ~10 μm diameter, they spread over the opening to form the closed picoliter space. Thus, molecules exported from cells accumulate in such a space and be detected by fluorescence imaging. In this report, we show that, by employing horizontal microwell design, materials exported from the cell membrane can be visualized without overlapping with the cell, increasing the S/N ratio of the fluorescence signal. Efflux of the cancer drug transported by the multidrug resistance protein was detected.
{"title":"A microwell device for measurement of membrane transport of adherent cells","authors":"Y. Okada, M. Tsugane, H. Suzuki","doi":"10.1109/MEMSYS.2015.7050984","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050984","url":null,"abstract":"We developed the microwell device for measurement of membrane transport of single adherent cells. As the cells in a population (e.g., tumor) is inevitably heterogeneous, a technique to measure the transport activities at a single-cell level is needed. When adherent cells were cultured on the microwells with ~10 μm diameter, they spread over the opening to form the closed picoliter space. Thus, molecules exported from cells accumulate in such a space and be detected by fluorescence imaging. In this report, we show that, by employing horizontal microwell design, materials exported from the cell membrane can be visualized without overlapping with the cell, increasing the S/N ratio of the fluorescence signal. Efflux of the cancer drug transported by the multidrug resistance protein was detected.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117332519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051135
D. Psychogiou, M. Sinanis, D. Peroulis
This paper reports on a novel hybrid integration concept that enables the realization of high-quality (Q) factor, low-frequency coaxial cavity resonators with well-defined capacitive-loading and variable center frequency. It is based on a silicon-micromachined spacer that is mounted on top of a conventional CNC-machined metallic cavity to functionalize the resonator's capacitance. For the first time, it is demonstrated that low-frequency resonators with micrometer-scale gaps (10s of microns), relatively large Q-factor (459-505) and tunable response (18.5%) can be constructed without the need for post-fabrication tuning. To demonstrate these benefits, a resonator assembly was designed, built and experimentally tested at the UHF band and for a frequency tuning range between 1424-1711 MHz.
{"title":"Silicon-micromachined spacers for UHF cavity resonators","authors":"D. Psychogiou, M. Sinanis, D. Peroulis","doi":"10.1109/MEMSYS.2015.7051135","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051135","url":null,"abstract":"This paper reports on a novel hybrid integration concept that enables the realization of high-quality (Q) factor, low-frequency coaxial cavity resonators with well-defined capacitive-loading and variable center frequency. It is based on a silicon-micromachined spacer that is mounted on top of a conventional CNC-machined metallic cavity to functionalize the resonator's capacitance. For the first time, it is demonstrated that low-frequency resonators with micrometer-scale gaps (10s of microns), relatively large Q-factor (459-505) and tunable response (18.5%) can be constructed without the need for post-fabrication tuning. To demonstrate these benefits, a resonator assembly was designed, built and experimentally tested at the UHF band and for a frequency tuning range between 1424-1711 MHz.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122990222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050885
H. Cai, J. X. Lin, J. H. Wu, B. Dong, Y. D. Gu, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu
This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 μs is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.
{"title":"NEMS optical cross connect (OXC) driven by opticl force","authors":"H. Cai, J. X. Lin, J. H. Wu, B. Dong, Y. D. Gu, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu","doi":"10.1109/MEMSYS.2015.7050885","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050885","url":null,"abstract":"This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 μs is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115353614","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050942
F. Zhao, A. Lim
This paper reports single crystalline 4H-SiC MEMS with homoepitaxial n-p-n structure and its resonant characteristics under electrostatic actuation. Single crystalline fully exploits the superior material properties of SiC for operations in harsh environments. Compared to previously report p-n structure, the n-p-n structure makes electrostatic actuation applicable which is essentially important for applications of resonators and actuators to sensor devices. Such n-p-n structure, complementing the p-n structure, also further extends the capability of monolithic integration between SiC MEMS and electronic devices and circuits with not only p-n configurations such as diodes, but also n-p-n configurations such as BJTs and MOSFETs, etc.
{"title":"Fabrication and characterization of single crystalline 4H-SiC MEMS devices with n-p-n homoepitaxial structure","authors":"F. Zhao, A. Lim","doi":"10.1109/MEMSYS.2015.7050942","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050942","url":null,"abstract":"This paper reports single crystalline 4H-SiC MEMS with homoepitaxial n-p-n structure and its resonant characteristics under electrostatic actuation. Single crystalline fully exploits the superior material properties of SiC for operations in harsh environments. Compared to previously report p-n structure, the n-p-n structure makes electrostatic actuation applicable which is essentially important for applications of resonators and actuators to sensor devices. Such n-p-n structure, complementing the p-n structure, also further extends the capability of monolithic integration between SiC MEMS and electronic devices and circuits with not only p-n configurations such as diodes, but also n-p-n configurations such as BJTs and MOSFETs, etc.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125089510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051133
J. Marzouk, S. Arscott, A. El Fellahi, K. Haddadi, T. Lasri, L. Buchaillot, G. Dambrine
We demonstrate a radio frequency (RF) probe based on microelectromechanical systems (MEMS) design and processing technologies. The probe responds to the current needs of microelectronics requiring microwave characterization of nanoscale devices and systems having micrometer pad sizes. The use of MEMS technologies enables the probe contact pad area dimensions to be reduced by a three orders of magnitude compared to existing commercial RF probes. On-wafer RF measurements prove the feasibility of the approach to 30 GHz at very low contact resistance ≪1 Ω. A contact aging study demonstrates that the probes are capable of forming this contact for 6000 contact cycles.
{"title":"MEMS-based RF probes for on-wafer microwave characterization of micro/nanoelectronics","authors":"J. Marzouk, S. Arscott, A. El Fellahi, K. Haddadi, T. Lasri, L. Buchaillot, G. Dambrine","doi":"10.1109/MEMSYS.2015.7051133","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051133","url":null,"abstract":"We demonstrate a radio frequency (RF) probe based on microelectromechanical systems (MEMS) design and processing technologies. The probe responds to the current needs of microelectronics requiring microwave characterization of nanoscale devices and systems having micrometer pad sizes. The use of MEMS technologies enables the probe contact pad area dimensions to be reduced by a three orders of magnitude compared to existing commercial RF probes. On-wafer RF measurements prove the feasibility of the approach to 30 GHz at very low contact resistance ≪1 Ω. A contact aging study demonstrates that the probes are capable of forming this contact for 6000 contact cycles.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129601252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050973
D. Kang, S. Matsuki, Y. Tai
This paper reports the mechanical behavior and barrier property of the hybrid parylene/PDMS material. The repetitive uniaxial tensile tests are done to characterize its mechanical behavior and the water vapor transmission rate is measured to evaluate its barrier property. The experimental data are in accordance with the composite material theory. A novel approach of facilitating the diffusion and penetration of parylene coatings into PDMS using in-situ heated deposition is presented. The parylene depth profiling in PDMS and 180° peel tests demonstrate that parylene deposition at elevated temperatures shows enhanced pore sealing capability. A theoretical model is proposed, featuring an infinitely long cylindrical PDMS pore model, free molecular flow and time-varying pore geometry during the deposition. There is only one unknown parameter in the model: the PDMS pore diameter. By fitting the numerical solutions of the theoretical model to the parylene depth profiling curves, the PDMS pore diameter is estimated to be ~6.02nm.
{"title":"Study of the hybrid parylene/PDMS material","authors":"D. Kang, S. Matsuki, Y. Tai","doi":"10.1109/MEMSYS.2015.7050973","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050973","url":null,"abstract":"This paper reports the mechanical behavior and barrier property of the hybrid parylene/PDMS material. The repetitive uniaxial tensile tests are done to characterize its mechanical behavior and the water vapor transmission rate is measured to evaluate its barrier property. The experimental data are in accordance with the composite material theory. A novel approach of facilitating the diffusion and penetration of parylene coatings into PDMS using in-situ heated deposition is presented. The parylene depth profiling in PDMS and 180° peel tests demonstrate that parylene deposition at elevated temperatures shows enhanced pore sealing capability. A theoretical model is proposed, featuring an infinitely long cylindrical PDMS pore model, free molecular flow and time-varying pore geometry during the deposition. There is only one unknown parameter in the model: the PDMS pore diameter. By fitting the numerical solutions of the theoretical model to the parylene depth profiling curves, the PDMS pore diameter is estimated to be ~6.02nm.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129043022","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050940
Honglei Guo, Jingquan Liu, Zhaoyu Wang, Xingzhao Wang, Xiang Chen, Bin Yang, Chunsheng Yang
This paper develops a novel and simple process device based on an atmospheric pressure air microplasma jet for the selective etching of parylene-C film. In order to realize the selective etching, a quartz glass microtube (100 μm, inner diameter) is employed to generate the air microplasma jet. Experimental results demonstrated Micro-holes, micro-trenches on parylene-C film were successfully fabricated by the air microplasma jet without causing any heat damage to films and using any masks, and the etching rate reached 5.14μm/min. Due to its operating at ambient conditions, this process device can be easily integrated with roll-to-roll systems for large-scale manufacturing of flexible electronic devices in the future.
{"title":"Development of an atmospheric pressure air microplasma jet for the selective etching of parylene-C film","authors":"Honglei Guo, Jingquan Liu, Zhaoyu Wang, Xingzhao Wang, Xiang Chen, Bin Yang, Chunsheng Yang","doi":"10.1109/MEMSYS.2015.7050940","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050940","url":null,"abstract":"This paper develops a novel and simple process device based on an atmospheric pressure air microplasma jet for the selective etching of parylene-C film. In order to realize the selective etching, a quartz glass microtube (100 μm, inner diameter) is employed to generate the air microplasma jet. Experimental results demonstrated Micro-holes, micro-trenches on parylene-C film were successfully fabricated by the air microplasma jet without causing any heat damage to films and using any masks, and the etching rate reached 5.14μm/min. Due to its operating at ambient conditions, this process device can be easily integrated with roll-to-roll systems for large-scale manufacturing of flexible electronic devices in the future.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130255308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051003
Xiaoxing Xing, L. Yobas
Continuous-flow dielectrophoretic sorting of particles has been demonstrated using a simple microfluidic design incorporating 3D electrodes with castellated sidewalls. Two variations of the design have been fabricated, slightly differing in their sidewall and separation junction profiles, through a single-mask process on silicon-based platforms. These 3D silicon electrodes have shown the capacity to segregate polystyrene beads into distinct flow layers along the channel depth while delivering them to separate outlets through a downstream junction of a specific design. The utility of either structure has been showcased by sorting a mixture of 1 and 10 μm beads based on their size continuously at a velocity of 1.5 mm/s.
{"title":"Continuous-flow dielectrophoretic sorting of particles via 3D silicon electrodes featuring castellated sidewalls","authors":"Xiaoxing Xing, L. Yobas","doi":"10.1109/MEMSYS.2015.7051003","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051003","url":null,"abstract":"Continuous-flow dielectrophoretic sorting of particles has been demonstrated using a simple microfluidic design incorporating 3D electrodes with castellated sidewalls. Two variations of the design have been fabricated, slightly differing in their sidewall and separation junction profiles, through a single-mask process on silicon-based platforms. These 3D silicon electrodes have shown the capacity to segregate polystyrene beads into distinct flow layers along the channel depth while delivering them to separate outlets through a downstream junction of a specific design. The utility of either structure has been showcased by sorting a mixture of 1 and 10 μm beads based on their size continuously at a velocity of 1.5 mm/s.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"47 49","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120889020","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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